Magnetic levitation gravity compensation device

Abstract

The utility model relates to the field of magnetic attraction equipment, in particular to a magnetic levitation gravity compensation device which comprises a fixed magnetic steel assembly and a movable magnetic steel assembly, the fixed magnetic steel assembly comprises a base and fixed magnetic steel, and the movable magnetic steel assembly comprises a carrying table and movable magnetic steel. The movable magnetic steel and the fixed magnetic steel are stacked at intervals along the Z axis, and the fixed magnetic steel generates upward driving force to the movable magnetic steel; a plurality of first through holes are formed in the adjusting end, first threaded holes communicated with the first through holes are formed in the fixed end, and adjusting bolts penetrate through the first through holes to be connected with the first threaded holes; the distance between the fixed end and the adjusting end can be adjusted by rotating the adjusting bolt. According to the utility model, two or two groups of mutually repulsive fixed magnetic steels are arranged and are respectively connected to the fixed end and the adjusting end, so that the fixed end and the adjusting end have driving forces which are far away from each other, the adjustment of tightening or loosening the adjusting bolt is facilitated, and the convenient active adjustment of the magnetic levitation gravity is realized.

Description

Technical Field

[0001] The utility model relates to the technical field of magnetic attraction equipment, in particular to a magnetic levitation gravity compensation device. Background Art

[0002] In industrial production, many industrial producers with high motion precision, such as photolithography machines, high-precision machine tools, and robotic arms, especially in vacuum environments, have a high demand for equipment to be isolated from external vibrations and disturbances. Therefore, magnetic levitation gravity compensation devices are needed for active vibration isolation. Magnetic levitation gravity compensators with adjustable output, compact structure, and fixed output pins are particularly needed in the industry.

[0003] The commonly used vibration isolation equipment at present mainly adjusts the gas flow through air pumps and air valves to provide spring stiffness and gravity compensation. This type of equipment has problems such as high noise, limited vibration isolation frequency and cannot be used in a vacuum environment. In addition, there are also magnetic levitation gravity compensators on the market, which are clean, noiseless, frictionless, wear-free, suitable for vacuum environments, and have small output fluctuations. They have broad application prospects. However, the magnetic gravity compensator in the prior art is difficult to adjust the size of the magnetic levitation force because the mover and stator always have a driving tendency to move away from or close to each other. It also requires the use of additional auxiliary fixtures, which also increases the cost of the equipment. Therefore, how to achieve convenient adjustment of the magnetic levitation force through the structural design of the magnetic levitation gravity compensator is a problem that technicians in this field need to consider. Utility Model Content

[0004] The utility model aims to provide a magnetic buoyancy gravity compensation device to solve the problems of low magnetic buoyancy force adjustment efficiency of the magnetic buoyancy gravity compensation device in the prior art.

[0005] The technical solution of the utility model is: a magnetic levitation gravity compensation device, comprising a fixed magnetic steel assembly and a dynamic magnetic steel assembly, wherein the fixed magnetic steel assembly comprises a base and a fixed magnetic steel, and the dynamic magnetic steel assembly comprises a carrier and a dynamic magnetic steel; the dynamic magnetic steel and the fixed magnetic steel are stacked and arranged at intervals along the Z axis, and the fixed magnetic steel generates an upward driving force on the dynamic magnetic steel;

[0006] The base includes a fixed end and an adjusting end arranged at the upper end thereof, the fixed magnetic steel is provided with at least two groups and is respectively fixedly installed on the fixed end and the adjusting end, and the dynamic magnetic steel is arranged between the two groups of the fixed magnetic steel;

[0007] The adjusting end is provided with a plurality of first through holes, the fixed end is provided with a first threaded hole communicating with the first through holes, and is connected with the first threaded hole through an adjusting bolt passing through the first through hole; the distance between the fixed end and the adjusting end can be adjusted by rotating the adjusting bolt.

[0008] Preferably, the carrier includes a load end and a mounting end, the dynamic magnetic steel is fixedly mounted at the mounting end, and the mounting end is arranged between the two fixed magnetic steels.

[0009] Preferably, the fixed magnetic steel and the moving magnetic steel on the fixed end repel each other, and the fixed magnetic steel and the moving magnetic steel at the adjusting end attract each other.

[0010] Preferably, the fixed end and the adjustable end are connected via a connecting plate;

[0011] The connecting plate is provided with two groups of connecting holes, which are respectively connected to the fixed end and the adjusting end through bolts; at least one of the two groups of connecting holes is a waist-shaped hole.

[0012] Preferably, the cross-sections of the base and the carrier are both in a square shape, and the base and the carrier are connected in a chain shape.

[0013] Preferably, a limiting block is fixedly connected to the adjusting end, and the limiting block is connected to the mounting end.

[0014] Preferably, the dynamic magnetic steel is embedded in or installed through the bottom of the installation end.

[0015] Compared with the prior art, the advantages of the utility model are:

[0016] (1) In the utility model, two pieces or two groups of mutually repelling fixed magnetic steel are provided and are respectively connected to the fixed end and the adjusting end, so that the fixed end and the adjusting end have a driving force to move away from each other, thereby facilitating the tightening or loosening of the adjusting bolt, thereby realizing convenient active adjustment of magnetic levitation gravity. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The utility model is further described below in conjunction with the accompanying drawings and embodiments:

[0018] Figure 1 It is a structural schematic diagram of the magnetic levitation gravity compensation device of the utility model;

[0019] Figure 2 It is a schematic diagram of the top view of the structure of the magnetic levitation gravity compensation device of the utility model;

[0020] Figure 3 for Figure 2 Schematic diagram of the cross-sectional structure at AA in the middle;

[0021] Figure 4 It is a structural schematic diagram of the fixed end of the utility model.

[0022] Among them: fixed magnetic steel assembly 1, base 11, fixed end 111, first threaded hole 1111, side plate 1112, adjustment end 112, first through hole 1121, connecting plate 113, connecting hole 1131, limit block 114, fixed magnetic steel 12, moving magnetic steel assembly 2, carrier 21, load end 211, mounting end 212, moving magnetic steel 22. DETAILED DESCRIPTION

[0023] The following is a further detailed description of the present invention in conjunction with specific embodiments:

[0024] like Figure 1-4 As shown, a magnetic levitation gravity compensation device includes a fixed magnetic steel component 1 and a dynamic magnetic steel component 2, the fixed magnetic steel component 1 includes a base 11 and a fixed magnetic steel 12, and the dynamic magnetic steel component 2 includes a carrier 21 and a dynamic magnetic steel 22; the dynamic magnetic steel 22 and the fixed magnetic steel 12 are stacked and arranged at intervals along the Z axis, and the fixed magnetic steel 12 generates an upward driving force on the dynamic magnetic steel 22.

[0025] The base 11 includes a fixed end 111 and an adjustment end 112 disposed at the upper end thereof, and at least two groups of fixed magnetic steels 12 are disposed and fixedly mounted on the fixed end 111 and the adjustment end 112, respectively. The carrier 21 includes a load end 211 and a mounting end 212, and the moving magnetic steel 22 is fixedly mounted at the mounting end 212, and the mounting end 212 and the moving magnetic steel 22 are both disposed between two fixed magnetic steels 12. The moving magnetic steel 22 is embedded or installed through the bottom of the mounting end 212. In this embodiment, the fixed magnetic steel 12 installed on the fixed end 111, the dynamic magnetic steel 22 and the fixed magnetic steel 12 installed on the adjustment end 112 are arranged from bottom to top in sequence; the fixed magnetic steel 12 at the fixed end 111 repels the dynamic magnetic steel 22, and the fixed magnetic steel 12 at the adjustment end 112 attracts the dynamic magnetic steel 22, so that the two fixed magnetic steels 12 both generate driving forces in the same direction on the dynamic magnetic steel 22, that is, the vertical upward driving force in this embodiment; at this time, the two fixed magnetic steels 12 repel each other. When the magnetic levitation gravity compensation device is in use, the base 11 is fixedly mounted on the equipment, the carrier 21 is connected to the load, and the driving force generated by the magnetic force of the fixed magnetic steel 12 and the dynamic magnetic steel 22 is used to compensate for the force of the load. For example, the driving force between the fixed magnetic steel 12 and the dynamic magnetic steel 22 can be adjusted to be equal to the gravity of the load. When the driving device in the equipment drives the load to move, due to the compensation of the magnetic buoyancy force, it is equivalent to zero-load driving of the driving device, which can greatly increase the driving stability and driving accuracy of the driving device.

[0026] The adjusting end 112 is provided with a plurality of first through holes 1121, and the fixed end 111 is provided with a first threaded hole 1111 communicating with the first through hole 1121, and is connected to the first threaded hole 1111 by an adjusting bolt penetrating the first through hole 1121; the spacing between the fixed end 111 and the adjusting end 112 can be adjusted by rotating the adjusting bolt. The fixed end 111 and the adjusting end 112 are connected by a connecting plate 113; two groups of connecting holes 1131 are provided on the connecting plate 113, and are respectively connected to the fixed end 111 and the adjusting end 112 by bolts; at least one of the two groups of connecting holes 1131 is a waist-shaped hole. In this embodiment, the cross-sections of the base 11 and the carrier 21 are both in the shape of a U, and the base 11 and the carrier 21 are connected in a chain shape, that is, the fixed end 111 in the base 11 is in the shape of a U, which includes a bottom plate and two side plates 1112. There are two groups of first through holes 1121, and two groups of corresponding first threaded holes 1111 are respectively arranged at the ends of each side plate 1112 of the chain. There are multiple first through holes 1121 and first threaded holes 1111 in each group. When it is necessary to adjust the magnetic levitation gravity, the adjusting bolt (not shown in the figure) can be rotated. When the adjusting bolt is tightened, the fixed end 111 and the adjusting end 112 can be brought close to each other, and then the moving magnetic steel 22 and the fixed magnetic steel 12 can be brought close to each other, so as to increase the magnetic levitation force; when the adjusting bolt is loosened, the fixed magnetic steel 12 and the moving magnetic steel 22 are moved away from each other, so as to reduce the magnetic levitation force. It should be noted that during adjustment, multiple adjusting bolts need to be adjusted sequentially and repeatedly to maintain the stability of the adjustment. In addition, a limit block 114 is fixedly connected to the adjustment end 112, and the limit block 114 is connected to the mounting end 212. That is, before the load is connected to the carrier 21, the limit block 114 is required to fix the relative position of the moving magnetic steel 22 and the fixed magnetic steel 12. After the carrier 21 is connected to the load, the limit block 114 can be removed.

[0027] The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with this technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments, and the utility model can be implemented in other specific forms without departing from the spirit or basic features of the utility model. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is limited by the attached claims rather than the above description, so it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the utility model.

Claims

1. A magnetic levitation gravity compensation device, characterized in that: It comprises a fixed magnetic steel assembly and a dynamic magnetic steel assembly, wherein the fixed magnetic steel assembly comprises a base and a fixed magnetic steel, and the dynamic magnetic steel assembly comprises a carrier and a dynamic magnetic steel; the dynamic magnetic steel and the fixed magnetic steel are stacked and arranged at intervals along the Z axis, and the fixed magnetic steel generates an upward driving force on the dynamic magnetic steel; The base includes a fixed end and an adjusting end arranged at the upper end thereof, the fixed magnetic steel is provided with at least two groups and is respectively fixedly installed on the fixed end and the adjusting end, and the dynamic magnetic steel is arranged between the two groups of the fixed magnetic steel; The adjusting end is provided with a plurality of first through holes, the fixed end is provided with a first threaded hole communicating with the first through holes, and is connected with the first threaded hole through an adjusting bolt passing through the first through hole; the distance between the fixed end and the adjusting end can be adjusted by rotating the adjusting bolt.

2. A magnetic levitation gravity compensation device according to claim 1, characterized in that: The carrier comprises a load end and a mounting end, the moving magnetic steel is fixedly mounted at the mounting end, and the mounting end is arranged between the two fixed magnetic steels.

3. A magnetic levitation gravity compensation device according to claim 2, characterized in that: The fixed magnetic steel and the moving magnetic steel on the fixed end repel each other, and the fixed magnetic steel and the moving magnetic steel at the adjusting end attract each other.

4. The magnetic levitation gravity compensation device according to claim 1, characterized in that: The fixed end and the adjustable end are connected via a connecting plate; The connecting plate is provided with two groups of connecting holes, which are respectively connected to the fixed end and the adjusting end through bolts; at least one of the two groups of connecting holes is a waist-shaped hole.

5. The magnetic levitation gravity compensation device according to claim 1, characterized in that: The cross sections of the base and the carrier are both in a square shape, and the base and the carrier are connected in a chain shape.

6. The magnetic levitation gravity compensation device according to claim 1, characterized in that: A limiting block is fixedly connected to the adjusting end, and the limiting block is connected to the mounting end.

7. The magnetic levitation gravity compensation device according to claim 1, characterized in that: The dynamic magnetic steel is embedded or installed through the bottom of the installation end.

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