Collision buffering and energy absorbing device, motion table system and photoetching machine

Abstract

The utility model provides a collision buffering and energy absorbing device, a motion platform system and a photoetching machine. The collision buffering and energy absorbing device comprises a main body structure and an elastic body, the elastomer comprises an upper-layer elastomer and a lower-layer elastomer; the main body structure comprises an upper stator structure, a middle rotor structure and a lower stator structure which are sequentially arranged in the vertical direction. The upper stator structure and the lower stator structure are rigidly connected; the middle rotor structure extends out of the peripheries of the upper stator structure and the lower stator structure; the upper-layer elastic body is arranged between the middle mover structure and the upper stator structure, and the two ends of the upper-layer elastic body are connected with the upper stator structure and the middle mover structure respectively; the lower-layer elastic body is arranged between the middle mover structure and the lower stator structure, and the two ends of the lower-layer elastic body are connected with the lower stator structure and the middle mover structure respectively; the upper-layer elastomer and the lower-layer elastomer are spatially crossed; through the configuration, damage to parts caused by collision due to high-speed movement of the moving table can be avoided, meanwhile, the internal occupied space is reduced, and the collision stroke is shortened.

Description

Technical Field

[0001] The utility model relates to the field of collision buffering of a moving platform, and in particular to a collision buffering energy absorbing device, a moving platform system and a photolithography machine which can absorb most of the kinetic energy and ensure the safety of valuable parts. Background Art

[0002] In semiconductor lithography machines, moving tables such as silicon wafer tables and mask tables (also called wafer carriers) are extremely important key components. The typical structure is: the moving table is composed of a coarse motion module and a fine motion module, which together realize the precise motion positioning of the moving table in six degrees of freedom in space. The kinetic energy of the moving table is very high at high speeds. If a collision occurs, it may cause damage to the precise and expensive device components such as the mask or substrate installed on the moving table. Therefore, an anti-collision buffer device is usually provided on the moving table to absorb the large amount of energy generated by the collision and avoid damage to the device components on the moving table. However, most of the anti-collision buffer devices in the prior art occupy a large space and have a large collision stroke, which will increase the exchange distance of the double moving tables, increase the exchange time, and reduce the yield. Moreover, some existing anti-collision buffer devices do not provide a good safety protection effect.

[0003] It should be noted that the information disclosed in the background technology section of this application is only intended to deepen the understanding of the general background technology of this application, and should not be regarded as an admission or suggestion in any form that the information constitutes prior art already known to those skilled in the art. Utility Model Content

[0004] The utility model provides a collision buffering energy absorption device, a motion table system and a photolithography machine, aiming to avoid component damage caused by collision during high-speed motion of the motion table, while reducing internal occupied space and shortening collision travel.

[0005] In order to solve the above technical problems, the utility model provides a collision buffering energy absorbing device, comprising: a main body structure and an elastic body; the elastic body comprises an upper elastic body and a lower elastic body;

[0006] The main structure comprises an upper stator structure, an intermediate mover structure and a lower stator structure which are arranged in sequence along the vertical direction; the upper stator structure and the lower stator structure are rigidly connected; the intermediate mover structure extends beyond the periphery of the upper stator structure and the lower stator structure;

[0007] The upper elastic body is arranged between the intermediate mover structure and the upper stator structure, and two ends of the upper elastic body are respectively connected to the upper stator structure and the intermediate mover structure;

[0008] The lower elastic body is arranged between the intermediate mover structure and the lower stator structure, and two ends of the lower elastic body are respectively connected to the lower stator structure and the intermediate mover structure;

[0009] The upper elastic body and the lower elastic body are spatially cross-arranged.

[0010] Preferably, the upper stator structure and the lower stator structure are rigidly connected at the periphery by a vertical connecting member, and the upper stator structure and the lower stator structure are vertically supported at the inner side by an auxiliary structural member.

[0011] Preferably, the vertical connecting member is a flange structure, the flange structure vertically passes through the intermediate mover structure, and two ends of the flange structure extend out of the intermediate mover structure and are respectively connected with the upper stator structure and the lower stator structure;

[0012] And / or, the auxiliary structural member includes a fixed pillar, the bottom end of which is limitedly connected to the lower stator structure in both vertical and horizontal directions, and the top end of which is limitedly connected to the upper stator structure in the vertical direction and released in the horizontal direction.

[0013] Preferably, the main structure as a whole is an annular structure, the middle gap of the annular structure is used to accommodate the moving table, at least one of the upper stator structure and the lower stator structure is used to be connected to the coarse motion module of the moving table, and the inner side of the intermediate moving substructure maintains a certain gap with the fine motion module of the moving table at any orientation in the horizontal direction, and the gap is greater than or equal to the maximum collision stroke in the horizontal direction.

[0014] Preferably, the upper stator structure and the lower stator structure are rigidly connected via a vertical connecting member, and one end of the upper elastic body and the lower elastic body can be rotatably connected to a corresponding one of the vertical connecting members.

[0015] Preferably, a tensioning portion is provided on the vertical connecting member, and the tensioning portion tensions the elastic body.

[0016] Preferably, the tensioning portion comprises an eccentrically arranged centering wheel and a tensioning wheel, the elastomer is sleeved on the centering wheel, and the tensioning wheel tensions the elastomer.

[0017] Preferably, the connection point between the upper elastic body and the intermediate mover structure is at the same horizontal position as the connection point between the lower elastic body and the intermediate mover structure.

[0018] Preferably, a mover fixing pin is provided on the intermediate mover structure, and both ends of the mover fixing pin extend vertically out of the intermediate mover structure. After extending out of the intermediate mover structure, the two ends of the mover fixing pin are respectively connected to the upper elastomer and the lower elastomer.

[0019] Preferably, a spacer is provided between each of the elastic bodies and the intermediate mover structure.

[0020] Preferably, the collision buffering and energy absorbing device also has at least one of the following features:

[0021] The elastic body is made of superelastic memory alloy material;

[0022] All of the elastic bodies are pre-tensioned components;

[0023] The elastic body is a multi-strand structure in the horizontal direction;

[0024] The number of the elastic bodies is 16 or 24.

[0025] Preferably, one or more acceleration sensors are provided on at least one of the upper stator structure, the intermediate mover structure and the lower stator structure.

[0026] Furthermore, based on the same inventive concept, the utility model also provides a sports table system, comprising a sports table and any one of the collision buffering and energy absorbing devices, wherein the collision buffering and energy absorbing device is connected to the sports table via at least one of the upper stator structure and the lower stator structure.

[0027] Based on the same inventive concept, the utility model further provides a photolithography machine, comprising a moving table and any one of the collision buffering and energy absorbing devices, wherein the collision buffering and energy absorbing device is connected to the moving table via at least one of the upper stator structure and the lower stator structure.

[0028] Compared with the prior art, the utility model has at least the following advantages:

[0029] 1. The present application divides the elastic body into two layers, the upper and lower layers are respectively arranged on the upper side and the lower side of the intermediate mover structure, so as to balance the vertical forces on the upper and lower sides of the intermediate mover structure, prevent the internal structure from deforming, and thus avoid the elastic body from getting stuck and failing to play the anti-collision effect;

[0030] 2. The present application divides the elastic body into two layers, the upper layer and the lower layer, respectively arranged on the upper side and the lower side of the intermediate mover structure, which is also conducive to increasing the number of elastic bodies without increasing the size in the horizontal direction, thereby increasing the tension of the elastic body, reducing the collision stroke, and reducing the occupied space;

[0031] 3. For the double motion table, the reduction of the collision stroke makes the exchange distance of the double motion table shorter, thereby shortening the exchange time and improving productivity.

[0032] Since the motion table system and photolithography machine provided by the utility model and the collision buffer and energy absorption device provided by the utility model belong to the same inventive concept, the motion table system and photolithography machine provided by the utility model at least have all the beneficial effects of the collision buffer and energy absorption device provided by the utility model. For details, please refer to the relevant description of the beneficial effects of the collision buffer and energy absorption device provided by the utility model in the above text. Therefore, the beneficial effects of the motion table system and photolithography machine provided by the utility model will not be described one by one here. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The accompanying drawings are used to better understand the present invention and do not constitute an improper limitation on the present invention.

[0034] Figure 1 Schematic diagram of a scenario in which the collision buffering and energy absorbing device in some embodiments of the utility model is applied to a double moving stage of a photolithography machine; wherein the arrow indicates the moving direction of the moving stage;

[0035] Figure 2 It is a vertical cross-sectional view of the collision buffering and energy absorbing device in the first embodiment of the utility model;

[0036] Figure 3 It is a top view of the collision buffering and energy absorbing device in the first embodiment of the utility model; wherein the invisible elastic body is represented by a dotted line, and the visible elastic body is represented by a solid line;

[0037] Figure 4 It is a schematic diagram of the three-dimensional structure of the collision buffering and energy absorbing device when a double-strand elastic body is used in the first embodiment of the utility model;

[0038] Figure 5 for Figure 4 A cross-sectional view of the middle collision buffer energy-absorbing device along the AA line;

[0039] Figure 6 This is a top view of the collision buffering and energy absorbing device in the first embodiment of the utility model when auxiliary support is added to the inner side of the stator structure; wherein the invisible part is represented by a dotted line;

[0040] Figure 7 This is a partial enlarged view of the collision buffering and energy absorbing device in the first embodiment of the utility model when auxiliary support is added to the inner side of the stator structure;

[0041] Figure 8 This is a schematic structural diagram of the tensioning portion in the first embodiment of the utility model;

[0042] Fig. 9This is a schematic diagram of the structure of a single elastic body in Embodiment 1 of the present utility model;

[0043] Fig.10 It is a stress characteristic curve diagram when the elastic body in some embodiments of the utility model adopts superelastic memory alloy material;

[0044] Fig.11 This is a schematic diagram of a collision simulation scene of a collision buffer energy absorption device in Embodiment 1 of the present utility model;

[0045] Fig.12 This is a stress variation diagram of the superelastic memory alloy during the collision process in the first embodiment of the utility model;

[0046] Fig.13 This is a diagram showing the change in kinetic energy of the center of mass of the coarse motion module in the first embodiment of the present utility model;

[0047] Fig.14 It is a vertical cross-sectional view of the collision buffering and energy absorbing device in the second embodiment of the utility model;

[0048] Fig.15 It is a top view of the collision buffering and energy absorbing device in the second embodiment of the present utility model.

[0049] in, Figure 1-Figure 15 In: 1, 2-moving table; 101-coarse motion module; 102-fine motion module; 3-substrate; 100-collision buffer energy absorption device; 110-main structure; 111-upper stator structure; 112-middle mover structure; 113-lower stator structure; 114-vertical connecting piece; 114a-flange structure; 114b-centering wheel; 114c-tensioning wheel; 114d-tensioning hole; 115-auxiliary structural part; 115a-fixing support; 115b-screw; 116-motor fixing pin; 120-elastic body; 1201-motor connecting end; 1202-stator connecting end; 121-upper elastic body; 122-lower elastic body; a, b-connection points; 130-acceleration sensor. DETAILED DESCRIPTION

[0050] In order to make the purpose, advantages and features of the utility model clearer, the utility model is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model. In addition, the structure shown in the drawings is often a part of the actual structure. In particular, the emphasis of each drawing is different, and sometimes different scales are used.

[0051] As used in the present invention, the singular forms "one", "an" and "the" include plural objects, the term "or" is usually used to include the meaning of "and / or", the term "several" is usually used to include the meaning of "at least one", and the term "two or more" is usually used to include the meaning of "two or more". In addition, the terms "first", "second" and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second" and "third" can explicitly or implicitly include one or at least two of the features. In addition, as used in the present invention, an element is arranged on another element, which usually only indicates that there is a connection, coupling, matching or transmission relationship between the two elements, and the connection, coupling, matching or transmission between the two elements can be direct or indirect through an intermediate element, and cannot be understood as indicating or implying the spatial position relationship between the two elements, that is, an element can be in any orientation such as inside, outside, above, below or on one side of another element, unless the content clearly indicates otherwise. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. The X-axis and Y-axis described herein both represent two mutually perpendicular directions in the horizontal direction. In addition, the vertical direction is the vertical direction.

[0052] Figure 1 FIG. 1 is an application scenario diagram of the collision buffering and energy absorbing device 100 provided in some embodiments of the present utility model. Figure 1 As shown, in some application scenarios, there are two moving tables 1 and 2 in the lithography machine, each of which includes a coarse motion module 101 and a fine motion module 102 (i.e., a wafer stage), and the fine motion module 102 is arranged on the coarse motion module 101, and the fine motion module 102 is used to carry a substrate 3 (such as a silicon wafer), and the two moving tables 1 and 2 can operate independently at the same time. For example, when the moving table 1 is performing scanning exposure at the exposure station, the other moving table 2 performs pre-processing work such as upper and lower films and three-dimensional morphology measurement of the substrate (including wafer stage alignment, substrate alignment and focus measurement) at the measurement station. After the moving table 1 completes the exposure of the substrate, the two moving tables 1 and 2 exchange positions to perform the same work, and so on and so forth, achieving a substantial improvement in the production capacity and work efficiency of the lithography machine. In order to absorb most of the kinetic energy and ensure the safety of valuable parts when each moving table 1 or 2 is out of control, a collision buffer energy absorption device 100 is added to its coarse motion module 101.

[0053] It should be noted that the collision buffering and energy absorbing device 100 provided by the present invention can be applicable to a lithography machine with more than two moving tables, and can also be applicable to a lithography machine with a single moving table. In addition, in addition to being applicable to a lithography machine, it is also applicable to other devices or equipment with a moving table. Therefore, the collision buffering and energy absorbing device 100 includes but is not limited to use on a lithography machine.

[0054] The collision buffering and energy absorbing device 100 provided by the utility model has a compact size, can withstand collision forces in any horizontal direction, and can be used repeatedly.

[0055] The preferred implementation of the collision buffering and energy absorbing device 100 provided by the present invention is described in detail below.

[0056] <Example 1>

[0057] Please refer to Figure 2 and Figure 3 As shown, in the first embodiment of the present application, the collision buffering energy absorbing device 100 includes: a main structure 110 and an elastic body 120; the specific number of the elastic body 120 is not limited; the elastic body 120 specifically includes an upper elastic body 121 and a lower elastic body 122; the main structure 110 includes an upper stator structure 111, an intermediate moving substructure 112 and a lower stator structure 113 arranged in sequence along the vertical direction; the upper stator structure 111 and the lower stator structure 113 are rigidly connected, preferably, the upper stator structure 111 and the lower stator structure 113 are rigidly connected by a vertical connecting member 114, and the vertical connecting member 114 is usually perpendicular to the upper stator structure 111 , an intermediate mover structure 112 and a lower stator structure 113; at least one of the upper stator structure 1111 and the lower stator structure 113 is used to connect with the moving table. For example, in the present embodiment, at least one of the upper stator structure 1111 and the lower stator structure 113 is used to connect with the coarse motion module of the moving table; and the intermediate mover structure 112 extends beyond the upper stator structure 111 and the lower stator structure 113 on all sides, that is, the intermediate mover structure 112 extends out of the edges of the upper stator structure 111 and the lower stator structure 113 in the horizontal X-axis and Y-axis directions, so that when a collision occurs, the intermediate mover structure 112 directly collides with the object being collided.

[0058] In addition, the upper elastic body 121 is arranged between the intermediate mover structure 112 and the upper stator structure 111, and the lower elastic body 122 is arranged between the intermediate mover structure 112 and the lower stator structure 113. Such an arrangement is conducive to balancing the vertical (vertical is the Z direction) force components on the upper and lower sides of the intermediate mover structure 112, preventing deformation of the internal structure, mainly preventing deformation of the main structure 110, thereby preventing the elastic body 120 from getting stuck and failing to play the anti-collision effect.

[0059] Please focus on Figures 3 to 5As shown, the two ends of the upper elastomer 121 are respectively connected to the upper stator structure 111 and the middle mover structure 112, and the two ends of the lower elastomer 122 are respectively connected to the lower stator structure 113 and the middle mover structure 112. And the upper elastomer 121 and the lower elastomer 122 are spatially cross-arranged, that is, the arrangement direction of the upper elastomer 121 is exactly opposite to the arrangement direction of the lower elastomer 122, so that it can be subjected to opposite forces in the horizontal direction, so that the internal force of the entire structure is balanced to ensure the stability of the entire device. Usually, the number of upper elastomers 121 is the same as the number of lower elastomers 122, that is, half of the elastomers 120 are arranged between the middle mover structure 112 and the upper stator structure 111, and the other half of the elastomers 120 are arranged between the middle mover structure 112 and the lower stator structure 113. In addition, the length of the elastic body 120 (ie, the length when not stretched and deformed) is as consistent as possible, which can better balance the overall internal force and reduce the difficulty of connecting and installing the elastic body 120.

[0060] Therefore, in the event of an abnormal collision, the collision buffering and energy absorbing device 100 preferentially contacts the external impact through the intermediate moving substructure 112, thereby protecting the sports platform, and at the same time utilizing the elastic body 120 to buffer and absorb the collision of the sports platform, thereby ultimately ensuring the safety of the fragile components on the sports platform. In particular, the layout of the upper and lower layers of elastic bodies 120 is also conducive to increasing the number of elastic bodies 120 without increasing the horizontal dimensions, thereby increasing the tension of the elastic bodies 120, so that under the same impact force, it will not occupy more internal space, which helps to reduce the collision stroke.

[0061] Specifically, based on the formula E=Fd, it can be known that when E remains unchanged and F increases, d can be reduced, that is, the collision stroke is reduced, thereby reducing the space occupied; where E is the energy absorbed by the elastic body 120; F is the tension; and d is the collision stroke. Then, for the double motion table, after the collision stroke is reduced, the exchange distance of the double motion table can be shortened, thereby shortening the exchange time and improving the productivity.

[0062] The upper stator structure 111, the intermediate mover structure 112 and the lower stator structure 113 can adopt a variety of structures such as plates, wire frames, etc., without specific limitation. In the specific example, the upper stator structure 111, the intermediate mover structure 112 and the lower stator structure 113 are all plate structures, but they are not limited to this. The outer shapes of the upper stator structure 111, the intermediate mover structure 112 and the lower stator structure 113 include but are not limited to the square described in the figure, and can be specifically set according to the shape of the sports table. The upper stator structure 111, the intermediate mover structure 112 and the lower stator structure 113 are preferably made of materials with high strength and low density characteristics such as titanium alloy, carbon fiber, aluminum alloy, etc.

[0063] The elastomer 120 is the main energy-absorbing component, and the elastomer 120 preferably uses a superelastic memory alloy (SMA) for better buffering effect. According to the energy-absorbing principle of the superelastic memory alloy, when a collision occurs, the intermediate mover structure 112 deforms and causes the elastomer 120 to stretch and deform, so that the collision kinetic energy is converted into the internal energy of the elastomer 120; as the collision proceeds, due to the stress hysteresis characteristics of the superelastic memory alloy, the kinetic energy continues to be converted into the internal energy of the elastomer 120 until the elastomer 120 absorbs all the kinetic energy; after the collision, the elastomer 120 releases the stored internal energy, but the stress is less than the stress during the collision, so the buffering energy absorption effect is good.

[0064] Fig.10 is the stress-strain curve of superelastic memory alloy. Fig.10 As shown, when the strain of the superelastic memory alloy reaches 1%, the nonlinear change ability of the memory alloy begins to be triggered, that is, as the strain increases, its tension no longer changes or changes very little, and then within the strain range of 1%-6%, the external collision impact kinetic energy can be converted into the internal energy of the superelastic memory alloy itself. Since the collision buffer energy absorption device 100 utilizes the elastic deformation of the superelastic memory alloy to absorb energy during collision, one end of each elastic body 120 is connected to the stator structure, and the other end is connected to the intermediate mover structure 112.

[0065] In order to improve the connection stiffness between the intermediate mover structure 112 and the stator structure, a two-layer stator structure consisting of an upper stator structure 111 and a lower stator structure 113 is designed. Based on the two-layer stator structure, combined with the upper and lower layers of elastic bodies 120, the intermediate mover structure 112 can be well supported, and the vertical support positioning problem of the intermediate mover structure 112 when the motion platform is working normally is well solved.

[0066] The specific number of elastic bodies 120 can be adjusted according to the application object, and therefore, the present application does not limit this. In the first embodiment of the present application, schematically, a total of 24 elastic bodies 120 are used, 12 elastic bodies 120 are arranged on the upper side of the middle moving substructure 112, and the other 12 elastic bodies 120 are arranged on the lower side of the middle moving substructure 112.

[0067] The main structure 110 as a whole can be an annular structure so that the middle notch of the main structure 110 can accommodate the moving table. When the main structure 110 installs the moving table through the middle notch, the inner side 1121 of the intermediate moving substructure 112 maintains a certain gap with the moving table at any orientation in the horizontal direction. Specifically, in this embodiment, a certain gap is maintained with the micro-motion module of the moving table, and the gap is greater than or equal to the maximum collision stroke in the horizontal direction to ensure that when the maximum collision occurs, the intermediate moving substructure 112 and the moving table, especially the micro-motion module, do not collide. However, as can be understood by those skilled in the art, in some other embodiments, the moving table can also be installed on the upper stator structure 111. A more common method is to accommodate the moving table through the middle notch of the main structure 110, which is convenient for installing and fixing the moving table and can reduce the weight of the entire collision buffering and energy absorbing device 100.

[0068] Preferably, the upper stator structure 111 and the lower stator structure 113 are rigidly connected at the periphery by vertical connectors 114, and the vertical connectors 114 are evenly distributed at the periphery of the upper stator structure 111 and the lower stator structure 113. The specific number of vertical connectors 114 is not limited. The vertical connectors 114 can have various structural forms, such as screws, pins, flanges or other fastening structures. Preferably, the vertical connector 114 is a flange structure 114a (see Figure 5 ), the flange structure 114a is generally I-shaped, and the flange structure 114a passes through the middle moving substructure 112 vertically, so that the two ends of the flange structure 114a extend out of the middle moving substructure 112 and are respectively connected with the upper stator structure 111 and the lower stator structure 113. This structure is simple and very convenient to connect and install. In the specific example, 16 flange components 114a are evenly distributed on the outer sides of the upper stator structure 111 and the lower stator structure 113, which can provide strong connection rigidity. In addition, the flange component 114a itself is provided with a spacer collar (see Figure 5 ), which is beneficial to separate the upper and lower layers of the elastic body 120 and play a better axial supporting role.

[0069] The connection position of the elastomer 120 with the upper stator structure 111 and the lower stator structure 113 can be selected to be set at the rigid connection position of the upper stator structure 111 and the lower stator structure 113, or can be selected at other positions. Preferably, the upper stator structure 111 and the lower stator structure 113 are both connected to the elastomer 120 through a vertical connector 114, specifically: one end of the upper elastomer 121 and the lower elastomer 122 can be rotatably connected to a corresponding vertical connector 114; in this way, there is no need to add additional connection points to the stator structure, making the structure simple and more convenient to manufacture. In this embodiment, the number of vertical connectors 114 can be determined according to the number of elastomers 120 to ensure that all elastomers 120 can be connected to the corresponding vertical connectors 114. Among them, some vertical connectors 114 are only connected to one upper elastomer 121 or one lower elastomer 122, and some vertical connectors 114 are connected to the upper elastomer 121 and the lower elastomer 122 at the same time.

[0070] In addition, the connection point a (see Figure 3 and Figure 6 ), and the connection point b of the lower elastic body 122 and the intermediate moving substructure 112 is preferably at the same horizontal position (i.e., the same position along the X-axis and Y-axis directions). Of course, the connection point a and the connection point b at the same horizontal position are respectively located on the upper side and the lower side of the intermediate moving substructure 112, and do not overlap vertically; such a setting facilitates the layout of the elastic bodies 120 of the same length. It should be noted that the two ends of the elastic body 120 are rotatably connected to the stator structure and the intermediate moving substructure 112 to allow the elastic body 120 to bend in the horizontal direction.

[0071] Preferably, the upper stator structure 111 and the lower stator structure 113 are also supported vertically by auxiliary structural members 115 to improve vertical stiffness. In a preferred embodiment, the upper stator structure 111 and the lower stator structure 113 are vertically supported by auxiliary structural members 115 on the inner side. Figure 4 , Figure 5-6 As shown. The use of the auxiliary structural member 115 effectively increases the vertical stiffness of the connection between the upper stator structure 111 and the lower stator structure 113. The specific number of the auxiliary structural members 115 is not limited. For example, the number of the auxiliary structural members 115 is greater than, less than or equal to the number of the vertical connecting members 114, as long as the auxiliary connecting members 115 are evenly distributed on the inner side or other positions. The auxiliary structural member 115 and the vertical connecting member 114 can be aligned or staggered in the direction along the X-axis or Y-axis.

[0072] To prevent over-positioning, the auxiliary structure 115 is more suitable for limiting the vertical distance between the upper stator structure 111 and the lower stator structure 113. Therefore, the auxiliary structure 115 only adds horizontal limit to the lower stator structure 113, and does not add horizontal limit to the upper stator structure 111. For more details, please refer to Figure 7 As shown, in an optional embodiment, the auxiliary structural member 115 includes a fixed support 115a, the bottom end of the fixed support 115a is limitedly connected to the lower stator structure 113 in both the vertical and horizontal directions, and the top end of the fixed support 115a is limitedly connected to the upper stator structure 111 in the vertical direction and is released in the horizontal direction. Optionally, the auxiliary structural member 115 also includes a screw 115b, and the fixed support 115a is fixedly connected to the upper stator structure 111 and the lower stator structure 113 respectively by two screws 115b to achieve a rigid connection. In a specific example, a total of 16 flange structures 114a are arranged on the periphery of the upper stator structure 111 and the lower stator structure 113, and a total of 12 auxiliary structural members 115 are arranged on the inner side.

[0073] It should be further explained that when the intermediate mover structure 112 is arranged between two layers of stator structures, the intermediate mover structure 112 is connected to the upper stator structure 111 and the lower stator structure 113 in the horizontal direction only through a predetermined number of elastic bodies 120, and structurally, the connection points a and b between the elastic bodies 120 and the intermediate mover structure 112 are distributed on the inner side of the collision buffering and energy absorbing device 100. For example, when 24 elastic bodies 120 are used, the intermediate mover structure 112 is connected to the stator structure only through 24 elastic bodies 120 in the horizontal direction, and there are 12 connection points a and b between the elastic bodies 120 and the intermediate mover structure 112, and the 12 connection points a and b are evenly distributed on the inner side of the collision buffering and energy absorbing device 100.

[0074] The specific connection method between the elastic body 120 and the intermediate moving substructure 112 is not particularly limited, as long as the elastic body 120 and the intermediate moving substructure 112 can be horizontally bent at the connection portion when connected. Figure 4 and Figure 5 As shown, a mover fixing pin 116 is provided on the intermediate mover structure 112, and both ends of the mover fixing pin 116 extend vertically out of the intermediate mover structure 112, so that the two ends of the mover fixing pin 116 are respectively connected to the upper elastomer 121 and the lower elastomer 122 after extending out of the intermediate mover structure 112, thereby fixing the two layers of elastomer 120 on both sides of the intermediate mover structure 112, and each elastomer 120 can rotate freely in the horizontal direction around the mover fixing pin 116.

[0075] In order to prevent the elastic body 120 from scratching the intermediate mover structure 112, preferably, a spacer (not shown) is provided between each elastic body 120 and the intermediate mover structure 112. The spacer is a precision part, mainly made of metal material, and has a relatively smooth surface. Preferably, the spacer is a variety of commonly used metal gaskets. In a specific example, a spacer is fixed at both ends of the mover fixing pin 116, so that the elastic body 120 and the intermediate mover structure 112 can be easily separated.

[0076] In order to respond to external collisions in a timely manner, it is best to provide a certain initial tension in advance inside the collision buffering and energy absorbing device 100. Then, the collision buffering and energy absorbing device 100 obtains a certain internal initial tension by pre-tensioning the elastomer 120. The initial tension causes the elastomer 120 to produce a certain initial strain, and can enter the energy absorption stage faster. For superelastic memory alloys, the initial strain of the elastomer 120 is preferably 1%. Of course, the initial strain of the elastomer 120 can also be adjusted according to actual needs, including but not limited to 1%. In practice, the elastomer 120 can be pre-tightened by various commonly used pre-tightening methods, which is not limited by the present application. Preferably, a tensioning portion is provided on the vertical connecting member 114, and the tensioning portion directly tensions the elastomer 120. Such a structure is simpler and the connection and installation are more convenient. Schematically, the elastic member 120 is tensioned by the flange structure 114a. As shown Figure 8 As shown, a tensioning part is provided on the flange structure 114a, and the tensioning part specifically includes an eccentrically arranged centering wheel 114b and a tensioning wheel 114c. The elastic body 120 is sleeved on the centering wheel 114b, and the tensioning wheel 114c tensions the elastic body 120. For ease of operation, the tensioning wheel 114c has a tensioning hole 114d, which is convenient for applying force to rotate the tensioning wheel 114c at the tensioning hole 114d with the help of a wrench. The tensioning hole 114d can be in various forms such as a hexagon socket and a plum blossom socket, and the initial tensioning of the elastic body 120 can be completed by using a relevant standard wrench. It should be known that in the embodiments of the present application, all elastic bodies 120 are pre-stretched components to obtain a certain internal initial tension.

[0077] In actual use, the number of strands of the elastic body 120 is 1, 2, 3 or more. The higher the number of strands, the greater the impact force that a single elastic body 120 can withstand. In order to improve the horizontal flexibility of the structure itself, that is, to reduce the horizontal rigidity of the elastic body 120 and make the elastic body 120 more easily deformable, preferably, the elastic body 120 is a multi-strand structure in the horizontal direction. In a specific example, Figure 4 and Fig. 9As shown, all elastic bodies 120 are of double-strand design, that is, each elastic body 120 is composed of two sections in the horizontal direction; thus, if 24 elastic bodies 120 are used, there are 48 sections in total, which is equivalent to indirectly increasing the number of elastic bodies 120, increasing the tension of the entire structure, and further reducing the collision stroke. The cross-sectional area of ​​each section is, for example, 1mm 2 Or other sizes, there is no special requirement for this. In addition, the cross section of the elastic body 120 is rectangular, circular or other various configurations, preferably rectangular, which is convenient for processing.

[0078] Continue to refer Fig. 9 As shown, in a preferred embodiment, one end of the elastomer 120 is a mover connection end 1201, and the other end is a stator connection end 1202, and a single-strand structure, a double-strand structure or a plurality of strands are provided between the mover connection end 1201 and the stator connection end 1202; in this way, the connection and installation of the elastomer 120 can be completed by rotatably sleeved the mover connection end 1201 on the mover fixing pin 116 and sleeved the stator connection end 1202 on the tensioning part.

[0079] In order to verify the buffering and energy absorption effect of the collision buffering and energy absorption device 100, the moving table on the lithography machine is taken as the test object, and based on some specific structures therein, the dynamic collision simulation analysis is carried out to simulate the collision of real scenes, which effectively verifies its buffering and energy absorption effect. At the same time, the superelastic characteristics of the superelastic memory alloy (SMA) are verified, that is, within a certain strain range (generally 1%-%6), its stress will not change with the change of strain. According to this characteristic, the external impact kinetic energy can be converted into the internal energy of the alloy wire, thereby achieving the energy absorption effect, and reducing the impact of external collisions on the key components of the workpiece table to a certain extent.

[0080] Due to the different layout requirements of different series of products, the range of spatial size constraints of the collision buffer energy absorption device 100 is also different, but the premise is that the collision stroke is designed as large as possible, that is, the stroke between the intermediate mover structure 112 and the stator structure is increased under the condition of meeting the strain range of the superelastic memory alloy (1%-6%), so as to absorb more external kinetic energy. Based on this, in this simulation analysis, under the condition of meeting the layout of 24 double-strand superelastic memory alloys, the collision stroke of the intermediate mover structure 112 of the collision buffer energy absorption device 100 is 6mm. When a horizontal collision occurs, at least 12 superelastic memory alloys play an energy absorption role (that is, the superelastic memory alloys are stretched), and the rest are relaxed, and the initial state is restored after the collision.

[0081] Assume that the coarse motion module (the wafer carrier and its mounting base) on the motion platform hits the rigid wall at a speed V of 0.5 m / s in a certain horizontal direction. The mass of the coarse motion module is 75 kg, which is fully loaded on the two-layer stator structure. Assume that the center of mass C of the moving part is in the middle of the collision buffer energy absorption device 100. The collision scenario is as follows: Fig.11 shown.

[0082] Checking the changes of the superelastic memory alloy during the collision, it can be seen that a total of 12 superelastic memory alloys were stretched (a total of 24 strands), and another 12 superelastic memory alloys were bent in the horizontal direction (a total of 24 strands). In this case, the stretched superelastic memory alloy deformed and absorbed external kinetic energy.

[0083] In addition, a superelastic memory alloy with the largest deformation is selected to analyze its stress change, such as Fig.12 As shown in the figure, the maximum stress is 475.34MPa, which does not exceed the maximum bearing stress. Fig.13 As shown in the figure, the kinetic energy of the center of mass of the moving part changes during the final collision. The initial energy of the center of mass is about 9.38 J, which is reduced to 6.75 J after the collision, indicating that the SMA absorbs 2.63 J of energy during this process.

[0084] It can be seen that the collision buffering and energy absorbing device 100 provided in this embodiment can effectively absorb the energy generated by the accidental collision of the sports platform, and at the same time provide a certain buffer area to ensure the safety of other fragile parts on the sports platform. 2 , the results are different after changing the cross-sectional area, but the trend is the same, so no further verification is required.

[0085] <Example 2>

[0086] Please refer to Figure 14 to Figure 15 The collision buffering and energy absorbing device 100 provided in the second embodiment of the present application is basically the same as the collision buffering and energy absorbing device 100 provided in the first embodiment. The same parts will not be described again, and only the differences will be described below.

[0087] Specifically, Fig.14 and Fig.15 As shown, in the second embodiment, when the components to be protected do not require too much rigidity, the number of elastomers 120 can be appropriately reduced. On the basis of not increasing the external dimensions of the collision buffer and energy absorption device 100 in the first embodiment, the number of elastomers 120 is reduced to increase flexibility. For example, the number of elastomers 120 is reduced from 24 in the original first embodiment to 16 elastomers 120, 8 elastomers 120 are arranged on the upper side of the intermediate moving substructure 112, and the other 8 elastomers 120 are arranged on the lower side of the intermediate moving substructure 112.

[0088] In a further improvement, at least one acceleration sensor 130 is provided on the intermediate moving substructure 112 for monitoring the real-time collision impact acceleration. Preferably, more than two acceleration sensors 130 are used. For example, four acceleration sensors 130 are used as described in the figure, and two acceleration sensors 130 are provided along the X-axis and the Y-axis. The acceleration sensor 130 can be selectively provided outside or inside the intermediate moving substructure 112, preferably inside the intermediate moving substructure 112, so as to better protect the acceleration sensor 130. In a specific embodiment, an inner cavity is provided on the periphery of the intermediate moving substructure 112 for accommodating the acceleration sensor 130. The acceleration sensor 130 can be a two-axis acceleration sensor, or a three-axis acceleration sensor or a six-axis acceleration sensor. When the intermediate moving substructure 112 contacts the outside world, the acceleration sensor 130 will immediately respond to the acceleration change of the intermediate moving substructure 112. In addition, the configuration of multiple acceleration sensors 150 increases a fault-tolerance mechanism to avoid the adverse situation that a certain acceleration sensor 130 cannot be monitored when it is damaged, thereby increasing the reliability of acceleration monitoring.

[0089] It should be understood that in actual use, the stator structure is directly connected to the motion platform frame, so optionally, at least one of the upper stator structure 111 and the lower stator structure 113 may also be configured with one or more acceleration sensors 130, preferably, the acceleration sensor 130 is disposed inside the stator structure. In this way, the residual acceleration transmitted to the motion platform after the stator structure absorbs external impact can also be monitored.

[0090] To summarize, in the collision buffering and energy absorbing device 100 provided by the utility model, by dividing the elastomer 120 into two layers and arranging them on the upper side and the lower side of the intermediate moving substructure 112 respectively, the vertical components of the upper and lower sides of the intermediate moving substructure 112 can be balanced to prevent deformation of the internal structure, thereby avoiding the elastomer 120 from getting stuck and making the elastomer 120 unable to play an anti-collision effect; on the other hand, by dividing the elastomer 120 into two layers and arranging them on the upper side and the lower side of the intermediate moving substructure 112 respectively, it is also beneficial to increase the number of elastomers 120 without increasing the size in the horizontal direction, thereby increasing the pulling force of the elastomer 120, E=Fd, reducing the collision stroke, and reducing the occupied space.

[0091] Furthermore, based on the same inventive concept, the utility model also provides a motion table system, including a motion table and the collision buffering and energy absorbing device 100 described in any of the above embodiments; the collision buffering and energy absorbing device 100 is connected to the motion table through at least one of the upper stator structure 111 and the lower stator structure 113. Optionally, the motion table includes a coarse motion module and a fine motion module; the coarse motion module supports the fine motion module; the fine motion module can achieve six-degree-of-freedom precise adjustment and positioning; the coarse motion module achieves large-stroke movement; the coarse motion module and the fine motion module can move relative to each other. Such a motion table is preferably a workpiece table on a photolithography machine; thus, the coarse motion module is connected to at least one of the upper stator structure 111 and the lower stator structure 113.

[0092] In addition, the utility model further provides a photolithography machine, including a moving table and the collision buffering and energy absorbing device 100 described in any embodiment.

[0093] Since the motion stage system and photolithography machine provided by the present invention and the collision buffering and energy absorbing device 100 provided by the present invention belong to the same inventive concept, the motion stage system and photolithography machine provided by the present invention at least have all the beneficial effects of the collision buffering and energy absorbing device 100 provided by the present invention. For details, please refer to the above description of the beneficial effects of the collision buffering and energy absorbing device 100 provided by the present invention. Therefore, the beneficial effects of the motion stage system and photolithography machine provided by the present invention will not be described one by one. Furthermore, for the double motion stage, since the collision stroke is reduced, the exchange distance of the double motion stage can be shorter, so as to shorten the exchange time and improve the yield.

[0094] Although the utility model is disclosed as above, it is not limited thereto. Those skilled in the art may make various modifications and variations to the utility model without departing from the spirit and scope of the utility model. Thus, if these modifications and variations of the utility model fall within the scope of the utility model specification and its equivalent technology, the utility model is also intended to include these modifications and variations.

Claims

1. A collision buffering energy absorbing device, characterized in that: include: The main structure and the elastic body; the elastic body comprises an upper elastic body and a lower elastic body; The main structure comprises an upper stator structure, an intermediate mover structure and a lower stator structure which are arranged in sequence along the vertical direction; the upper stator structure and the lower stator structure are rigidly connected; the intermediate mover structure extends beyond the periphery of the upper stator structure and the lower stator structure; The upper elastic body is arranged between the intermediate mover structure and the upper stator structure, and two ends of the upper elastic body are respectively connected to the upper stator structure and the intermediate mover structure; The lower elastic body is arranged between the intermediate mover structure and the lower stator structure, and two ends of the lower elastic body are respectively connected to the lower stator structure and the intermediate mover structure; The upper elastic body and the lower elastic body are spatially cross-arranged.

2. The collision buffering and energy absorbing device according to claim 1, characterized in that: The upper stator structure and the lower stator structure are rigidly connected at the periphery via a vertical connecting member, and the upper stator structure and the lower stator structure are vertically supported at the inner side via an auxiliary structural member.

3. The collision buffering and energy absorbing device according to claim 2, characterized in that: The vertical connecting member is a flange structure, and the flange structure passes through the intermediate mover structure in the vertical direction. Two ends of the flange structure extend out of the intermediate mover structure and are respectively connected with the upper stator structure and the lower stator structure. And / or, the auxiliary structural member includes a fixed pillar, the bottom end of which is limitedly connected to the lower stator structure in both vertical and horizontal directions, and the top end of which is limitedly connected to the upper stator structure in the vertical direction and released in the horizontal direction.

4. The collision buffering and energy absorbing device according to claim 2, characterized in that: The main structure is an annular structure as a whole, and the middle gap of the annular structure is used to accommodate the moving table. At least one of the upper stator structure and the lower stator structure is used to be connected to the coarse motion module of the moving table. The inner side of the intermediate moving substructure maintains a certain gap with the fine motion module of the moving table at any orientation in the horizontal direction, and the gap is greater than or equal to the maximum collision stroke in the horizontal direction.

5. The collision buffering and energy absorbing device according to claim 1, characterized in that: The upper stator structure and the lower stator structure are rigidly connected via a vertical connecting member, and one end of the upper elastic body and the lower elastic body can be rotatably connected to a corresponding one of the vertical connecting members.

6. The collision buffering and energy absorbing device according to claim 5, characterized in that: A tensioning portion is provided on the vertical connecting member, and the tensioning portion tensions the elastic body.

7. The collision buffering and energy absorbing device according to claim 6, characterized in that: The tensioning part comprises an eccentrically arranged centering wheel and a tensioning wheel, the elastic body is sleeved on the centering wheel, and the tensioning wheel tensions the elastic body.

8. The collision buffering and energy absorbing device according to claim 1 or 5, characterized in that: The connection point between the upper elastic body and the middle mover structure is at the same horizontal position as the connection point between the lower elastic body and the middle mover structure.

9. The collision buffering and energy absorbing device according to claim 8, characterized in that: A mover fixing pin is arranged on the intermediate mover structure, and both ends of the mover fixing pin extend vertically out of the intermediate mover structure. After extending out of the intermediate mover structure, both ends of the mover fixing pin are respectively connected to the upper elastic body and the lower elastic body.

10. The collision buffering and energy absorbing device according to claim 1, 2 or 5, characterized in that: A spacer is arranged between each elastic body and the intermediate mover structure.

11. The collision buffering and energy absorbing device according to claim 1, 2 or 5, characterized in that: The collision buffering and energy absorbing device also has at least one of the following features: The elastic body is made of superelastic memory alloy material; All of the elastic bodies are pre-tensioned components; The elastic body is a multi-strand structure in the horizontal direction; The number of the elastic bodies is 16 or 24.

12. The collision buffering and energy absorbing device according to claim 1, 2 or 5, characterized in that: One or more acceleration sensors are disposed on at least one of the upper stator structure, the middle mover structure and the lower stator structure.

13. A sports table system, characterized in that: It comprises a moving platform and the collision buffering and energy absorbing device according to any one of claims 1 to 12, wherein the collision buffering and energy absorbing device is connected to the moving platform through at least one of the upper stator structure and the lower stator structure.

14. A photolithography machine, characterized in that: It comprises a moving platform and the collision buffering and energy absorbing device according to any one of claims 1 to 12, wherein the collision buffering and energy absorbing device is connected to the moving platform through at least one of the upper stator structure and the lower stator structure.

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