Gas transmission device

Abstract

The utility model discloses a gas transmission device, which at least comprises a first input pipe, a second input pipe, a first gas supply pipe and a second gas supply pipe, the second input pipe is communicated with a second air source; the mixer comprises at least two inlets, and the inlets are communicated with the sides, away from the first gas source and the second gas source, of the first input pipe and the second input pipe respectively; the output pipe is communicated with an outlet of the mixer; the heater is arranged on the output pipe; the gulp valve is arranged on the output pipe, and the gulp valve is connected with the heater in parallel; the analyzer is arranged on the output pipe on one side, far away from the mixer, of the heater and the gulp valve; the switch valve is arranged on the output pipe on one side, far away from the heater and the gulp valve, of the analyzer; and the calculation unit is connected with the first input pipe, the second input pipe and the switch valve. According to the transmission device provided by the utility model, the mixing effect of all components in the mixed gas can be monitored and adjusted in real time, and the stability of gas transmission is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a gas transmission device. Background Art

[0002] In the semiconductor manufacturing process, mixed gases are often used to deposit or etch wafers. The uniformity of the gas composition and the stability of the gas transmission seriously affect the uniformity of the film distribution on the wafer surface or the uniformity of the etching, which in turn determines the yield rate of semiconductor production. In existing gas transmission devices, cylinders containing pre-mixed mixed gases are generally used for gas supply, resulting in the inability to monitor and adjust the mixing effect of the gases used in semiconductor production in real time. In addition, existing transmission devices cannot stabilize the pressure of the output gas, which affects the quality of semiconductor production. Utility Model Content

[0003] The utility model aims to provide a gas transmission device, which can monitor and adjust the mixing effect of each component in the mixed gas in real time and improve the stability of gas transmission.

[0004] In order to achieve the above-mentioned purpose and other related purposes, the utility model is implemented through the following technical solutions.

[0005] The utility model provides a gas transmission device, comprising:

[0006] A first input pipe, connected to a first gas source;

[0007] A second input pipe is connected to a second gas source;

[0008] A mixer, comprising at least two inlets, wherein the inlets are respectively connected to the first input pipe and the second input pipe at a side away from the first gas source and the second gas source;

[0009] an output pipe, connected to an outlet of the mixer;

[0010] A heater, arranged on the output pipe;

[0011] An air supply valve is arranged on the output pipe, and the air supply valve and the heater are connected in parallel;

[0012] An analyzer is arranged on the output pipe at a side of the heater and the air supply valve away from the mixer;

[0013] A switch valve is arranged on the output pipe at a side of the analyzer away from the heater and the gas supply valve;

[0014] The computing unit, the first input pipe, the second input pipe and the switch valve are connected.

[0015] In an embodiment of the utility model, at least one first regulating valve is arranged on the first input pipe, and the first regulating valve is arranged at any position of the first input pipe between the first gas source and the mixer.

[0016] In an embodiment of the utility model, at least one second regulating valve is arranged on the second input pipe, and the second regulating valve is arranged at any position of the second input pipe between the second gas source and the mixer.

[0017] In an embodiment of the present utility model, a comparison unit is provided on the switch valve, and the comparison unit controls the switch of the switch valve.

[0018] In an embodiment of the present invention, the calculation unit includes two input terminals, and the input terminals are respectively connected to the first regulating valve and the second regulating valve.

[0019] In an embodiment of the present invention, the calculation unit further includes an output terminal, and the output terminal is connected to the comparison unit.

[0020] In an embodiment of the utility model, the switch signal of the switch valve is fed back to the heater to control the start and stop of the heater.

[0021] In one embodiment of the present invention, the heater is a cartridge heater, a tubular heater, a belt heater, a film heater or a ceramic heater.

[0022] In an embodiment of the utility model, the switch valve is a gate valve, a stop valve, a ball valve or a butterfly valve.

[0023] In an embodiment of the present invention, the mixer is a static mixer or a dynamic mixer.

[0024] In summary, the utility model proposes a gas transmission device. When the theoretical calculation result of the calculation unit for the composition of the mixed gas is consistent with the analysis result of the analyzer, the switch valve is opened to output a mixed gas with uniform composition. When the calculation result of the calculation unit is inconsistent with the analysis result of the analyzer, the switch valve is closed and the heater is started to heat the gas to accelerate the mixing of the gas. In addition, the gas transmission device provided by the utility model can also maintain the pressure of the gas output by the gas transmission device at a set value through the gas replenishment valve, reduce the pressure fluctuation of the first input pipe, the second input pipe, the output pipe, the mixer and the heater, and ensure the stability of the output gas.

[0025] Of course, any method of implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for describing the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0027] Figure 1 The figure is a schematic diagram of a process of a gas transmission device.

[0028] Marking Description:

[0029] 11. First gas source; 12. Second gas source; 13. First input pipe; 131. First regulating valve; 14. Second input pipe; 141. Second regulating valve; 15. Mixer; 16. Output pipe; 17. Heater; 18. Gas supply valve; 19. Analyzer; 20. Switch valve; 201. Comparison unit; 21. Calculation unit. DETAILED DESCRIPTION

[0030] The following describes the implementation of the present invention through specific examples. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific implementations. The details in the present invention can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0031] It should be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present invention, and thus the drawings only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed at will, and the component layout may also be more complicated.

[0032] In the present invention, it should be noted that, if the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, if the terms "first" and "second" appear, they are only used for description and distinction purposes, and cannot be understood as indicating or implying relative importance.

[0033] The utility model provides a gas transmission device, which can enhance the gas mixing effect through a heater and a switch valve, and ensure that the gas composition output by the transmission device is uniform. In addition, through the gas replenishment valve, the fluctuation of the gas pressure caused by the transmission pipeline, the mixer and the heater is reduced, and the stability of the gas output by the transmission device is improved.

[0034] See also Figure 1 As shown, the utility model provides a gas transmission device, for example, including a first gas source 11, a second gas source 12, a first input pipe 13, a second input pipe 14, a mixer 15, an output pipe 16, a heater 17, a gas supply valve 18, an analyzer 19, a switch valve 20 and a calculation unit 21. Among them, a comparison unit 201 is set in the switch valve 20, and the gas composition output by the gas transmission device is ensured to be uniform through the comparison unit 201, the analyzer 19, the calculation unit 21 and the switch valve 20. In addition, the gas pressure output by the gas transmission device is maintained stable through the gas supply valve 18.

[0035] See also Figure 1 As shown, in one embodiment of the utility model, the first gas source 11 is connected to the first input pipe 13 to transmit the gas in the first gas source 11. At least one first regulating valve 131 is provided on the first input pipe 13, and the first regulating valve 131 is provided at any position of the first input pipe 13 between the first gas source 11 and the mixer 15. In this embodiment, for example, one first regulating valve 131 is provided on the first input pipe 13, and the first regulating valve 131 is used to adjust the amount of gas transmitted in the first input pipe 13.

[0036] See also Figure 1 As shown, in one embodiment of the utility model, the second gas source 12 is connected to the second input pipe 14 to transmit the gas in the second gas source 12. At least one second regulating valve 141 is provided on the second input pipe 14, and the second regulating valve 141 is provided at any position of the second input pipe 14 between the second gas source 12 and the mixer 15. In this embodiment, for example, one second regulating valve 141 is provided on the second input pipe 14, and the second regulating valve 141 is used to adjust the amount of gas transmitted in the second input pipe 14.

[0037] See also Figure 1As shown, in one embodiment of the utility model, the mixer 15 includes at least two inlets, the inlets are respectively connected to the first input pipe 13 and the second input pipe 14 on the side away from the first gas source 11 and the second gas source 12, and the outlet is connected to the output pipe 16. The gas enters the mixer 15 through the inlet of the mixer 15 for mixing, and the mixed gas enters the output pipe 16 from the outlet of the mixer 15. In this embodiment, the mixer 15 includes, for example, 1 outlet and 2 inlets, and the gas from the first input pipe 13 and the second input pipe 14 enters the mixer 15 from the two inlets, and enters the output pipe 16 from the outlet after mixing. The mixer 15 is, for example, a static mixer or a dynamic mixer.

[0038] See also Figure 1 As shown, in one embodiment of the utility model, the heater 17 is arranged on the output pipe 16. When the mixer 15 mixes the gas unevenly, the heater 17 is started to heat the gas in the output pipe 16. Due to the heating, the gas pressure in the output pipe 16 increases, and the gas in the output pipe 16 returns to the mixer 15. The gas flowing back into the mixer 15 exchanges heat with the original gas in the mixer 15, the temperature of the gas in the mixer 15 increases, the movement state of the gas in the mixer 15 is accelerated, the mixing effect of the mixer 15 is intensified, and the mixing of the gas is uniform. When the mixer 15 mixes the gas uniformly, the heater 17 stops, and the gas transmission device outputs the uniformly mixed gas. In this embodiment, the heater 17 is, for example, a cartridge heater, a tubular heater, a belt heater, a film heater or a ceramic heater.

[0039] See also Figure 1As shown, in one embodiment of the utility model, the air supply valve 18 is arranged on the output pipe 16, and the air supply valve 18 is arranged in parallel with the heater 17. After the gas flows through the first input pipe 13, the first regulating valve 131, the second input pipe 14, the second regulating valve 141, the mixer 15, the output pipe 16 and the heater 17, due to certain resistance of the valves, equipment and pipelines, the gas pressure output by the heater 17, that is, the gas pressure at point A, has a certain drop, and the air supply valve 18 can be opened or closed according to the set value of the gas pressure output by the gas transmission device, so that the gas pressure on the side of the analyzer 19 close to the heater 17 and the air supply valve 18, that is, the gas pressure at point B, is equal to the set value of the gas pressure output by the gas transmission device. When the gas output by the heater 17, i.e., the gas pressure at point A, is lower than the set value of the gas pressure output by the gas transmission device, the gas supply valve 18 opens, and part of the gas is supplied to the gas output by the heater 17 through the gas supply valve 18. The gas output by the gas supply valve 18 and the gas output by the heater 17 are mixed into one path and flow through the analyzer 19. At this time, the gas pressure on the side of the analyzer 19 close to the heater 17 and the gas supply valve 18, i.e., the gas pressure at point B, is equal to the set value of the gas pressure output by the gas transmission device. When the gas output by the heater 17, i.e., the gas pressure at point A, is equal to the set value of the gas pressure output by the gas transmission device, the gas supply valve 18 remains closed, and the gas output by the heater 17 flows directly through the analyzer 19. Therefore, the difference between the gas pressure output by the heater 17, i.e., the gas pressure at point A, and the set value of the gas pressure output by the gas transmission device is balanced by the gas supply valve 18, so that the gas pressure on the side of the analyzer 19 close to the heater 17 and the gas supply valve 18, i.e., the gas pressure at point B, is always consistent with the set value to ensure the stable transmission of the gas. In this embodiment, the air supply valve 18 is, for example, a pressure regulating valve.

[0040] See also Figure 1 As shown, in one embodiment of the utility model, the analyzer 19 is arranged on the output pipe 16 on the side of the heater 17 and the gas supply valve 18 away from the mixer 15. The analyzer 19 is used to analyze the gas composition output by the heater 17 and the gas supply valve 18 to monitor the mixing effect of the mixer 15 on the gas. In this embodiment, the analyzer 19 is, for example, a thermal conductivity gas analyzer, an electrochemical gas analyzer, and an infrared absorption analyzer.

[0041] See also Figure 1As shown, in one embodiment of the utility model, the calculation unit 21 is connected to the first input pipe 13, the second input pipe 14 and the switch valve 20. In this embodiment, the calculation unit 21 includes, for example, two input ends and one output end. The two input ends are connected to the first regulating valve 131 and the second regulating valve 141 to receive the data of the opening of the first regulating valve 131 and the second regulating valve 141, and the one output end is connected to the comparison unit 201. Through the data of the opening of the first regulating valve 131 and the second regulating valve 141, the calculation unit 21 calculates the theoretical composition of the mixed gas after the gases transmitted by the first input pipe 13 and the second input pipe 14 are mixed uniformly at the current opening, and then transmits the theoretical composition to the comparison unit 201.

[0042] See also Figure 1 As shown, in one embodiment of the utility model, the switch valve 20 is arranged on the output pipe 16 of the analyzer 19 away from the heater 17 and the gas supply valve 18. In this embodiment, a comparison unit 201 is arranged on the switch valve 20, for example, and the comparison unit 201 is connected to the output end of the calculation unit 21 and the analyzer 19. The comparison unit 201 receives the calculation result of the theoretical composition of the mixed gas output by the calculation unit 21, and compares it with the analysis result received by the analyzer 19, and is used to control the switch of the switch valve 20. The switch signal of the switch valve 20 is fed back to the heater 17 to control the start and stop of the heater 17. Therefore, when the comparison unit 201 compares the calculation result of the calculation unit 21 with the analysis result of the analyzer 19 and finds that they are consistent, the switch valve 20 is opened, and the switch valve 20 outputs a mixed gas with uniform composition, and the opening signal of the switch valve 20 is transmitted to the heater 17, and the heater 17 will not start and remain in a stopped state. When the calculation result of the comparison unit 201 and the analysis result of the analyzer 19 are inconsistent, that is, the mixed gas composition on the side of the switch valve 20 close to the analyzer 19 is not uniform, the switch valve 20 is closed, the switch valve 20 does not output gas, and the closing signal of the switch valve 20 is transmitted to the heater 17, the heater 17 is started, the gas is heated, and the mixing effect is enhanced. In this embodiment, the switch valve 20 is, for example, a shut-off valve such as a gate valve, a stop valve, a ball valve or a butterfly valve.

[0043] In order to further illustrate a gas transmission device provided by the present invention, the working process of the gas transmission device is specifically described below, and the specific process is as follows.

[0044] See also Figure 1As shown, the first regulating valve 131 and the second regulating valve 141 are opened, and the gases in the first gas source 11 and the second gas source 12 enter the mixer 15 through the first input pipe 13 and the second input pipe 14 respectively. The mixed gas enters the output pipe 16 from the outlet of the mixer 15 and flows through the heater 17. If the gas pressure output by the heater 17, that is, the gas pressure at point A, is consistent with the output gas pressure setting value of the gas transmission device, the gas replenishment valve 18 remains closed, and the gas directly passes through the analyzer 19. If the gas pressure output by the heater 17, that is, the gas pressure at point A, is less than the output gas pressure setting value of the gas transmission device, the gas replenishment valve 18 is opened, and part of the gas is replenished into the gas output by the heater 17 through the gas replenishment valve 18. The gas output by the gas replenishment valve 18 and the gas output by the heater 17 are mixed into one path and flow through the analyzer 19. Therefore, the difference between the gas pressure output by the heater 17, i.e., the gas pressure at point A, and the set value of the gas pressure output by the gas transmission device is balanced by the gas supply valve 18, so that the gas pressure on the side of the analyzer 19 close to the heater 17 and the gas supply valve 18, i.e., the gas pressure at point B, is always consistent with the set value to ensure stable transmission of the gas.

[0045] The gas from the heater 17 and the gas supply valve 18 flows through the analyzer 19, and the analyzer 19 analyzes the gas composition, and the analyzer 19 transmits the analysis result to the comparison unit 201. At the same time, the calculation unit 21 calculates the theoretical composition of the mixed gas after the gas transmitted by the first input pipe 13 and the second input pipe 14 is mixed uniformly through the data of the opening degree of the first regulating valve 131 and the second regulating valve 141, and transmits the calculation result to the comparison unit 201. The comparison unit 201 compares the analysis result of the analyzer 19 with the calculation result of the calculation unit 21 for the theoretical composition of the mixed uniform gas.

[0046] If the analysis result of the analyzer 19 is inconsistent with the calculation result of the calculation unit 21, that is, the composition of the mixed gas on the side of the switch valve 20 close to the analyzer 19 is not uniform, the switch valve 20 is closed, the switch valve 20 will not output gas, and the closing signal of the switch valve 20 is transmitted to the heater 17, the heater 17 is started, and the gas in the output pipe 16 is heated, the gas pressure in the output pipe 16 is increased, and returned to the mixer 15, the gas in the mixer 15 is heated, the motion state of the gas in the mixer 15 is intensified, the mixing effect of the gas in the mixer 15 is accelerated, and the gas is mixed uniformly. After the gas is mixed uniformly, the analysis result of the analyzer 19 is consistent with the calculation result of the calculation unit 21, the switch valve 20 is opened, the gas transmission device outputs gas with uniform composition, and the opening signal of the switch valve 20 is transmitted to the heater 17, and the heater 17 stops.

[0047] If the analysis result of the analyzer 19 is consistent with the calculation result of the calculation unit 21, the switch valve 20 is opened, and the gas transmission device outputs a gas with uniform composition. At the same time, the opening signal of the switch valve 20 is transmitted to the heater 17, and the heater 17 will not start and remain in a stopped state. At this time, the single mixer 15 can achieve a uniform mixing effect of the gas, and the heater 17 does not need to work.

[0048] In summary, the utility model proposes a gas transmission device, which can ensure the uniform composition of the gas output by the gas transmission device through a calculation unit, a heater, a comparison unit and a switch valve. When the calculation result of the calculation unit for the theoretical composition of the mixed gas is consistent with the analysis result of the analyzer, the switch valve is opened to output a mixed gas with uniform composition. When the calculation result of the calculation unit is inconsistent with the analysis result of the analyzer, the switch valve is closed and the heater is started to heat the gas to accelerate the mixing of the gas. In addition, the gas transmission device provided by the utility model can also maintain the pressure of the gas output by the gas transmission device at a set value through a gas replenishing valve, reduce the pressure fluctuations of the first input pipe, the second input pipe, the output pipe, the mixer and the heater, and ensure the stability of the output gas.

[0049] References throughout the specification to "one embodiment," "an embodiment," or "a specific embodiment" mean that the specific features, structures, or characteristics described in conjunction with the embodiment are included in at least one embodiment of the utility model, and not necessarily in all embodiments. Thus, the various appearances of the phrases "in one embodiment," "in an embodiment," or "in a specific embodiment" in different places throughout the specification do not necessarily refer to the same embodiment. In addition, the specific features, structures, or characteristics of any specific embodiment of the utility model may be combined with one or more other embodiments in any suitable manner. It should be understood that other variations and modifications of the utility model embodiments described and shown herein may be based on the teachings herein and will be considered part of the spirit and scope of the utility model.

[0050] The above description is only a preferred embodiment of the present application and an explanation of the technical principles used. Those skilled in the art should understand that the scope of the utility model involved in the present application is not limited to the technical solution formed by a specific combination of the above-mentioned technical features, but should also cover other technical solutions formed by any combination of the above-mentioned technical features or their equivalent features without departing from the concept of the utility model, such as the technical solution formed by replacing the above-mentioned features with the technical features with similar functions disclosed in this application (but not limited to). In addition to the technical features described in the specification, the remaining technical features are known technologies to those skilled in the art. In order to highlight the innovative features of the present utility model, the remaining technical features will not be repeated here.

Claims

1. A gas transmission device, characterized in that: At least: A first input pipe, connected to a first gas source; A second input pipe is connected to a second gas source; A mixer, comprising at least two inlets, wherein the inlets are respectively connected to the first input pipe and the second input pipe at a side away from the first gas source and the second gas source; an output pipe, connected to an outlet of the mixer; A heater, arranged on the output pipe; An air supply valve is arranged on the output pipe, and the air supply valve and the heater are connected in parallel; An analyzer is arranged on the output pipe at a side of the heater and the air supply valve away from the mixer; A switch valve is arranged on the output pipe at a side of the analyzer away from the heater and the gas supply valve; A calculation unit is connected to the first input pipe, the second input pipe and the switch valve.

2. The transmission device according to claim 1, characterized in that: At least one first regulating valve is arranged on the first input pipe, and the first regulating valve is arranged at any position of the first input pipe between the first gas source and the mixer.

3. The transmission device according to claim 2, characterized in that: At least one second regulating valve is arranged on the second input pipe, and the second regulating valve is arranged at any position of the second input pipe between the second gas source and the mixer.

4. The transmission device according to claim 1, characterized in that: A comparison unit is provided on the switch valve, and the comparison unit controls the switch of the switch valve.

5. The transmission device according to claim 3, characterized in that: The calculation unit includes two input terminals, and the input terminals are respectively connected to the first regulating valve and the second regulating valve.

6. The transmission device according to claim 4, characterized in that: The calculation unit further comprises an output terminal, and the output terminal is connected to the comparison unit.

7. The transmission device according to claim 1, characterized in that: The switch signal of the switch valve is fed back to the heater to control the start and stop of the heater.

8. The transmission device according to claim 1, characterized in that: The heater is a cartridge heater, a tubular heater, a belt heater, a film heater or a ceramic heater.

9. The transmission device according to claim 1, characterized in that: The switch valve is a gate valve, a stop valve, a ball valve or a butterfly valve.

10. The transmission device according to claim 1, characterized in that: The mixer is a static mixer or a dynamic mixer.

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