Automatic cleaning device for suction nozzle

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By designing an automatic nozzle cleaning device for semiconductor sorting production lines, the motor-driven cleaning parts are combined with the alcohol sprayer, the cleaning problem caused by the sticking of residual glue on the suction nozzle is solved, and the automatic cleaning of the suction nozzle is achieved, which improves the production line efficiency and reduces material waste.

CN222568551UActive Publication Date: 2025-03-07SJ SEMICONDUCTOR (JIANGYIN) CORP

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Patent Information

Application Number: CN202420601565.4
Authority / Receiving Office: CN · China
Patent Type: Utility models(China)
Current Assignee / Owner
Filing Date: 2024-03-26
Publication Date: 2025-03-07
Estimated Expiration: 2034-03-26

AI Technical Summary

Technical Problem

In the semiconductor sorting production line, the nozzle affects the transport effect due to sticking to residual glue, which makes manual cleaning difficult and easy to damage, resulting in inefficiency in the production line and waste of materials.

Method used

An automatic cleaning device for suction nozzle is designed, including a cleaning mechanism, an alcohol replenishment mechanism, a mobile cylinder, a bottom plate and a rack. The cleaning parts driven by a motor are combined with an alcohol sprayer to achieve automatic cleaning of the suction nozzle.

Benefits of technology

The automatic cleaning of the suction nozzle is achieved, which reduces the risk of manual operation, improves the production line efficiency, reduces the waste of suction nozzle materials, and improves the cleaning effect by automatically replenishing alcohol.

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Abstract

The utility model relates to an automatic cleaning device for a suction nozzle. The automatic cleaning device comprises a cleaning mechanism, an alcohol supplementing mechanism, a movable air cylinder, a bottom plate and a rack, the cleaning mechanism comprises a motor, a connecting rod and a cleaning piece; the alcohol supplementing mechanism comprises an alcohol spraying device, an alcohol conveying pipe and an alcohol spraying cylinder; a cylinder body of the movable air cylinder is fixed to the bottom plate, and a piston rod of the movable air cylinder is connected with a driven plate. The suction nozzle cleaning device has the advantages that (1) the problems that the suction nozzle is small in size and difficult to clean manually are solved, mechanical cleaning of the suction nozzle is achieved, waste of suction nozzle materials is reduced, and production line efficiency is improved; and (2) the alcohol of the cleaning cloth is automatically supplemented, the degumming effect of the cleaning cloth is improved, the operation of manually supplementing the alcohol is omitted, and the operation safety is improved.

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Description

Technical Field

[0001] The utility model relates to the field of semiconductor sorting auxiliary equipment, in particular to an automatic cleaning device for a suction nozzle. Background Art

[0002] In the semiconductor sorting production line, the taping equipment needs to transport wafers through the nozzle of the loading tray. After repeated operations, residual glue will stick to the surface of the nozzle, seriously affecting the transportation effect of the nozzle. Therefore, the residual glue on the nozzle needs to be cleaned. In order to ensure the cleanliness of the nozzle, the production line needs to clean the nozzle every 2 hours, but because the nozzle used for wafer transportation is extremely small, it is difficult to wipe it manually, which is easy to damage the nozzle and seriously affects the efficiency of the production line. If the nozzle is replaced directly, the nozzle will be replaced frequently, resulting in waste of materials.

[0003] Therefore, there is a problem that the suction nozzle for transporting wafers is difficult to clean. Utility Model Content

[0004] The utility model aims to provide an automatic nozzle cleaning device, which can realize automatic nozzle cleaning and replace manual operation.

[0005] In order to achieve the above-mentioned utility model object, the utility model provides an automatic nozzle cleaning device, including a cleaning mechanism, an alcohol replenishing mechanism, a movable cylinder, a bottom plate, and a frame;

[0006] The cleaning mechanism comprises a motor, a connecting rod, and a cleaning member; the cleaning member is connected to the motor via the connecting rod, and a cleaning cloth is provided at the end of the cleaning member;

[0007] The alcohol replenishing mechanism comprises an alcohol ejector, an alcohol transmission pipe, and an alcohol ejection cylinder; the alcohol ejector comprises a push rod and an alcohol storage chamber, the push rod is in an "I" shape, one end of the push rod is located in the alcohol storage chamber, and the other end of the push rod is located outside the alcohol storage chamber; a push plate is provided at the end of the piston rod of the alcohol ejection cylinder, and the push plate faces the push rod; the alcohol transmission pipe is connected to the outlet end of the alcohol storage chamber, and the end of the alcohol transmission pipe faces the cleaning cloth;

[0008] The cylinder body of the movable cylinder is fixed on the bottom plate, the piston rod of the movable cylinder is connected with a driven plate, and the cleaning mechanism and the alcohol replenishing mechanism are both located on the driven plate;

[0009] The frame is provided with connecting columns, and the bottom plate is fixed below the frame through the connecting columns.

[0010] As a further improvement of the utility model, a socket is coaxially provided at the end of the connecting rod, the connecting rod is provided with a connecting hole, the end of the cleaning piece is inserted into the socket, and the first fastener detachably fixes the cleaning piece in the connecting rod through the connecting hole.

[0011] Preferably, a trumpet-shaped spray head is provided at the end of the alcohol transmission tube.

[0012] As a further improvement of the utility model, the alcohol replenishing mechanism also includes a card plate, the card plate is provided with a half-open card slot, and the alcohol storage cavity is stuck in the card slot.

[0013] As a further improvement of the utility model, the base plate is provided with a linear guide rail assembly, and the driven plate is connected to the base plate through the linear guide rail assembly.

[0014] As a further improvement of the utility model, it also includes a sensing component, which includes two position sensors and a sensing rod. The two position sensors are both located on the bottom plate, and the sensing rod is located on the side of the driven plate. The position of the position sensor is adapted to the position of the sensing rod.

[0015] As a further improvement of the utility model, a plurality of adjustment holes are provided at the bottom of the frame, a mounting plate is provided at the end of the connecting column, and the mounting plate is detachably fixed to the frame through the second fastener passing through the adjustment holes.

[0016] The utility model discloses an automatic suction nozzle cleaning device, which is used for cleaning a wafer loading plate of a tape-making device. A plurality of suction nozzles are distributed on the wafer loading plate. A cleaning member approaches a single target suction nozzle through a moving cylinder. The cleaning member replenishes alcohol at any time through an alcohol replenishing mechanism on the side. Alcohol is sprayed on a cleaning cloth through an alcohol sprayer. The cleaning cloth rotates at a high speed under the action of a motor, thereby rubbing against the surface of the suction nozzle to remove residual glue from the suction nozzle. After the cleaning of a single target suction nozzle is completed, the cleaning member is reset through the moving cylinder to give way to the rotation of the wafer loading plate to avoid collision between the cleaning member and other workpieces. The wafer loading plate is rotated through its own rotation driving device, and the next suction nozzle to be cleaned is turned to the target position to wait for cleaning by the cleaning mechanism.

[0017] Compared with the prior art, the automatic nozzle cleaning device of the utility model has the following advantages:

[0018] (1) Solve the problem of small nozzle size and difficulty in manual cleaning, realize mechanized cleaning of nozzles, reduce nozzle material waste, and improve production line efficiency;

[0019] (2) Automatically replenish alcohol in the cleaning cloth, improve the glue removal effect of the cleaning cloth, save the operation of manually replenishing alcohol, and improve work safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the structure of an automatic nozzle cleaning device of the utility model;

[0021] Figure 2 This is a schematic diagram of the structure of an automatic nozzle cleaning device of the utility model;

[0022] Figure 3 It is a top view of the connection between the cleaning mechanism, the alcohol replenishing mechanism, and the moving cylinder;

[0023] Figure 4 It is a schematic diagram of the alcohol ejector structure;

[0024] Figure 5 It is a schematic diagram of the rack connection structure;

[0025] Figure 6 This is a diagram of nozzle cleaning. DETAILED DESCRIPTION

[0026] The specific implementation of the utility model is further described in detail below with reference to the accompanying drawings.

[0027] like Figure 1 As shown, an automatic nozzle cleaning device of the utility model comprises a cleaning mechanism 1, an alcohol replenishing mechanism 2, a moving cylinder 3, a bottom plate 4, and a frame 7;

[0028] like Figure 2-3 As shown, the cleaning mechanism 1 includes a motor 11, a connecting rod 12, and a cleaning member 13; the cleaning member 13 is connected to the motor 11 through the connecting rod 12, and a cleaning cloth 14 is provided at the end of the cleaning member 13;

[0029] The motor 11 drives the connecting rod 12 to rotate at high speed, and the cleaning member 13 drives the cleaning cloth 14 to rotate at high speed. The residual glue on the suction nozzle 81 adheres to the cleaning cloth 14. After the cleaning cloth 14 is used for a long time, the residual glue will affect the cleaning ability of the cleaning cloth 14, and the cleaning cloth 14 needs to be replaced regularly. Since the size of the suction nozzle used for wafers on the actual production line is extremely small, the diameter of the cleaning member 13 is 0.5-2cm, and it is difficult to manually replace the cleaning cloth 14.

[0030] The end of the connecting rod 12 is coaxially provided with a socket 121, and the connecting rod 12 is provided with a connecting hole 122. The end of the cleaning member 13 is inserted into the socket 121, and the first fastener 122 detachably fixes the cleaning member 13 in the connecting rod 12 through the connecting hole 122. A cleaning cloth 14 can be attached to one end of the cleaning member 13 to form a cleaning assembly, and a plurality of spare cleaning assemblies can be prefabricated. When the cleaning cloth 14 needs to be replaced, the first fastener 122 is used to quickly complete the replacement of the cleaning assembly, thereby improving the replacement efficiency of the cleaning cloth 14 on the production line.

[0031] The alcohol replenishing mechanism 2 includes an alcohol ejector 21, an alcohol transmission pipe 22, and an alcohol ejection cylinder 23; Figure 4 As shown, the alcohol ejector 21 includes a push rod 211 and an alcohol storage chamber 212. The push rod 211 is in an "I" shape. One end of the push rod 211 is located in the alcohol storage chamber 212, and the other end of the push rod 211 is located outside the alcohol storage chamber 212. A push plate 231 is provided at the end of the piston rod of the alcohol ejection cylinder 23, and the push plate 231 faces the push rod 211. The alcohol transmission pipe 22 is connected to the outlet end of the alcohol storage chamber 212, and the end of the alcohol transmission pipe 22 faces the cleaning cloth 14.

[0032] The existing method of adding alcohol to the cleaning cloth 14 is to remove the cleaning cloth 14, manually dip it in alcohol, and then fix the cleaning cloth 14 on the cleaning member 13. Since the cleaning cloth 14 is small in size, it is difficult to operate manually, and the frequency of removing glue from the suction nozzle 81 on the production line is high. In order to maintain the loading effect of the suction nozzle 81, the suction nozzle 81 needs to be cleaned every two hours. The speed of manually continuously adding alcohol to the cleaning cloth 14 is slow, which affects the efficiency of the production line.

[0033] In this embodiment, the push plate 231 pushes the push rod 211 forward as the piston rod of the alcohol spraying cylinder 23 extends, and the alcohol in the alcohol storage chamber 212 is pushed into the alcohol transmission tube 22 from the outlet of the alcohol storage chamber 212 by the push rod 211. The alcohol is sprayed onto the cleaning cloth 14 in the alcohol transmission tube 22, thereby improving the degumming effect of the cleaning cloth 14. When the cleaning cloth 14 is replenished with alcohol, the motor 11 can be used to keep the cleaning cloth 14 rotating continuously, and the alcohol sprayed from the alcohol transmission tube 22 on one side of the cleaning cloth 14 can cover the entire cleaning cloth 14. Among them, the push plate 231 directly pushes the push rod 211 instead of the piston rod of the alcohol spraying cylinder 23, and the push plate 231 can increase the contact area with the push rod 211, so that the push rod 211 can be pushed more smoothly.

[0034] A trumpet-shaped spray head 221 is provided at the end of the alcohol transmission tube 22, and the alcohol in the tube can be sprayed onto the cleaning cloth 14 in a mist form through the trumpet-shaped spray head 221, so that the alcohol has a better covering effect on the cleaning cloth 14.

[0035] The alcohol replenishing mechanism 2 also includes a card plate 24, which is provided with a half-open card slot 241. The alcohol storage chamber 212 of the alcohol sprayer 21 is stuck in the card slot 241, which makes it convenient to remove the alcohol sprayer 21 and replenish alcohol in the alcohol storage chamber 212.

[0036] The cylinder body of the moving cylinder 3 is fixed on the bottom plate 4, the piston rod of the moving cylinder 3 is connected to the driven plate 41, and the cleaning mechanism 1 and the alcohol replenishing mechanism 2 are both located on the driven plate 41;

[0037] The driven plate 41 reciprocates under the action of the moving cylinder 3 , driving the cleaning mechanism 1 and the alcohol replenishing mechanism 2 to the target position to clean the suction nozzle 81 .

[0038] The bottom plate 4 is provided with a linear guide assembly 5, and the driven plate 41 is connected to the bottom plate 4 through the linear guide assembly 5. The linear guide assembly 5 is an existing guide rail and slider combination, and the driven plate 41 keeps moving linearly along the guide rail through the slider, so as to prevent the driven plate 41 from being offset during the reciprocating movement, causing the cleaning cloth 14 and the suction nozzle 81 to be misaligned, affecting the cleaning effect, or even damaging the equipment.

[0039] The utility model provides an automatic nozzle cleaning device, which also includes a sensing component 6. The sensing component 6 includes two position sensors 61 and a sensing rod 62. The two position sensors 61 are both located on the bottom plate 4, and the sensing rod 62 is located on the side of the driven plate 41. The positions of the position sensors 61 and the sensing rod 62 are adapted to each other.

[0040] In order to improve the cleaning effect, after the cleaning member 13 reaches the designated position, the cleaning member 13 is reciprocated over a small distance on the target suction nozzle 81 by moving the cylinder 3, so that the cleaning cloth 14 rubs back and forth on the suction nozzle 81 multiple times to ensure that the residual glue on the suction nozzle 81 is cleaned.

[0041] The installation spacing between the two position sensors 61 is the travel range of the cleaning cloth 14 for multiple back and forth cleaning. The position sensor 61 is an existing photoelectric sensor. When the sensing rod 62 is located in the sensing area of the position sensor 61, the position sensor 61 converts the sensed light signal into an electrical signal and transmits it to the terminal. The terminal receives the information and instructs the mobile cylinder 3 to achieve multiple back and forth cleaning of the cleaning cloth 14.

[0042] The frame 7 is provided with a connecting column 71, and the bottom plate 4 is fixed to the bottom of the frame 7 through the connecting column 71. The machine space of the semiconductor sorting production line is limited, and the bottom plate 4 is fixed to the frame 7 through the connecting column 71, so that the cleaning mechanism 1 and the alcohol replenishing mechanism 2 are suspended on one side of the wafer loading tray 8, reducing space restrictions and avoiding collision and interference between the cleaning mechanism 1 and the alcohol replenishing mechanism 2 and other equipment during cleaning.

[0043] like Figure 5 As shown, the bottom of the frame 7 is provided with a plurality of adjustment holes 74, and the end of the connecting column 71 is provided with a mounting plate 72, and the mounting plate 72 is detachably fixed to the frame 7 through the second fastener 73 passing through the adjustment hole 74. When debugging the equipment, the initial position of the cleaning mechanism 1 can be adjusted by selecting the adjustment holes 74 at different positions according to the position of the wafer loading plate 8, which has stronger applicability.

[0044] The utility model discloses an automatic suction nozzle cleaning device, which is used for cleaning a wafer loading plate 8 of a tape-forming device. A plurality of suction nozzles 81 are distributed on the wafer loading plate 8. A cleaning member 13 approaches a single target suction nozzle 81 through a moving cylinder 3. The cleaning member 13 is replenished with alcohol at any time through an alcohol replenishing mechanism 2 on the side. Alcohol is sprayed on a cleaning cloth 14 through an alcohol ejector 21. The cleaning cloth 14 rotates at a high speed under the action of a motor 11, thereby rubbing against the surface of the suction nozzle 81 to remove residual glue from the suction nozzle 81. After the single target suction nozzle 81 is cleaned, the cleaning member 13 is reset through the moving cylinder 3 to give way to the rotation of the wafer loading plate 8 to avoid collision between the cleaning member 13 and other workpieces. The wafer loading plate 8 is rotated through its own rotation driving device, and the next suction nozzle to be cleaned is turned to the target position to wait for cleaning by the cleaning mechanism 1.

[0045] The preferred embodiments of the present invention have been specifically described above, but the present invention is not limited to the described embodiments. Those skilled in the art may make various equivalent modifications or substitutions without violating the spirit of the present invention, and these equivalent modifications or substitutions are all within the scope defined by the claims of this application.

Claims

1. An automatic nozzle cleaning device, characterized in that: It includes a cleaning mechanism, an alcohol replenishing mechanism, a moving cylinder, a bottom plate, and a frame; The cleaning mechanism comprises a motor, a connecting rod, and a cleaning member; the cleaning member is connected to the motor via the connecting rod, and a cleaning cloth is provided at the end of the cleaning member; The alcohol replenishing mechanism comprises an alcohol ejector, an alcohol transmission pipe, and an alcohol ejection cylinder; the alcohol ejector comprises a push rod and an alcohol storage chamber, the push rod is in an "I" shape, one end of the push rod is located in the alcohol storage chamber, and the other end of the push rod is located outside the alcohol storage chamber; a push plate is provided at the end of the piston rod of the alcohol ejection cylinder, and the push plate faces the push rod; the alcohol transmission pipe is connected to the outlet end of the alcohol storage chamber, and the end of the alcohol transmission pipe faces the cleaning cloth; The cylinder body of the movable cylinder is fixed on the bottom plate, the piston rod of the movable cylinder is connected with a driven plate, and the cleaning mechanism and the alcohol replenishing mechanism are both located on the driven plate; The frame is provided with connecting columns, and the bottom plate is fixed below the frame through the connecting columns.

2. The automatic nozzle cleaning device according to claim 1, characterized in that: The end of the connecting rod is coaxially provided with an insertion hole, the connecting rod is provided with a connecting hole, the end of the cleaning member is inserted into the insertion hole, and the first fastener detachably fixes the cleaning member in the connecting rod through the connecting hole.

3. The automatic nozzle cleaning device according to claim 1, characterized in that: A trumpet-shaped spray head is arranged at the end of the alcohol transmission pipe.

4. The automatic nozzle cleaning device according to claim 1, characterized in that: The alcohol replenishing mechanism also includes a card plate, the card plate is provided with a half-open card slot, and the alcohol storage cavity is stuck in the card slot.

5. The automatic nozzle cleaning device according to claim 1, characterized in that: The base plate is provided with a linear guide assembly, and the driven plate is connected to the base plate through the linear guide assembly.

6. The automatic nozzle cleaning device according to claim 1, characterized in that: It also includes a sensing component, which includes two position sensors and a sensing rod. The two position sensors are both located on the bottom plate, the sensing rod is located on the side of the driven plate, and the position of the position sensors matches the position of the sensing rod.

7. The automatic nozzle cleaning device according to claim 1, characterized in that: The bottom of the frame is provided with a plurality of adjustment holes, the end of the connecting column is provided with a mounting plate, and the mounting plate is detachably fixed on the frame through the second fastener passing through the adjustment holes.