Cleaning basket for aluminum nitride substrate

Abstract

The utility model provides a cleaning basket of aluminium nitride substrate, including main frame and a plurality of bearing subassembly, the bearing subassembly includes at least two first support bar and two second support bar, the first support bar is equipped with the first rack part, the second support bar is equipped with the second rack part, the first rack part is equipped with the second rack part. Every two teeth on the first rack part and the second rack part form a group, the color marks of the teeth in the same group are the same, the color marks of the teeth in the adjacent groups are different, and the end of the first supporting rod and the end of the second supporting rod are connected with the main frame in a sliding mode. According to the cleaning basket for the aluminum nitride substrate, when the multiple first rack parts and the multiple second rack parts are matched with each other to clamp the aluminum nitride substrate, it can be ensured that the aluminum nitride substrate is vertically arranged in the cleaning basket and cannot incline; and color marks are arranged on the first rack part and the second rack part, so that the aluminum nitride substrate is ensured not to be dislocated during loading, the aluminum nitride substrate is ensured to be vertically mounted, and stains on the surface of the substrate are effectively removed.

Description

Technical Field

[0001] The utility model relates to the technical field of cleaning baskets, in particular to a cleaning basket for an aluminum nitride substrate. Background Art

[0002] Aluminum nitride substrate is an insulating ceramic substrate with high thermal and electrical conductivity. It has a low expansion coefficient and high oxidation resistance, making it a suitable choice for a variety of semiconductors.

[0003] When cleaning aluminum nitride substrates, people generally use a cleaning basket to load the aluminum nitride substrates. Currently, the bottom of the cleaning basket is provided with a groove that matches the substrate, but there are some problems with the structure. When the substrate is placed vertically in the groove, it will tilt, and the two adjacent substrates will tilt, and the sides of the substrates will stick together, resulting in the inability to effectively remove stains on the surface of the substrate. Utility Model Content

[0004] The technical problem to be solved by the utility model is: in order to overcome the shortcomings in the prior art that when a substrate is vertically placed in a cleaning basket groove, it will tilt, two adjacent substrates will tilt, and the sides of the substrates will stick together, resulting in stains on the surface of the substrates cannot be effectively cleaned, the utility model provides a cleaning basket for aluminum nitride substrates.

[0005] The two cams are connected to each other with a toothed plate, and the two cams are connected with each other with a toothed plate, and the two cams are connected with each other with a toothed plate, and the two cams are connected with each other with a toothed plate, and the two cams are connected with each other with a toothed plate.

[0006] The first support rod and the second support rod in each group of bearing components cooperate with each other to form a frame for fixing the aluminum nitride substrate. The bottom of the aluminum nitride substrate is supported by the first rack portion on the first support rod, and the upper side of the aluminum nitride substrate is clamped by the second rack portion on the second support plate. The spacing between the second support rods can be adjusted to adapt to aluminum nitride substrates of different sizes; the locking member is used to fix the position of the first support rod and the second support rod. Color markings are provided on the teeth of the first rack portion and the second rack portion. The color markings of the teeth corresponding to the vertical position of the first rack portion and the second rack portion are the same, so that the aluminum nitride substrate is ensured to be placed vertically when the aluminum nitride substrate is placed.

[0007] Furthermore, in order to facilitate the adjustment of the positions of the first support rod and the second support rod, the top and bottom of the main frame are provided with a plurality of strip holes arranged along the length direction, and the locking member is a screw that cooperates with the first support rod and the second support rod.

[0008] Furthermore, when the aluminum nitride substrate is loaded, in order to place the two ends of the aluminum nitride substrate in the teeth corresponding to the positions of the two second rack parts, a slide groove is provided on the second support rod along the length direction, a slider is slidably connected in the slide groove, and a telescopic rod is connected between the sliders in the same group of bearing components.

[0009] When loading the aluminum nitride substrate, the aluminum nitride substrate is slid into between the second support rods with the telescopic rod as the base point, ensuring that the two ends of the aluminum nitride substrate are located in the teeth corresponding to the positions of the two second rack parts. Each time an aluminum nitride substrate is loaded, the sliders at both ends of the telescopic rod move a distance of one tooth along the length direction of the second rack part.

[0010] Furthermore, in order to allow the aluminum nitride substrate to be loaded into the cleaning basket in a vertical direction, a guide rod extending toward the bottom of the main frame is provided on the telescopic rod.

[0011] Furthermore, handles are symmetrically provided at both ends of the top of the main frame.

[0012] The beneficial effects of the utility model are as follows: the utility model provides a cleaning basket for an aluminum nitride substrate, which can ensure that the aluminum nitride substrate is vertically arranged in the cleaning basket without tilting when a plurality of first rack parts and a second rack parts cooperate with each other to clamp the aluminum nitride substrate; color markings are arranged on the first rack part and the second rack part to ensure that the aluminum nitride substrate is not misaligned when loaded, and the aluminum nitride substrate is vertically installed, so that stains on the surface of the substrate can be effectively removed. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0014] Figure 1 It is a structural schematic diagram of the best embodiment of the utility model;

[0015] Figure 2yes Figure 1 A is an enlarged schematic diagram.

[0016] In the figure: 1, main frame, 11, strip hole, 12, handle, 2, first support rod, 21, first rack portion, 3, second support rod, 31, second rack portion, 32, slide groove, 4, slider, 5, telescopic rod, 6, guide rod, 7, locking piece. DETAILED DESCRIPTION

[0017] Now the utility model is described in detail with reference to the accompanying drawings. This figure is a simplified schematic diagram, which only illustrates the basic structure of the utility model in a schematic manner, so it only shows the components related to the utility model.

[0018] like Figure 1-2 As shown, a cleaning basket for an aluminum nitride substrate of the utility model comprises a main frame 1 and a plurality of groups of bearing components arranged on the main frame 1, handles 12 are symmetrically provided at both ends of the top of the main frame 1, the bearing components comprise two first support rods 2 arranged at the bottom of the main frame 1, and two second support rods 3 arranged at the top of the main frame 1, the axes of the first support rod 2 and the second support rod 3 are parallel, a first rack portion 21 is provided at the upper end of the first support rod 2 along the length direction, a second rack portion 31 is provided on the side wall of the second support rod 3 along the length direction of the second support rod 3, the teeth on the first rack portion 21 and the second rack portion 31 are in a group of two, the color markings of the teeth in the same group are the same, the color markings of the teeth in adjacent groups are different, the color markings of the teeth corresponding to the vertical positions of the first rack portion 21 and the second rack portion 31 are the same, the ends of the first support rod 2 and the second support rod 3 are slidably connected to the main frame 1, the ends of the first support rod 2 and the second support rod 3 are provided with locking members 7 for fixing the positions of the first support rod 2 and the second support rod 3, and the projections of the first support rod 2 in the vertical direction are both arranged between the projections of the two second support rods 3 in the vertical direction.

[0019] The top and bottom of the main frame 1 are provided with a plurality of strip holes 11 arranged along the length direction. The locking member 7 is a screw that cooperates with the first support rod 2 and the second support rod 3. The screw passes through the strip hole 11 and cooperates with the nut to fix the ends of the first support rod 2 and the second support rod 3.

[0020] The second support rod 3 is provided with a slide groove 32 along the length direction, and a slider 4 is slidably connected in the slide groove 32. The slider 4 is slidably arranged at the upper end of the second support rod 3, and a telescopic rod 5 is connected between the sliders 4 in the same group of bearing components. The telescopic rod 5 is provided with a guide rod 6 extending toward the bottom direction of the main frame 1, and the guide rod 6 is arranged in the vertical direction.

[0021] Working process:

[0022] Before loading the substrate, adjust the distance between the two second support rods 3 so that the distance between the two second support rods 3 is slightly larger than the width of the substrate, ensuring that the substrate can be inserted between the two second rack parts 31; the color markings on the first rack part 21 and the second rack part 31 can prevent the substrate from tilting and misaligning when loading the substrate; in order to prevent friction between the substrate and the second rack part 31 when the substrate is installed, causing the substrate to wear, the telescopic rod 5 is used as the base point and the guide rod 6 is used as the guide to slide the aluminum nitride substrate between the second support rods 3 to avoid friction between the substrate and the second rack part 31. For each aluminum nitride substrate installed, the sliders 4 at both ends of the telescopic rod 5 move the distance of one tooth along the length direction of the second rack part 31, and so on. After a group of bearing components are filled with substrates, adjust the distance between the two second support rods 3, clamp the ends of the substrate, and ensure that the substrate is set vertically.

[0023] Directions and references (e.g., up, down, left, right, etc.) in the present invention may only be used to assist in the description of features in the accompanying drawings. Therefore, the following detailed description is not to be taken in a limiting sense, and the scope of the subject matter claimed is limited only by the attached claims and their equivalents.

[0024] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without departing from the scope of the utility model through the above description. The technical scope of this utility model is not limited to the contents of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A cleaning basket for an aluminum nitride substrate, characterized in that: The invention comprises a main frame (1) and a plurality of bearing components arranged on the main frame (1), wherein the bearing components comprise at least two first support rods (2) arranged at the bottom of the main frame (1), and two second support rods (3) arranged at the top of the main frame (1), wherein the axes of the first support rod (2) and the second support rod (3) are parallel, a first rack portion (21) is arranged at the upper end of the first support rod (2) along the length direction, a second rack portion (31) is arranged on the side wall of the second support rod (3) along the length direction of the second support rod (3), and the teeth on the first rack portion (21) and the second rack portion (31) are arranged in a Two teeth form a group, the teeth in the same group have the same color marking, and the teeth in adjacent groups have different color markings, the teeth in the first rack portion (21) and the second rack portion (31) in the vertical direction have the same color marking, the ends of the first support rod (2) and the second support rod (3) are slidably connected to the main frame (1), the ends of the first support rod (2) and the second support rod (3) are provided with locking members (7) for fixing the positions of the first support rod (2) and the second support rod (3), and the projections of the first support rod (2) in the vertical direction are arranged between the projections of the two second support rods (3) in the vertical direction.

2. A cleaning basket for an aluminum nitride substrate as claimed in claim 1, characterized in that: The top and bottom of the main frame (1) are provided with a plurality of strip-shaped holes (11) arranged along the length direction, and the locking member (7) is a screw that cooperates with the first support rod (2) and the second support rod (3).

3. The cleaning basket for aluminum nitride substrate according to claim 1, characterized in that: The second support rod (3) is provided with a slide groove (32) along the length direction, a slider (4) is slidably connected in the slide groove (32), and telescopic rods (5) are connected between the sliders (4) in the same group of bearing components.

4. A cleaning basket for an aluminum nitride substrate as claimed in claim 3, characterized in that: The telescopic rod (5) is provided with a guide rod (6) extending towards the bottom of the main frame (1).

5. The cleaning basket for aluminum nitride substrate according to claim 1, characterized in that: Handles (12) are symmetrically provided at both ends of the top of the main frame (1).

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