Reaction device and processing equipment
By adopting a combined design of arc-surface wall and flat wall in the reaction chamber, the problem of poor space utilization of the existing reaction chamber is solved, and more efficient material processing is achieved and material cost is reduced.
Patent Information
- Application Number
- CN202420495217.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-14
- Publication Date
- 2025-02-25
- Estimated Expiration
- 2034-03-14
AI Technical Summary
The design of existing reaction chambers leads to poor space utilization, especially areas close to the peripheral wall, which leads to inefficient material processing.
A reaction device is designed, wherein the reaction chamber adopts a combination of multiple arc-surface walls and at least one planar wall to form a containment cavity to improve space utilization and optimize thermal management by heating assembly and insulation layer.
By replacing part of the arc wall with a planar wall, the space utilization of the reaction device is improved, and the material cost is reduced, while the vacuum efficiency is improved.
Smart Images
Figure CN222524662U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of photovoltaic and semiconductor processing, and in particular to a reaction device and processing equipment. Background Art
[0002] In the production process of photovoltaic and semiconductor products, some sheet materials usually need to undergo chemical treatments such as chemical vapor deposition (CVD) before being applied to related products. The chemical treatment of sheet materials usually requires a high temperature vacuum environment.
[0003] At present, sheet materials can be chemically treated in a reaction chamber. The reaction chamber is usually a cylindrical chamber. The carrier carrying the sheet material and the mechanism for heating the carrier are arranged in the middle of the chamber, and the position close to the surrounding wall in the chamber is difficult to be used, resulting in the defect of poor space utilization in the chamber. Utility Model Content
[0004] In view of the above, it is necessary to provide a reaction device and processing equipment to solve the above defects.
[0005] In a first aspect, an embodiment of the present application provides a reaction device, comprising: a reaction chamber, the reaction chamber comprising a plurality of curved walls and at least one plane wall, the plane wall being connected to the at least one curved wall to form a receiving cavity, the receiving cavity being used to receive a plurality of sheet materials; a heating component, the heating component being disposed in the receiving cavity and being used to heat the plurality of sheet materials; and a thermal insulation layer, the thermal insulation layer being disposed on at least one curved wall and being used to reduce heat loss in the receiving cavity.
[0006] Optionally, the number of the plane walls is two, the number of the arcuate walls is two, the two plane walls are arranged opposite to each other, the two arcuate walls are arranged opposite to each other, the two sides of each plane wall are respectively connected to the two arcuate walls, and the two sides of each arcuate wall are respectively connected to the two plane walls.
[0007] Optionally, the reaction device further comprises: an isolation plate, which is mounted on at least one curved wall and cooperates with the corresponding curved wall to enclose a heat-insulating space, and the heat-insulating layer is accommodated in the heat-insulating space.
[0008] Optionally, reinforcing ribs are provided on the plane wall, and the reinforcing ribs are located outside the reaction chamber.
[0009] Optionally, there are multiple heating components, which are used to be arranged around multiple sheet materials, and each heating component includes: a connecting plate, which is connected to the corresponding curved wall or plane wall; and a heating wire, which is arranged on the side of the connecting plate away from the corresponding curved wall or plane wall.
[0010] Optionally, each heating component further includes: a positioning frame, which is installed on a side of the connecting plate away from the corresponding curved wall or plane wall, and a positioning groove is provided on the positioning frame, and the positioning groove is used to partially accommodate the heating wire.
[0011] Optionally, a limit groove is further provided on the positioning frame, and the limit groove is connected to the positioning groove. Each heating component also includes: a limit pin, which is passed through the limit groove and is used to cover the positioning groove and limit the movement of the heating wire.
[0012] Optionally, the reaction device further includes: a plurality of support rods, the plurality of support rods are connected to a plane wall, the plurality of support rods extend along the length direction of the reaction chamber and are arranged at intervals, the plurality of support rods are used to support a carrier, and the carrier is used to carry a plurality of sheet materials.
[0013] Optionally, the reaction device also includes: a plurality of support frames, the plurality of support frames are spaced apart in the reaction chamber, each support frame is mounted on a plane wall, a support groove is provided on a side of each support frame facing away from the connected plane wall, the support groove is used to partially accommodate a corresponding support rod, and a distance between a side of an inner wall of the support groove close to the corresponding plane wall and the plane wall is greater than a distance between a heating component corresponding to the plane wall and the plane wall.
[0014] Optionally, a hatch is opened at at least one end of the reaction chamber in the length direction, and the reaction device further comprises: an end cover connected to the reaction chamber at one end of the reaction chamber where the hatch is opened, and the end cover is used to close the hatch.
[0015] In a second aspect, an embodiment of the present application provides a processing device, comprising: a vacuum device; a reaction device such as any of the above, the reaction device is connected to the vacuum device, and the vacuum device is used to vacuum the reaction device.
[0016] With the reaction device and processing equipment provided by the present application, at least part of the side walls of the reaction chamber can be plane walls, which can reduce the space of the receiving cavity except the space occupied by the heating component, and improve the space utilization rate in the reaction device.
[0017] When the width is the same, the material usage of the curved wall is greater than that of the plane wall. In this way, replacing part of the curved wall with a plane wall and replacing the cylindrical reaction chamber with a reaction chamber with an incomplete circular, waist-shaped or rectangular cross-section can save material usage and reduce the material cost of the reaction chamber. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 It is a schematic diagram of the processing equipment in the embodiment of the present application.
[0019] Figure 2 It is a front view of the reaction device in the embodiment of the present application.
[0020] Figure 3It is a first structural schematic diagram of the reaction device in the embodiment of the present application.
[0021] Figure 4 It is a second structural schematic diagram of the reaction device in the embodiment of the present application.
[0022] Figure 5 yes Figure 3 Enlarged view of the V in the middle.
[0023] Figure 6 yes Figure 2 Enlarged view of the center VI.
[0024] Main component symbols
[0025] Reaction device 100
[0026] Air extraction device 200
[0027] Vehicle 300
[0028] Reaction Chamber 10
[0029] Accommodation chamber 11
[0030] Curved wall 12
[0031] Plane wall 13
[0032] Reinforcement 131
[0033] Heating element 20
[0034] Connecting plate 21
[0035] Positioning frame 22
[0036] Positioning slot 221
[0037] Limiting slot 222
[0038] Heating wire 23
[0039] Extension 231
[0040] Rotating part 232
[0041] Limit pin 24
[0042] Limit plate 25
[0043] Insulation layer 30
[0044] Isolation board 40
[0045] End cap 50
[0046] Support frame 60
[0047] Support groove 61
[0048] Support rod 70 DETAILED DESCRIPTION
[0049] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.
[0050] In the present application, the term "plurality" refers to two or more. In addition, it should be understood that in the description of the present application, the terms "first", "second", etc. are only used for the purpose of distinguishing descriptions, and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying an order.
[0051] In the description of the embodiments of the present application, words such as "exemplary" or "for example" are used to indicate examples, illustrations or descriptions. Any embodiment or design described as "exemplary" or "for example" in the embodiments of the present application should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way.
[0052] See also Figure 1 , Figure 1 A processing device provided by an embodiment of the present application is shown.
[0053] In an embodiment of the present application, the processing equipment may include a reaction device 100 and a gas extraction device 200. The reaction device 100 is connected to the gas extraction device 200. The reaction device 100 is provided with a receiving chamber 11 ( Figure 2 ), the receiving chamber 11 can receive the carrier 300 ( Figure 2 ) and a plurality of sheet materials loaded on the carrier 300. The vacuum device 200 can evacuate the receiving chamber 11. After the vacuum chamber is evacuated, the plurality of sheet materials can be chemically treated in the receiving chamber 11.
[0054] In the embodiment of the present application, there is no specific limitation on the sheet material and the carrier 300. For example, the sheet material may be, but is not limited to, a silicon sheet, a silicon carbide sheet, and a wafer. The carrier 300 may be a quartz boat or a graphite boat.
[0055] In the embodiments of the present application, the chemical treatment of the sheet material by the processing equipment is not specifically limited. For example, the chemical treatment may be, but is not limited to, chemical vapor deposition (CVD) treatment or diffusion process treatment.
[0056] Please also read Figure 2 and Figure 3 , Figure 2 and Figure 3 A reaction device 100 provided in an embodiment of the present application is shown.
[0057] In one embodiment, the reaction device 100 may include a reaction chamber 10, a heating component 20 and a thermal insulation layer 30. The reaction chamber 10 may be connected to the exhaust device 200. The reaction chamber 10 may be formed by connecting a plurality of side walls. The reaction chamber 10 may include a plurality of curved walls 12 and at least one plane wall 13. Each plane wall 13 is fixedly connected to at least one curved wall 12. All plane walls 13 and all curved walls 12 may be distributed along the circumferential direction and enclose a receiving cavity 11. The heating component 20 and the thermal insulation layer 30 are both located in the receiving cavity 11. There are a plurality of heating components 20, and the plurality of heating components 20 are distributed along the circumferential direction. The number of the thermal insulation layer 30 may be less than or equal to the number of the curved walls 12. A thermal insulation layer 30 is attached to the inner side of at least one curved wall 12.
[0058] In the embodiments of the present application, there is no specific limitation on the fixing method during the fixed connection and fixed installation. For example, the fixing method may include, but is not limited to, bolt fixing, snap fixing, welding fixing, etc.
[0059] It is understood that the receiving chamber 11 can receive the carrier 300 loaded with sheet materials. A plurality of heating components 20 can be arranged around the carrier 300 to heat the sheet materials at various positions in the carrier 300 so that the temperature of the sheet materials can reach the temperature required for chemical treatment.
[0060] For example, the number of the reaction chamber side walls and the number of the heating components 20 can both be four. The four heating components 20 form a rectangular space in the receiving chamber 11, and the carrier 300 can be received in the rectangular space.
[0061] It can be understood that there is a spacing space between the arc top position of the arc wall 12 and the adjacent heating component 20, and the insulation layer 30 can be arranged in the spacing space, which can improve the utilization rate of the space in the receiving cavity 11 and reduce the loss of heat generated by the heating component 20.
[0062] For example, the reaction chamber 10 may include two curved walls 12 and two plane walls 13. The two curved walls 12 are relatively spaced apart in the first direction, and the two plane walls 13 are relatively spaced apart in the second direction. The arc tops of the two curved walls 12 are on the side away from the receiving chamber 11. Each curved wall 12 is fixedly connected to a plane wall 13 on both sides in the second direction, and each plane wall 13 is connected to a curved wall 12 on both sides in the first direction. The distance between the arc tops of the two curved walls 12 is greater than the distance between the two plane walls 13. A heat preservation layer 30 is arranged on the inner side of each curved wall 12, and each heat preservation layer 30 is spaced apart from the adjacent heating component 20. Each plane wall 13 is spaced apart from the adjacent heating component 20.
[0063] In the embodiment of the present application, the width direction of the reaction chamber 10 can be defined as the first direction, the height direction as the second direction, and the length direction as the third direction. For example, the first direction can be Figure 2 and Figure 3 The X direction and its opposite direction shown, the second direction can be Figure 2 and Figure 3 The Y direction and its reverse direction shown, the third direction can be Figure 3 The Z direction and its opposite direction are shown.
[0064] It can be understood that part of the side wall of the reaction chamber 10 is provided by a plane wall 13, and the space capacity between the plane wall 13 and the adjacent heating component 20 is smaller than the space capacity between the arc wall 12 and the adjacent heating component 20, so that the space of the receiving chamber 11 other than the space occupied by the heating component 20 and the carrier 300 can be reduced, and the space utilization rate in the reaction device 100 can be improved. At the same time, in the case of the same width, the material usage of the arc wall 12 is greater than the material usage of the plane wall 13, so that the plane wall 13 replaces part of the arc wall 12, and the reaction chamber 10 with an incomplete circular, waist-shaped or rectangular cross-section replaces the cylindrical reaction chamber 10, which can save the material usage and reduce the material cost of the reaction chamber 10.
[0065] It can be understood that when the curved wall 12 and the plane wall 13 cooperate to form the receiving chamber 11, the space between the curved wall 12 and the heating component 20 can be used as a gas channel when the vacuum device 200 evacuates the receiving chamber 11, thereby improving the efficiency of vacuuming the receiving chamber 11.
[0066] It can be understood that when the reaction device 100 is working, the direction in which the two curved walls 12 are arranged relative to each other can be a horizontal direction. The staff can move laterally to the two curved walls 12 to observe or control the operation of the reaction device 100. Providing the heat preservation layer 30 on the curved wall 12 can reduce the heat received by the curved wall 12, thereby reducing the temperature of the curved wall 12 and reducing the probability of the staff being injured due to high temperature due to contact with the curved wall 12.
[0067] It is understandable that each heating assembly 20 can be fixedly connected to a mounting frame fixedly connected to the curved wall 12 or the plane wall 13 to achieve a fixed connection with the corresponding curved wall 12 or the plane wall 13. The mounting frame fixedly connected to the curved wall 12 can be penetrated by the insulation layer 30.
[0068] In some embodiments, the reaction device 100 may further include an isolation plate 40. An isolation plate 40 is fixedly connected to the inner side of each arc-shaped wall connected to the insulation layer 30. Both sides of the isolation plate 40 are fixedly connected to the corresponding arc-shaped wall, and the isolation plate 40 and the arc-shaped wall cooperate to enclose an arc-shaped insulation space. The insulation layer 30 is accommodated in the insulation space. The isolation plate 40 is spaced apart from the adjacent heating assembly 20.
[0069] For example, Figure 2 As shown, the number of the isolation plates 40 and the number of the arc-shaped walls are both two. Each isolation plate 40 is fixedly connected to the corresponding arc-shaped wall at two sides in the second direction.
[0070] In the embodiment of the present application, there is no specific limitation on the material of the thermal insulation layer 30. For example, the thermal insulation layer 30 may be, but is not limited to, aluminum silicate thermal insulation wool.
[0071] In some embodiments, the heating assembly 20 corresponding to the curved wall 12 may be fixedly connected to the isolation plate 40 to achieve a fixed connection with the curved wall 12 .
[0072] In some embodiments, each plane wall 13 is fixedly connected to the outside with a reinforcing rib 131. The reinforcing rib 131 can improve the structural strength of the plane wall 13 and reduce the probability of the plane wall 13 being deformed due to the pressure difference between the inside and outside of the receiving chamber 11 when the vacuum device 200 vacuums the receiving chamber 11.
[0073] Please also read Figure 4 In some embodiments, hatches are provided at both ends of the reaction chamber 10 in the third direction. The reaction device 100 may further include two end covers 50. Each end cover 50 is detachably connected to one end of the reaction chamber 10 in the third direction, and each end cover 50 may close a hatch.
[0074] It can be understood that at least one end cover 50 can be connected to the exhaust device 200 , thereby achieving the connection between the reaction chamber 10 and the exhaust device 200 .
[0075] In the embodiments of the present application, the detachable connection method is not specifically limited. For example, the detachable connection method may include, but is not limited to, bolt connection, snap connection, bonding, etc.
[0076] For example, the reaction chamber 10 has flanges integrally connected to both ends in the third direction, and each end cover 50 can be connected to the corresponding flange by bolts to close the corresponding hatch.
[0077] Please also read Figure 5 and Figure 6 In some embodiments, each heating assembly 20 may include a connecting plate 21, a positioning frame 22, and a heating wire 23. The connecting plate 21 may extend along the third direction, that is, the length direction of the connecting plate 21 coincides with the third direction. The positioning frame 22 may be fixedly mounted on the inner side of the connecting plate 21. A plurality of positioning grooves 221 may be provided on the positioning frame 22. Each positioning groove 221 penetrates the side of the positioning frame 22 away from the connecting plate 21 along the thickness direction of the connecting plate 21. The heating wire 23 is arranged on the inner side of the connecting plate 21. The heating wire 23 may include a plurality of extensions 231 and a plurality of rotations 232. The plurality of extensions 231 are arranged at intervals in the second direction, and each extension 231 is fixedly connected to another adjacent extension 231 through a rotation 232. The rotation 232 is fixedly connected to one end of the corresponding extension 231 in the third direction. Each positioning groove 221 accommodates an extension 231 or a rotation 232 to achieve the connection between the heating wire 23 and the connecting plate 21.
[0078] It is understood that the heating wire 23 may extend in a serpentine shape. When the heating wire 23 is powered on, it may heat the space surrounded by the plurality of heating components 20 to heat the plurality of sheet materials in the carrier 300 .
[0079] It is understood that the number of the positioning frames 22 on each connecting plate 21 can be one or more, and the embodiments of the present application do not limit this. When multiple positioning frames 22 are fixedly connected to each connecting plate 21, the multiple positioning frames 22 are arranged at intervals in the third direction.
[0080] It is understood that the number of the heating wires 23 on each connecting plate 21 may be one or more, and the embodiments of the present application do not limit this. When multiple heating wires 23 are provided on each connecting plate 21, the multiple heating wires 23 are arranged side by side in the third direction.
[0081] In some embodiments, the positioning frame 22 is further provided with a limiting groove 222. The limiting groove 222 penetrates the positioning frame 22 along the width direction of the connecting plate 21 (i.e., the length direction of the positioning frame 22). Each positioning groove 221 is connected to the limiting groove 222. Each heating component 20 may also include a limiting pin 24. The limiting pin 24 may penetrate the limiting groove 222 to cover each positioning groove 221, i.e., the extension portion 231 or the rotating portion 232 in the positioning groove 221.
[0082] It can be understood that the limit pin 24 can block between the opening of the positioning groove 221 and the heating wire 23 in the thickness direction of the connecting plate 21, thereby blocking the movement of the heating wire 23 toward the opening of the positioning groove 221, so as to fix the rotating part 232 or the extension part 231 of the heating wire 23 in the positioning groove 221.
[0083] In some cases, the limiting pin 24 may abut against the inner wall of the limiting groove 222 , and the limiting pin 24 may limit the movement of the limiting pin 24 through friction with the inner wall of the limiting groove 222 .
[0084] In other cases, each heating assembly 20 may further include two limit plates 25. The two limit plates 25 are respectively fixedly mounted at both ends in the width direction of the connecting plate 21. Each limit plate 25 may abut against one end in the length direction of the limit pin 24 to limit the movement of the limit pin 24.
[0085] In some embodiments, the reaction device 100 further includes a plurality of support frames 60 and a plurality of support rods 70. The plurality of support frames 60 and the plurality of support rods 70 are all located in the receiving chamber 11. Some of the support frames 60 are located at the first end of the receiving chamber 11 in the third direction, and the remaining support frames 60 are located at the second end of the receiving chamber 11 in the third direction. Each support frame 60 is fixedly mounted on the inner side of a plane wall 13. At each end of the receiving chamber 11, the plurality of support frames 60 are spaced apart in the first direction. Every two support frames 60 correspondingly arranged in the third direction support a support rod 70. The support rod 70 extends along the third direction. The support rod 70 can enter the space surrounded by the plurality of heating assemblies 20, and the support rod 70 can support the carrier 300. The carrier 300 can slide with the support rod 70, and the carrier 300 can slide along the support rod 70 in the third direction.
[0086] It can be understood that the carrier 300 can enter and move out of the receiving chamber 11 by sliding on the support rod 70 , which can improve the convenience of the carrier 300 entering and moving out of the receiving chamber 11 .
[0087] It can be understood that the length of the support rod 70 in the third direction can be greater than the length of each heating assembly 20 in the third direction, and the support rod 70 can extend out of the space surrounded by multiple heating assemblies 20.
[0088] In some embodiments, a support groove 61 may be provided on each support frame 60. Each support frame 60 has a support groove 61 on a side away from the connected plane wall 13, and the support groove 61 may penetrate an end of the support frame 60 toward the inside of the receiving cavity 11 in the third direction. Both ends of the support rod 70 in the third direction may be received in the corresponding support groove 61.
[0089] The distance between the inner wall of the support groove 61 and the corresponding plane wall 13 is greater than the distance between the heating assembly 20 corresponding to the plane wall 13 and the plane wall 13. In this way, the support rod 70 can be at least partially located in the space surrounded by multiple heating assemblies 20.
[0090] For example, Figure 2 and Figure 5 As described above, the distance between the bottom of the inner wall of the support groove 61 and the plane wall 13 at the bottom of the reaction chamber 10 is greater than the distance between the heating assembly 20 near the bottom of the reaction chamber 10 and the plane wall 13 at the bottom of the reaction chamber 10 .
[0091] It can be understood that the distance between the inner wall of the supporting groove 61 close to the corresponding plane wall 13 and the plane wall 13 is greater than the distance between the heating component 20 corresponding to the plane wall 13 and the plane wall 13 .
[0092] It is understandable that Figure 5 As shown, the inner wall of the support groove 61 can limit the movement of the support rod 70 from the third direction and the first direction to achieve relative fixation of the support rod 70 and the support frame 60.
[0093] In the processing equipment provided by the embodiment of the present application, a carrier 300 loaded with a plurality of sheet materials can enter the receiving chamber 11 through one of the hatches of the reaction chamber 10, and the carrier 300 can be supported on a plurality of support rods 70, and slide along the third direction on the support rods 70 to completely enter the receiving chamber 11. Then, the staff can close the two end covers 50, and the exhaust device 200 can evacuate the receiving chamber 11. When the air pressure in the vacuum chamber meets the requirements of chemical treatment, the heating component 20 can heat the receiving chamber 11, so that the plurality of sheet materials can be chemically treated at a temperature and air pressure that meet the requirements of chemical treatment.
[0094] Through the reaction device 100 and processing equipment provided in the embodiment of the present application, at least part of the side walls of the reaction chamber 10 can adopt flat walls 13, which can reduce the space of the receiving cavity 11 except the space occupied by the heating component 20 and the carrier 300, and improve the space utilization rate in the reaction device 100.
[0095] At the same time, the space between the arc wall 12 and the heating assembly 20 can be used as a gas channel when the vacuum device 200 vacuums the receiving chamber 11, thereby improving the efficiency of vacuuming the receiving chamber 11.
[0096] It is obvious to those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and that the present application can be implemented in other specific forms without departing from the spirit or basic features of the present application. Therefore, no matter from which point of view, the above embodiments of the present application should be regarded as exemplary and non-restrictive, and the scope of the present application is defined by the attached claims rather than the above description, and therefore it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present application.
Claims
1. A reaction device, characterized in that: include: A reaction chamber, the reaction chamber comprising a plurality of curved walls and at least one plane wall, the plane wall being connected to at least one of the curved walls to form a receiving cavity, the receiving cavity being used to receive a plurality of sheet materials; A heating component, the heating component is disposed in the receiving cavity and is used to heat the plurality of sheet materials; A heat-insulating layer is arranged on at least one of the arc-surface walls to reduce the loss of heat in the receiving cavity.
2. The reaction device according to claim 1, characterized in that The number of the plane walls is two, the number of the arcuate walls is two, the two plane walls are arranged opposite to each other, the two arcuate walls are arranged opposite to each other, the two sides of each plane wall are respectively connected to the two arcuate walls, and the two sides of each arcuate wall are respectively connected to the two plane walls.
3. The reaction device according to claim 1, characterized in that The reaction device also includes: An isolation plate is installed on at least one of the arc-surface walls and cooperates with the corresponding arc-surface wall to enclose a heat-insulating space, and the heat-insulating layer is accommodated in the heat-insulating space.
4. The reaction device according to claim 1, characterized in that The plane wall is provided with reinforcing ribs, and the reinforcing ribs are located outside the reaction chamber.
5. The reaction device according to claim 1, characterized in that: There are multiple heating components, and the multiple heating components are used to surround the multiple sheet materials, and each of the heating components includes: A connecting plate, the connecting plate being connected to the corresponding curved wall or the flat wall; A heating wire is arranged on a side of the connecting plate away from the corresponding curved wall or the plane wall.
6. The reaction device according to claim 5, characterized in that Each of the heating components also includes: A positioning frame is installed on a side of the connecting plate away from the corresponding arc wall or the plane wall. A positioning groove is provided on the positioning frame, and the positioning groove is used to partially accommodate the heating wire.
7. The reaction device according to claim 6, characterized in that The positioning frame is also provided with a limiting groove, the limiting groove is communicated with the positioning groove, and each of the heating components further comprises: A limit pin is inserted into the limit slot and is used to block the positioning slot and limit the movement of the heating wire.
8. The reaction device according to claim 1, characterized in that The reaction device also includes: A plurality of support rods are connected to one of the plane walls, the plurality of support rods extend along the length direction of the reaction chamber and are arranged at intervals, the plurality of support rods are used to support a carrier, and the carrier is used to carry a plurality of the sheet materials.
9. The reaction device according to claim 8, characterized in that The reaction device also includes: A plurality of support frames are arranged at intervals in the reaction chamber, each of the support frames is installed on one of the plane walls, and a support groove is provided on a side of each of the support frames away from the connected plane wall, the support groove is used to partially accommodate the corresponding support rod, and the distance between the side of the inner wall of the support groove close to the corresponding plane wall and the plane wall is greater than the distance between the heating component corresponding to the plane wall and the plane wall.
10. The reaction device according to claim 1, characterized in that: The reaction chamber has a hatch opening at at least one end in the length direction, and the reaction device further comprises: An end cover is connected to the reaction chamber at one end of the reaction chamber where a hatch is opened, and the end cover is used to close the hatch.
11. A processing equipment, characterized in that: include: Extraction device; The reaction device according to any one of claims 1 to 10, wherein the reaction device is connected to the exhaust device, and the exhaust device is used to vacuum the reaction device.