Single crystal furnace

Abstract

The utility model relates to a single crystal furnace. The single crystal furnace comprises an auxiliary chamber, a first valve bin, a second valve bin and a main chamber, a first closing valve is arranged in the first valve bin and used for opening and closing the first valve bin, and a second closing valve is arranged in the second valve bin and used for opening and closing the second valve bin. The auxiliary chamber, the first valve bin, the second valve bin and the main chamber are sequentially connected. When the crystal bar falls to the first closing valve, and the first closing valve generates pits, deformation, air leakage, water leakage and other abnormalities, the second closing valve can be urgently started at the moment; when the crystal bar falls to the first closing valve, the crystal bar is directly taken down through the bearing effect of the first closing valve on the crystal bar after the auxiliary chamber is filled with normal pressure, the cost is saved, and meanwhile potential safety hazards are eliminated. After the second closing valve is closed and the auxiliary chamber and the second valve bin are filled with normal pressure, the silicon material and the thermal field in the main chamber furnace are protected from being oxidized, so that the inside of the main chamber furnace is prevented from being influenced, crystal pulling can be continued, and silicon material loss caused by banking of the silicon material and thermal field loss caused by thermal field oxidation can be eliminated.

Description

Technical Field

[0001] The present application relates to the technical field of single crystal silicon production equipment, and in particular to a single crystal furnace. Background Art

[0002] The single crystal furnace is an essential equipment in the process of converting polycrystalline silicon into single crystal silicon, and single crystal silicon is the basic raw material in the photovoltaic power generation industry. The basic structure of the existing single crystal furnace mainly includes a sub-chamber, a valve chamber and a main chamber. In the production of single crystals by the direct pulling method, when the crystal rod is pulled, during the cooling and lifting process of the section or during the pressure maintenance process of the crystal rod, the crystal rod often shakes due to the blowing of argon gas or falls off due to problems with the seed crystal. After the rod falls off, the impact force of the crystal falling will cause varying degrees of damage to the flap valve. In mild cases, the flap valve will be deformed and pitted. In severe cases, the flap valve seal leaks, resulting in oxidation in the furnace, difficulty in crystal formation, and abnormalities such as hanging polycrystalline. In severe cases, the flap valve interlayer will leak, and crystal pulling cannot continue, resulting in a furnace stewing accident.

[0003] At present, the usual practice when the single crystal rod falls off in the auxiliary chamber is to use the seed crystal rope to wrap and bundle the crystal rod, lift it to the auxiliary chamber and then take it out. For the deformation of the flap valve, the spare parts are usually replaced and repaired after the furnace is shut down. However, the sealing of the flap valve has been affected, which seriously affects the subsequent single crystal pulling. It is even impossible to continue pulling the crystal and the furnace can only be stewed, resulting in serious losses. Summary of the invention

[0004] Based on this, it is necessary to provide a single crystal furnace to address the problem that the flap valve is deformed after the rod is dropped and the furnace needs to be stopped for maintenance, which affects the production efficiency.

[0005] The embodiment of the present application provides a single crystal furnace, comprising:

[0006] Vice Chamber;

[0007] A first valve compartment, wherein a first closing valve is disposed in the first valve compartment, and the first closing valve is used to open and close the first valve compartment;

[0008] A second valve compartment, wherein a second closing valve is disposed in the second valve compartment, and the second closing valve is used to open and close the second valve compartment;

[0009] The main chamber, the sub-chamber, the first valve chamber, the second valve chamber and the main chamber are connected in sequence.

[0010] In one of the embodiments, the single crystal furnace further includes a controller, and the controller is communicatively connected with the first closing valve and the second closing valve.

[0011] In one of the embodiments, a first clamping device is provided in the first valve chamber, and the first clamping device includes a first clamping member, a second clamping member and a first clamping driving member. The first clamping driving member is drivingly connected to the first clamping member and the second clamping member, and drives the first clamping member and the second clamping member to approach the center of the first valve chamber to clamp the crystal rod.

[0012] In one embodiment, the controller is in communication with the first clamping drive.

[0013] In one embodiment, the single crystal furnace further includes a crystal weight monitor, which is disposed in the sub-chamber and is used to connect the crystal rod and monitor the weight of the crystal rod;

[0014] The crystal weight monitor is in communication with the controller.

[0015] In one of the embodiments, a second clamping device is provided in the second valve chamber, and the second clamping device includes a third clamping member, a fourth clamping member and a second clamping driving member. The second clamping driving member is drivingly connected to the third clamping member and the fourth clamping member, and drives the third clamping member and the fourth clamping member to approach the center of the second valve chamber to clamp the crystal rod.

[0016] In one embodiment, the controller is in communication with the second clamping drive.

[0017] In one of the embodiments, a first interlocking device is provided between the secondary chamber and the first valve chamber;

[0018] A second interlocking device is provided between the first valve compartment and the second valve compartment.

[0019] In one of the embodiments, the first closing valve is configured as a first flap valve;

[0020] The second closing valve is configured as a second flap valve.

[0021] In one embodiment, the first flap valve includes a first plate and a first driving member, wherein the first driving member is drivingly connected to the first plate to drive the first plate to flip to open and close the first valve chamber;

[0022] The second flap valve includes a second plate and a second driving member, and the second driving member is drivingly connected to the second plate to drive the second plate to flip to open and close the second valve chamber.

[0023] According to the single crystal furnace of the embodiment of the present application, by designing the first valve bin and the second valve bin, when the rod is taken out and isolated normally, only the first closing valve needs to be closed, and the second closing valve remains normally open. After closing the first closing valve, if the crystal rod falls to the first closing valve during the pressure maintenance or rod taking process, the second closing valve needs to be closed at this time. Specifically, when the crystal rod falls to the first closing valve, causing the first closing valve to have pits, deformation, air leakage, water leakage and other abnormalities, the second closing valve can be urgently activated at this time; when the crystal rod falls to the first closing valve, there is no need to use the seed crystal rope to wrap and bind the rod, but after closing the second closing valve, the auxiliary chamber is filled with normal pressure and the crystal rod is directly removed through the bearing effect of the first closing valve on the crystal rod, which can save the cost of a seed crystal rope and eliminate the safety hazards of personnel operation; when the crystal rod falls to the first closing valve, the first closing valve has pits, deformation, air leakage, and water leakage, and the second closing valve can be urgently activated. After closing the second closing valve and filling the auxiliary chamber and the second valve chamber with normal pressure, the silicon material and the thermal field in the main chamber furnace are protected from oxidation, so that the main chamber furnace is not affected and crystal pulling can continue, which can eliminate the silicon material loss caused by the silicon material stewing furnace and the thermal field loss caused by thermal field oxidation. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] FIG. 1 is a schematic structural diagram of a single crystal furnace according to an embodiment of the present application.

[0025] FIG. 2 is a schematic diagram of a partial structure of a single crystal furnace according to an embodiment of the present application.

[0026] FIG3 is a schematic structural diagram of a first clamping device in a single crystal furnace according to an embodiment of the present application.

[0027] FIG4 is a schematic diagram of the structure of the first interlocking device in the single crystal furnace of one embodiment of the present application when interlocked.

[0028] FIG5 is a schematic diagram of the structure of a single crystal furnace when the first interlocking device is unlocked according to an embodiment of the present application.

[0029] Reference numerals:

[0030] 1. Secondary room;

[0031] 2. first valve chamber; 21. first clamping device; 211. first clamping member; 212. second clamping member; 2121. clamping groove; 213. first clamping driving member;

[0032] 3. First closing valve; 31. First plate; 32. First driving member;

[0033] 4. Second valve compartment; 41. Second clamping device; 411. Third clamping member; 412. Fourth clamping member; 413. Second clamping driving member;

[0034] 5. second closing valve; 51. second plate; 52. second driving member;

[0035] 6. Main chamber; 61. Furnace cover; 62. Furnace body;

[0036] 7. Crystal rod;

[0037] 8. Crystal weight monitor; 81. Fixed pulley; 82. Seed crystal rope;

[0038] 9. First interlocking device; 90. Second interlocking device;

[0039] 91. Fixed plate;

[0040] 92, rotating disk; 921, locking slot; 9211, first slot; 9212, second slot; 922, lock buckle; 9221, locking rod; 9222, lock head;

[0041] 93. Rotating driving member; 931. Driving motor; 932. Driving gear; 933. Driven rack. DETAILED DESCRIPTION

[0042] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0043] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0044] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0045] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0046] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0047] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0048] Referring to Fig. 1, at least one embodiment of the present application proposes a single crystal furnace, which includes a sub-chamber 1, a first valve bin 2, a second valve bin 4 and a main chamber 6. A first closing valve 3 is provided in the first valve bin 2, and the first closing valve 3 is used to open and close the first valve bin 2. A second closing valve 5 is provided in the second valve bin 4, and the second closing valve 5 is used to open and close the second valve bin 4. The sub-chamber 1, the first valve bin 2, the second valve bin 4 and the main chamber 6 are connected in sequence.

[0049] According to the single crystal furnace of the embodiment of the present application, by designing the first valve bin 2 and the second valve bin 4, when the rod is taken out and isolated normally, only the first closing valve 3 needs to be closed, and the second closing valve 5 remains normally open. After closing the first closing valve 3, if the crystal rod 7 falls to the first closing valve 3 during the pressure maintenance or rod taking process, the second closing valve 5 needs to be closed. Specifically, when the crystal rod 7 falls to the first closing valve 3, causing the first closing valve 3 to have pits, deformation, air leakage, water leakage and other abnormalities, the second closing valve 5 can be urgently activated at this time; when the crystal rod 7 falls to the first closing valve 3, it is not necessary to take the rod by winding and binding with the seed crystal rope 82, but after closing the second closing valve 5, the secondary chamber 1 is filled with normal pressure and the crystal rod 7 is directly removed by the bearing effect of the first closing valve 3 on the crystal rod 7, which can save the cost of a seed crystal rope 82 and eliminate the safety hazards of personnel operation; when the crystal rod 7 falls to the first closing valve 3, the first closing valve 3 has pits, deformation, air leakage, water leakage, etc., and the second closing valve 5 can be urgently activated. After closing the second closing valve 5 and filling the auxiliary chamber 1 and the second valve chamber 4 with normal pressure, the silicon material and the thermal field in the main chamber 6 furnace are protected from oxidation, so that the main chamber 6 furnace is not affected and crystal pulling can continue, which can eliminate the silicon material loss caused by the silicon material stewing furnace and the thermal field loss caused by thermal field oxidation.

[0050] In some embodiments, the single crystal furnace further includes a controller, which is in communication with the first closing valve 3 and the second closing valve 5. The controller can control the opening and closing of the first closing valve 3 and the second closing valve 5 respectively. When the rod is taken out and isolated normally, the first closing valve 3 is closed by the controller, and the second closing valve 5 remains normally open. After closing the first closing valve 3, if the crystal rod 7 falls to the first closing valve 3 during the pressure maintenance or rod taking process, the controller controls the second closing valve 5 to close, thereby improving the automation of the single crystal furnace.

[0051] Referring to FIG. 1 and FIG. 2 , in some embodiments, a first clamping device 21 is provided in the first valve bin 2, and the first clamping device 21 includes a first clamping member 211, a second clamping member 212, and a first clamping driving member 213. The first clamping driving member 213 is drivingly connected to the first clamping member 211 and the second clamping member 212, and drives the first clamping member 211 and the second clamping member 212 to approach the center of the first valve bin 2 to clamp the crystal rod 7. The first clamping device 21 can clamp the crystal rod 7 in the first valve bin 2, prevent the occurrence of rod drop accidents, prevent the crystal rod 7 from falling on the first closing valve 3, and reduce the rod drop loss during the equal diameter growth process of the crystal rod 7.

[0052] Referring to FIG. 3 , in some embodiments, the first clamping device 21 may be configured as a driving cylinder, which controls the positions of the first clamping member 211 and the second clamping member 212 by extending and retracting the driving cylinder, so that the first clamping member 211 and the second clamping member 212 synchronously approach the center of the first valve chamber 2 to clamp the crystal rod 7.

[0053] Specifically, in some embodiments, when there is no need to clamp the crystal ingot 7, the first clamping member 211 and the second clamping member 212 are arranged close to the inner wall of the first valve chamber 2 under the driving action of the first clamping driving member 213. In order to facilitate the clamping stability of the crystal ingot 7, a semi-arc-shaped clamping groove 2121 is provided on the surfaces opposite to the first clamping member 211 and the second clamping member 212, so as to fit with the circumferential outer wall of the crystal ingot 7 when clamping the crystal ingot 7.

[0054] In some embodiments, the controller is in communication with the first clamping driver 213. The controller can control the first clamping driver 213 to control the first clamping device 21 to clamp the crystal rod 7, thereby improving the automation of the single crystal furnace.

[0055] 1 , in some embodiments, the single crystal furnace further includes a crystal weight monitor 8, which is disposed in the auxiliary chamber 1 and is used to connect to the crystal rod 7 and monitor the weight of the crystal rod 7. The crystal weight monitor 8 is in communication with the controller.

[0056] Specifically, the crystal weight monitor 8 is arranged at the top of the auxiliary chamber 1, and the crystal weight monitor 8 can be configured as a weight sensor. A fixed pulley 81 is arranged below the crystal weight monitor 8, and a seed crystal rope 82 passes through the fixed pulley 81. A weight, a chuck and a crystal rod 7 are hung on the seed crystal rope 82.

[0057] When the crystal rod falls off abnormally during the equal diameter growth, the weight of the crystal changes drastically. The crystal weight monitor 8 can monitor the crystal weight signal. The crystal weight signal is transmitted to the controller, so that the controller sends a command to the first clamping device 21. The first clamping device 21 then clamps the crystal rod 7 to prevent the occurrence of the rod falling accident.

[0058] Referring to FIG. 1 and FIG. 2 , in some embodiments, a second clamping device 41 is provided in the second valve bin 4, and the second clamping device 41 includes a third clamping member 411, a fourth clamping member 412, and a second clamping driving member 413. The second clamping driving member 413 is drivingly connected to the third clamping member 411 and the fourth clamping member 412, and drives the third clamping member 411 and the fourth clamping member 412 to approach the center of the second valve bin 4 to clamp the crystal rod 7. The second clamping device 41 can clamp the crystal rod 7 in the second valve bin 4, prevent the occurrence of the rod drop accident, prevent the crystal rod 7 from falling on the second closing valve 5, and reduce the rod drop loss during the equal diameter growth process of the crystal rod 7. It can be understood that the structure of the second clamping device 41 can be set similarly to the first clamping device 21, and will not be repeated here.

[0059] In some embodiments, the controller is in communication with the second clamping driver 413. The controller can control the second clamping driver 413 to control the second clamping device 41 to clamp the crystal rod 7, thereby improving the automation of the single crystal furnace.

[0060] Referring to FIG. 1 , in some embodiments, a first interlocking device 9 is provided between the secondary chamber 1 and the first valve bin 2. In some embodiments, a second interlocking device 90 is provided between the first valve bin 2 and the second valve bin 4. The first interlocking device 9 enables the secondary chamber 1 and the first valve bin 2 to be fixedly connected, and the secondary chamber 1 and the first valve bin 2 can be lifted synchronously after interlocking; the second interlocking device 90 enables the first valve bin 2 and the second valve bin 2 to be fixedly connected, and the first valve bin 2 and the second valve bin 4 can be lifted synchronously after interlocking. Specifically, in some embodiments, the main chamber 6 includes a furnace body 62 and a furnace cover 61 covering the furnace body 62, and the upper part of the furnace cover 61 is connected to the second valve bin 4 through a fixed structure such as a flange, and an interlocking device may not be provided. When the first interlocking device 9 and the second interlocking device 90 are both in an interlocked state, the secondary chamber 1, the first valve bin 2, the second valve bin 4, and the furnace cover 61 can be lifted synchronously, which is convenient for operations such as dismantling the furnace.

[0061] Referring to FIG. 4 and FIG. 5 , specifically, in some embodiments, the first interlocking device 9 includes a fixed disk 91, a rotating disk 92, and a rotating drive member 93. The fixed disk 91 is fixed on the first valve chamber 2, the rotating disk 92 is fixed on the secondary chamber 1, and the rotating drive member 93 is installed on the secondary chamber 1. The rotating drive member 93 can be configured as a driving motor 931, and a driving gear 932 is provided on the output shaft of the driving motor 931. A driven rack 933 meshing with the driving gear 932 is provided on the rotating disk 92, and the driven rack 933 is arc-shaped. When the driving motor 931 is started, the driving gear 932 is driven to rotate, so as to drive the driven rack 933 and the rotating disk 92 to rotate together, so as to realize the relative rotation of the rotating disk 92 and the fixed disk 91.

[0062] A lock slot 921 is provided on the rotating disk 92 to vertically penetrate the rotating disk 92. The lock slot 921 includes a first slot 9211 and a second slot 9212. The first slot 9211 and the second slot 9212 are connected to each other and are arranged along the circumference of the rotating disk 92. A lock buckle 922 is also provided between the fixed disk 91 and the rotating disk 92. The lock buckle 922 includes a lock rod 9221 and a lock head 9222 fixedly connected to the lock rod 9221. The lock head 9222 can vertically penetrate the first slot 9211, but cannot vertically penetrate the second slot 9212. The bottom end of the lock rod 9221 is fixed on the fixed disk 91, and the top end of the lock rod 9221 passes through the lock slot 921 and is fixedly connected to the lock head 9222.

[0063] As shown in Figure 4, when the rotating disk 92 and the fixed disk 91 are in an interlocked state, the locking rod 9221 is placed in the second groove 9212, the locking head 9222 is placed above the second groove 9212, and the bottom of the locking head 9222 abuts against the rotating disk 92. The rotating disk 92 and the fixed disk 91 cannot produce relative movement in the vertical direction, that is, the sub-chamber 1 and the first valve chamber 2 are locked and fixed in the vertical direction and cannot be separated.

[0064] As shown in FIG5 , when the rotating disk 92 and the fixed disk 91 are in the unlocked state, the rotating driving member 93 drives the rotating disk 92 to rotate relative to the fixed disk 91, so that the locking rod 9221 moves from the second slot 9212 to the first slot 9211, and the locking head 9222 is placed above the first slot 9211. However, since the locking head 9222 can pass through the first slot 9211 vertically, the rotating disk 92 and the fixed disk 91 are not limited in the vertical direction. At this time, the rotating disk 92 and the fixed disk 91 can be separated vertically, that is, the auxiliary chamber 1 and the first valve chamber 2 can be separated vertically.

[0065] In some embodiments, the first closing valve 3 is configured as a first flap valve, and the second closing valve 5 is configured as a second flap valve. The provision of the flap valve can reduce the horizontal space occupied by the first closing valve 3 and the second closing valve 5, and also facilitates the provision and installation of the first clamping device 21 and the second clamping device 41.

[0066] Referring to Fig. 2, in some embodiments, the first flap valve includes a first plate 31 and a first driving member 32, the first driving member 32 is drivingly connected to the first plate 31, and drives the first plate 31 to flip to open or close the first valve compartment 2. The first driving member 32 can be configured as a motor, the output shaft of which is horizontally arranged and connected to the first plate 31, driving the first plate 31 to flip to open or close the first valve compartment 2.

[0067] The second flap valve includes a second plate 51 and a second driving member 52. The second driving member 52 is connected to the second plate 51 and drives the second plate 51 to flip to open or close the second valve compartment 4. The second driving member 52 can be configured as a motor, the output shaft of which is horizontally arranged and connected to the second plate 51, driving the second plate 51 to flip to open or close the first valve compartment 2.

[0068] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0069] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A single crystal furnace, characterized in that: include: Vice Chamber; A first valve compartment, wherein a first closing valve is disposed in the first valve compartment, and the first closing valve is used to open and close the first valve compartment; A second valve compartment, wherein a second closing valve is disposed in the second valve compartment, and the second closing valve is used to open and close the second valve compartment; The main chamber, the sub-chamber, the first valve chamber, the second valve chamber and the main chamber are connected in sequence.

2. The single crystal furnace according to claim 1, characterized in that: The single crystal furnace also includes a controller, which is communicatively connected with the first closing valve and the second closing valve.

3. The single crystal furnace according to claim 2, characterized in that: A first clamping device is provided in the first valve chamber, and the first clamping device includes a first clamping member, a second clamping member and a first clamping driving member. The first clamping driving member is drivingly connected to the first clamping member and the second clamping member, and drives the first clamping member and the second clamping member to approach the center of the first valve chamber to clamp the crystal rod.

4. The single crystal furnace according to claim 3, characterized in that: The controller is in communication with the first clamping drive.

5. The single crystal furnace according to claim 4, characterized in that: The single crystal furnace further includes a crystal weight monitor, which is disposed in the auxiliary chamber and is used to connect a crystal rod and monitor the weight of the crystal rod; The crystal weight monitor is in communication with the controller.

6. The single crystal furnace according to claim 5, characterized in that: A second clamping device is provided in the second valve chamber, and the second clamping device includes a third clamping member, a fourth clamping member and a second clamping driving member. The second clamping driving member is drivingly connected to the third clamping member and the fourth clamping member, and drives the third clamping member and the fourth clamping member to approach the center of the second valve chamber to clamp the crystal rod.

7. The single crystal furnace according to claim 6, characterized in that: The controller is in communication with the second clamping drive.

8. The single crystal furnace according to claim 1, characterized in that: A first interlocking device is provided between the secondary chamber and the first valve chamber; A second interlocking device is provided between the first valve compartment and the second valve compartment.

9. The single crystal furnace according to claim 1, characterized in that: The first closing valve is configured as a first flap valve; The second closing valve is configured as a second flap valve.

10. The single crystal furnace according to claim 9, characterized in that: The first flap valve comprises a first plate and a first driving member, wherein the first driving member is drivingly connected to the first plate and drives the first plate to flip to open and close the first valve compartment; The second flap valve includes a second plate and a second driving member, and the second driving member is drivingly connected to the second plate to drive the second plate to flip to open and close the second valve chamber.

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