Auxiliary tool for adjusting crystal orientation deviation angle

Abstract

The utility model provides an auxiliary tool for adjusting a crystal orientation deviation angle, which comprises a bonding plate for bearing a crystal bar, a base and a mounting plate arranged above the base, the upper surface of the mounting plate is obliquely arranged, and the bonding plate is bonded on the mounting plate. The mounting plate with the inclined upper surface is arranged on the base to be bonded with the bonding plate for bearing the crystal bar, so that the function of adjusting the crystal orientation of the crystal bar in the y direction is realized, the crystal bar with overlarge crystal orientation deviation in the y direction can meet the production precision requirement through the device, and the yield of the crystal bar is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor silicon wafer processing, in particular to an auxiliary tooling for adjusting a crystal orientation deviation angle. Background Art

[0002] Before a semiconductor single crystal silicon ingot is cut into silicon wafers, the crystal orientation on the x and y directions of the crystal orientation control plane needs to be measured, and the crystal ingot offset positioning is performed when the crystal ingot is bonded to the cutting tool according to the crystal orientation data so that its crystal orientation angle meets the production requirements. Figure 1 As shown, the crystal orientation adjustment at A and B in the x-direction can be achieved by offsetting in the horizontal direction, while the crystal orientation adjustment at C and D in the y-direction requires offsetting in the vertical direction. Among them, the crystal orientation adjustment in the x-direction is a mature existing technology, but there is currently no simpler adjustment method for the crystal orientation in the y-direction.

[0003] Chinese patent CN215472273U discloses a device for adjusting the crystal orientation angle of a silicon rod, comprising: a base, and a carrier mounted on the base and used for carrying the crystal rod, and also comprising: an adjusting mechanism mounted on the base; a carrier for bonding the crystal rod is rotatably mounted on the base, and an adjusting mechanism eccentrically hinged to the carrier is provided on the base, the adjusting mechanism is manually rotated to drive the carrier to rotate horizontally, and the precise fine adjustment of the installation angle of the carrier is achieved in conjunction with a scale, thereby achieving micro-adjustment of the crystal rod bonding angle, meeting the strict requirements of the crystal orientation degree of the silicon wafer after cutting, simplifying the operation and greatly improving the accuracy, solving the technical problems of the prior art such as the inconvenience of adjusting the crystal rod bonding angle, poor accuracy, and failure to meet the cutting requirements.

[0004] At present, the crystal orientation error range of the crystal rod in each direction is generally within 120', while the crystal orientation requirement of the silicon wafer after the crystal rod is cut is generally controlled within 30'. Although this technical solution can adjust the crystal orientation in the x direction more conveniently, it cannot adjust the crystal orientation in the y direction. The crystal rod with a large crystal orientation error in the y direction can only be treated as waste, with a low yield rate, resulting in a waste of resources. Utility Model Content

[0005] The purpose of the utility model is to address the deficiencies in the prior art and provide an auxiliary tooling for adjusting the crystal orientation deviation angle. By arranging a mounting plate with an inclined upper surface on a base to bond a bonding plate that carries a crystal rod, the function of adjusting the crystal orientation of the crystal rod in the y direction is achieved. The crystal rod with excessive crystal orientation deviation in the y direction can meet the production accuracy requirements through the utility model, thereby improving the yield rate of the crystal rod.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] An auxiliary tool for adjusting the crystal orientation offset angle comprises an adhesive plate for carrying a crystal rod, a base and a mounting plate arranged above the base, wherein the upper surface of the mounting plate is inclined and the adhesive plate is bonded to the mounting plate.

[0008] As a preference, the mounting plate and the base are integrally arranged, and an angle between an upper surface of the mounting plate and a horizontal plane is in the range of 0-1°.

[0009] As a preference, the mounting plate and the base are separately arranged, and one end of the mounting plate is hinged to the base, and the other end is provided with an adjustment mechanism.

[0010] As a preference, a groove is provided on the bottom surface of the mounting plate, and the adjustment mechanism is installed in the groove.

[0011] As a preferred embodiment, the adjustment mechanism comprises:

[0012] A screw rod is movably connected to the mounting plate, and a control wheel is provided at one end of the screw rod extending out of the mounting plate;

[0013] A guide sleeve, installed in the groove and matched with the thread of the screw rod;

[0014] A connecting rod, one end of which is rotatably connected to the side surface of the guide sleeve.

[0015] As a preference, a hinge seat is installed on the top surface of the base, and the connecting rod domain section is rotatably connected to the hinge seat.

[0016] As a preference, the connecting rods and hinged seats are symmetrically arranged in two groups.

[0017] Preferably, the articulation directions of the mounting plate and the base, the guide sleeve and the connecting rod, and the connecting rod and the articulation seat are parallel.

[0018] As a preference, a limiting structure is provided at the end of the mounting plate, and the end of the adhesive plate abuts against the inner side of the limiting structure.

[0019] As a preference, a dovetail groove is provided at the bottom of the base.

[0020] The beneficial effects of the utility model are:

[0021] (1) The utility model realizes the function of adjusting the crystal orientation of the crystal rod in the y direction by arranging a mounting plate whose upper surface is at an angle to the horizontal plane on the base to bond the bonding plate that supports the crystal rod, thereby effectively reducing the difference in the y-axis crystal orientation of the crystal rod, expanding the qualified range of the y-axis crystal orientation difference of the crystal rod, and improving the yield rate of the crystal rod.

[0022] (2) The utility model sets the base and the mounting plate in an integrated manner, and sets a plurality of mounting plates with different inclination angles within a certain angle range. Workers can select a mounting plate with a suitable angle for bonding according to the deviation value of the y-axis crystal direction measurement of the crystal rod, so that the y-axis crystal direction adjustment is convenient and quick.

[0023] (3) The utility model provides a base and a mounting plate in a separate manner, and hinges the two and provides an adjustment mechanism, so that the angle adjustment is more flexible and accurate. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the crystal orientation control surface of the crystal rod;

[0025] Figure 2 This is a schematic diagram of the overall structure of the first embodiment of the utility model;

[0026] Figure 3 This is a side structural schematic diagram of an embodiment of the utility model;

[0027] Figure 4 For this utility model Figure 3 The local enlarged schematic diagram of point I in the middle;

[0028] Figure 5 This is a schematic diagram of the overall structure of the second embodiment of the utility model;

[0029] Figure 6 This is a side view structural schematic diagram of embodiment 2 of the present utility model. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0031] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the equipment or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present utility model. In addition, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0032] Embodiment 1

[0033] like Figure 1-4 As shown, this embodiment provides an auxiliary tooling for adjusting the crystal orientation offset angle, including an adhesive plate 2 supporting a crystal rod 1, and also including a base 3 and a mounting plate 4 arranged above the base 3, wherein the upper surface of the mounting plate 4 is inclined, and the adhesive plate 2 is bonded to the mounting plate 4.

[0034] By arranging a mounting plate 4 with an inclined upper surface on the base 3 to bond the bonding plate 2 carrying the crystal rod 1 , the function of adjusting the crystal orientation of the crystal rod 1 in the y direction is achieved.

[0035] like Figure 3 , 4 As shown, the mounting plate 4 and the base 3 are integrally arranged, and the angle between the upper surface of the mounting plate 4 and the horizontal plane is Figure 4 The middle angle θ is in the range of 0-1°, and within this angle range, a number of mounting plates 4 with different angles θ are arranged from small to large.

[0036] By integrally arranging the base 3 and the mounting plate 4 and arranging a plurality of mounting plates 4 with different inclination angles within a certain angle range, workers can select mounting plates 4 with suitable angles for bonding according to the deviation value of the y-axis crystal direction measurement of the crystal rod 1, making the y-axis crystal direction adjustment convenient and quick.

[0037] It should be noted that, in the present embodiment, in order to make the crystal orientation range of the crystal rod 1 with a crystal orientation deviation range of less than 2° in the y direction within 30′ after adjustment, two inclined planes with inclination angles θ of 22′30″ and 45′ are generally used. This is because the angle adjustment of the crystal rod 1 has opposite effects on the crystal orientation on the opposite side, which is reflected in the adjustment of the crystal orientation angles on the opposite sides as one positive and one negative, that is, the adjustment value of the crystal orientation of the inclined plane with an inclination angle θ of 22′30″ is 45′, and the adjustment value of the crystal orientation of the inclined plane with an inclination angle θ of 45′ is 1°30′. Calculation shows that the absolute value range of the crystal orientation difference applicable to the mounting plate 4 with an inclination angle θ of 22′30″ is 30′ to 1°15′, and the adjusted crystal orientation difference range is -15′ to 30′; the absolute value range of the crystal orientation difference applicable to the mounting plate 4 with an inclination angle θ of 45′ is 1° to 2°, and the adjusted crystal orientation difference range is -30′ to 30′.

[0038] The following table shows an example of the y-axis crystal orientation adjustment of a crystal rod using a mounting plate 4 with an inclination angle θ of 22′30″ in actual production:

[0039]

[0040] The deviation of the data in the table is within a reasonable range. It can be seen from the table that by installing the crystal rod 1 and the bonding plate 2 on the mounting plate 4 with an inclination angle θ of 22′30″, the difference in the y-axis crystal direction of the crystal rod can be effectively reduced, the qualified range of the y-axis crystal direction difference of the crystal rod can be expanded, and the yield rate of the crystal rod can be improved.

[0041] like Figure 3 , 4 As shown, a limiting structure 32 is provided at the end of the mounting plate 4, and the end of the adhesive plate 2 abuts against the inner side of the limiting structure 32. At this time, the adjustment value in the x direction is 0, because the adjustment in the x direction is a prior art and will not be described here.

[0042] like Figure 2 As shown, a dovetail groove 33 is provided at the bottom of the base 3 .

[0043] Embodiment 2

[0044] like Figure 5 , 6 As shown, the components identical or corresponding to those in the first embodiment are marked with the corresponding reference numerals in the first embodiment. For the sake of simplicity, only the differences from the first embodiment are described below. The second embodiment is different from the first embodiment in that the mounting plate 4 and the base 3 are separately arranged, and one end of the mounting plate 4 is hinged to the base, and the other end is provided with an adjustment mechanism 5.

[0045] The bottom surface of the mounting plate 4 is provided with a groove 41, and the adjustment mechanism 5 is installed in the groove 41. The adjustment mechanism 5 includes: a screw rod 51, which is movably connected to the mounting plate 4, and a control wheel 511 is provided at one end thereof extending from the mounting plate 4; a guide sleeve 52, which is installed in the groove 41 and threadedly matched with the screw rod 51; and a connecting rod 53, one end of which is rotatably connected to the side of the guide sleeve 52. The top surface of the base 3 is provided with an articulated seat 31, and the connecting rod 53 is rotatably connected to the articulated seat 31 in the field section.

[0046] By separately arranging the base 3 and the mounting plate 4, hingedly connecting the two and arranging an adjustment mechanism 5, the angle adjustment can be made more flexible and accurate.

[0047] like Figure 5 As shown, the connecting rod 53 and the hinge seat 31 are symmetrically arranged in two groups, so that the adjustment process is smoother and the force is more uniform.

[0048] like Figure 5 , 6 As shown, the hinge directions of the mounting plate 4 and the base 3, the guide sleeve 52 and the connecting rod 53, and the connecting rod 53 and the hinge seat 31 are parallel, so that when the screw rod 51 rotates to drive the guide sleeve 52 to move axially, the connecting rod 53 transmits the displacement of the guide sleeve 52 to the hinge seat 31, so that the mounting plate 4 can rotate around the hinge between it and the base 3.

[0049] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An auxiliary tool for adjusting the crystal orientation deviation angle, comprising a bonding plate for carrying a crystal rod, characterized in that: It also includes a base and a mounting plate arranged above the base, the upper surface of the mounting plate is inclined, and the adhesive plate is bonded to the mounting plate.

2. The auxiliary tooling for adjusting the crystal orientation deviation angle according to claim 1, characterized in that: The mounting plate and the base are integrally arranged, and the angle between the upper surface of the mounting plate and the horizontal plane is in the range of 0-1°.

3. The auxiliary tooling for adjusting the crystal orientation deviation angle according to claim 1, characterized in that: The mounting plate and the base are separately arranged, and one end of the mounting plate is hinged to the base, and the other end is provided with an adjustment mechanism.

4. The auxiliary tooling for adjusting the crystal orientation deviation angle according to claim 3, characterized in that: The bottom surface of the mounting plate is provided with a groove, and the adjustment mechanism is installed in the groove.

5. The auxiliary tooling for adjusting the crystal orientation deviation angle according to claim 4, characterized in that: The regulating mechanism comprises: A screw rod is movably connected to the mounting plate, and a control wheel is provided at one end of the screw rod extending out of the mounting plate; A guide sleeve, installed in the groove and matched with the thread of the screw rod; A connecting rod, one end of which is rotatably connected to the side surface of the guide sleeve.

6. The auxiliary tooling for adjusting the crystal orientation deviation angle according to claim 5, characterized in that: A hinge seat is installed on the top surface of the base, and the other end of the connecting rod is rotatably connected to the hinge seat.

7. The auxiliary tooling for adjusting the crystal orientation deviation angle according to claim 6, characterized in that: The connecting rod and the hinged seat are symmetrically arranged in two groups.

8. The auxiliary tooling for adjusting the crystal orientation deviation angle according to claim 6, characterized in that: The hinge directions of the mounting plate and the base, the guide sleeve and the connecting rod, and the connecting rod and the hinge seat are parallel.

9. The auxiliary tooling for adjusting the crystal orientation deviation angle according to claim 1, characterized in that: A limiting structure is disposed at the end of the mounting plate, and the end of the adhesive plate abuts against the inner side of the limiting structure.

10. The auxiliary tooling for adjusting the crystal orientation deviation angle according to claim 1, characterized in that: A dovetail groove is arranged at the bottom of the base.

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