Supporting rod charging tool and vapor deposition furnace

Abstract

The utility model discloses a die-pin loading tooling and vapor deposition furnace, the die-pin loading tooling comprises a muffle cylinder with both ends open, a shunt disc, a fixed disc and a plurality of die-pins, the shunt disc and the fixed disc are arranged in the muffle cylinder at intervals along the axial direction of the muffle cylinder, the shunt disc is provided with air holes, the number of the air holes is greater than that of the die-pins, and the fixed disc is provided with a plurality of air holes. A through hole is formed in each supporting rod, each supporting rod penetrates through the fixing disc to abut against the flow dividing disc, and the through hole of each supporting rod is right opposite to and communicated with one air hole. According to the invention, the process gas can be smoother in the deposition furnace, so that the product quality is improved and the production cost is saved.

Description

Technical Field

[0001] The utility model relates to the technical field of chemical equipment, and more specifically, to a rod-supporting charging tool. In addition, the utility model also relates to a vapor deposition furnace comprising the rod-supporting charging tool. Background Art

[0002] The vapor deposition furnace is an important equipment for material preparation. It forms a thin film or coating on the surface of the substrate through physical or chemical changes of gaseous substances. For example, silicon carbide materials are usually made using a vapor deposition furnace. Specifically, the vapor deposition furnace is loaded with molten silicon, and the preform is suspended by a support rod and inserted into the molten silicon in the vapor deposition furnace to generate crystalline silicon. At the same time, methane process gas is filled into the vapor deposition furnace. The methane gas decomposes into carbon and hydrogen under high temperature, and the carbon is deposited on the crystalline silicon to form silicon carbide materials. It can be seen that the flowability of the process gas in the furnace directly affects the deposition effect, and thus affects the product quality.

[0003] The traditional method of loading process gas is to install a support rod assembly inserted into the furnace on the loading tray, and set an air inlet hole connected to the furnace on the loading tray, and the process gas flows into the furnace through the air inlet hole. However, since the support rod assembly is generally composed of multiple support rods, the process gas can only flow into the furnace through the gaps between the support rods. If the process gas flows poorly, it will affect the deposition effect, resulting in low quality of the generated products and low utilization of the process gas, resulting in high production costs.

[0004] In summary, how to solve the problem of poor flow of process gases in a deposition furnace is an urgent problem to be solved by those skilled in the art. Utility Model Content

[0005] In view of this, the purpose of the utility model is to provide a support rod charging tool, which can make the process gas flow more smoothly in the deposition furnace, so as to improve product quality and save production costs.

[0006] Another object of the utility model is to provide a vapor deposition furnace comprising the above-mentioned support rod charging tooling.

[0007] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0008] A support rod loading tool comprises a muffle cylinder with openings at both ends, a diverter plate, a fixed plate and a plurality of support rods, wherein the diverter plate and the fixed plate are arranged in the muffle cylinder at intervals along the axial direction of the muffle cylinder, the diverter plate is provided with air holes in a number greater than the number of the support rods, each of the support rods is provided with a through hole, and each of the support rods passes through the fixed plate and abuts against the diverter plate, and the through hole is arranged to be directly opposite to and connected to one of the air holes.

[0009] Preferably, the fixed plate and the diverter plate are parallel to each other and are both arranged along an axial direction perpendicular to the muffle.

[0010] Preferably, a plurality of limiting holes for passing the supporting rods are evenly arranged on the fixing plate, and the central axis of each of the limiting holes is arranged to coincide with the central axis of one of the air holes.

[0011] Preferably, the support rod and the limiting hole are detachably plug-fitted.

[0012] Preferably, a fixing structure is provided between the diverter plate and the fixing plate.

[0013] Preferably, the fixing structure comprises three support rods arranged in a triangle, and each of the support rods is detachably connected between the diverter plate and the fixing plate.

[0014] Preferably, the periphery of the diverter plate is in sealing cooperation with the inner wall of the muffle, and the periphery of the fixed plate is in sealing cooperation with the inner wall of the muffle.

[0015] A vapor deposition furnace comprises the support rod charging tooling described in any one of the above items.

[0016] The support rod loading tooling provided by the utility model is applied to a vapor deposition furnace. When in use, one end of the muffle tube close to the diverter plate is connected to the process gas inlet. Since some of the air holes on the diverter plate are directly connected to the through holes in the multiple support rods, part of the process gas enters the inner holes of the multiple support rods through some of the air holes, while the other part of the process gas is diffused to the outer periphery of the multiple support rods through the remaining air holes, so as to avoid the support rods hindering the process gas from entering the furnace, so that the process gas is fully diffused to the inner holes and outer periphery of the multiple support rods, and the process gas flows more smoothly in the furnace. In this way, during deposition, the inner holes and outer walls of the support rods are densified at the same time, which improves the uniformity of crystal densification, that is, improves the quality of the generated product, and makes full use of the process gas to reduce production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0018] Figure 1 A schematic diagram of the structure of the support rod loading tooling provided by the utility model;

[0019] Figure 2 This is a schematic diagram of the assembly of the diverter plate and the fixed plate provided by the utility model.

[0020] Reference numerals:

[0021] 1-muffle; 2-diverter plate; 3-fixed plate; 4-support rod; 5-air vent; 6-through hole; 7-limiting hole; 8-support rod. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] The core of the utility model is to provide a supporting rod charging tool, which can make the process gas flow more smoothly in the deposition furnace, so as to improve product quality and save production costs.

[0024] Another core of the utility model is to provide a vapor deposition furnace including the above-mentioned support rod charging tooling.

[0025] It should be noted that, in the present embodiment, the directions or positional relationships indicated by “upper”, “lower”, “front”, “back”, etc. are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present application.

[0026] Please refer to Figure 1 and Figure 2 The present application provides a support rod loading tool, including a muffle 1 with openings at both ends, a diverter plate 2, a fixed plate 3 and a plurality of support rods 4, the diverter plate 2 and the fixed plate 3 are arranged in the muffle 1 along the axial direction of the muffle 1, the diverter plate 2 is provided with air holes 5, the number of which is greater than the number of the support rods 4, each support rod 4 is provided with a through hole 6, and each support rod 4 passes through the fixed plate 3 and abuts against the diverter plate 2, and its through hole 6 is arranged to be directly connected with one of the air holes 5.

[0027] It should be noted that the vapor deposition furnace usually has a material distribution plate installed at the furnace mouth, and the material distribution plate is used to hang the support rod 4 and allow the process gas to pass in. Therefore, the diverter plate 2 of the present application is installed on the material distribution plate through a pad, and the muffle tube 1 is sleeved on the outer periphery of the diverter plate 2 and the fixed plate 3 and fixed on the material distribution plate, so that the process gas is diffused to the outer periphery and inner hole of the support rod 4 through the multiple air holes 5 on the diverter plate 2 in turn, that is, the process gas circulates more smoothly in the furnace. At the same time, the muffle tube 1 plays a role in preventing the process gas from diffusing to the surroundings, so that the process gas must circulate around the outer periphery and inner hole of the support rod 4 to ensure that the process gas is deposited on the support rod 4.

[0028] The above-mentioned support rod loading tooling is applied to a vapor deposition furnace. When in use, one end of the muffle tube 1 close to the diverter plate 2 is connected to the process gas inlet. Since some of the air holes 5 on the diverter plate 2 are directly connected to the through holes 6 in the multiple support rods 4, part of the process gas enters the inner holes of the multiple support rods 4 through some of the air holes 5, while the other part of the process gas diffuses to the outer periphery of the multiple support rods 4 through the remaining air holes 5, so as to avoid the support rods 4 hindering the process gas from entering the furnace, so that the process gas is fully diffused to the inner holes and outer periphery of the multiple support rods 4, that is, the process gas flows more smoothly in the furnace. In this way, during deposition, the inner holes and outer walls of the support rods 4 are densified at the same time, which improves the uniformity of crystal densification, that is, improves the quality of the generated product, and makes full use of the process gas to reduce production costs.

[0029] Based on the above examples, please refer to Figure 2 The fixed plate 3 and the diverter plate 2 are parallel to each other and are arranged in an axial direction perpendicular to the muffle 1. In this way, the central axes of the fixed plate 3, the diverter plate 2 and the muffle 1 can be parallel to or coincide with each other. Even if the parallel fixed plate 3 and the diverter plate 2 are placed horizontally relative to the muffle 1, on the one hand, it is convenient for the support rod 4 to pass through the top opening of the muffle 1 and be inserted into the limiting hole 7 of the fixed plate 3, thereby avoiding the problem that the fixed plate 3 is tilted relative to the muffle 1 and the support rod 4 remains unchanged when being disassembled. On the other hand, the fixed plate 3 and the diverter plate 2 are parallel to each other, so that the installed support rod 4 can be kept in a vertical state to avoid the support rod 4 being tilted and contacting with its adjacent support rod 4, that is, avoiding the problem that the gap between two adjacent support rods 4 is too small and the process gas circulation is not smooth.

[0030] Based on the above examples, please refer to Figure 2 A plurality of limiting holes 7 for passing the supporting rods 4 are evenly arranged on the fixing plate 3 , and the central axis of each limiting hole 7 is arranged to coincide with the central axis of one of the air holes 5 .

[0031] It is understandable that each support rod 4 vertically passes through a limiting hole 7 and abuts against the diverter plate 2. Multiple limiting holes 7 are evenly arranged on the fixed plate 3, so that multiple support rods 4 can be evenly arranged, which is conducive to smoother flow of process gas in the space formed by the periphery of multiple support rods 4, thereby ensuring that the periphery of each support rod 4 is evenly densified. In addition, the central axis of each limiting hole 7 is arranged to coincide with the central axis of an air hole 5, so that the through hole 6 of the support rod 4 inserted in the limiting hole 7 is directly connected to the air hole 5 on the diverter plate 2, thereby ensuring that the inner hole of each support rod 4 is evenly densified. Therefore, the limiting hole 7 is arranged in the above manner, which not only plays a limiting role on the support rod 4 and prevents the support rod 4 from tipping over, but also ensures that the inner hole and periphery of each support rod 4 in the support rod 4 assembly are evenly densified, thereby improving the quality rate of the generated product.

[0032] Optionally, the support rod 4 and the limiting hole 7 have a clearance fit, that is, the diameter of the limiting hole 7 is slightly larger than the diameter of the support rod 4, which facilitates the insertion or exit of the support rod 4 and avoids the situation where the diameter of the support rod 4 is larger than the limiting hole 7, resulting in the support rod 4 being unchanged when being disassembled or even damaging the surface of the support rod 4.

[0033] In order to improve the structural stability of the support rod 4, on the basis of the above embodiment, the support rod 4 and the limiting hole 7 are detachably plugged together. Specifically, at least one groove is provided on the hole wall of the limiting hole 7, and at least one protrusion is provided on the outer wall of the support rod 4. The protrusion and the groove are adapted to be snap-fitted, so that the support rod 4 and the limiting hole 7 are detachably connected. This improves the structural stability of the support rod 4 while ensuring that the support rod 4 is easy to disassemble and assemble, prevents the support rod 4 from shaking and tipping over, and further ensures that the through hole 6 of each support rod 4 is connected to an air vent 5.

[0034] Furthermore, a fixing structure is arranged between the diverter plate 2 and the fixed plate 3, and the fixing structure connects the diverter plate 2 and the fixed plate 3 as a whole to prevent the fixed plate 3 and the diverter plate 2 from moving and offsetting, so that each limiting hole 7 on the fixed plate 3 always coincides with the central axis of an air hole 5 of the diverter plate 2, thereby effectively ensuring that the through hole 6 of each support rod 4 is connected to an air hole 5.

[0035] The fixed structure includes three support rods 8 arranged in a triangle. Figure 2 As shown, the fixed structure adopts a triangular support structure with a stable structure, which is conducive to improving the firmness of the connection between the fixed plate 3 and the diverter plate 2. In addition, each support rod 8 can be detachably connected between the diverter plate 2 and the fixed plate 3. Even if each support rod 8 is detachably arranged, it is convenient to adjust the relative position between the fixed plate 3 and the diverter plate 2 to ensure that the through hole 6 of each support rod 4 is connected to a vent hole 5.

[0036] On the basis of the above-mentioned embodiment, the periphery of the diverter plate 2 is sealed with the inner wall of the muffle 1, and / or the periphery of the fixed plate 3 is sealed with the inner wall of the muffle 1 to prevent the process gas from flowing into the furnace through the gap between the diverter plate 2 and the muffle 1 and the gap between the fixed plate 3 and the muffle 1 in sequence, that is, to ensure that the process gas flows through the outer periphery of the support rod 4 and the through hole 6, so as to improve the uniformity of the densification of the support rod 4 and make effective use of the process gas.

[0037] In addition to the above-mentioned support rod loading tooling, the utility model also provides a vapor deposition furnace including the support rod loading tooling disclosed in the above-mentioned embodiment. Please refer to the prior art for the structure of other parts of the vapor deposition furnace, which will not be described in detail herein.

[0038] It should be noted that, in this specification, relational terms such as first and second are merely used to distinguish one entity from other entities, but do not necessarily require or imply any actual relationship or order between these entities.

[0039] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0040] The above is a detailed introduction to a support rod loading tooling and a vapor deposition furnace provided by the utility model. This article uses specific examples to illustrate the principle and implementation method of the utility model. The description of the above embodiments is only used to help understand the method and core idea of ​​the utility model. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the utility model, the utility model can also be improved and modified, and these improvements and modifications also fall within the scope of protection of the claims of the utility model.

Claims

1. A rod loading tool, characterized in that: The invention comprises a muffle cylinder (1) with openings at both ends, a diverter disk (2), a fixed disk (3) and a plurality of support rods (4); the diverter disk (2) and the fixed disk (3) are arranged in the muffle cylinder (1) at intervals along the axial direction of the muffle cylinder (1); the diverter disk (2) is provided with air holes (5) whose number is greater than the number of the support rods (4); each of the support rods (4) is provided with a through hole (6); and each of the support rods (4) passes through the fixed disk (3) and abuts against the diverter disk (2), and the through hole (6) is arranged to be directly opposite to and communicated with one of the air holes (5).

2. The support rod loading tooling according to claim 1, characterized in that: The fixed plate (3) and the diverter plate (2) are parallel to each other and are both arranged along an axial direction perpendicular to the muffle cylinder (1).

3. The support rod loading tool according to claim 1, characterized in that: The fixing plate (3) is evenly provided with a plurality of limiting holes (7) for passing the supporting rod (4), and the central axis of each limiting hole (7) is arranged to coincide with the central axis of one of the air holes (5).

4. The support rod loading tooling according to claim 3, characterized in that: The support rod (4) and the limiting hole (7) are detachably plug-in-matched.

5. The support rod loading tool according to claim 1, characterized in that: A fixing structure is provided between the diverter plate (2) and the fixing plate (3).

6. The support rod loading tool according to claim 5, characterized in that: The fixing structure comprises three support rods (8) arranged in a triangle, and each of the support rods (8) is detachably connected between the diverter plate (2) and the fixing plate (3).

7. The support rod loading tool according to any one of claims 1 to 6, characterized in that: The periphery of the diverter plate (2) is in sealing cooperation with the inner wall of the muffle cylinder (1), and the periphery of the fixed plate (3) is in sealing cooperation with the inner wall of the muffle cylinder (1).

8. A vapor deposition furnace, characterized in that: It includes the support rod loading tooling as described in any one of claims 1 to 7 above.

Images