Sputtering coating machine
By using a combination of fixed prisms and rotating parts in the sputtering coating machine, continuous coating and automatic flip of coating products are achieved, solving the problem of long coating process time in the prior art, and improving coating efficiency and product quality.
Patent Information
- Application Number
- CN202421181529.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-28
- Publication Date
- 2025-03-07
- Estimated Expiration
- 2034-05-28
AI Technical Summary
In the single coating process, existing sputtering coating machines can only coat a single product, and when replacing the product, it is necessary to disassemble and empty the coating box, resulting in a long process time and affecting the coating efficiency.
A sputtering coating machine is designed, using a combination of fixed prisms and rotating parts, allowing the coating product to be continuously coated without disassembly, and the product will be automatically flipped and positioned by clamping parts and rotating parts.
This design significantly saves time in replacing coating products, improves the efficiency of coating processes, reduces the need for manual operation, and further improves product quality through automatic flip and drying functions.
Smart Images
Figure CN222574756U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of coating equipment, and in particular to a sputtering coating machine. Background Art
[0002] Coating refers to a technical means of covering the surface of a material with one or more layers of thin film in order to protect, improve or change the surface performance and chemical properties of the material, usually using technologies such as physical vapor deposition or chemical vapor deposition.
[0003] In the related art, a sputtering coating machine is designed, which includes a coating box, in which a positive substrate and a negative substrate are arranged. The positive substrate is used to fix the coating product, and the negative substrate is used to fix the coating material. When coating, it is necessary to ensure that the coating box is a vacuum environment, and a voltage is added between the positive and negative electrodes to make the entire magnetic field take effect. The coating material located on the negative substrate sputters out sputtering particles under the action of the electric field. The sputtering particles will move toward the positive substrate, and then form a deposition on the surface of the coating product, and finally form a specific film.
[0004] With respect to the above-mentioned related technologies, there are the following problems: the above-mentioned coating machine can only perform sputtering coating on a single product in one coating process. After the coating of the product is completed, the coating box needs to be opened and the original product needs to be disassembled to replace the new product. However, after the coating box is opened, outside air will enter the coating box. When coating the next product, the air in the coating box needs to be pumped out again. The overall process takes a long time, which affects the coating efficiency, so it needs to be improved. Utility Model Content
[0005] In order to improve the coating efficiency of a sputtering coating machine and save process time, the present application provides a sputtering coating machine.
[0006] A sputtering coating machine provided in this application adopts the following technical solution:
[0007] A sputtering coating machine comprises a coating box, wherein a positive electrode substrate and a negative electrode substrate are arranged in the coating box, a fixed prism is arranged on the side of the positive electrode substrate facing the negative electrode substrate, a first rotating member is arranged in the coating box, the first rotating member is connected to the fixed prism to drive the fixed prism to rotate, each side wall of the fixed prism is provided with a mounting groove for placing a coating product, and the upper and lower inner walls of the mounting groove are provided with clamping members for fixing the coating product.
[0008] By adopting the above technical solution, the coated product is placed in the installation groove, and the coated product is fixed by the clamping member. Driven by the first rotating member, the coated product can face the negative substrate to carry out the coating process. When the coating of the coated product is completed, the first rotating member will drive the fixed prism to continue to rotate, so that the coated products on other surfaces can face the negative substrate for continuous coating, which saves the time spent on replacing the coated product and improves the efficiency of the coating process.
[0009] Optionally, the clamping member includes an electric telescopic rod, a mounting block, a second rotating member and an abutment block, the electric telescopic rod is connected to the inner wall of the mounting groove, the piston rod of the electric telescopic rod is arranged in a vertical direction, the mounting block is connected to the piston rod end wall of the electric telescopic rod, the second rotating member is installed on a side of the mounting block away from the electric telescopic rod, the abutment block is connected to the output shaft of the second rotating member, the abutment blocks on both sides are used to clamp the coated product, and the fixed prism is hollow inside.
[0010] By adopting the above technical solution, when the coated product is placed in the installation groove, the electric telescopic rods on both sides will drive the installation block and the abutment block to move toward the coated product, and tighten the coated product from the upper and lower sides. When the coating is completed on the side of the coated product facing the negative electrode plate, the second rotating part will drive the coated product to turn over and coat the other side in the same way, so as to save the time of manual flipping of the coated product.
[0011] Optionally, a vacuum suction cup is provided on a side of the abutment block facing the coated product, and a vacuum pump is provided on a side wall of the abutment block, and the vacuum pump is connected to the vacuum suction cup.
[0012] By adopting the above technical solution, the provision of a vacuum suction cup can increase the fastening strength of the abutment block on the coated product, thereby reducing the probability of the coated product falling off when the second rotating member and the abutment block drive the coated product to turn over, thereby improving stability.
[0013] Optionally, clamping grooves are provided on both side walls of the installation groove, and pushing cylinders are arranged in the clamping grooves. The piston rods of the pushing cylinders on both sides are arranged facing each other, and the end walls of the piston rods of the pushing cylinders are connected to fastening blocks for abutting the side walls of the coated product.
[0014] By adopting the above technical solution, the fastening block abuts against the side walls of the coated product and cooperates with the abutment blocks on the upper and lower sides to improve the stability of the coated product in the installation groove.
[0015] Optionally, hidden grooves are provided on the upper and lower surfaces of the fastening block, and the hidden grooves penetrate through the side wall of the fastening block facing the coated product. A lifting cylinder is arranged in the hidden groove, and the piston rod of the lifting cylinder is arranged in a vertical direction. An extension block is provided on the end wall of the piston rod of the lifting cylinder, and the surface of the extension block is flush with the side of the fastening block facing the coated product.
[0016] By adopting the above technical solution, when the lifting cylinder is started, it can drive the extension block to move toward the abutment block until it abuts against the abutment block, thereby fully covering the coated product together with the abutment block and the fastening block. On the one hand, it improves the stability of the coated product, and on the other hand, it can prevent splashed particles on the coating material from entering the fixed prism.
[0017] Optionally, a drying post is provided on the internal top wall of the fixed prism, a heating wire is provided in the drying port, an air supply fan is provided on the top wall of the fixed prism, and the air supply fan is connected to the drying port.
[0018] By adopting the above technical solution, when the second rotating part drives the coated product to rotate, the side that has completed the coating will face the inside of the fixed prism, and air will be introduced toward the drying port through the blower. The heat generated by the heating wire can quickly dry the deposited film on the surface of the coated product, thereby improving product quality and saving overall production time.
[0019] Optionally, a ground rail is provided in the coating box, a mounting platform is slidably connected to the ground rail, and a countersunk hole for mounting the first rotating member is provided on the surface of the mounting platform.
[0020] By adopting the above technical solution, the ground rails and the installation platform are provided to move the fixed prism, so that the staff can easily disassemble the coated products fixed on the fixed prism.
[0021] Optionally, a separation film is provided on a side of the positive electrode substrate facing the fixed prism.
[0022] By adopting the above technical solution, the isolation film can be provided to protect the surface of the positive electrode substrate to prevent the sputtered particles from the coating material from being deposited on the surface of the positive electrode substrate to form a film, thereby affecting the normal use of the positive electrode substrate.
[0023] In summary, the present application includes at least one of the following beneficial technical effects:
[0024] 1. Place the coated product in the installation groove, fix the coated product by the clamping member, and drive the first rotating member so that the coated product can face the negative electrode substrate to carry out the coating process. When the coating of the coated product is completed, the first rotating member will drive the fixed prism to continue to rotate, so that the coated products on other surfaces can face the negative electrode substrate to carry out continuous coating, which saves the time spent on replacing the coated product and improves the efficiency of the coating process;
[0025] 2. When the coated product is placed in the installation groove, the electric telescopic rods on both sides will drive the mounting block and the abutment block to move toward the coated product, and tighten the coated product from the upper and lower sides. When the coating is completed on the side of the coated product facing the negative electrode plate, the second rotating part will drive the coated product to turn over and coat the other side in the same way, so as to save the time of manual flipping of the coated product. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] Figure 1 It is a top view of a sputtering coating machine in an embodiment of the present application.
[0027] Figure 2 It is a schematic diagram of the structure of the ground rail and the fixed prism in the embodiment of the present application.
[0028] Figure 3 yes Figure 2 A partial enlarged view of point A in the middle.
[0029] Figure 4 yes Figure 2 A partial enlarged view of point B in the middle.
[0030] Figure 5 It is a schematic diagram of the structure of the drying port of the fixed prism in the embodiment of the present application.
[0031] Explanation of the reference numerals: 1. coating box; 11. positive electrode substrate; 111. isolation film; 12. negative electrode substrate; 2. fixed prism; 21. mounting groove; 22. clamping groove; 23. pushing cylinder; 24. fastening block; 241. hidden groove; 242. lifting cylinder; 243. extension block; 25. drying port; 26. heating wire; 27. air supply fan; 3. first rotating part; 4. clamping part; 41. electric telescopic rod; 42. mounting block; 43. second rotating part; 44. abutment block; 441. vacuum suction cup; 442. vacuum pump; 5. floor rail; 51. mounting platform; 511. countersunk hole. DETAILED DESCRIPTION
[0032] The following is combined with Figure 1-5 This application is described in further detail.
[0033] The present application embodiment discloses a sputtering coating machine. Figure 1 and Figure 2 , including a coating box 1, in which a positive electrode substrate 11 and a negative electrode substrate 12 are arranged, a coating material is fixed on the negative electrode substrate 12, an isolation film 111 is arranged on the side of the positive electrode substrate 11 facing the negative electrode substrate 12, so as to prevent splashed particles from forming a deposition film on the surface of the isolation film 111, a ground rail 5 is arranged on the side of the positive electrode substrate 11 close to the negative electrode substrate 12, and a mounting platform 51 is slidably connected to the ground rail 5, and a cylinder is arranged in the coating box 1, and the cylinder is parallel to the ground rail 5, so as to drive the mounting platform 51 to move.
[0034] Reference Figure 2 A countersunk hole 511 is provided on the surface of the mounting platform 51, and a first rotating member 3 is arranged in the countersunk hole 511. In this embodiment, the first rotating member 3 is a motor, and its output shaft is arranged in the vertical direction. The output shaft of the first rotating member 3 is connected to a fixed prism 2. In this embodiment, the fixed prism 2 is a triangular prism. In other embodiments, the fixed prism 2 may also be a quadrangular prism, a pentagonal prism, etc.
[0035] Reference Figure 2 and Figure 3 Each side wall of the fixed prism 2 is provided with a mounting groove 21 for the coating product to be installed. The upper and lower inner walls of the mounting groove 21 are provided with clamping members 4 for fixing the coating product. The clamping member 4 includes an electric telescopic rod 41, a mounting block 42, a second rotating member 43 and an abutting block 44. The electric telescopic rod 41 is connected to the corresponding inner wall of the mounting groove 21. The piston rod of the electric telescopic rod 41 is arranged in the vertical direction. The mounting block 42 is connected to the piston rod end wall of the electric telescopic rod 41. The side of the mounting block 42 away from the electric telescopic rod 41 is provided with a second rotating member 43. The hole is set, and the output shaft of the second rotating member 43 is set in the vertical direction. In this embodiment, the second rotating member 43 adopts a motor, and the abutment block 44 is connected to the output shaft end wall of the second rotating member 43. A vacuum suction cup 441 is set on the side of the abutment block 44 facing the coated product, and a vacuum pump 442 is set on the side wall of the abutment block 44. The vacuum pump 442 is connected to the vacuum suction cup 441 to improve the adsorption force on the coated product. The interior of the fixed prism 2 is hollow, so that the second rotating member 43 drives the coated product to rotate, thereby coating the other side of the coated product.
[0036] Reference Figure 2 and Figure 4, clamping grooves 22 are provided on both side walls of the installation groove 21, and a pushing cylinder 23 is provided in each clamping groove 22. The piston rods of the pushing cylinders 23 in the clamping grooves 22 on both sides are arranged facing each other, and the piston rod end walls of the pushing cylinders 23 are connected with fastening blocks 24 by welding. Under the action of the pushing cylinders 23 on both sides, the fastening blocks 24 on both sides can abut against the side walls of the coated product; hidden grooves 241 are provided on the upper and lower end surfaces of the fastening blocks 24, and the hidden grooves 241 penetrate the side wall of the fastening blocks 24 close to the coated product, and a lifting groove 241 is provided in the hidden grooves 241. The lowering cylinder 242, the piston rod of the lifting cylinder 242 is arranged in the vertical direction, and the piston rod end wall of the lifting cylinder 242 is provided with an extension block 243, and the surface of one side of the extension block 243 is flush with the surface of the fastening block 24 with the hidden groove 241. Driven by the lifting cylinder 242, the extension block 243 will extend out of the hidden groove 241 and abut against the surface of the abutment block 44, and cooperate with the fastening block 24 and the abutment block 44 to fully surround the coated product, thereby preventing splashed particles from entering the fixed prism 2 to ensure the coating quality of the coated product.
[0037] Reference Figure 2 and Figure 5 A drying port 25 is provided on the top wall inside the fixed prism 2, and a heating wire 26 is provided inside the drying port 25. The heating wire 26 will generate heat when energized. An air supply fan 27 is provided on the top wall of the fixed prism 2, and the air supply fan 27 is connected to the drying port 25 for drying the deposited film on the surface of the coated product facing the inside of the fixed prism 2.
[0038] The implementation principle of a sputtering coating machine in an embodiment of the present application is as follows: a coated product is placed in a mounting groove 21, and the coated product is fixed by a clamping member 4, and driven by a first rotating member 3 so that the coated product can face the negative electrode substrate 12, thereby performing a coating process. When the coating of the coated product is completed, the second rotating member 43 will drive the coated product to turn over to coat the other side, and at the same time, the air supply fan 27 will dry the turned film through the heating wire 26; when both sides of the coated product are coated, the first rotating member 3 will drive the fixed prism 2 to continue to rotate, so that the coated products on other sides can face the negative electrode substrate 12 for continuous coating, thereby saving the time consumed in replacing the coated product and improving the efficiency of the coating process.
[0039] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.
Claims
1. A sputtering coating machine, comprising a coating box (1), wherein a positive electrode substrate (11) and a negative electrode substrate (12) are arranged in the coating box (1), characterized in that: A fixed prism (2) is arranged on the side of the positive electrode substrate (11) facing the negative electrode substrate (12), and a first rotating member (3) is arranged in the coating box (1). The first rotating member (3) is connected to the fixed prism (2) so as to drive the fixed prism (2) to rotate. Each side wall of the fixed prism (2) is provided with a mounting groove (21) for placing a coating product, and the upper and lower inner walls of the mounting groove (21) are provided with clamping members (4) for fixing the coating product.
2. A sputtering coating machine according to claim 1, characterized in that: The clamping member (4) comprises an electric telescopic rod (41), a mounting block (42), a second rotating member (43) and an abutment block (44); the electric telescopic rod (41) is connected to the inner wall of the mounting groove (21); the piston rod of the electric telescopic rod (41) is arranged in the vertical direction; the mounting block (42) is connected to the piston rod end wall of the electric telescopic rod (41); the second rotating member (43) is mounted on a side of the mounting block (42) away from the electric telescopic rod (41); the abutment block (44) is connected to the output shaft of the second rotating member (43); the abutment blocks (44) on both sides are used to clamp the coated product; the fixed prism (2) is hollow inside.
3. A sputtering coating machine according to claim 2, characterized in that: A vacuum suction cup (441) is arranged on the side of the abutment block (44) facing the coated product, and a vacuum pump (442) is arranged on the side wall of the abutment block (44), and the vacuum pump (442) is connected to the vacuum suction cup (441).
4. A sputtering coating machine according to claim 1, characterized in that: The side walls on both sides of the installation groove (21) are provided with clamping grooves (22), and a pushing cylinder (23) is arranged in the clamping groove (22). The piston rods of the pushing cylinders (23) on both sides are arranged facing each other, and the end wall of the piston rod of the pushing cylinder (23) is connected to a fastening block (24) for abutting against the side wall of the coated product.
5. A sputtering coating machine according to claim 4, characterized in that: The upper surface and the lower surface of the fastening block (24) are both provided with a hidden groove (241), and the hidden groove (241) is provided through the side wall of the fastening block (24) facing the coated product. A lifting cylinder (242) is arranged in the hidden groove (241), and the piston rod of the lifting cylinder (242) is arranged in the vertical direction. An extension block (243) is arranged on the end wall of the piston rod of the lifting cylinder (242), and the surface of the extension block (243) is flush with a side of the fastening block (24) facing the coated product.
6. The sputtering coating machine according to claim 1, characterized in that: The top wall of the fixed prism (2) is provided with a drying port (25), a heating wire (26) is provided in the drying port (25), and the top wall of the fixed prism (2) is provided with an air supply fan (27), which is in communication with the drying port (25).
7. The sputtering coating machine according to claim 1, characterized in that: A ground rail (5) is arranged in the coating box (1), a mounting platform (51) is slidably connected to the ground rail (5), and a countersunk hole (511) for mounting the first rotating member (3) is provided on the surface of the mounting platform (51).
8. The sputtering coating machine according to claim 1, characterized in that: A separation film (111) is provided on one side of the positive electrode substrate (11) facing the fixed prism (2).