Paddle assembly and bearing device

Abstract

The utility model provides a paddle assembly and a bearing device, relates to the field of semiconductor and photovoltaic material processing, and solves the technical problem that a paddle or a boat support occupies a large space in a reaction furnace. The paddle assembly includes: a single paddle; the base plate assembly is located on the upper surface of the single paddle and is configured to bear at least one boat structure, the size of the base plate assembly in the first direction is smaller than or equal to the size of the boat structure in the first direction, the first direction is the horizontal direction perpendicular to the extending direction of the single paddle, and the base plate assembly is provided with a limiting structure; the limiting structure is configured to make contact with the bottom of the at least one boat structure and limit the at least one boat structure to move in the horizontal direction. Compared with double propellers, the space occupied by the single propeller is reduced, and the space for placing the boat structure is increased; and compared with a boat support in the prior art, the base plate assembly occupies a smaller space, so that a boat structure with a larger size can be accommodated in the reaction furnace, the boat structure can bear more sheet materials, and the productivity is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor or photovoltaic material processing, and in particular to a paddle assembly and a supporting device. Background Art

[0002] At present, when using a reactor to process semiconductor or photovoltaic materials, the materials to be processed are usually transported by a paddle assembly. Specifically, the materials to be processed are usually placed in a small boat, and the boat is supported by a boat support, and then the two side plates of the boat support are supported by two paddles respectively, or the bottom of the boat support is supported by a single paddle, and the paddle is driven by a boat pusher to move, so as to send the materials to be processed into and out of the reactor.

[0003] However, if two propellers are used, the propellers are large in size and occupy a larger space in the reactor, thereby reducing the space for placing the small boats. Only smaller or fewer small boats can be used, so that the reactor can only process fewer materials to be processed at the same time, reducing production capacity; if a single propeller is used, in order for the boat support to carry both sides of the small boat, the width of the boat support (that is, the dimension of the boat support in the horizontal direction perpendicular to the extension direction of the propeller) is often larger than the width of the small boat. Therefore, the boat support occupies a larger space in the reactor, which also reduces the space for placing the small boats. So that the reactor can only process fewer materials to be processed at the same time, reducing production capacity. Utility Model Content

[0004] In order to solve the above technical problems, the present application is proposed. The embodiment of the present application provides a paddle assembly and a bearing device.

[0005] In a first aspect, an embodiment of the present application provides a paddle assembly, comprising: a single paddle; a pad assembly, located on the upper surface of the single paddle, configured to support at least one boat structure, wherein a dimension of the pad assembly in a first direction is less than or equal to a dimension of the boat structure in the first direction, the first direction is a horizontal direction perpendicular to an extension direction of the single paddle, the pad assembly has a limiting structure, the limiting structure is configured to contact the bottom of the at least one boat structure and limit the movement of the at least one boat structure in a horizontal direction.

[0006] In some embodiments, the pad assembly includes: a first support member, the extension direction of the first support member is the same as the extension direction of the single paddle; a second support member, arranged opposite to the first support member, the extension direction of the second support member is the same as the extension direction of the single paddle, wherein the first support member and the second support member are jointly configured to support at least one boat structure; at least one third support member, connecting the first support member and the second support member.

[0007] In some embodiments, a vertical distance between a side of the first support member away from the second support member and a side of the second support member away from the first support member is less than or equal to a dimension of the boat structure in the first direction.

[0008] In some embodiments, the boat structure includes: a top plate; a bottom plate, arranged opposite to the top plate; at least one connecting rod, connecting the top plate and the bottom plate, and configured to carry a vertically arranged sheet material; wherein the first support member and the second support member form a limiting structure, and the upper surfaces of the first support member and the second support member each have at least one first groove, wherein, in the case where the pad assembly carries the boat structure, at least part of the connecting rod is located in the first groove, and the first groove is configured to limit the movement of the boat structure along the extension direction of the single paddle, the top plate is located on the side of the first support member away from the second support member, and the bottom plate is located on the side of the second support member away from the first support member, and the first support member and the second support member are configured to limit the movement of the boat structure along the first direction.

[0009] In some embodiments, the pad assembly further includes: at least one reinforcement rib; wherein the reinforcement rib connects the first support member and the second support member; or, when the number of third support members is multiple, connects multiple third support members; or, when the number of reinforcement ribs is multiple, one reinforcement rib connects the first support member and another reinforcement rib, or one reinforcement rib connects the second support member and another reinforcement rib.

[0010] In some embodiments, the number of third support members is multiple, at least one third support member connects the first end of the first support member and the first end of the second support member, and at least one third support member connects the second end of the first support member and the second end of the second support member; wherein the pad assembly also includes: at least two handle assemblies, one handle assembly is connected to the third support member arranged at the first end of the first support member, and the other handle assembly is connected to the third support member arranged at the second end of the first support member, and the handle assembly is configured to be clamped by a transportation device when transporting the pad assembly and the boat structure.

[0011] In some embodiments, the upper surface of the single paddle has a second groove, and the lower surface of the pad assembly has a first boss; wherein the first boss is connected to the second groove in a concave-convex matching manner.

[0012] In some embodiments, the material of the backing plate assembly includes silicon carbide, quartz, or ceramic.

[0013] In some embodiments, the single propeller has an air vent that runs through the single propeller in a vertical direction; wherein, when the propeller assembly is located in the reaction chamber, the process gas in the reaction chamber flows through the air vent, the gap between the first support member and the second support member, and the boat structure.

[0014] In a second aspect, an embodiment of the present application provides a carrying device, comprising: at least one boat structure; and any one of the paddle assemblies in the above-mentioned first aspect, configured to carry at least one boat structure.

[0015] The paddle assembly and the bearing device proposed in the embodiment of the present application, firstly, support the boat structure with a single paddle, and compared with the double paddles, the single paddle is smaller in size, thereby reducing the space occupied by the paddle and increasing the space for placing the boat structure. Secondly, since the pad assembly is used to support the bottom of the boat structure, even if the size of the pad assembly in the first direction is less than or equal to the size of the boat structure in the first direction, it can stably support the boat structure. Therefore, this pad assembly occupies less space than the boat support in the traditional technology. In this way, when the size of the reactor remains unchanged, since the pad assembly occupies less space and the size of the boat structure in the first direction can be greater than or equal to the size of the pad assembly in the first direction, a larger boat structure can be accommodated in the reactor, so that the boat structure can carry more sheet materials, thereby improving production capacity. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 Shown is a schematic structural diagram of a carrying device provided by an exemplary embodiment of the present application.

[0018] Figure 2 Shown is an exploded view of a carrying device provided by an exemplary embodiment of the present application.

[0019] Figure 3 Shown is a schematic structural diagram of a pad assembly provided by an exemplary embodiment of the present application.

[0020] Figure 4 An exemplary embodiment of the present application is shown. Figure 3 A partial enlarged view of area B in the middle.

[0021] Figure 5 An exemplary embodiment of the present application is shown. Figure 1 A partial enlarged view of area C in the middle.

[0022] Reference numerals:

[0023] 100, paddle assembly; 110, single paddle; 111, second groove; 112, vent; 120, pad assembly; 121, first support member; 1211, first groove; 122, second support member; 123, third support member; 124, reinforcing rib; 125, handle assembly; 126, first boss; 200, boat structure; 210, top plate; 220, bottom plate; 230, connecting rod; 300, carrying device. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0025] Application Overview

[0026] When processing semiconductor or photovoltaic materials, a high-temperature reactor (such as chemical vapor deposition equipment) is usually used to process the materials to be processed. When transporting the materials to be processed to the reactor, the materials to be processed (such as silicon wafers) are usually placed in a small boat, and then the boat is carried by the paddle, and the boat is carried by the boat. The boat is transported in the way that the materials to be processed are carried by the boat. Specifically, when the paddle carries the boat, the boat is often carried by two paddles supporting the two side plates of the boat respectively, or by a single paddle supporting the bottom of the boat.

[0027] However, if two propellers are used, the propellers are large in size and occupy a larger space in the reactor, thereby reducing the space for placing the small boats. Only smaller or fewer small boats can be used, so that the reactor can only process fewer materials to be processed at the same time, reducing production capacity; if a single propeller is used, in order for the boat support to carry both sides of the small boat, the width of the boat support (that is, the horizontal dimension of the boat support perpendicular to the extension direction of the propeller) is often larger than the width of the small boat. Therefore, the boat support occupies a larger space in the reactor, thereby reducing the space for placing the small boats. Similarly, the reactor can only process fewer materials to be processed at the same time, reducing production capacity.

[0028] In view of this, the present application proposes a paddle assembly and a carrying device, wherein the paddle assembly includes: a single paddle; a pad assembly, located on the upper surface of the single paddle, configured to carry at least one boat structure, wherein a size of the pad assembly in a first direction is less than or equal to a size of the boat structure in the first direction, the first direction is a horizontal direction perpendicular to the extension direction of the single paddle, and the pad assembly has a limiting structure, which is configured to contact the bottom of the at least one boat structure and limit the movement of the at least one boat structure in the horizontal direction.

[0029] First, the boat structure is supported by a single propeller, which is smaller than a double propeller, thereby reducing the space occupied by the propeller and increasing the space for placing the boat structure. Secondly, since the pad assembly is used to support the bottom of the boat structure, even if the size of the pad assembly in the first direction is less than or equal to the size of the boat structure in the first direction, it can stably support the boat structure. Therefore, this pad assembly occupies less space than the boat support in the traditional technology. In this way, when the size of the reactor remains unchanged, since the pad assembly occupies less space and the size of the boat structure in the first direction can be greater than or equal to the size of the pad assembly in the first direction, a larger boat structure can be accommodated in the reactor, so that the boat structure can carry more sheet materials, thereby increasing production capacity.

[0030] Exemplary Devices

[0031] Figure 1 FIG. 1 is a schematic diagram of the structure of a carrying device provided by an exemplary embodiment of the present application. Figure 2 The figure shows an exploded view of a carrying device provided by an exemplary embodiment of the present application. Figure 1 and Figure 2 As shown, an embodiment of the present application provides a paddle assembly 100, comprising: a single paddle 110; a pad assembly 120, located on the upper surface of the single paddle 110, and configured to carry at least one boat structure 200, wherein a dimension of the pad assembly 120 in a first direction is less than or equal to a dimension of the boat structure 200 in the first direction, the first direction is a horizontal direction perpendicular to an extension direction of the single paddle 110, and the pad assembly 120 has a limiting structure, and the limiting structure is configured to contact the bottom of the at least one boat structure 200 and limit the movement of the at least one boat structure 200 in a horizontal direction.

[0032] The boat structure 200 is configured to carry a sheet material, which may be a semiconductor or photovoltaic material, such as a silicon wafer. The single paddle 110 is configured to be connected to a boat pusher, which is used to drive the single paddle 110 to move.

[0033] For example, Figure 1 As shown, the width of the boat structure 200 may be wider than the width of the pad assembly 120, wherein the width of the boat structure 200 is the dimension of the boat structure 200 in a first direction, which may be as shown in FIG. Figure 1 The sheet material can be vertically arranged in the boat structure 200. If the boat structure 200 is wider, more sheet materials can be accommodated, thereby improving the production capacity.

[0034] First, the boat structure 200 is supported by a single paddle 110. Compared with a double paddle, the single paddle 110 is smaller in size, thereby reducing the space occupied by the paddle and increasing the space for placing the boat structure 200. Secondly, since the pad assembly 120 is used to support the bottom of the boat structure 200, even if the size of the pad assembly 120 in the first direction is less than or equal to the size of the boat structure 200 in the first direction, it can stably support the boat structure 200. Therefore, this pad assembly 120 occupies less space than the boat support in the traditional technology. In this way, when the size of the reactor remains unchanged, since the pad assembly 120 occupies less space and the size of the boat structure 200 in the first direction can be greater than or equal to the size of the pad assembly 120 in the first direction, the reactor can accommodate a larger boat structure 200, so that the boat structure 200 can carry more sheet materials, thereby improving production capacity.

[0035] Figure 3 Shown is a schematic structural diagram of a pad assembly provided by an exemplary embodiment of the present application.

[0036] In some embodiments, Figure 3 As shown, the pad assembly 120 includes: a first support member 121, the extension direction of the first support member 121 is the same as the extension direction of the single paddle 110; a second support member 122, which is arranged opposite to the first support member 121, and the extension direction of the second support member 122 is the same as the extension direction of the single paddle 110, wherein the first support member 121 and the second support member 122 are jointly configured to carry at least one boat structure 200; at least one third support member 123, connecting the first support member 121 and the second support member 122.

[0037] The first support member 121, the second support member 122 and the third support member 123 may be plate-shaped structures or rod-shaped structures. Figure 3 As shown, the pad assembly 120 includes two third support members 123, wherein one of the third support members 123 is respectively connected to the first end of the first support member 121 and the second support member 122, and the other third support member 123 is respectively connected to the second end of the first support member 121 and the second support member 122, that is, the first support member 121, the second support member 122 and the two third support members 123 are enclosed into a rectangular bearing frame, wherein the upper surfaces of the first support member 121 and the second support member 122 can be used to bear the boat structure 200. Here, the height of the third support member 123 can be higher than that of the first support member 121 and the second support member 122, so as to prevent the boat structure 200 from sliding down from the extending direction of the single paddle 110.

[0038] In some embodiments, the vertical distance between the side of the first support member 121 away from the second support member 122 and the side of the second support member 122 away from the first support member 121 is less than or equal to the size of the boat structure 200 in the first direction. Since in the conventional paddle assembly, the size of the boat support in the first direction is larger than the boat structure, it is necessary to preferentially determine the size of the boat support as large as possible according to the size of the reaction chamber, and then select a boat structure smaller than the boat support according to the size of the boat support. In the embodiment of the present application, the above-mentioned vertical distance can be less than or equal to the size of the boat structure 200 in the first direction, so there is no need to consider the size of the pad assembly 120 in the first direction, and the boat structure 200 with a larger size in the first direction can be directly selected according to the size of the reaction chamber. The larger boat structure 200 can hold more sheet materials, thereby improving production capacity.

[0039] Figure 4 An exemplary embodiment of the present application is shown. Figure 3 A partial enlarged view of area B in the middle. Figure 5 An exemplary embodiment of the present application is shown. Figure 1 A partial enlarged view of area C in the middle.

[0040] In some embodiments, Figure 4 and Figure 5 As shown, the boat structure 200 includes: a top plate 210; a bottom plate 220, which is arranged opposite to the top plate 210; and at least one connecting rod 230, which connects the top plate 210 and the bottom plate 220 and is configured to carry a vertically arranged sheet material. The first support member 121 and the second support member 122 form a limiting structure, and the upper surfaces of the first support member 121 and the second support member 122 each have at least one first groove 1211, wherein, when the pad assembly 120 carries the boat structure 200, at least part of the connecting rod 230 is located in the first groove 1211, and the first groove 1211 is configured to limit the boat structure 200 from moving along the extension direction of the single paddle 110, the top plate 210 is located on the side of the first support member 121 away from the second support member 122, and the bottom plate 220 is located on the side of the second support member 122 away from the first support member 121, and the first support member 121 and the second support member 122 are configured to limit the boat structure 200 from moving along the first direction.

[0041] Exemplarily, between the top plate 210 and the bottom plate 220, a plurality of connecting rods 230 (e.g., four) may be arranged around the edge areas of the top plate 210 and the bottom plate 220. When the boat structure 200 is placed on the pad assembly 120, the connecting rods 230 close to the pad assembly 120 are in contact with the bottom of the first groove 1211.

[0042] The connecting rod 230 is supported by the bottom of the first groove 1211, and the connecting rod 230 is limited by the groove wall of the first groove 1211, so that the boat structure 200 can be prevented from moving along the extension direction of the single paddle 110, thereby preventing the boat structure 200 from falling off the pad assembly 120. After at least part of the connecting rod 230 is located in the first groove 1211, the first support member 121 can limit the top plate 210 from moving in a direction close to the first support member 121, and the second support member 122 can limit the bottom plate 220 from moving in a direction close to the second support member 122, thereby limiting the boat structure 200 from moving in the first direction. In addition, in the related art, the sheet material is usually arranged horizontally in the boat structure 200. In this way, due to the gravity of the sheet material itself and the influence of high temperature, the center of the sheet material will sag, deform, or even crack. If the cleanliness in the reaction chamber does not meet the standards, particulate pollutants may fall onto the surface of the sheet material and be integrated into the interior of the sheet material under the influence of the high temperature environment, thereby reducing the process quality. In the embodiment of the present application, the sheet material is placed vertically, which can prevent the sheet material from sagging, deforming, or even cracking, or pollutants from contaminating the sheet material.

[0043] In some embodiments, the cross-sectional shape of the first groove 1211 includes: a rectangle or a trapezoid. If the cross-sectional shape is a rectangle, the side wall of the first groove 1211 can better limit the connection rod 230 to prevent the connection rod 230 from moving out of the first groove 1211. If the cross-sectional shape is a trapezoid, the side wall of the first groove 1211 has a guiding function, and it is easier to place the connection rod 230 in the first groove 1211.

[0044] In some embodiments, the cross-sectional shape of the connecting rod 230 includes: a circle or a rectangle. In a specific example, if the cross-sectional shape of the connecting rod 230 is a rectangle and the cross-sectional shape of the first groove 1211 is a rectangle, the connecting rod 230 can be more firmly embedded in the first groove 1211.

[0045] In some embodiments, Figure 3 As shown, the pad assembly 120 also includes: at least one reinforcing rib 124; wherein the reinforcing rib 124 connects the first support member 121 and the second support member 122; or, when the number of third support members 123 is multiple, connects multiple third support members 123; or, when the number of reinforcing ribs 124 is multiple, one reinforcing rib 124 connects the first support member 121 and another reinforcing rib 124, or one reinforcing rib 124 connects the second support member 122 and another reinforcing rib 124.

[0046] In a specific example, if Figure 3As shown, the plurality of reinforcing ribs 124 include: a first reinforcing rib connected to the two third support members 123, at least one second reinforcing rib connected to the first support member 121 and the first reinforcing rib, and at least one third reinforcing rib connected to the second support member 122 and the first reinforcing rib.

[0047] By providing the reinforcing ribs 124 , the structural stability of the pad assembly 120 can be improved, thereby reducing the deformation of the pad assembly 120 due to the gravity of the boat structure 200 and improving the load capacity of the pad assembly 120 .

[0048] In some embodiments, Figure 3 As shown, the number of the third support members 123 is multiple, at least one third support member 123 connects the first end of the first support member 121 and the first end of the second support member 122, and at least one third support member 123 connects the second end of the first support member 121 and the second end of the second support member 122; wherein the pad assembly 120 further includes: at least two handle assemblies 125, one handle assembly 125 is connected to the third support member 123 disposed at the first end of the first support member 121, and the other handle assembly 125 is connected to the third support member 123 disposed at the second end of the first support member 121, and the handle assembly 125 is configured to be clamped by a transport device when transporting the pad assembly 120 and the boat structure 200. By providing the handle assembly 125, it is convenient for the transport device to transport the pad assembly 120 and the boat structure 200.

[0049] In some embodiments, Figure 2 and Figure 3 As shown, the upper surface of the single paddle 110 has a second groove 111, and the lower surface of the pad assembly 120 has a first boss 126; wherein the first boss 126 is connected with the second groove 111 in a concave-convex matching manner. Exemplarily, the second groove can be a strip structure arranged along the extension direction of the single paddle 110, and the first boss 126 can be a strip structure arranged along the extension direction of the single paddle 110. By providing the second groove 111 and the first boss 126, the pad assembly 120 and the single paddle 110 can be firmly connected to prevent the pad assembly 120 from shaking or even falling off the single paddle 110.

[0050] In some embodiments, the plurality of reinforcing ribs 124 include a first boss 126. Figure 3 As shown, the first reinforcing rib is not only connected to the second reinforcing rib, the third reinforcing rib and the third support member 123 , but is also used for concave-convex fitting connection with the second groove 111 .

[0051] In some other embodiments, the upper surface of the single paddle 110 has a second boss, and the lower surface of the pad assembly 120 has a third groove; wherein the second boss is connected to the third groove in a concave-convex matching manner.

[0052] In some embodiments, the material of the pad assembly 120 includes: silicon carbide, quartz or ceramic. Silicon carbide, quartz or ceramic materials have the characteristics of high temperature resistance and high strength. The use of silicon carbide, quartz or ceramic materials can reduce the deformation of the pad assembly 120 caused by the weight of the boat structure 200 under the high temperature environment in the reactor, and reduce the possibility of the pad assembly 120 breaking.

[0053] In some embodiments, the single paddle 110 has a vent hole 112 that runs through the single paddle 110 in a vertical direction; wherein, when the paddle assembly 100 is located in the reaction chamber, the process gas in the reaction chamber flows through the vent hole 112, the gap between the first support member 121 and the second support member 122, and the boat structure 200, so that the sheet material in the boat structure 200 can be fully in contact with the process gas, thereby improving the process quality.

[0054] In a specific example, the upper surface of the single propeller 110 has a first vent hole, the lower surface has a second vent hole, and the single propeller 110 has a cavity inside, which is connected to the first vent hole and the second vent hole.

[0055] Based on the same concept, the embodiment of the present application also provides a carrying device 300, such as Figure 1 As shown, the carrying device 300 includes: at least one boat structure 200; the paddle assembly 100 described in the above embodiment is configured to carry at least one boat structure 200.

[0056] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0057] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.

[0058] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0059] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0060] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A paddle assembly, characterized in that: include: Single oar; A pad assembly is located on the upper surface of the single propeller and is configured to support at least one boat structure, wherein a size of the pad assembly in a first direction is less than or equal to a size of the boat structure in the first direction, the first direction is a horizontal direction perpendicular to the extension direction of the single propeller, and the pad assembly has a limiting structure, which is configured to contact the bottom of at least one of the boat structures and limit the movement of at least one of the boat structures in the horizontal direction.

2. The paddle assembly according to claim 1, characterized in that: The backing plate assembly comprises: a first support member, wherein an extending direction of the first support member is the same as an extending direction of the single propeller; a second support member, arranged opposite to the first support member, the extension direction of the second support member being the same as the extension direction of the single propeller, wherein the first support member and the second support member are jointly configured to carry at least one of the boat structures; At least one third supporting member connects the first supporting member and the second supporting member.

3. The paddle assembly according to claim 2, characterized in that: A vertical distance between a side of the first support member away from the second support member and a side of the second support member away from the first support member is less than or equal to a dimension of the boat structure in the first direction.

4. The paddle assembly according to claim 2 or 3, characterized in that: The boat structure comprises: roof; A bottom plate, arranged opposite to the top plate; at least one connecting rod, connecting the top plate and the bottom plate, configured to carry a vertically arranged sheet material; Wherein, the first support member and the second support member form the limiting structure, and the upper surfaces of the first support member and the second support member each have at least one first groove, wherein, when the pad assembly carries the boat structure, at least part of the connecting rod is located in the first groove, and the first groove is configured to limit the movement of the boat structure along the extension direction of the single paddle, the top plate is located on the side of the first support member away from the second support member, and the bottom plate is located on the side of the second support member away from the first support member, and the first support member and the second support member are configured to limit the movement of the boat structure along the first direction.

5. The paddle assembly according to claim 2 or 3, characterized in that: The backing plate assembly also includes: at least one reinforcing rib; Wherein, the reinforcing rib connects the first supporting member and the second supporting member; or, In case that there are multiple third support members, multiple third support members are connected; or, In the case where there are multiple reinforcing ribs, one reinforcing rib connects the first supporting member and another reinforcing rib, or one reinforcing rib connects the second supporting member and another reinforcing rib.

6. The paddle assembly according to claim 2 or 3, characterized in that: There are multiple third support members, at least one of which connects the first end of the first support member and the first end of the second support member, and at least one of which connects the second end of the first support member and the second end of the second support member; Wherein, the pad assembly further comprises: At least two handle assemblies, one handle assembly is connected to the third support member arranged at the first end of the first support member, and the other handle assembly is connected to the third support member arranged at the second end of the first support member. The handle assemblies are configured to be clamped by a transportation device when transporting the pad assembly and the boat structure.

7. The paddle assembly according to any one of claims 1 to 3, characterized in that: The upper surface of the single propeller has a second groove, and the lower surface of the pad assembly has a first boss; Wherein, the first boss is connected to the second groove in a concave-convex matching manner.

8. The paddle assembly according to any one of claims 1 to 3, characterized in that: The material of the pad assembly includes: silicon carbide, quartz or ceramic.

9. The paddle assembly according to claim 2 or 3, characterized in that: The single propeller has a vent hole that penetrates the single propeller in a vertical direction; Wherein, when the paddle assembly is located in the reaction chamber, the process gas in the reaction chamber flows through the vent hole, the gap between the first support member and the second support member, and the boat structure.

10. A carrying device, characterized in that: include: at least one boat structure; The paddle assembly of any one of claims 1 to 9 above, is configured to carry at least one of the boat structures.

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