Novel overlay measuring device

Abstract

The utility model belongs to the technical field of semiconductor technology, and particularly relates to a novel overlay measuring device which comprises a first fixing plate. A plurality of supporting plates are fixedly connected to the top of the outer side wall of the first fixing plate. The top of the outer side wall of the supporting plate is fixedly connected with a pair of second fixing plates. The inner side wall of the second fixing plate is in threaded connection with a threaded rod. The outer side wall of the threaded rod is rotationally connected with a connecting plate. A plurality of first springs are fixedly connected to the outer side wall of the connecting plate; a plurality of dampers are fixedly connected to the outer side wall of the connecting plate; an extrusion plate is fixedly connected to the outer side wall of the first spring; the inner side wall of the second fixing plate is in sliding contact with a sliding block. The inner side wall of the second fixing plate is fixedly connected with a limiting column. And through arrangement of a second spring and a damper, when the equipment fixes materials with different sizes and shapes, fixed objects can be protected, the probability that the materials are damaged due to too large extrusion force is reduced, protection of the equipment to the materials is improved, and the probability that the materials are damaged is reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor process, in particular to a novel overlay measuring device. Background Art

[0002] With the continuous advancement of semiconductor manufacturing technology, overlay measurement devices are also constantly developing and improving. Overlay measurement devices play a vital role in the semiconductor manufacturing process. They ensure the alignment accuracy of patterns during the lithography process, thereby improving the quality and yield of chips.

[0003] An overlay measurement device (also called an overlay gauge or aligner) is a high-precision measuring device used to accurately measure and calibrate alignment marks in the photolithography process. It ensures the precise alignment of the photolithography pattern through technologies such as optical imaging, mark recognition, contrast enhancement, two-dimensional measurement, alignment calibration, and automated control.

[0004] Before the equipment starts working, the material needs to be fixed and then the equipment is started. During the fixing process, the size of the material is different. Excessive squeezing force on the material will damage the material. Therefore, a new overlay measuring device is proposed to address the above problem. Utility Model Content

[0005] In order to make up for the deficiencies of the prior art and solve at least one technical problem raised in the background technology, the utility model proposes a novel overlay measurement device.

[0006] The technical solution adopted by the utility model to solve its technical problems is: a new type of overlay measuring device described in the utility model comprises a first fixed plate; a plurality of support plates are fixedly connected to the top of the outer wall of the first fixed plate; a pair of second fixed plates are fixedly connected to the top of the outer wall of the support plate; a threaded rod is threadedly connected to the inner wall of the second fixed plate; a connecting plate is rotatably connected to the outer wall of the threaded rod; a plurality of first springs are fixedly connected to the outer wall of the connecting plate; a plurality of dampers are fixedly connected to the outer wall of the connecting plate; an extrusion plate is fixedly connected to the outer wall of the first spring; a slider is slidably contacted with the inner wall of the second fixed plate; a limiting column is fixedly connected to the inner wall of the second fixed plate; a second spring is fixedly connected to the inner wall of the second fixed plate; a slider is fixedly connected to the side wall of the second spring; and a handle is fixedly connected to the outer wall of the threaded rod.

[0007] Preferably, a servo motor is fixedly connected to the top of the outer side wall of the first fixed plate; a plurality of fixed blocks are fixedly connected to the top of the outer side wall of the first fixed plate; a screw rod is fixedly connected to the output end of the servo motor; a connecting block is threadedly connected to the outer side wall of the screw rod; the connecting blocks are provided in a pair; a support frame is fixedly connected to the outer side wall of the connecting block; a laser measuring component body is fixedly connected to the inner side wall of the support frame; a guide column is fixedly connected to the inner side wall of the fixed block; the guide column is in sliding contact with the connecting block.

[0008] Preferably, a sliding groove is provided at the top of the outer side wall of the sliding block; a fixing column is slidably contacted by the inner side wall of the sliding groove; a clamping ring is fixedly connected to the top of the outer side wall of the fixing column; and the fixing column can be detached from the sliding groove.

[0009] Preferably, a brush plate is fixedly connected to the outer wall of the connecting block; a plurality of bristles are fixedly connected to the inner wall of the brush plate; and the bristles are in contact with the screw rod.

[0010] Preferably, a plurality of limit strips are fixedly connected to the top of the outer side wall of the first fixing plate; the limit strips are in sliding contact with the support frame.

[0011] Preferably, a plurality of balls are provided on the inner side wall of the support frame; the balls rotate on the side wall of the support frame; the balls cannot be separated from the support frame; and the balls are in contact with the limit strips.

[0012] Preferably, a plurality of scrapers are fixedly connected to the outer wall of the turning handle; the scrapers are in contact with the palms of the staff; and the scrapers are made of hard plastic material.

[0013] Beneficial effects of the utility model:

[0014] 1. The utility model provides a novel overlay measuring device. By setting a second spring and a damper, the device can provide protection for the fixed objects when fixing materials of different sizes and shapes, reduce the probability of material damage due to excessive squeezing force, increase the protection of the equipment for the material, and reduce the probability of material damage.

[0015] 2. The utility model provides a novel overlay measuring device. The position of the laser measuring component body can be changed by setting a screw rod and a connecting block, so that the staff can measure other fixed materials in time, reduce the idle time of the laser measuring component body when the staff fixes the materials, facilitate the staff to use the equipment, reduce the time spent by the staff in measuring multiple materials, and increase the practicality of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present application. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0017] Figure 1 It is a three-dimensional diagram of the utility model;

[0018] Figure 2 It is a three-dimensional diagram of the threaded rod in the utility model;

[0019] Figure 3 It is a three-dimensional diagram of the slideway in the utility model;

[0020] Figure 4 It is a three-dimensional diagram of the bristles in the utility model;

[0021] Figure 5 It is a three-dimensional diagram of the ball in the utility model.

[0022] Legend:

[0023] 1. First fixed plate; 11. Support plate; 12. Second fixed plate; 13. Threaded rod; 14. Connecting plate; 15. First spring; 16. Damper; 17. Extrusion plate; 18. Sliding block; 19. Limiting column; 10. Second spring; 101. Turning handle; 2. Servo motor; 21. Fixed block; 22. Screw rod; 23. Connecting block; 24. Support frame; 25. Laser measuring component body; 26. Guide column; 3. Slide groove; 31. Fixed column; 32. Snap ring; 4. Brush plate; 41. Bristles; 5. Limiting strip; 6. Ball bearing; 7. Scraper. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] Specific examples are given below.

[0026] See also Figure 1 - Figure 5The utility model provides a new type of overlay measuring device, comprising a first fixed plate 1; a plurality of support plates 11 are fixedly connected to the top of the outer wall of the first fixed plate 1; a pair of second fixed plates 12 are fixedly connected to the top of the outer wall of the support plate 11; a threaded rod 13 is threadedly connected to the inner wall of the second fixed plate 12; a connecting plate 14 is rotatably connected to the outer wall of the threaded rod 13; a plurality of first springs 15 are fixedly connected to the outer wall of the connecting plate 14; a plurality of dampers 16 are fixedly connected to the outer wall of the connecting plate 14; an extrusion plate 17 is fixedly connected to the outer wall of the first spring 15; a slider 18 is slidably contacted with the inner wall of the second fixed plate 12; a limiting column 19 is fixedly connected to the inner wall of the second fixed plate 12; a second spring 10 is fixedly connected to the inner wall of the second fixed plate 12; a slider 18 is fixedly connected to the side wall of the second spring 10; a turning handle 101 is fixedly connected to the outer wall of the threaded rod 13. Before starting work, place the object to be measured on the support plate 11, turn the handle 101 to drive the threaded rod 13 to rotate, then the connecting plate 14 will move, and then the position of the damper 16 will move, when the extrusion plate 17 contacts the object, the damper 16 will be squeezed and contracted, when the extrusion force is too large, the damper 16 will push the connecting plate 14, the threaded rod 13, the second spring 10 and the slider 18 to move, the limit column 19 limits the distance that the slider 18 can move, when the object leaves the support plate 11, the second spring 10 resets the slider 18, by setting the second spring 10 and the damper 16, the equipment can provide protection for the fixed objects when fixing materials of different sizes and shapes, reduce the probability of damage to the materials due to excessive extrusion pressure, increase the protection of the equipment to the materials, and reduce the probability of damage to the materials.

[0027] Further, such as Figure 2 As shown, a servo motor 2 is fixedly connected to the top of the outer wall of the first fixing plate 1; a plurality of fixing blocks 21 are fixedly connected to the top of the outer wall of the first fixing plate 1; a screw rod 22 is fixedly connected to the output end of the servo motor 2; a connecting block 23 is threadedly connected to the outer wall of the screw rod 22; the connecting block 23 is provided in a pair; a support frame 24 is fixedly connected to the outer wall of the connecting block 23; a laser measuring component body 25 is fixedly connected to the inner wall of the support frame 24; a guide column 26 is fixedly connected to the inner wall of the fixing block 21; the guide column 26 is in sliding contact with the connecting block 23. When the servo motor 2 is started to rotate the screw rod 22, the connecting block 23 will move, thereby changing the positions of the support frame 24 and the laser measuring component body 25. The screw rod 22 and the connecting block 23 can change the position of the laser measuring component body 25, so that the staff can measure other fixed materials in time, reduce the idle time of the laser measuring component body 25 when the staff fix the materials, facilitate the staff to use the equipment, reduce the time spent by the staff between measuring multiple materials, and increase the practicality of the equipment.

[0028] Further, such as Figure 3 As shown, a slide groove 3 is provided on the top of the outer wall of the slider 18; a fixed column 31 is in sliding contact with the inner wall of the slide groove 3; a clamping ring 32 is fixedly connected to the top of the outer wall of the fixed column 31; and the fixed column 31 can be separated from the slide groove 3. When the equipment is working, the slider 18 will slide. When the fixed column 31 is inserted into the slide groove 3, the fixed column 31 fixes the slider 18. At this time, the slider 18 cannot slide further, thereby fixing the position of the connecting plate 14. Pulling the clamping ring 32 can make the fixed column 31 separate from the slide groove 3, thereby allowing the slider 18 to slide normally. By setting the fixed column 31, the staff can adjust the equipment according to the actual situation. When the equipment encounters different situations, the extrusion force of the extrusion plate 17 on the material can be increased or reduced, which is convenient for the staff to use the equipment.

[0029] Further, such as Figure 4 As shown, the outer wall of the connecting block 23 is fixedly connected with a brush plate 4; the inner wall of the brush plate 4 is fixedly connected with a plurality of bristles 41; the bristles 41 are in contact with the screw rod 22. When the device is working, the connecting block 23 will move, and the bristles 41 will contact different positions of the screw rod 22, thereby cleaning the outer wall of the screw rod 22. The bristles 41 can reduce the amount of dust and impurities attached to the side wall of the screw rod 22, thereby reducing the impact of dust and impurities on the operation of the device, reducing the probability of jamming or failure of the connecting block 23 and the screw rod 22 during operation, and increasing the stability of the device.

[0030] Further, such as Figure 1 and Figure 5 As shown, a plurality of limit bars 5 are fixedly connected to the top of the outer wall of the first fixing plate 1; the limit bars 5 are in sliding contact with the support frame 24. When the device is working, the support frame 24 will slide, and the limit bars 5 can limit the direction of movement of the support frame 24. By setting the limit bars 5, the stability of the device during operation can be increased, and the probability of deviation in the direction of movement of the support frame 24 and subsequent failure can be reduced during long-term use.

[0031] Further, such as Figure 5 As shown, a plurality of balls 6 are provided on the inner side wall of the support frame 24; the balls 6 rotate on the side wall of the support frame 24; the balls 6 cannot be separated from the support frame 24; the balls 6 are in contact with the limit strip 5. When the device is working, the limit strip 5 will make sliding contact with the support frame 24, and the balls 6 will make contact with the limit strip 5 before the support frame 24, turning the sliding friction between the support frame 24 and the limit strip 5 into rolling friction. The balls 6 can reduce the friction between the support frame 24 and the limit strip 5, thereby increasing the smoothness of the device during operation and reducing the wear between the support frame 24 and the limit strip 5 caused by long-term operation.

[0032] Further, such as Figure 2 As shown, the outer wall of the turning handle 101 is fixedly connected with a plurality of scrapers 7; the scrapers 7 are in contact with the palms of the staff; the scrapers 7 are made of hard plastic. When the equipment is working, the staff will turn the turning handle 101, and the scrapers 7 can scrape the sweat or other liquids on the palms of the staff. The scrapers 7 can reduce the friction between the turning handle 101 and the palms of the staff due to the liquid, thereby reducing the probability of slipping.

[0033] Working principle: before starting work, place the object to be measured on the support plate 11, turn the handle 101 to drive the threaded rod 13 to rotate, and then the connecting plate 14 will move, thereby moving the position of the damper 16. When the extrusion plate 17 contacts the object, the damper 16 will be squeezed and contracted. When the extrusion force is too large, the damper 16 will push the connecting plate 14, the threaded rod 13, the second spring 10 and the slider 18 to move, and the limit column 19 will limit the distance that the slider 18 can move. When the object leaves the support plate 11, the second spring 10 will reset the slider 18. By setting the second spring 10 and the damper 16, the equipment can provide protection for the fixed objects when fixing materials of different sizes and shapes, and reduce The probability of material damage due to excessive extrusion pressure is increased, and the protection of the equipment to the material is increased to reduce the probability of material damage. The servo motor 2 is started to rotate the screw rod 22. At this time, the connecting block 23 will move, thereby changing the position of the support frame 24 and the laser measurement component body 25. The position of the laser measurement component body 25 can be changed by setting the screw rod 22 and the connecting block 23, so that the staff can measure other fixed materials in time, reduce the idle time of the laser measurement component body 25 when the staff fixes the materials, facilitate the staff to use the equipment, reduce the time spent by the staff between measuring multiple materials, and increase the practicality of the equipment. When the equipment is working, the slider 18 will slide to fix the column 31 When the slide groove 3 is inserted, the fixed column 31 fixes the slider 18. At this time, the slider 18 cannot continue to slide, thereby fixing the position of the connecting plate 14. Pulling the snap ring 32 can make the fixed column 31 disengage from the slide groove 3, thereby allowing the slider 18 to slide normally. Through the set fixed column 31, the staff can adjust the equipment according to the actual situation. When the equipment encounters different situations, the extrusion force of the extrusion plate 17 on the material can be increased or reduced, which is convenient for the staff to use the equipment. When the equipment is working, the connecting block 23 will move. At this time, the bristles 41 will contact different positions of the screw rod 22, thereby cleaning the outer wall of the screw rod 22. Through the set bristles 41, the amount of dust and impurities attached to the side wall of the screw rod 22 can be reduced, thereby cleaning the outer wall of the screw rod 22. The influence of dust and impurities on the operation of the equipment is reduced, the probability of jamming or failure of the connecting block 23 and the screw rod 22 during operation is reduced, and the stability of the equipment is increased. When the equipment is working, the support frame 24 will slide, and the limit bar 5 can limit the direction of movement of the support frame 24. The limit bar 5 is set to increase the stability of the equipment during operation, and the probability of deviation in the direction of movement of the support frame 24 and then failure during long-term use is reduced. When the equipment is working, the limit bar 5 will slide in contact with the support frame 24, and the ball 6 will contact the limit bar 5 before the support frame 24, and the sliding friction between the support frame 24 and the limit bar 5 will be converted into rolling friction. The friction between the support frame 24 and the limit bar 5 can be reduced by setting the ball 6.This increases the smoothness of the equipment during operation and reduces the wear between the support frame 24 and the limit strip 5 caused by long-term operation. When the equipment is working, the staff will turn the handle 101, and the scraper 7 can scrape the sweat or other liquids on the palms of the staff. The scraper 7 can reduce the friction between the handle 101 and the palms of the staff due to the liquid, thereby reducing the probability of slipping.

[0034] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, and these changes and improvements fall within the scope of the utility model to be protected.

Claims

1. A novel overlay measuring device, comprising a first fixing plate (1); characterized in that: A plurality of support plates (11) are fixedly connected to the top of the outer wall of the first fixing plate (1); a pair of second fixing plates (12) are fixedly connected to the top of the outer wall of the supporting plate (11); a threaded rod (13) is threadedly connected to the inner wall of the second fixing plate (12); a connecting plate (14) is rotatably connected to the outer wall of the threaded rod (13); a plurality of first springs (15) are fixedly connected to the outer wall of the connecting plate (14); a plurality of dampers (16) are fixedly connected to the outer wall of the connecting plate (14); an extrusion plate (17) is fixedly connected to the outer wall of the first spring (15); a slider (18) is slidably contacted to the inner wall of the second fixing plate (12); a limiting column (19) is fixedly connected to the inner wall of the second fixing plate (12); a second spring (10) is fixedly connected to the inner wall of the second fixing plate (12); a slider (18) is fixedly connected to the side wall of the second spring (10); and a turning handle (101) is fixedly connected to the outer wall of the threaded rod (13).

2. A novel overlay measurement device according to claim 1, characterized in that: A servo motor (2) is fixedly connected to the top of the outer wall of the first fixing plate (1); a plurality of fixing blocks (21) are fixedly connected to the top of the outer wall of the first fixing plate (1); a screw rod (22) is fixedly connected to the output end of the servo motor (2); a connecting block (23) is threadedly connected to the outer wall of the screw rod (22); the connecting blocks (23) are arranged in a pair; a support frame (24) is fixedly connected to the outer wall of the connecting block (23); a laser measuring component body (25) is fixedly connected to the inner wall of the support frame (24); a guide column (26) is fixedly connected to the inner wall of the fixing block (21); the guide column (26) is in sliding contact with the connecting block (23).

3. A novel overlay measurement device according to claim 1, characterized in that: A sliding groove (3) is provided at the top of the outer wall of the sliding block (18); a fixing column (31) is in sliding contact with the inner wall of the sliding groove (3); a clamping ring (32) is fixedly connected to the top of the outer wall of the fixing column (31); and the fixing column (31) can be detached from the sliding groove (3).

4. A novel overlay measurement device according to claim 2, characterized in that: A brush plate (4) is fixedly connected to the outer wall of the connection block (23); a plurality of bristles (41) are fixedly connected to the inner wall of the brush plate (4); and the bristles (41) are in contact with the screw rod (22).

5. A novel overlay measurement device according to claim 2, characterized in that: A plurality of limit strips (5) are fixedly connected to the top of the outer side wall of the first fixed plate (1); the limit strips (5) are in sliding contact with the support frame (24).

6. A novel overlay measurement device according to claim 5, characterized in that: A plurality of balls (6) are provided on the inner side wall of the support frame (24); the balls (6) rotate on the side wall of the support frame (24); the balls (6) cannot be separated from the support frame (24); and the balls (6) are in contact with the limiting strip (5).

7. A novel overlay measurement device according to claim 1, characterized in that: A plurality of scrapers (7) are fixedly connected to the outer wall of the turning handle (101); the scrapers (7) are in contact with the palms of the staff; and the scrapers (7) are made of hard plastic material.

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