Pincer-shaped electrode

Abstract

The utility model discloses a pincerlike electrode, which relates to the technical field of plasma chemical vapor deposition and comprises a first electrode block component and a second electrode block component, and two ends of the first electrode block component are movably connected with two ends of the second electrode block component respectively. Compared with an existing structure, the electrode block is changed into a movable structure from a fixed structure, so that the electrode block can be assembled and disassembled more easily, the operation time of a machine table is guaranteed, the width of the electrode block can be increased, the situation that production cannot be carried out due to slight displacement of a graphite boat is avoided, the maintenance time can be shortened, and the workshop productivity is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of plasma chemical vapor deposition, in particular to a clamp-shaped electrode. Background Art

[0002] Currently, radio frequency power is widely used to ionize the reaction gas, promote its rapid reaction and attachment to the substrate to form a thin film.

[0003] A graphite boat coating device is disclosed in Chinese patent application No. 202321864531.6, including a coating device body, a coating cavity is provided in the coating device body, a graphite boat body is provided in the coating cavity, the graphite boat body is composed of multiple graphite boat sheets, multiple insulating components are provided at the top and bottom of the graphite boat body, the insulating components include an insulating strip, multiple ceramic rods are inserted on one side of the insulating strip, and a ceramic ring is fixedly connected to the other end of the ceramic rod, and multiple card slots are provided at the bottom of the insulating strip, the card slots are carded with the graphite boat sheet, multiple connecting bolts are inserted between the multiple graphite boat sheets, and the connecting bolts are plugged with the ceramic ring, both ends of the graphite boat body are fixedly connected with an upper electrode block and a lower electrode block, and one side of the graphite boat sheet is provided with multiple inserting positions. The utility model separates the card slot from the graphite boat sheet by unscrewing the connecting bolts and then lifting the insulating component upward, thereby facilitating the disassembly and assembly of the graphite boat sheet, and further facilitating the cleaning of the graphite boat sheet.

[0004] However, there are many problems with tubular plasma chemical vapor deposition at present, such as high frequency causing the film thickness to be substandard or uneven. Secondly, there is an inconsistency in conductivity or insufficient contact between the RF electrode and the graphite boat, resulting in arcing on the contact surface between the two. Arcing will cause defects on the metal surface, resulting in a significant decrease in its conductivity, which in turn causes high frequency, affecting both production capacity and product quality. This means that the electrode must be replaced after a certain number of uses, but the above-mentioned electrode is fixedly connected and cannot be directly disassembled and requires cooling, which will greatly affect the operation time of the machine. Utility Model Content

[0005] The utility model provides a clamp-shaped electrode to solve the problem raised in the background technology.

[0006] In order to achieve the above objectives, the present invention is implemented through the following technical solutions:

[0007] A clamp electrode comprises a first electrode block component and a second electrode block component, wherein two ends of the first electrode block component are movably connected to two ends of the second electrode block component.

[0008] Preferably, the first end of the first electrode block component is provided with a hole for accommodating a bolt, and the first end of the second electrode block component is provided with a hole for accommodating a bolt, the bolt is inserted into the holes of the first electrode block component and the second electrode block component, and the first electrode block component and the second electrode block component are both rotatably connected to the bolt.

[0009] Preferably, a connecting plate is provided at the second end of the first electrode block component, a screw is rotatably connected to the connecting plate, a control block is threadedly connected to the screw, and the control block is slidably connected to the second end of the first electrode block component.

[0010] Preferably, the second end of the second electrode block component is located between the control block and the connecting plate.

[0011] Preferably, a nut is provided on the screw rod, and the nut is located at an end of the screw rod away from the control block.

[0012] Preferably, a clamping plate is provided on one side of the upper end of the control block close to the connecting plate, and an abutting plate is provided on the lower end of the control block, and the length of the abutting plate is greater than the length of the clamping plate.

[0013] Preferably, a protrusion is provided on the second end of the first electrode block component.

[0014] Preferably, the second end of the second electrode block component is provided with an oblique opening, and the oblique opening is adapted to the clamping plate at the upper end of the control block;

[0015] The second end of the second electrode block component abuts against the abutment plate at the lower end of the control block when the control block is located above the protrusion.

[0016] Preferably, a stabilizing rod is fixedly connected to the lower surface of the control block, and the stabilizing rod is inserted and slid in the cavity in the second end of the first electrode block component. A sliding groove is provided on the stabilizing rod, and a sliding shaft is slidably connected in the sliding groove. Stabilizing wheels are rotatably connected at both ends of the sliding shaft, and the stabilizing wheels abut against the upper surface of the cavity. A spring is provided between the sliding shaft and the lower surface of the sliding groove.

[0017] Preferably, two ends of the spring are fixedly connected to the sliding shaft and the sliding groove respectively.

[0018] Compared with the prior art, the present invention has at least the following beneficial effects:

[0019] Compared with the existing structure, the present application changes the electrode block from a fixed structure to a movable structure, which not only makes it easier to load and unload, ensuring the operation time of the machine, but also increases its width, avoiding the inability to produce due to slight displacement of the graphite boat, shortening maintenance time and improving workshop production capacity. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1It is a schematic diagram of the main three-dimensional structure of the utility model;

[0021] Figure 2 It is a schematic diagram of the main structure of the utility model;

[0022] Figure 3 It is a top view schematic diagram of the main structure of the utility model;

[0023] Figure 4 It is a left side schematic diagram of the main structure of the utility model;

[0024] Figure 5 It is a left side schematic diagram of the control block connection structure of the utility model;

[0025] Figure 6 It is a front view schematic diagram of the control block connection structure of the utility model.

[0026] In the figure: 1. first electrode block component; 2. bolt; 3. second electrode block component; 4. nut; 5. screw; 6. control block; 7. protrusion; 8. bevel; 9. cavity; 10. stabilizing rod; 11. slide groove; 12. slide shaft; 13. stabilizing wheel; 14. spring. DETAILED DESCRIPTION

[0027] In the present utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes, and do not specifically refer to the order or sequence, nor are they used to limit the present utility model. They are only used to distinguish the protective components or operations described with the same technical terms, and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions and technical features between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in this field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.

[0028] Example 1

[0029] See also Figure 1-4 A clamp electrode comprises a first electrode block component 1 and a second electrode block component 3, wherein two ends of the first electrode block component 1 and two ends of the second electrode block component 3 are movably connected respectively.

[0030] The working principle and beneficial effects of the above scheme:

[0031] Compared with the existing structure, the present application changes the electrode block from a fixed structure to a movable structure, which not only makes it easier to load and unload, ensuring the operation time of the machine, but also increases its width, avoiding the inability to produce due to slight displacement of the graphite boat, shortening maintenance time and improving workshop production capacity.

[0032] Example 2

[0033] See also Figure 1-4 On the basis of Example 1, the first end of the first electrode block component 1 is provided with a hole for accommodating the bolt 2, and the first end of the second electrode block component 3 is provided with a hole for accommodating the bolt 2. The bolt 2 is inserted into the holes of the first electrode block component 1 and the second electrode block component 3, and the first electrode block component 1 and the second electrode block component 3 are both rotatably connected with the bolt 2.

[0034] The second end of the first electrode block component 1 is provided with a connecting plate, on which a screw 5 is rotatably connected, and a control block 6 is threadedly connected to the screw 5, and the control block 6 is slidably connected to the second end of the first electrode block component 1.

[0035] The second end of the second electrode block component 3 is located between the control block 6 and the connecting plate.

[0036] The screw rod 5 is provided with a nut 4 , and the nut 4 is located at an end of the screw rod 5 away from the control block 6 .

[0037] A clamping plate is provided on one side of the upper end of the control block 6 close to the connecting plate, and an abutting plate is provided on the lower end of the control block 6 , wherein the length of the abutting plate is greater than the length of the clamping plate.

[0038] A protrusion 7 is provided on the second end of the first electrode block component 1 .

[0039] The second end of the second electrode block component 3 is provided with an oblique opening 8, and the oblique opening 8 is adapted to the clamping plate at the upper end of the control block 6;

[0040] When the control block 6 is located above the protrusion 7 , the second end of the second electrode block component 3 abuts against the abutment plate at the lower end of the control block 6 .

[0041] The working principle and beneficial effects of the above scheme:

[0042] The first electrode block component 1 is connected to the second electrode block component 3 by bolts 2. This connection allows the second electrode block component 3 to be lifted upwards when the components are loaded and unloaded in the process chamber, making it easy to disassemble and assemble. The nut 4 is fixed to one end of the screw 5 to prevent the screw 5 from falling off when it is reversed. There is a transition fit between the screw 5 and the control block 6 to ensure that the control block 6 will not get stuck during the movement. When the screw 5 is reversed, the control block is driven forward by the thread on the screw 5. When it moves to the protrusion 7 above the first electrode block component 1, the abutment plate of the control block 6 pushes the second electrode block component 3 upwards, loosens the first electrode block component 1 and the second electrode block component 3, and can be easily removed. When the screw 5 rotates forward, the screw 5 pushes the control block 6 to move backward, and the clamping plate of the control block 6 presses the bevel 8 of the second electrode block component 3 to fix it firmly;

[0043] Compared with the existing fixed structure, the electrode block and the support rod in the process chamber can only be matched in a transitional manner, which causes frequent displacement when in contact with the graphite boat, inducing high-frequency and boat collision accidents. The present application can change their matching relationship to a clearance fit or add materials such as thermal insulation cotton to the electrode block to firmly fix them in the same position.

[0044] Example 3

[0045] See also Figure 5-6 On the basis of Examples 1 and 2, a stabilizing rod 10 is fixedly connected to the lower surface of the control block 6, and the stabilizing rod 10 is inserted and slidably inserted into the cavity 9 in the second end of the first electrode block component 1. A slide groove 11 is provided on the stabilizing rod 10, and a slide shaft 12 is slidably connected in the slide groove 11. Stabilizing wheels 13 are rotatably connected at both ends of the slide shaft 12, and the stabilizing wheel 13 abuts against the upper surface of the cavity 9. A spring 14 is provided between the slide shaft 12 and the lower surface of the slide groove 11.

[0046] Two ends of the spring 14 are fixedly connected to the sliding shaft 12 and the sliding groove 11 respectively.

[0047] The working principle and beneficial effects of the above scheme:

[0048] When the control block 6 is moved by the screw 5, due to the setting of the protrusion 7, the control block 6 will have certain ups and downs. In order to ensure the stability of the movement process of the control block 6, a stabilizing wheel 13 is provided. The stabilizing wheel 13 always rolls against the upper surface of the cavity 9 under the action of the spring 14 as the control block 6 moves, so that the control block 6 cannot be separated from the surface of the first electrode block component 1, thereby ensuring the stability of the movement process of the control block 6.

[0049] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. A clamp electrode, characterized in that: It comprises a first electrode block component (1) and a second electrode block component (3), wherein two ends of the first electrode block component (1) and two ends of the second electrode block component (3) are respectively movably connected.

2. A clamp electrode according to claim 1, characterized in that: The first end of the first electrode block component (1) is provided with a hole for accommodating a bolt (2), and the first end of the second electrode block component (3) is provided with a hole for accommodating a bolt (2). The bolt (2) is inserted into the holes of the first electrode block component (1) and the second electrode block component (3), and the first electrode block component (1) and the second electrode block component (3) are both rotatably connected to the bolt (2).

3. A clamp electrode according to claim 1, characterized in that: The second end of the first electrode block component (1) is provided with a connecting plate, to which a screw rod (5) is rotatably connected, and a control block (6) is threadedly connected to the screw rod (5), and the control block (6) is slidably connected to the second end of the first electrode block component (1).

4. A clamp electrode according to claim 3, characterized in that: The second end of the second electrode block component (3) is located between the control block (6) and the connecting plate.

5. A clamp electrode according to claim 3, characterized in that: The screw rod (5) is provided with a nut (4), and the nut (4) is located at an end of the screw rod (5) away from the control block (6).

6. A clamp electrode according to claim 4, characterized in that: A clamping plate is arranged on one side of the upper end of the control block (6) close to the connecting plate, and an abutting plate is arranged on the lower end of the control block (6), wherein the length of the abutting plate is greater than the length of the clamping plate.

7. A clamp electrode according to claim 6, characterized in that: A protrusion (7) is provided on the second end of the first electrode block component (1).

8. A clamp electrode according to claim 7, characterized in that: The second end of the second electrode block component (3) is provided with an oblique opening (8), and the oblique opening (8) is adapted to the clamping plate at the upper end of the control block (6); When the control block (6) is located above the protrusion (7), the second end of the second electrode block component (3) abuts against the abutment plate at the lower end of the control block (6).

9. A clamp electrode according to claim 3, characterized in that: A stabilizing rod (10) is fixedly connected to the lower surface of the control block (6), and the stabilizing rod (10) is inserted and slidably connected to the cavity (9) in the second end of the first electrode block component (1). A sliding groove (11) is provided on the stabilizing rod (10), and a sliding shaft (12) is slidably connected in the sliding groove (11). Stabilizing wheels (13) are rotatably connected at both ends of the sliding shaft (12), and the stabilizing wheel (13) is in contact with the upper surface of the cavity (9). A spring (14) is provided between the sliding shaft (12) and the lower surface of the sliding groove (11).

10. A clamp electrode according to claim 9, characterized in that: Two ends of the spring (14) are respectively fixedly connected to the sliding shaft (12) and the sliding groove (11).

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