Floating nickel brushing head mechanism of automatic nickel brushing workstation
By designing the floating nickel brushing head mechanism of the automatic nickel brushing workstation and combining with a six-axis robot to achieve automated operations, the problems of single-piece work time, unstable quality and poor product consistency during the electroplating of semiconductor equipment parts are solved, and efficient and stable nickel plating effect is achieved.
Patent Information
- Application Number
- CN202421123780.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-22
- Publication Date
- 2025-03-07
- Estimated Expiration
- 2034-05-22
AI Technical Summary
There are problems such as single-piece working time, unstable quality and poor product consistency in the electroplating process of existing semiconductor equipment parts.
A floating nickel brush head mechanism for automatic nickel brushing workstations is designed, and automated operations are achieved with a six-axis robot. The mechanism includes a quick change plate for brush handles, quick change positioning plates, coupling vertical plates, cross-link rods, T-shaped plates, counterweight rods and nickel brush heads. The pressure of the nickel liquid head is adjusted through the four-link structure and counterweight screws to ensure uniform nickel plating on the surface of the workpiece.
It effectively reduces single-piece work time, ensures the quality of batch production and product consistency, and realizes automated operation of electroplating nickel.
Smart Images
Figure CN222574824U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of nickel electroplating, in particular to a floating nickel brushing head mechanism of an automatic nickel brushing workstation. Background Art
[0002] With the wide application of semiconductors in various fields and the continuous development of the domestic semiconductor industry, the demand for precision parts of semiconductor equipment is also increasing. In order to increase the corrosion resistance, voltage breakdown resistance, wear resistance and consistency and uniformity of the workpiece surface, the surface of the metal parts of the semiconductor equipment needs to be treated. In addition, the electroplating of nickel on some parts of semiconductor equipment is characterized by high labor intensity, high working hours per piece and low one-time yield of products. Combined with the current broad prospects of the semiconductor industry, it is technically feasible to apply automatic electroplating to the semiconductor industry. Therefore, research based on industrial robot automated production lines is carried out for the electroplating nickel industry.
[0003] At present, the electroplating of metal products in the company is completed by manual operation, which will result in long working hours for each piece, quality cannot be guaranteed during batch production, and product consistency is poor. To solve the above problems, a floating nickel brushing head mechanism of an automatic nickel brushing workstation is proposed. Utility Model Content
[0004] In order to solve the above problems, the utility model provides a floating nickel brushing head mechanism of an automatic nickel brushing workstation. The floating nickel brushing head mechanism of the automatic nickel brushing workstation cooperates with a six-axis manipulator to realize the automated operation of nickel electroplating, effectively reducing the working hours of a single piece, effectively ensuring the quality during batch production, and achieving good product consistency.
[0005] The technical solution of the utility model is as follows:
[0006] A floating nickel brushing head mechanism of an automatic nickel brushing workstation is connected to a six-axis manipulator, and includes a brush handle quick-change disk, a quick-change positioning plate, a connecting vertical plate, a horizontal connecting rod, a T-plate, a counterweight rod and a nickel brushing head. The quick-change positioning plate is connected to the six-axis manipulator through the brush handle quick-change disk, the connecting vertical plate is fixedly connected to the bottom of the quick-change positioning plate, the T-plate includes a horizontal and vertical part, the connecting vertical plate, the horizontal connecting rod, the T-plate and the counterweight rod are connected in sequence to form a four-bar structure, the horizontal and vertical parts of the connecting vertical plate and the T-plate are respectively two parallel vertical rods of the four-bar structure, the horizontal connecting rod and the counterweight rod are two parallel transverse rods of the four-bar structure, and the horizontal connecting rod is above the counterweight rod; the nickel brushing head is fixedly connected to the vertical part of the T-plate.
[0007] A counterweight screw is threadedly connected to one end of the counterweight rod away from the T-shaped plate.
[0008] The nickel brush head comprises a connecting block, a connecting rod and a disc, wherein the connecting block is fixedly connected to the T-shaped plate, the disc is fixedly connected to the connecting block through the connecting rod, and a plurality of circular holes are evenly distributed on the bottom surface of the disc.
[0009] A nickel liquid joint is provided on the top of the disc.
[0010] The nickel liquid joint is connected to the nickel liquid supply equipment through a pipeline.
[0011] A pipe clamp for fixing the pipeline is arranged on the connecting vertical plate.
[0012] A circular non-woven fabric is fixedly arranged on the bottom of the disc.
[0013] A cable clamp for fixing a cable for supplying power to the nickel brush head is arranged on the connecting vertical plate.
[0014] The beneficial effects of the utility model are:
[0015] The utility model discloses a floating nickel brushing head mechanism of an automatic nickel brushing workstation. The floating nickel brushing head mechanism of the automatic nickel brushing workstation cooperates with a six-axis manipulator to realize the automated operation of nickel electroplating, effectively reducing the working hours of a single piece, effectively ensuring the quality in the batch production process, and achieving good product consistency. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] By reading the detailed description of the preferred embodiment below, the scheme and advantages of the present application will become clear to those skilled in the art. The accompanying drawings are only used to illustrate the preferred embodiment and are not considered to be limiting of the present invention.
[0017] In the attached picture:
[0018] Figure 1 It is a three-dimensional structural schematic diagram of a floating nickel brushing head mechanism of an automatic nickel brushing workstation according to an embodiment of the utility model;
[0019] Figure 2 It is a front view of a floating nickel brushing head mechanism of an automatic nickel brushing workstation according to an embodiment of the utility model;
[0020] Figure 3 for Figure 2 Middle AA section view;
[0021] The components represented by the reference numerals in the figure are:
[0022] The utility model comprises: 1. a quick-change plate for a brush handle, 2. a quick-change positioning plate, 3. a connecting vertical plate, 4. a horizontal connecting rod, 5. a T-plate, 6. a pipe clamp, 7. a cable clamp, 8. a counterweight rod, 9. a counterweight screw, 10. a nickel brush head, 11. a nickel liquid joint, 12. a round non-woven fabric. DETAILED DESCRIPTION
[0023] like Figure 1-Figure 3 As shown, the floating nickel brushing head mechanism of the automatic nickel brushing workstation is connected to the six-axis manipulator, including a brush handle quick-change disk 1, a quick-change positioning plate 2, a connecting vertical plate 3, a horizontal connecting rod 4, a T-plate 5, a counterweight rod 8 and a nickel brushing head 10. The quick-change positioning plate 2 is connected to the six-axis manipulator through the brush handle quick-change disk 1, the connecting vertical plate 3 is fixedly connected to the bottom of the quick-change positioning plate 2, the T-plate 5 includes a horizontal part and a vertical part, the connecting vertical plate 3, the horizontal connecting rod 4, the T-plate 5 and the counterweight rod 8 are connected in sequence to form a four-bar structure, the horizontal and vertical parts of the connecting vertical plate 3 and the T-plate 5 are respectively two parallel vertical rods of the four-bar structure, the horizontal connecting rod 4 and the counterweight rod 8 are two parallel transverse rods of the four-bar structure, and the horizontal connecting rod 4 is above the counterweight rod 8; the nickel brushing head 10 is fixedly connected to the vertical part of the T-plate 5.
[0024] A counterweight screw 9 is threadedly connected to one end of the counterweight rod 8 away from the T-shaped plate 5 .
[0025] The nickel brush head 10 includes a connecting block, a connecting rod and a disc. The connecting block is fixedly connected to the T-shaped plate 5. The disc is fixedly connected to the connecting block through the connecting rod. A plurality of circular holes are evenly distributed on the bottom surface of the disc.
[0026] A nickel liquid joint 11 is provided on the top of the disc.
[0027] The nickel liquid connector 11 is connected to the nickel liquid supply device through a pipeline.
[0028] A pipe clamp 6 for fixing the pipeline is arranged on the connecting vertical plate 3 .
[0029] A circular nonwoven fabric 12 is fixedly arranged at the bottom of the disc.
[0030] A cable clamp 7 for fixing a cable for supplying power to the nickel brush head 10 is provided on the connecting vertical plate 3 .
[0031] In a specific embodiment: the floating nickel brushing head mechanism of the automatic nickel brushing workstation includes a brush handle quick-change plate 1 (purchased part, model QT8244 A021), a quick-change positioning plate 2, a connecting plate 3, a horizontal connecting rod 4, a T-type plate 5, a pipe clamp 6, a cable clamp 7, a counterweight rod 8, a counterweight screw 9, a nickel brush head 10, a nickel liquid joint 11 and a circular non-woven fabric 12; the present invention manually loads the material to the working platform, and starts the equipment after the workpiece is clamped. The six-axis manipulator is connected to the quick-change positioning plate 2 and the connecting plate 3 through the brush handle quick-change plate 1, and the pipe clamp 6 and the cable clamp 7 are respectively installed on both sides of the connecting plate 3. The nickel liquid joint 11 and the circular non-woven fabric 12 are both installed on the nickel brush head 10, and the nickel brush head 10 is then connected to the T-type plate 5. The vertical plate 3, the horizontal connecting rod 4, the T-plate 5 and the counterweight rod 8 are connected in sequence to form a four-bar structure. The counterweight screw 9 is screwed onto the counterweight rod 8 to reduce the downward pressure of the entire nickel liquid head. According to the setting, the six-axis manipulator drives the entire nickel brushing head mechanism to automatically operate along the trajectory. By replacing different counterweight screws 9, the pressure of the nickel brushing head on the workpiece can be changed, thereby avoiding scratching the workpiece surface due to excessive downward pressure of the nickel brushing head. The nickel brushing head automatically inputs nickel liquid through the nickel liquid connector 11, and at the same time supplies power to the electrodes on the nickel brushing head 10 to electroplate the nickel liquid to the surface of the workpiece to complete the automatic nickel brushing work.
[0032] The brush handle quick-change plate 1 is an outsourced part used for quick replacement of nickel brush heads 10 to be compatible with a variety of nickel brush heads 10 quick-change. The brush handle quick-change plate 1 is pneumatically fastened to the quick-change plate on the side of the six-axis manipulator, causing the entire circular nickel brush head 10 mechanism to move with the six-axis manipulator; the quick-change positioning plate 2 is used for precise positioning of the nickel brush head 10 that has been quickly replaced; the connecting vertical plate 3, the horizontal connecting rod 4, the T-plate 5 and the counterweight rod 8 are connected in sequence to form a four-bar structure, and the counterweight screw 9 is screwed onto the counterweight rod 8 to adjust the downward pressure of the entire nickel liquid head to prevent scratches on the workpiece due to excessive downward pressure; the φ1mm circular holes evenly distributed on the circular titanium alloy plate at the bottom of the nickel brush head 10 will uniformly penetrate the circular non-woven fabric 12, and then be spread on the surface of the workpiece through the circular non-woven fabric 12.
[0033] The floating nickel brushing head mechanism of the automatic nickel brushing workstation cooperates with the six-axis manipulator to realize the automated operation of nickel electroplating, effectively reducing the working hours of each piece. The quality is effectively guaranteed during the batch production process, and the product consistency is good.
Claims
1. A floating nickel brushing head mechanism of an automatic nickel brushing workstation, connected to a six-axis manipulator, characterized in that: The invention comprises a brush handle quick-change plate (1), a quick-change positioning plate (2), a connecting plate (3), a horizontal connecting rod (4), a T-plate (5), a counterweight rod (8) and a nickel brush head (10). The quick-change positioning plate (2) is connected to a six-axis manipulator via the brush handle quick-change plate (1). The connecting plate (3) is fixedly connected to the bottom of the quick-change positioning plate (2). The T-plate (5) comprises a horizontal part and a vertical part. The connecting plate (3), the horizontal connecting rod (4), the T-plate (5) and the counterweight rod (8) are connected in sequence to form a four-bar structure. The horizontal and vertical parts of the connecting plate (3) and the T-plate (5) are respectively two parallel vertical rods of the four-bar structure. The horizontal connecting rod (4) and the counterweight rod (8) are two parallel transverse rods of the four-bar structure. The horizontal connecting rod (4) and the counterweight rod (8) are two parallel transverse rods of the four-bar structure. The horizontal connecting rod (4) is above the counterweight rod (8). The nickel brush head (10) is fixedly connected to the vertical part of the T-plate (5).
2. The floating nickel brushing head mechanism of the automatic nickel brushing workstation according to claim 1 is characterized in that: A counterweight screw (9) is threadedly connected to one end of the counterweight rod (8) away from the T-shaped plate (5).
3. The floating nickel brushing head mechanism of the automatic nickel brushing workstation according to claim 1 is characterized in that: The nickel brush head (10) comprises a connecting block, a connecting rod and a disc, wherein the connecting block is fixedly connected to the T-shaped plate (5), and the disc is fixedly connected to the connecting block via the connecting rod, and a plurality of circular holes are evenly distributed on the bottom surface of the disc.
4. The floating nickel brushing head mechanism of the automatic nickel brushing workstation according to claim 3 is characterized in that: A nickel liquid joint (11) is provided on the top of the disc.
5. The floating nickel brushing head mechanism of the automatic nickel brushing workstation according to claim 4 is characterized in that: The nickel liquid joint (11) is connected to the nickel liquid supply equipment via a pipeline.
6. The floating nickel brushing head mechanism of the automatic nickel brushing workstation according to claim 5 is characterized in that: A pipe clamp (6) for fixing the pipeline is provided on the connecting vertical plate (3).
7. The floating nickel brushing head mechanism of the automatic nickel brushing workstation according to claim 3 is characterized in that: A circular non-woven fabric (12) is fixedly arranged at the bottom of the disc.
8. The floating nickel brushing head mechanism of the automatic nickel brushing workstation according to claim 1 is characterized in that: A cable clamp (7) for fixing a cable for supplying power to the nickel brush head (10) is provided on the connecting vertical plate (3).