Ozone gas-liquid treatment device and photovoltaic cleaning system

Abstract

The utility model relates to an ozone gas-liquid treatment device and a photovoltaic cleaning system. The ozone gas-liquid treatment device comprises a mixing mechanism and a gas-liquid separation mechanism. The mixing mechanism comprises a pipeline and is used for mixing the ozone gas and the ozone liquid to form a mixed fluid and enabling the mixed fluid to flow in the pipeline, and the mixing mechanism is used for increasing the flow speed of the mixed fluid to be higher than the flow speed of at least one of the ozone gas and the ozone liquid; the gas-liquid separation mechanism comprises a first inlet, a first outlet and a second outlet, the first inlet is communicated with the pipeline, and the gas-liquid separation mechanism is used for separating the mixed fluid and the residual gas output by the mixing mechanism and discharging the mixed fluid and the residual gas from the first outlet and the second outlet correspondingly. The mixing mechanism can promote mixing of ozone water and ozone gas by increasing the flow speed of the ozone water, and the gas-liquid separation mechanism can separate bubbles in the ozone water, so that the cleaning effect of the ozone water on silicon wafers can be improved, and the surface treatment quality of the silicon wafers can be improved.

Description

Technical Field

[0001] The present application relates to the technical field of photovoltaic cleaning systems, and in particular to an ozone gas liquid treatment device and a photovoltaic cleaning system. Background Art

[0002] In the production process of solar cells, ozone water (ozone is dissolved in clean water or acidic solution or alkaline solution to form a mixed fluid) is generally used to treat the surface of silicon wafers to improve the silicon wafer's absorption of light and thus improve the photoelectric conversion efficiency of solar cells.

[0003] Due to the low solubility of ozone gas, only low-concentration ozone water can be obtained during the mixing process of ozone gas and solution, resulting in poor cleaning effect of ozone water on silicon wafers; and the undissolved ozone gas and the oxygen produced by its decomposition during the mixing process will cause a large number of bubbles to appear in the ozone water, and the presence of bubbles will affect the surface treatment quality of silicon wafers. Utility Model Content

[0004] Based on this, it is necessary to provide an ozone gas-liquid treatment device and a gas-liquid separation mechanism to address the current problem that the mixing effect of ozone water is poor and a large number of bubbles will be generated during the mixing process, affecting the surface treatment quality of silicon wafers.

[0005] In a first aspect, an ozone liquid treatment device comprises:

[0006] a mixing mechanism, comprising a pipeline, the mixing mechanism being configured to mix ozone gas and ozone liquid to form a mixed fluid, and to make the mixed fluid flow in the pipeline, the mixing mechanism being configured to increase the flow rate of the mixed fluid to be higher than the flow rate of at least one of the ozone gas and the ozone liquid; and

[0007] The gas-liquid separation mechanism comprises a first inlet, a first outlet and a second outlet. The first inlet is connected to the pipeline. The gas-liquid separation mechanism is configured to separate the mixed fluid and the residual gas output by the mixing mechanism, and discharge the mixed fluid and the residual gas from the first outlet and the second outlet respectively.

[0008] In one embodiment, the mixing mechanism also includes a speed-increasing structure and a flow-mixing structure, both of which are connected to the pipeline. Along the flow direction of the mixed fluid, the flow-mixing structure is located upstream and / or downstream of the speed-increasing structure. The speed-increasing structure is configured to increase the flow rate of the mixed fluid to be higher than the flow rate of one of the ozone gas and the ozone liquid. The flow-mixing structure is configured to mix the ozone gas and the mixed fluid.

[0009] In one embodiment, the speed increasing structure comprises an active cavity and a liquid inlet and a liquid outlet connected to the active cavity, and the liquid inlet and the liquid outlet are both connected to the pipeline;

[0010] The speed increasing structure further comprises a movable component, which is movably disposed in the movable cavity and is configured to pressurize and extrude the mixed fluid entering the movable cavity from the liquid inlet to the liquid outlet.

[0011] In one embodiment, the movable chamber includes a first chamber and a second chamber that are spaced apart, and the liquid inlet includes a first liquid inlet, a second liquid inlet, and a third liquid inlet that are all connected to the pipeline;

[0012] The movable assembly includes a movable part and a switch connected to each other, and the movable part is movably arranged in the first chamber and the second chamber to separate the first chamber into a first inner chamber and a first outer chamber, and to separate the second chamber into a second inner chamber and a second outer chamber; the first inner chamber is communicated with the first liquid inlet and the liquid outlet, and the second inner chamber is communicated with the second liquid inlet and the liquid outlet;

[0013] The switch is used to control the third liquid inlet to selectively connect to the first outer chamber or the second outer chamber to drive the movable part located in the first chamber to move toward the first inner chamber; or drive the movable part located in the second chamber to move toward the second inner chamber.

[0014] In one embodiment, the flow mixing structure includes a flow mixing tube and a flow mixing piece connected to each other, the flow mixing tube is in communication with the pipeline, and the flow mixing piece is located in the flow mixing tube.

[0015] In one embodiment, the flow mixing element includes a curved flow dividing portion, which is located in the flow mixing tube and connected to the tube wall of the flow mixing tube; and / or, the flow mixing element includes a protruding portion, which is protruding from the tube wall of the flow mixing tube and is located in the flow mixing tube.

[0016] In one embodiment, the mixing mechanism also includes a uniform flow structure, which is located downstream of the speed increasing structure and the mixing flow structure along the flow direction of the mixed fluid; the uniform flow structure includes a liquid inlet port and a liquid outlet port, the liquid inlet port is connected to the pipeline, and the liquid outlet port is connected to the first inlet; along the first direction, the height of the liquid outlet port is higher than the height of the liquid inlet port, and the first direction is configured as the height direction of the ozone liquid treatment device.

[0017] In one embodiment, the uniform flow structure includes a first pipe and a second pipe that are connected to each other, the first pipe is provided with the liquid inlet port, the second pipe is provided with the liquid outlet port, the first pipe extends along the first direction, the second pipe extends along the second direction, and the second direction is configured to intersect with the first direction.

[0018] In one embodiment, the gas-liquid separation mechanism includes a pipeline group, and a first liquid level sensor and a second liquid level sensor disposed in the pipeline group, the pipeline group is provided with the first inlet, the first outlet and the second outlet, the first inlet is communicated with the liquid outlet port, and along the first direction, the height of the first outlet is greater than the height of the second outlet;

[0019] The first liquid level sensor is configured to detect that when the liquid level in the pipeline group reaches a first preset liquid level, control the second outlet to open; the second liquid level sensor is configured to detect that when the liquid level in the pipeline group reaches a second preset liquid level, control the second outlet to close; the first preset liquid level is lower than the second preset liquid level.

[0020] In a second aspect, the photovoltaic cleaning system includes the ozone liquid treatment device as described in the first aspect.

[0021] The mixing mechanism in the above-mentioned ozone liquid treatment device can increase the flow rate of the mixed fluid while promoting the mixing of ozone and ozone water, so that the contact frequency and contact speed of ozone water and ozone are faster, and the gas-liquid contact area is increased; in addition, by increasing the flow rate of the mixed fluid, the mass transfer resistance in the gas-liquid mass transfer process can be reduced during the mixing process, thereby promoting the dissolution of undissolved ozone; further, the higher flow rate of the mixed fluid helps to generate turbulence, and turbulence can increase the formation of eddies and turbulent flows, so that the ozone solute distribution in the mixed fluid is more uniform, so as to promote the further dissolution of undissolved ozone, thereby enabling ozone and ozone water to be fully mixed, increasing the concentration of ozone water, and thus improving the cleaning effect. In addition, by adding a gas-liquid separation mechanism, the residual gas is separated from the ozone water, so that the ozone water can be prevented from carrying too many bubbles and affecting the cleaning of silicon wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A schematic diagram of an ozone liquid treatment device provided in an embodiment of the present application.

[0023] Figure 2 Schematic diagram of the uniform flow structure and gas-liquid separation mechanism provided in the embodiments of the present application.

[0024] Figure 3 A schematic diagram of a speed increasing structure provided in an embodiment of the present application.

[0025] Figure 4 A three-dimensional diagram of a flow mixing element provided in an embodiment of the present application.

[0026] Figure 5 This is a front view of the flow mixing piece provided in an embodiment of the present application.

[0027] Description of the accompanying drawings: 100, ozone liquid treatment device; 1, mixing mechanism; 11, speed increasing structure; 111, first chamber; 1111, first inner chamber; 1112, first outer chamber; 112, second chamber; 1121, second inner chamber; 1122, second outer chamber; 113, liquid inlet; 1131, first liquid inlet; 1132, second liquid inlet; 1133, third liquid inlet; 114, liquid outlet; 115, movable part; 116, switch; 12, mixed flow structure; 121, mixed flow pipe; 122, mixed flow part; 1221, flow splitter; 1221a , spiral part; 1221b, annular part; 1222, raised part; 13, uniform flow structure; 131, liquid inlet port; 132, liquid outlet port; 133, first pipeline; 134, second pipeline; 14, jet structure; 2, gas-liquid separation mechanism; 21, first inlet; 22, first outlet; 23, second outlet; 24, pipeline group; 241, third pipeline; 242, fourth pipeline; 25, first liquid level sensor; 26, second liquid level sensor; 27, exhaust valve; 3, gas generating mechanism; 4, liquid generating mechanism; 41, tank body; 42, circulation pump. DETAILED DESCRIPTION

[0028] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0029] In order to solve the problem that ozone gas is difficult to fully mix with the solution, and a large number of bubbles will be generated during the mixing process, thus affecting the cleaning effect of ozone water on silicon wafers. Figure 1 The embodiment of the present application provides an ozone liquid treatment device 100. The ozone liquid treatment device 100 includes a gas generating mechanism 3, a liquid generating mechanism 4, a mixing mechanism 1 and a gas-liquid separation mechanism 2.

[0030] The mixing mechanism 1 includes a pipeline, and the mixing mechanism 1 is configured to mix ozone gas and ozone liquid to form a mixed fluid, and make the mixed fluid flow in the pipeline, and the mixing mechanism 1 is configured to increase the flow rate of the mixed fluid to make it higher than the flow rate of at least one of the ozone gas and the ozone liquid. In other words, the mixing mechanism 1 can increase the flow rate of the mixed fluid in the process of mixing ozone and ozone water, so that the contact frequency and contact speed of ozone water and ozone are faster, and the gas-liquid contact area is increased; in addition, by increasing the flow rate of the mixed fluid, the mass transfer resistance in the gas-liquid mass transfer process can be reduced during the mixing process, thereby promoting the mixing of undissolved ozone; further, the higher flow rate of the mixed fluid helps to generate turbulence, and turbulence can promote the uniform mixing of solutes in the mixed fluid by increasing the formation of eddies and turbulent flows, thereby further promoting the mixing of undissolved ozone, increasing the concentration of ozone water, and thus improving the cleaning effect.

[0031] It should be noted that the ozone gas in the embodiments of the present application refers to a gas including but not limited to ozone. The ozone liquid refers to a liquid whose solute includes but is not limited to ozone, and the solution of the ozone liquid may be an acidic solution including but not limited to hydrochloric acid or hydrofluoric acid, or an alkaline solution including but not limited to sodium hydroxide, or deionized water, etc.

[0032] See also Figure 1 and Figure 2 , the gas-liquid separation mechanism 2 includes a first inlet 21, a first outlet 22 and a second outlet 23. The first inlet 21 is connected to the pipeline, and the gas-liquid separation mechanism 2 is configured to separate the mixed fluid and the residual gas output by the mixing mechanism 1, and discharge the mixed fluid and the residual gas from the first outlet 22 and the second outlet 23 respectively. In other words, the mixed fluid flowing out of the pipeline of the mixing mechanism 1 flows into the gas-liquid separation mechanism 2 through the first inlet 21, and the gas-liquid separation mechanism 2 separates the bubbles contained in the mixed fluid, so that the separated mixed fluid is discharged from the first outlet 22, and the bubbles are discharged from the second outlet 23. Therefore, the addition of the gas-liquid separation mechanism 2 can reduce the bubbles in the ozone water and avoid affecting the surface treatment effect of the ozone water on the silicon wafer.

[0033] The gas generating mechanism 3 includes an ozone generator and an oxygen supply device which are connected. The oxygen supply device is used to supply oxygen to the ozone generator, and the ozone generator is used to drive oxygen decomposition and ozone generation. For example, the oxygen supply device can be an oxygen cylinder or an oxygen supply pipeline. The ozone generator can be a high-voltage discharge ozone generator, an ultraviolet irradiation ozone generator, or an electrolytic ozone generator, etc.

[0034] Please participate Figure 1 and Figure 2, the ozone liquid generating mechanism 4 includes a tank body 41 and a circulation pump 42. The circulation pump 42 includes a suction port and a delivery port. The tank body 41 has a containing tank and a cleaning tank, and the tank body 41 includes a first opening connected to the containing tank and a second opening connected to the cleaning tank. The containing tank is used to contain the acidic solution or alkaline solution or deionized water mentioned above for mixing with the ozone gas. The first opening of the containing tank is connected to the suction port of the circulation pump 42, and the circulation pump 42 is used to pump the solution in the solute tank into the pipeline of the mixing mechanism 1. The second opening of the cleaning tank is connected to the first outlet 22 of the gas-liquid separation structure to introduce the mixed fluid after gas-liquid separation into the cleaning tank. Exemplarily, the circulation pump 42 can be a centrifugal pump or a vacuum pump.

[0035] See also Figure 1 The specific components of the mixing mechanism 1 are described below. The mixing mechanism 1 includes a pipeline and a jet structure 14, a speed increasing structure 11, a flow mixing structure 12 and a flow uniforming structure 13 all connected to the pipeline.

[0036] Along the flow direction of the mixed fluid, the jet structure 14 is located upstream of the speed increasing structure 11, the flow mixing structure 12 and the uniform flow structure 13. The jet structure 14 includes a third opening, a fourth opening and a fifth opening. The third opening is connected to the ozone generator of the gas generating mechanism 3; the fourth opening is connected to the delivery port of the circulation pump 42, and the circulation pump 42 pumps the solution into the jet structure 14 to form a high-speed solution. The jet structure 14 uses a high-speed fluid jet to generate negative pressure to inhale the ozone gas in the ozone generator. Under the impact of the high-speed solution, the ozone gas forms dense small bubbles, which are preliminarily mixed with the high-speed solution to form ozone water. Exemplarily, the jet structure 14 can be a turbine ejector or a static pressure ejector.

[0037] In some embodiments, along the flow direction of the mixed fluid, the mixing structure 12 is located upstream and / or downstream of the speed increasing structure 11, the speed increasing structure 11 is configured to increase the flow rate of the mixed fluid to be higher than the flow rate of one of the ozone and the ozone liquid, and the mixing structure 12 is configured to mix the ozone gas and the mixed fluid. In other words, the mixing structure 12 can be arranged only at the front end of the speed increasing structure 11, or only at the rear end of the speed increasing structure 11, or at both the front end and the rear end of the speed increasing structure 11. The speed increasing structure 11 further increases the flow rate of the ozone water preliminarily mixed by the jet structure 14, and the mixing structure 12 further mixes the unmixed ozone with the ozone water.

[0038] Preferably, a mixing flow structure 12 is provided at the front and rear ends of the speed increasing structure 11, so that the preliminarily mixed ozone water ejected from the jet structure 14 is further mixed before entering the speed increasing structure 11 for speed increase. The accelerated ozone water is then deeply mixed with the ozone gas through the mixing flow structure 12, thereby achieving layer-by-layer speed increase and layer-by-layer mixing, effectively improving the mixing effect of ozone and ozone water, and increasing the concentration of ozone water.

[0039] The embodiment of the present application does not limit the number of the flow mixing structures 12. For example, the flow mixing structures 12 may be one, two, three, etc., and may be arranged upstream and / or downstream of the speed increasing structure 11 according to actual mixing needs.

[0040] The specific components and structures of the speed increasing structure 11 and the flow mixing structure 12 will be described below.

[0041] See also Figure 3 In some embodiments, the speed increasing structure 11 includes an active cavity and a liquid inlet 113 and a liquid outlet 114 connected to the active cavity, and the liquid inlet 113 and the liquid outlet 114 are both connected to the pipeline; the speed increasing structure 11 also includes a movable component, which is movably arranged in the active cavity, and the movable component is configured to pressurize and extrude the mixed fluid entering the active cavity from the liquid inlet 113 to the liquid outlet 114. The movable component is provided to apply pressure to the mixed fluid to increase the flow rate of the mixed fluid. Exemplarily, the movable component can be a hydraulic movable component or a pneumatic movable component.

[0042] See also Figure 3 In some embodiments, the movable chamber includes a first chamber 111 and a second chamber 112 that are spaced apart. The liquid inlet 113 includes a first liquid inlet 1131, a second liquid inlet 1132, and a third liquid inlet 1133, all of which are connected to the pipeline. The movable component includes a movable member 115 and a switch 116 that are connected. The movable member 115 is movably disposed in the first chamber 111 and the second chamber 112 to separate the first chamber 111 into a first inner chamber 1111 and a first outer chamber 1112, and to separate the second chamber 112 into a second inner chamber 1121 and a second outer chamber 1122. The first inner chamber 1111 is connected to the first liquid inlet 1131 and the liquid outlet 114, and the second inner chamber 1121 is connected to the second liquid inlet 1132 and the liquid outlet 114. The switch 116 is used to control the third liquid inlet 1133 to selectively connect to the first outer chamber 1112 or the second outer chamber 1122 to drive the movable part 115 located in the first chamber 111 to move toward the first inner chamber 1111; or drive the movable part 115 located in the second chamber 112 to move toward the second inner chamber 1121.

[0043] See also Figure 3The direction in which the movable member 115 in the first chamber 111 moves toward the first inner chamber 1111 is referred to as direction A, and the direction in which the movable member 115 in the second chamber 112 moves toward the second inner chamber 1121 is referred to as direction B.

[0044] See also Figure 3 , taking a reciprocating motion of the movable part 115 along the AB direction as an example. The mixed fluid in the pipeline enters the first inner chamber 1111 through the first liquid inlet 1131, and enters the second inner chamber 1121 through the second liquid inlet 1132. First, the movable part 115 drives the switch 116 located in the first chamber 111 to open, so that the third liquid inlet 1133 is connected with the first outer chamber 1112, and the mixed fluid enters the first outer chamber 1112. The mixed fluid in the first outer chamber 1112 pushes the movable part 115 located in the first chamber 111 to gradually move in the A direction, so that the movable part 115 squeezes the mixed fluid in the first inner chamber 1111, and accelerates the mixed fluid in the first inner chamber 1111 to be discharged from the liquid outlet 114. During the process of the movable member 115 in the first chamber 111 moving in the direction A, the movable member 115 in the second chamber 112 is also driven to move in the direction A, thereby opening the switch 116 in the second chamber 112, and gradually closing the switch 116 in the first chamber 111. After the switch 116 in the second chamber 112 is opened, the third liquid inlet 1133 is connected with the second outer chamber 1122, and the mixed fluid enters the second outer chamber 1122. The mixed fluid in the second outer chamber 1122 pushes the movable member 115 in the second chamber 112 to gradually move in the direction B, so that the movable member 115 squeezes the mixed fluid in the second inner chamber 1121 and accelerates it to be discharged from the liquid outlet 114.

[0045] For example, the movable part 115 can be a piston, and the switch 116 can be a piston switch 116 or a reciprocating switch 116. The movable part 115 and the switch 116 are used to cooperate with each other to control the flow and speed increase of the mixed fluid, which has a simple structure, reduces the failure points, and improves the reliability and durability of the speed increase structure 11; at the same time, the piston can directly apply thrust to the mixed fluid. This direct action method makes the force transmission more efficient and accurate, and improves the speed increase effect of the speed increase structure 11.

[0046] See also Figure 4 In some embodiments, the flow mixing structure 12 includes a flow mixing tube 121 and a flow mixing element 122 connected to each other. The flow mixing tube 121 is connected to the pipeline; the flow mixing element 122 is located in the flow mixing tube 121, and can further mix the ozone with the mixed fluid introduced into the flow mixing tube 121.

[0047] See also Figure 5In some optional embodiments, the mixing element 122 includes a curved diverter portion 1221, which is located in the mixing tube 121 and connected to the tube wall of the mixing tube 121. Further, the diverter portion 1221 includes a spiral portion 1221a and an annular portion 1221b. The spiral portion 1221a is connected to the tube wall of the mixing tube 121 so that the flow channel of the mixing tube 121 is divided into a plurality of spiral flow channels, which can enable the mixed fluid to flow in a spiral manner, thereby improving the mixing effect of the mixed fluid and the ozone gas. The annular portion 1221b is connected to the spiral portion 1221a, and the annular portion 1221b is used to support the spiral portion 1221a and cut the mixed fluid passing into the mixing tube 121, thereby further improving the mixing effect of the mixed fluid and ozone.

[0048] See also Figure 5 Exemplarily, the spiral portion 1221a is a plurality of arc-shaped plates. Along the radial direction of the mixing tube 121, one end of the plurality of arc-shaped plates converges at the center of the mixing tube 121, and the other end of the plurality of arc-shaped plates is spaced apart on the tube wall of the mixing tube 121. For example, the spiral portion 1221a includes six arc-shaped plates, which are arranged so as to separate the flow channel of the mixing tube 121 into six spiral flow channels. The annular portion 1221b is a plurality of annular support bars of different diameters. Along the axial direction of the mixing tube 121, the annular portion 1221b includes multiple layers spaced apart on a plurality of arc-shaped plates; each layer of the annular portion 1221b includes a plurality of annular support bars, and along the radial direction of the mixing tube 121, the plurality of annular support bars are spaced apart on each arc-shaped plate in a concentric circle manner.

[0049] See also Figure 5 In some other optional embodiments, the mixing member 122 includes a protrusion 1222, which is protruding from the wall of the mixing tube 121 and is located inside the mixing tube 121. Since the mixed fluid in the spiral flow channel will generate centrifugal force during the flow process and impact the wall of the mixing tube 121. The protrusion 1222 can cut the water flow, thereby accelerating the mixing of the mixed fluid and ozone. Exemplarily, the protrusion 1222 can be in the shape of a pyramid, a square, a cone, a column, etc.

[0050] See also Figure 1 In some embodiments, along the flow direction of the mixed fluid, the uniform flow structure 13 is located downstream of the speed increasing structure 11 and the flow mixing structure 12. Providing the uniform flow structure 13 before the gas-liquid separation mechanism 2 can slow down the flow rate of the mixed fluid, so that the gas-liquid separation mechanism 2 can better separate the bubbles and the mixed fluid.

[0051] See also Figure 2In some embodiments, the uniform flow structure 13 includes a liquid inlet port 131 and a liquid outlet port 132, the liquid inlet port 131 is connected to the pipeline, and the liquid outlet port 132 is connected to the first inlet 21 of the gas-liquid separation mechanism 2. Figure 2 In the direction C shown in the figure, the height of the liquid outlet port 132 is higher than the height of the liquid inlet port 131, and the first direction is configured as the height direction of the ozone liquid treatment device 100. As a result, the mixed fluid flowing through the uniform flow structure 13 slows down under the action of its own gravity. When the speed of the mixed fluid slows down, the resistance of the mixed fluid to the bubbles will also decrease, which means that the resistance encountered by the bubbles when moving in the mixed fluid becomes smaller, causing the bubbles to float upward until the size of the bubbles is large enough so that the buoyancy they encounter is greater than the resistance, and they escape from the mixed fluid.

[0052] See also Figure 2 In some embodiments, the uniform flow structure 13 includes a first pipe 133 and a second pipe 134 that are connected to each other. The first pipe 133 is provided with a liquid inlet port 131, and the second pipe 134 is provided with a liquid outlet port 132. The first pipe 133 extends along a first direction, and the second pipe 134 extends along a second direction, and the second direction is configured to intersect with the first direction. In other words, the second pipe 134 is located above the first pipe 133, and the second pipe 134 extends transversely and upwardly. In the first pipe 133, since the mixed fluid overcomes its own gravity and moves upward, the mixed fluid will generate downward pressure on the bubbles inside itself, and will still have a certain obstacle to the floating of the bubbles, so that most of the bubbles stay inside the mixed fluid. In the second pipe 134, the transversely arranged second pipe 134 provides an upward supporting force for the mixed fluid, which can overcome the gravity of the mixed fluid itself, so that the pressure applied to the bubbles is small, and the buoyancy of the bubbles is greater than the pressure applied by the mixed fluid, and the bubbles float up to escape from the mixed fluid. Therefore, the first pipe 133 and the second pipe 134 are provided, which can decelerate the mixed fluid and accelerate the escape of bubbles, so that the bubbles are separated from the mixed fluid, making it easier for the gas-liquid separation mechanism 2 to discharge the bubbles.

[0053] See also Figure 2 In some embodiments, the gas-liquid separation mechanism 2 includes a pipeline group 24, and a first liquid level sensor 25 and a second liquid level sensor 26 arranged in the pipeline group 24. The pipeline group 24 is provided with a first inlet 21, a first outlet 22 and a second outlet 23. The first inlet 21 is connected to the liquid outlet port 132 of the uniform flow structure 13, and the liquid level sensor 25 is provided in the pipeline group 24. Figure 2C direction as shown), the height of the first outlet 22 is greater than the height of the second outlet 23; the first liquid level sensor 25 is configured to detect that when the liquid level in the pipeline group 24 reaches a first preset liquid level, control the second outlet 23 to open; the second liquid level sensor 26 is configured to detect that when the liquid level in the pipeline group 24 reaches a second preset liquid level, control the second outlet 23 to close, and the first preset liquid level is lower than the second preset liquid level.

[0054] It is understandable that, in the mixed fluid in the uniform flow structure 13, bubbles gradually separate from the mixed fluid and gather above the liquid surface of the mixed fluid. After the mixed fluid flows into the pipeline group 24, bubbles continue to accumulate above the liquid surface of the mixed fluid. Under the action of air pressure and its own gravity, the mixed fluid will gradually move down to reach the first preset liquid level, and the first liquid level sensor 25 controls the second outlet 23 to open, so that the residual gas gathered above the liquid surface of the mixed fluid is discharged through the second outlet 23. As the residual gas is discharged, the air pressure on the mixed fluid decreases, and the liquid surface in the pipeline group 24 gradually moves up. When it moves up to the second preset liquid level, the second liquid level sensor 26 controls the second outlet 23 to close and stop discharging the residual gas, thereby completing the discharge of the residual gas. The mixed fluid after gas-liquid separation flows into the cleaning tank of the liquid generating mechanism 4 through the first outlet 22, waiting to clean the silicon wafer.

[0055] See also Figure 2 Furthermore, an exhaust valve 27 may be provided on the pipeline group 24 , and the exhaust valve 27 is electrically connected to the first liquid level sensor 25 and the second liquid level sensor 26 , and the opening or closing of the second outlet 23 is controlled by controlling the opening and closing of the exhaust valve 27 .

[0056] See also Figure 2 Further, the pipeline group 24 includes a third pipeline 241 and a fourth pipeline 242. Both ends of the fourth pipeline 242 are connected to the third pipeline 241. The third pipeline 241 is provided with a first inlet 21, a first outlet 22 and a second outlet 23. The fourth pipeline 242 is provided with a first liquid level sensor 25 and a second liquid level sensor 26. It can be understood that the fourth pipeline 242 and the third pipeline 241 form a structure similar to a communicating vessel. The liquid levels in the third pipeline 241 and the fourth pipeline 242 are flush, so that the change in the liquid level of the third pipeline 241 can be known by observing the liquid level in the fourth pipeline 242. The fourth pipeline 242 can be set as a transparent pipeline.

[0057] In a second aspect, an embodiment of the present application further provides a photovoltaic cleaning system, which includes the ozone liquid treatment device 100 as described in the first aspect, and the photovoltaic cleaning system has all the technical effects possessed by the ozone liquid treatment device 100.

[0058] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0059] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0060] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0061] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0062] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0063] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0064] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. An ozone liquid treatment device (100), characterized in that: include: A mixing mechanism (1) comprising a pipeline, wherein the mixing mechanism (1) is configured to mix ozone gas and ozone liquid to form a mixed fluid, and to make the mixed fluid flow in the pipeline, wherein the mixing mechanism (1) is configured to increase the flow rate of the mixed fluid to be higher than the flow rate of at least one of the ozone gas and the ozone liquid; and The gas-liquid separation mechanism (2) comprises a first inlet (21), a first outlet (22) and a second outlet (23), wherein the first inlet (21) is connected to the pipeline, and the gas-liquid separation mechanism (2) is configured to separate the mixed fluid and the residual gas output by the mixing mechanism (1), and discharge the mixed fluid and the residual gas from the first outlet (22) and the second outlet (23) respectively.

2. The ozone liquid treatment device (100) according to claim 1, characterized in that: The mixing mechanism (1) further comprises a speed-increasing structure (11) and a flow-mixing structure (12) both of which are connected to the pipeline; along the flow direction of the mixed fluid, the flow-mixing structure (12) is located upstream and / or downstream of the speed-increasing structure (11); the speed-increasing structure (11) is configured to increase the flow rate of the mixed fluid to be higher than the flow rate of one of the ozone gas and the ozone liquid; and the flow-mixing structure (12) is configured to mix the ozone gas and the mixed fluid.

3. The ozone liquid treatment device (100) according to claim 2, characterized in that: The speed increasing structure (11) comprises an active cavity and a liquid inlet (113) and a liquid outlet (114) which are in communication with the active cavity, and the liquid inlet (113) and the liquid outlet (114) are both in communication with the pipeline; The speed increasing structure (11) further comprises a movable component, the movable component being movably disposed in the movable cavity, and the movable component being configured to pressurize and extrude the mixed fluid entering the movable cavity from the liquid inlet (113) to the liquid outlet (114).

4. The ozone liquid treatment device (100) according to claim 3, characterized in that: The active chamber comprises a first chamber (111) and a second chamber (112) which are arranged at intervals, and the liquid inlet (113) comprises a first liquid inlet (1131), a second liquid inlet (1132) and a third liquid inlet (1133) which are all connected to the pipeline; The movable component comprises a movable part (115) and a switch (116) connected to each other; the movable part (115) is movably arranged in the first chamber (111) and the second chamber (112) to separate the first chamber (111) into a first inner chamber (1111) and a first outer chamber (1112), and to separate the second chamber (112) into a second inner chamber (1121) and a second outer chamber (1122); the first inner chamber (1111) is in communication with the first liquid inlet (1131) and the liquid outlet (114), and the second inner chamber (1121) is in communication with the second liquid inlet (1132) and the liquid outlet (114); The switch (116) is used to control the third liquid inlet (1133) to selectively connect to the first outer chamber (1112) or the second outer chamber (1122), so as to drive the movable part (115) located in the first chamber (111) to move toward the first inner chamber (1111); or to drive the movable part (115) located in the second chamber (112) to move toward the second inner chamber (1121).

5. The ozone liquid treatment device (100) according to claim 2, characterized in that: The flow mixing structure (12) comprises a flow mixing tube (121) and a flow mixing piece (122) connected to each other; the flow mixing tube (121) is in communication with the pipeline; and the flow mixing piece (122) is located inside the flow mixing tube (121).

6. The ozone liquid treatment device (100) according to claim 5, characterized in that: The flow mixing element (122) comprises a flow dividing portion (1221) arranged in a curved manner, the flow dividing portion (1221) being located in the flow mixing tube (121) and connected to the tube wall of the flow mixing tube (121); and / or the flow mixing element (122) comprises a protruding portion (1222), the protruding portion (1222) being arranged protrudingly on the tube wall of the flow mixing tube (121) and being located in the flow mixing tube (121).

7. The ozone liquid treatment device (100) according to claim 2, characterized in that: The mixing mechanism (1) further comprises a flow-uniform structure (13), wherein the flow-uniform structure (13) is located downstream of the speed-increasing structure (11) and the flow-mixing structure along the flow direction of the mixed fluid; the flow-uniform structure (13) comprises a liquid inlet port (131) and a liquid outlet port (132), wherein the liquid inlet port (131) is connected to the pipeline, and the liquid outlet port (132) is connected to the first inlet (21); along a first direction, the height of the liquid outlet port (132) is higher than the height of the liquid inlet port (131), and the first direction is configured as the height direction of the ozone liquid treatment device (100).

8. The ozone liquid treatment device (100) according to claim 7, characterized in that: The flow-uniform structure (13) comprises a first pipe (133) and a second pipe (134) which are connected to each other; the first pipe (133) is provided with the liquid inlet port (131); the second pipe (134) is provided with the liquid outlet port (132); the first pipe (133) extends along the first direction; the second pipe (134) extends along a second direction; the second direction is configured to intersect with the first direction.

9. The ozone liquid treatment device (100) according to claim 7, characterized in that: The gas-liquid separation mechanism (2) comprises a pipeline group (24), and a first liquid level sensor (25) and a second liquid level sensor (26) arranged in the pipeline group (24); the pipeline group (24) is provided with the first inlet (21), the first outlet (22) and the second outlet (23); the first inlet (21) is communicated with the liquid outlet port (132); and along the first direction, the height of the first outlet (22) is greater than the height of the second outlet (23); The first liquid level sensor (25) is configured to detect that when the liquid level in the pipeline group (24) reaches a first preset liquid level, control the second outlet (23) to open; the second liquid level sensor (26) is configured to detect that when the liquid level in the pipeline group (24) reaches a second preset liquid level, control the second outlet (23) to close; the first preset liquid level is lower than the second preset liquid level.

10. A photovoltaic cleaning system, characterized in that: The photovoltaic cleaning system comprises the ozone liquid treatment device (100) according to any one of claims 1 to 9.

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