Single crystal silicon rod multi-station cutting equipment

Abstract

The utility model discloses single crystal silicon rod multi-station cutting equipment which comprises a working table, a side mounting plate is arranged on the working table, a feeding seat is arranged at one end of the side mounting plate, a plurality of feeding channels are arranged on the feeding seat, a conveying mechanism is arranged on one side of a vertical plate, silicon rods are synchronously conveyed through the conveying mechanism, and a transition plate is further arranged on the working table. A plurality of positioning holes are formed in the transition plate and are in one-to-one correspondence with the feeding channels, a pair of guide seats is arranged on one side of the transition plate, a cutting gap is reserved between the guide seats, the guide seats are mounted on the side mounting plate, a cutting assembly is in sliding fit between the guide seats, a discharging cover is arranged on one sides of the guide seats, and a collecting box is arranged at the bottom of the discharging cover; a detection opening is formed in the top of the discharging cover, a distance measuring assembly is arranged above the detection opening, and the sizes of the cut silicon rods are detected through the distance measuring assembly. The silicon rod cutting device has the advantages that multiple sets of silicon rods can be conveyed, meanwhile, the silicon rods of different sizes are accurately cut, automatic material receiving is achieved, and human intervention is not needed.

Description

Technical Field

[0001] The utility model belongs to the technical field of single crystal silicon rod processing, and more specifically, particularly relates to a single crystal silicon rod multi-station cutting device. Background Art

[0002] At present, single crystal silicon rods are single crystals of silicon, which are crystals with a basically complete lattice structure. They have different properties in different directions and are a good semiconductor material.

[0003] In the production and processing of single crystal silicon rods, the single crystal silicon rods need to be cut into different size requirements. At the same time, the existing single crystal silicon rod cutting is all single-body cutting, which takes a long time and has low output. It is impossible to cut multiple silicon rods at the same time, and the cutting length cannot be set freely. Manual measurement is required to maintain the existing cutting state. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides a single crystal silicon rod multi-station cutting device to solve the problems raised in the above background technology.

[0005] To achieve the above purpose, the utility model is implemented through the following technical solutions: a multi-station cutting device for single crystal silicon rods, including a workbench, a side mounting plate is arranged on the workbench, a vertical plate is arranged at one end of the side mounting plate, a feed seat is arranged on one side of the vertical plate, a plurality of feed channels are arranged on the feed seat for conveying silicon rods, a conveying mechanism is arranged on one side of the vertical plate, and the silicon rods are conveyed synchronously by the conveying mechanism, a transition plate is also arranged on the workbench, a plurality of positioning holes are arranged on the transition plate, and the plurality of feed channels are corresponding one to one, a pair of guide seats are arranged on one side of the transition plate, a cutting gap is left between the guide seats, and the guide seats are installed on the side mounting plate, a cutting assembly is slidably matched between the guide seats, and the silicon rods are quickly cut by the cutting assembly, a material discharge cover is arranged on one side of the guide seat, a material receiving box is arranged at the bottom of the material discharge cover, and the silicon rods are collected after cutting, a detection port is arranged on the top of the material discharge cover, and a distance measuring assembly is arranged above the detection port, and the size of the cut silicon rods is detected by the distance measuring assembly.

[0006] As an optional scheme of the utility model, the conveying mechanism includes a first conveying platform, the first conveying platform is installed on one side of the side mounting plate, a second conveying platform is arranged above the first conveying platform, anti-slip belts are installed on the second conveying platform and the first conveying platform, the second conveying platform is installed on one side of the lifting platform, the lifting platform is installed on the inner side of the slide of the double-rod slide cylinder, the double-rod slide cylinder is provided with the other side of the side mounting plate, an adapter plate is provided on the outer side of the slide of the double-rod slide cylinder, a second motor is provided on the adapter plate, a driving end of the second motor is connected to the second conveying platform, a first mounting plate is provided on the workbench, a first motor is fixed on the first mounting plate, and a driving end of the first motor is connected to the first conveying platform to drive the first conveying platform for continuous conveying.

[0007] As an optional solution of the utility model, a chip collection box is placed on the workbench below the cutting gap to collect the powder chips generated by cutting.

[0008] As an optional solution of the utility model, the cutting assembly includes a second mounting plate, an electric cylinder is arranged on the second mounting plate, a cutting seat is arranged at the pushing end of the electric cylinder, a cutter is installed at one end of the cutting seat, and the cutter is driven by the electric cylinder to perform horizontal cutting.

[0009] As an optional scheme of the utility model, the distance measuring assembly includes a reference plate, which is arranged on one side of the side mounting plate and above the cutting gap. The side mounting plate is provided with an adjustment seat, a slide groove is provided in the adjustment seat, a screw sleeve is slidably fitted in the slide groove, an adjusting screw is fitted in the inner thread of the screw sleeve, the adjusting screw is installed in the adjustment seat through a bearing, one end of the adjusting screw is connected to a handle for adjusting the spacing, a detection seat is provided on one side of the screw sleeve through a connecting rod, a laser rangefinder is installed in the detection seat, the laser rangefinder is facing the reference plate, and an infrared sensor is installed at the bottom of the detection seat for detecting the discharge of silicon rods.

[0010] The utility model provides a single crystal silicon rod multi-station cutting device, which has the following beneficial effects:

[0011] The cutting length is set according to the technical requirements, the distance of the detection seat is adjusted, the distance to the reference plate is detected by the laser rangefinder, and precise cutting is performed. The first and second conveyor platforms are made to fit the silicon rods tightly through the double-rod slide cylinder to ensure stable transportation. The first motor and the second motor are then used for continuous transportation. The silicon rods are quickly detected through infrared sensors, and the electric cylinder is used for rapid cutting. Repeated operations can be performed to achieve simultaneous cutting of multiple groups of silicon rods, ensure that the sizes of multiple groups of silicon rods are uniform, and automatically collect the materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a structural schematic diagram of the utility model;

[0013] Figure 2 It is a structural schematic diagram of another perspective of the utility model;

[0014] Figure 3 It is a side view of the utility model;

[0015] Figure 4 For this utility model Figure 3 AA section view;

[0016] Figure 5 For this utility model Figure 4 EE cross-sectional view

[0017] Figure 6 For this utility model Figure 4 FF cross-sectional view.

[0018] In the figure: 1. workbench; 101. chip box; 102. transition plate; 2. side mounting plate; 201. reference plate; 3. first mounting plate; 301. first motor; 4. second mounting plate; 401. electric cylinder; 402. cutting seat; 403. cutter; 5. material collecting box; 6. double-rod slide cylinder; 601. adapter plate; 602. second motor; 7. first conveyor platform; 8. second conveyor platform; 9. anti-slip belt; 10. lifting platform; 11. silicon rod piece; 12. vertical plate; 121. feed seat; 13. guide seat; 14. adjustment seat; 141. adjustment screw rod; 142. screw rod sleeve; 143. detection seat; 144. laser rangefinder; 145. infrared sensor; 15. unloading cover; 151. detection port. DETAILED DESCRIPTION

[0019] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0020] In the description of the present invention, unless otherwise specified, "multiple" means two or more; the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0021] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0022] See also Figures 1 to 6 The utility model provides a technical solution: a multi-station cutting device for a single crystal silicon rod, comprising a workbench 1, a side mounting plate 2 is arranged on the workbench 1, a vertical plate 12 is arranged at one end of the side mounting plate 2, a feed seat 121 is arranged at one side of the vertical plate 12, a plurality of feed channels are arranged on the feed seat 121 for conveying silicon rods 11, a conveying mechanism is arranged at one side of the vertical plate 12, and the silicon rods 11 are conveyed synchronously by the conveying mechanism, and the conveying mechanism comprises a first conveying platform 7, the first conveying platform 7 is installed at one side of the side mounting plate 2, and the first conveying platform 7 is arranged on the first conveying platform 7. A second conveying platform 8 is provided on the side, and anti-slip belts 9 are installed on the second conveying platform 8 and the first conveying platform 7, so as to stably convey the silicon rods 11. The second conveying platform 8 is installed on one side of the lifting platform 10, and the lifting platform 10 is installed on the moving end of the double-rod sliding cylinder. The double-rod sliding cylinder is provided with a side mounting plate 2 on the other side, and an adapter plate 601 is provided on the lifting end of the double-rod sliding cylinder. A second motor 602 is provided on the adapter plate 601. The driving end of the second motor 602 is connected to the second conveying platform 8, thereby driving the second conveying platform 8 to stably convey.

[0023] A first mounting plate 3 is provided on the workbench 1, and a first motor 301 is fixed on the first mounting plate 3. The driving end of the first motor 301 is connected to the first conveying platform 7 to drive the first conveying platform 7 to continuously convey. A transition plate 102 is also provided on the workbench. A plurality of positioning holes are provided on the transition plate 102, and they correspond to a plurality of feed channels one by one. A pair of guide seats 13 are provided on one side of the transition plate 102, and a cutting gap is left between the guide seats 13, which are installed on the side mounting plate 2. A chip box 101 is placed on the workbench 1 below the cutting gap for collecting powder chips generated by cutting. A cutting assembly is slidably fitted between the guide seats 13, and the silicon rods are quickly cut by the cutting assembly.

[0024] The cutting assembly includes a second mounting plate 4, on which an electric cylinder 401 is arranged, a cutting seat 402 is arranged at the pushing end of the electric cylinder 401, a cutter 403 is arranged at one end of the cutting seat 402, and the cutter 403 is driven by the electric cylinder 401 to cut horizontally, and the cutter 403 reciprocates in the cutting gap, a material discharge cover 15 is arranged on one side of the guide seat 13, a material receiving box 5 is arranged at the bottom of the material discharge cover 15 for collecting the cut silicon rods 11, a detection port 151 is arranged at the top of the material discharge cover 15, and a distance measuring assembly is arranged above the detection port, and the size of the cut silicon rods 11 is detected by the distance measuring assembly to improve the overall cutting accuracy, and the distance measuring assembly is installed on one side of the side mounting plate 2.

[0025] The distance measuring component includes a reference plate 201, which is arranged on one side of the side mounting plate 2 and is located above the cutting gap. An adjustment seat 14 is arranged on the side mounting plate 2, and a slide groove is arranged in the adjustment seat 14. A screw sleeve 142 is slidably matched in the slide groove. The inner thread of the screw sleeve 142 is matched with an adjusting screw 141. The adjusting screw 141 is installed in the adjustment seat 14 through a bearing. One end of the adjusting screw 141 is connected to a handle for adjusting the spacing. A detection seat 143 is arranged on one side of the screw sleeve 142 through a connecting rod. A laser rangefinder 144 is installed in the detection seat 143. The laser rangefinder 144 is facing the reference plate 201 to quickly detect the distance. An infrared sensor 145 is installed at the bottom of the detection seat 143 to detect the discharge of the silicon rod 11. The infrared sensor 145 is electrically connected to the electric cylinder 401 to control the movement of the electric cylinder 401. After the distance length is set, when the silicon rod 11 reaches the specified distance, the infrared sensor 145 immediately detects and controls the electric cylinder 401 to perform cutting operations for precise cutting.

[0026] The specific usage and function of this embodiment are as follows:

[0027] First, the cutting length is set according to the technical requirements, the distance of the detection seat 143 is adjusted, and the distance to the reference plate 201 is detected by the laser rangefinder 144, which is the cutting size. Multiple silicon rods 11 are conveyed to the feed seat 121, and the double-rod slide cylinder 6 is started, so that the first conveying platform 7 and the second conveying platform 8 are tightly fitted to the silicon rods 11 to ensure the stability of the conveying, and then the first motor 301 and the second motor 602 are started for continuous conveying. When the silicon rod 11 reaches directly below the infrared sensor 145, the electric cylinder 401 is immediately started for rapid cutting, and the operation is repeated to achieve simultaneous cutting of multiple groups of silicon rods 11, and ensure that the sizes of the multiple groups of silicon rods 11 are uniform, and finally they are collected in the receiving box 5.

[0028] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A multi-station cutting device for single crystal silicon rods, characterized in that: The invention comprises a workbench (1), wherein a side mounting plate (2) is arranged on the workbench (1), a vertical plate (12) is arranged at one end of the side mounting plate (2), a feed seat (121) is arranged on one side of the vertical plate (12), a plurality of feed channels are arranged on the feed seat (121) for conveying silicon rods (11), a conveying mechanism is arranged on one side of the vertical plate (12), and the silicon rods (11) are conveyed synchronously by the conveying mechanism, and a transition plate (102) is further arranged on the workbench (1), a plurality of positioning holes are arranged on the transition plate (102), and the plurality of positioning holes correspond to the plurality of feed channels one by one, and the transition plate (102) A pair of guide seats (13) are provided on one side of the guide seat (102), a cutting gap is left between the guide seats (13), and the guide seats (13) are installed on the side mounting plate (2), a cutting assembly is slidably matched between the guide seats (13), and the silicon rods are quickly cut by the cutting assembly, a material discharge cover (15) is provided on one side of the guide seat (13), a material receiving box (5) is provided at the bottom of the material discharge cover (15), and is used to collect the cut silicon rods (11), a detection port (151) is provided at the top of the material discharge cover (15), and a distance measuring assembly is provided above the detection port, and the size of the cut silicon rods (11) is detected by the distance measuring assembly.

2. The multi-station cutting device for single crystal silicon rods according to claim 1, characterized in that: The conveying mechanism comprises a first conveying platform (7), the first conveying platform (7) being mounted on one side of a side mounting plate (2), a second conveying platform (8) being arranged above the first conveying platform (7), the second conveying platform (8) and the first conveying platform (7) being both installed with anti-slip belts (9), the second conveying platform (8) being mounted on one side of a lifting platform (10), the lifting platform (10) being mounted on the inner side of a slide of a double-rod slide cylinder (6), the double-rod slide cylinder (6) being provided with the other side of a side mounting plate (2), an adapter plate (601) being arranged on the outer side of a slide of the double-rod slide cylinder (6), a second motor (602) being arranged on the adapter plate (601), a driving end of the second motor (602) being connected to the second conveying platform (8), a first mounting plate (3) being arranged on the workbench, a first motor (301) being fixed on the first mounting plate (3), a driving end of the first motor (301) being connected to the first conveying platform (7), and driving the first conveying platform (7) to perform continuous conveying.

3. The multi-station cutting device for single crystal silicon rods according to claim 1, characterized in that: A chip collecting box (101) is placed on the workbench (1) below the cutting gap, and is used to collect chips generated by cutting.

4. The multi-station cutting device for single crystal silicon rods according to claim 1, characterized in that: The cutting assembly comprises a second mounting plate (4), an electric cylinder (401) being arranged on the second mounting plate (4), a cutting seat (402) being arranged at the pushing end of the electric cylinder (401), a cutting knife (403) being arranged at one end of the cutting seat (402), and the cutting knife (403) is driven by the electric cylinder (401) to perform horizontal cutting.

5. The multi-station cutting device for single crystal silicon rods according to claim 1, characterized in that: The distance measuring assembly comprises a reference plate (201), the reference plate (201) being arranged on one side of the side mounting plate (2) and being located above the cutting gap; an adjustment seat (14) being arranged on the side mounting plate (2); a slide groove being arranged in the adjustment seat (14); a screw sleeve (142) being slidably fitted in the slide groove; an adjusting screw (141) being fitted in the inner thread of the screw sleeve (142); the adjusting screw (141) being mounted in the adjustment seat (14) via a bearing; one end of the adjusting screw (141) being connected to a handle for adjusting the spacing; a detection seat (143) being arranged on one side of the screw sleeve (142) via a connecting rod; a laser distance meter (144) being installed in the detection seat (143); the laser distance meter (144) being directly opposite to the reference plate (201); and an infrared sensor (145) being installed at the bottom of the detection seat (143) for detecting the discharge of the silicon rod (11).

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