High-precision sample table device
By designing a high-precision sample table device, using a high-precision three-dimensional motion table and balanced design, the problems of insufficient stroke accuracy of the sample table and sample shaking are solved, and high-precision and high-stability sample position adjustment is achieved, which improves the experiment and detection accuracy.
Patent Information
- Application Number
- CN202420640713.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-30
- Publication Date
- 2025-02-25
- Estimated Expiration
- 2034-03-30
AI Technical Summary
In X-ray detection instruments, the stroke accuracy of the sample stage is insufficient, the sample shakes when moving or the three-dimensional axis jumps, which causes the sample to be unable to accurately be in the optimal position of the ray light path, affecting the imaging effect and experimental results.
A high-precision sample table device was designed, including sample table top, sample table bracket, counterweight table top, counterweight bracket, rib plate, adapter plate, high-precision three-dimensional sports table, sports table base plate and support plate, through high-precision three-dimensional The sports table and balanced design enable accurate position adjustment and stability of the sample.
It realizes high-precision stroke control and high stability, reduces shaking and position shift when samples move, and improves the accuracy of experiments and detection results.
Smart Images
Figure CN222529257U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of sample stages, in particular to a high-precision sample stage device. Background Art
[0002] X-ray detection instruments use the principle of diffraction to accurately measure the crystal structure, texture and stress of materials, and accurately perform phase analysis, qualitative analysis and quantitative analysis. As the main means of characterizing the crystal structure of materials, they are widely used in scientific research, inspection and testing, and enterprise quality control of products. X-ray detection instruments have been used more and more as an efficient and non-destructive detection method.
[0003] During the X-ray detection process, a sample stage is needed to support and fix the sample on the corresponding optical path. During the experiment and detection process, there is also a need to move the sample to a certain angle or a certain three-dimensional coordinate position. When moving the sample, the sample stage usually has insufficient stroke accuracy, the sample shakes during movement, or the error caused by the three-dimensional axis jump of the sample stage, which makes it impossible for the sample to be accurately placed in the best position of the ray optical path, and it is impossible to obtain better imaging effects and experimental and detection results. Therefore, a sample stage with high stability and precise and controllable stroke is particularly needed. Utility Model Content
[0004] In order to solve the above-mentioned problems, the utility model proposes a high-precision sample stage device to meet the high-precision stroke control and high stability required when the sample needs to be moved to align the light or move the position under the detection instrument. The technical solution of the utility model is as follows:
[0005] A high-precision sample stage comprises a sample table, a sample table bracket, a counterweight table, a counterweight bracket, a rib plate, an adapter plate, a high-precision three-dimensional motion stage, a motion stage bottom plate and a support plate. The adapter plate is mounted on the high-precision three-dimensional motion stage, the sample table, the sample table bracket, the counterweight table, and the counterweight bracket are respectively threadedly connected to the adapter plate, the sample table, the sample table bracket and the counterweight table, and the counterweight bracket are mutually balanced with the adapter plate as a fulcrum, the high-precision three-dimensional motion stage is mounted on the motion stage bottom plate, and the motion stage bottom plate is mounted on the support plate and is supported and stabilized by the rib plate.
[0006] The sample table, sample table bracket, counterweight table, counterweight bracket and adapter plate are a sample assembly. The sample table bracket and counterweight bracket can be installed with appropriate lengths according to actual needs. After the sample is installed on the sample table, the sample table and the counterweight table achieve a balanced condition with the adapter plate as the fulcrum.
[0007] In some preferred embodiments, the sample table is triangular in shape with a hole in the center for mounting the sample. The sample table is also provided with a hole for threaded connection with the sample table bracket. The counterweight table is of the same style as the sample table to ensure a better balance, but the weight of the counterweight table is different from that of the sample table.
[0008] In some preferred embodiments, the sample stage bracket and the counterweight bracket are the same parts, wherein the sample stage bracket is cylindrical, and a threaded hole is punched at the center of both end faces, and the length of the sample stage bracket can be customized according to actual needs, for example, 1 cm to 7 cm. The sample stage bracket can be connected to form a longer bracket through multiple sample stage bracket threaded screws.
[0009] In some preferred embodiments, there is a through hole at the center of the adapter plate, and the adapter plate is punched with holes for threaded connection with the high-precision three-dimensional motion stage, and holes for threaded connection with the sample stage bracket and the counterweight bracket. The adapter plate is symmetrical left to right and up to down with the center hole as the center point.
[0010] In some preferred embodiments, the ribs are provided with holes for threaded connection with the support plate and the bottom plate of the motion platform. The contact surfaces of the ribs, the support plate and the bottom plate of the motion platform are at a certain angle, which can be 45° to 90°.
[0011] In some preferred embodiments, the high-precision three-dimensional motion table is a three-dimensional translation table with micron-level, sub-nanometer-level or nanometer-level precision, which can move in three dimensions. There is a hole in the center of the high-precision three-dimensional motion table, and the size of the hole allows the counterweight table surface to pass through.
[0012] In some preferred embodiments, the bottom plate of the motion platform is provided with holes for threaded connection with the high-precision three-dimensional motion platform, holes for threaded connection with the rib plate, and holes for threaded connection with the support plate. The bottom end of the bottom plate of the motion platform has a rectangular protruding platform, which is convenient for positioning and installing the high-precision three-dimensional motion platform and reducing the vibration effect transmitted from the support plate. A rectangular notch is left at one corner of the bottom end of the bottom plate of the motion platform, corresponding to the rectangular protruding positioning strip on the support plate, so that the bottom plate of the motion platform can be positioned and installed more quickly and accurately.
[0013] In some preferred embodiments, the support plate is provided with holes for threaded connection with the bottom plate of the moving table, holes for connection with the rib plate, holes for threaded connection with the support platform or moving mechanism on the experimental instrument, and a rectangular protruding positioning strip is provided on the contact surface connected with the base of the moving table to facilitate the positioning and installation of the bottom plate of the moving table.
[0014] The benefits of the utility model are: the support plate in the utility model can be connected to other motion mechanisms to complete a larger adjustment range; the high-precision three-dimensional motion table has micron-level, sub-nanometer-level or nanometer-level accuracy, and can more accurately adjust the sample position; the sample table and the counterweight table are balanced with each other, reducing the impact on the high-precision three-dimensional motion table, and can effectively reduce shaking and position deviation during movement, achieving high precision and high stability, and effectively promoting the accuracy of the results of experiments, detection and other projects. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 This is an axonometric view of the sample stage device.
[0016] Figure 2 This is an axonometric view of the rear side of the sample stage device.
[0017] Figure 3 Axonometric drawing of a sample assembly.
[0018] In the figure: 1-sample table, 21-sample table bracket one, 22-sample table bracket two, 3-adapter plate, 4-support plate, 5-high-precision three-dimensional motion table, 6-motion table bottom plate, 7-rib plate, 8-counterweight table, 9-counterweight bracket. DETAILED DESCRIPTION
[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0020] In the description of the present invention, it should be noted that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "inside", "outside", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction and be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention.
[0021] like Figure 3The sample assembly in the sample stage device shown, in one embodiment, has a sample table 1 that is triangular in shape, with a hole in the middle for mounting the sample and for the experimental radiation source to pass through, and a sample stage bracket 22 is mounted on an adapter plate 3, wherein the number of sample stage brackets 22 is greater than three, forming a stable three-point support or multi-point support, and then multiple sample stage brackets 21 of the same or different sizes can be added and connected to the sample stage bracket 22 according to experimental requirements, and then the sample table 1 is mounted on the sample table bracket 1 21, that is, the sample table 1 is mounted on the last sample bracket, and at the same time, the counterweight bracket 9 is mounted on the adapter plate 3, and the installation length and number of the counterweight bracket 3 are obtained based on reasonable calculations, and then the counterweight table 8 is mounted on the counterweight bracket 9, and the counterweight table 8 is of the same style as the sample table 1, and can be heavier or lighter than the sample table 1 for balance considerations.
[0022] like Figure 1 , Figure 2 The sample stage device shown is to pass the counterweight table 8 and the counterweight bracket 9 in the assembled sample assembly through the central hole of the high-precision three-dimensional motion stage 5, and then install the adapter plate on the high-precision three-dimensional motion stage 5 through a threaded connection. The high-precision three-dimensional motion stage 5 can perform three-dimensional motion with an accuracy of micrometer or nanometer level. Then the high-precision three-dimensional motion stage 5 is threadedly connected to the motion stage bottom plate 6. The bottom of the motion stage bottom plate 6 has a hole for threading with the support plate 4. After the motion stage bottom plate 6 is threadedly connected to the support plate 4, the rib plate 7 is installed on the motion stage bottom plate 6 and the support plate 4, so that the motion stage bottom plate 6 and the support plate 4 are more stable to each other and form a fixed angle without shaking. The contact surface between the motion stage bottom plate 6 and the support plate 4 can also be cut into a certain angle, so that the high-precision three-dimensional motion stage 5 forms a certain angle to facilitate the completion of different experimental requirements.
[0023] In actual work, the support plate 4 can be installed on different experimental table surfaces or other motion mechanisms, such as a translation table, a lifting table, a rotating table, an angular table, etc. to perform coarse adjustments on the sample stage device. During work, coarse adjustments are performed first, and then fine adjustments are performed using the high-precision three-dimensional motion table 5. The sample components can be assembled according to different samples, and the table surface of the high-precision three-dimensional motion table 5 is not pulled in a balanced state, which causes changes in the motion accuracy of the high-precision three-dimensional motion table 5. When replacing samples, the adapter plate 3 installed on the high-precision three-dimensional motion table 5 can be directly removed, and other debugged sample components can be replaced to complete faster sample replacement.
[0024] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A high-precision sample stage device, characterized in that: The sample stage device includes a sample table, a sample stage bracket, a counterweight table, a counterweight bracket, a rib plate, an adapter plate, a high-precision three-dimensional motion table, a motion table bottom plate and a support plate; the adapter plate is installed on the high-precision three-dimensional motion table, the sample table, the sample stage bracket, the counterweight table, and the counterweight bracket are respectively threadedly connected to the adapter plate, the sample table, the sample stage bracket and the counterweight table, and the counterweight bracket are balanced with each other with the adapter plate as a fulcrum, the high-precision three-dimensional motion table is installed on the motion table bottom plate, the motion table bottom plate is installed on the support plate and is firmly supported by the rib plate.
2. A high-precision sample stage device according to claim 1, characterized in that: The sample table is triangular in shape, with a hole in the center for installing the sample. The sample table is also provided with a hole for threaded connection with the sample table bracket. The counterweight table has the same style as the sample table, but a different weight from the sample table.
3. A high-precision sample stage device according to claim 1, characterized in that: The sample stage bracket and the counterweight bracket are the same parts, wherein the sample stage bracket is cylindrical, and threaded holes are punched at the center of both end faces. The length of the sample stage bracket can be customized according to actual needs; the sample stage bracket can be connected to form a longer bracket through multiple sample stage bracket threaded screws.
4. The high-precision sample stage device according to claim 1, characterized in that: There is a through hole at the center of the adapter plate. The adapter plate is punched with holes for threaded connection with the high-precision three-dimensional motion stage, and holes for threaded connection with the sample stage bracket and the counterweight bracket. The adapter plate is symmetrical left and right and up and down with the center hole as the center point.
5. The high-precision sample stage device according to claim 1, characterized in that: The rib plate is provided with holes for threaded connection with the support plate and the bottom plate of the motion platform; the angle between the contact surfaces of the rib plate, the support plate and the bottom plate of the motion platform is 45° to 90°.
6. The high-precision sample stage device according to claim 1, characterized in that: The high-precision three-dimensional motion table is a three-dimensional translation table with micron-level, sub-nanometer-level or nanometer-level precision, which can move in three dimensions. There is a hole in the center of the high-precision three-dimensional motion table, and the size of the hole can allow the counterweight table surface to pass through.
7. The high-precision sample stage device according to claim 1, characterized in that: The bottom plate of the motion table is provided with holes for threaded connection with the high-precision three-dimensional motion table, holes for threaded connection with the rib plate, and holes for threaded connection with the support plate; a rectangular protruding platform is provided at the lower end of the bottom plate of the motion table; a rectangular notch is provided at one corner of the lower end of the bottom plate of the motion table, corresponding to the rectangular protruding positioning strip on the support plate.
8. The high-precision sample stage device according to claim 1, characterized in that: The support plate is provided with holes for threaded connection with the bottom plate of the moving table, holes for connection with the rib plate, holes for threaded connection with the supporting platform or the moving mechanism on the experimental instrument, and a rectangular protruding positioning strip is provided on the contact surface connected with the base of the moving table.