Sliding supporting mechanism of ion implantation target chamber

Abstract

The utility model provides an ion implantation target chamber sliding supporting mechanism, which comprises a supporting assembling component, a switching bearing component, a deflection limiting component, a driving bracket component, a matching guide component and a structure reinforcing component, and is characterized in that a bearing vertical frame of the sliding supporting mechanism is arranged on a supporting seat body through a switching end and can deflect on the supporting seat body; the whole sliding supporting mechanism can flexibly deflect within a certain range so as to adapt to different position and angle requirements of the ion implantation target chamber, the deflection limiting assembly ensures that the deflection range of the transfer bearing assembly is limited, and the design of the transfer bearing assembly and the bearing vertical frame enables the mechanism to have high bearing capacity. The weight of the ion implantation target chamber and related equipment can be supported, the guide sliding sleeve matched with the guide assembly is matched with the guide rod body on the back face of the ion implantation target chamber, accurate guide is provided for movement of the ion implantation target chamber, reliable support and guide are provided for the ion implantation target chamber, and stability and accuracy of equipment operation are guaranteed.

Description

Technical Field

[0001] The utility model relates to integrated circuit production equipment, in particular to a sliding support mechanism for an ion implantation target chamber. Background Art

[0002] Patent document CN2851275Y discloses an ion implantation target chamber support mechanism, which is composed of components such as a handle, a cylinder, a connecting rod, a fixed seat, and a door panel. The power of the entire device is provided by two cylinders. The device is lifted upward by inputting compressed air, and the cylinder is connected to the door panel through a connecting rod. The connecting rod is connected to the screw rod and the door panel through a shaft sleeve. There is a semicircular groove on the connecting rod, which clamps the large rotating shaft together with the semicircular seat. The two ends of the large rotating shaft are fixed on the fixed seat, and the fixed seat is also fixed on the target chamber cavity. The piston rod ends of the two cylinders are fixed on the target chamber cavity through the cylinder fixed seat. The connecting block and the connecting rod together form a four-bar linkage. By swinging the handle upward or downward, the closing and opening of a small angle between the door panel and the target chamber cavity can be achieved. The opening and closing of the heavier target chamber cavity door can be easily achieved by controlling the opening and closing of the compressed air. When the door panel is opened, the two cylinders push the door panel upward, which will not cause obstacles to the staff operating in front of the target chamber cavity door. However, this support mechanism uses a connecting block and a connecting rod to form a four-bar linkage. By swinging the handle upward or downward, the door panel and the target chamber cavity can be closed and opened at a small angle. After long-term operation, it is easy to loosen, so that the target chamber cavity cannot be accurately guided and the operation stability is poor. Therefore, it is necessary to optimize the structure of this support mechanism to overcome the above defects. Utility Model Content

[0003] The utility model aims to provide a sliding support mechanism for an ion implantation target chamber to improve its operating performance.

[0004] The technical solution adopted by the utility model to solve its technical problems is:

[0005] An ion implantation target chamber sliding support mechanism, comprising:

[0006] A support assembly component is installed on the ion implanter frame through a connector and has an assembly space inside;

[0007] A transfer bearing assembly, which is mounted on the support assembly assembly through a deflection structure, can be deflected on the support assembly assembly, and has a bearing space inside;

[0008] A deflection limiting assembly, which is installed on the transfer bearing assembly through a movable connection structure and connected to the ion implanter frame through the movable connection structure, and the deflection limiting assembly limits the deflection range of the transfer bearing assembly;

[0009] A driving support assembly is installed on the transfer bearing assembly and can deflect together with the transfer bearing assembly. The driving support assembly has a support space for installing a driving motor;

[0010] A matching guide assembly is installed between the transfer bearings and can deflect with the transfer bearing assembly. The matching guide assembly has a matching space adapted to the guide shaft rod inside, and the matching guide assembly guides the deflection process of the transfer bearing assembly;

[0011] The structural reinforcement component is installed in the transfer load-bearing component and can strengthen the structure of the transfer load-bearing component.

[0012] Specifically, the support assembly includes:

[0013] A pair of supporting seats are provided, each supporting seat body is respectively installed on the ion implantation machine frame through connecting bolts, and has an assembly space inside.

[0014] In one embodiment of the utility model, the support seat body is formed by bending a stainless steel plate, the bottom of which extends laterally and is connected to the ion implantation machine frame through connecting bolts, and the top of which is bent upward.

[0015] The transfer bearing assembly includes:

[0016] A transfer end, which is provided with a pair, each transfer end is respectively mounted on the top of the support seat body through a rotating pin shaft, and can be deflected on the support seat body;

[0017] A pair of load-bearing frames are provided, each of which is respectively mounted on the transfer end and extends above the transfer end and can be deflected together with the transfer end.

[0018] In one embodiment of the utility model, the adapter end is made of a spherical bearing.

[0019] The deflection limit assembly includes:

[0020] A limit joint, a pair of which is provided, each limit joint being installed at the middle of the supporting frame through connecting bolts;

[0021] A pair of limiting iron chains are provided, one end of each limiting joint is respectively connected to the limiting joint, and the other end is respectively connected to the ion implantation machine frame, and the limiting iron chain limits the deflection range of the supporting frame.

[0022] The drive bracket assembly includes:

[0023] The driving seat plate is located between the supporting frames, and its two ends are fixedly connected to the lower section of the supporting frames by connecting bolts. The driving seat plate has a supporting space for installing a driving motor, and the driving motor of the ion implantation target chamber is installed on the driving seat plate.

[0024] The mating guide assembly includes:

[0025] A matching top beam, which is located between the supporting frames, and whose two ends are fixedly connected to the top of the supporting frames by connecting bolts;

[0026] A pair of guide sleeves are provided, each guide sleeve is installed in the matching top beam respectively, and its axes are parallel to each other, and can cooperate with the guide rod body on the back of the ion implantation target chamber to guide the movement process of the ion implantation target chamber.

[0027] In one embodiment of the utility model, the guide sleeve is implemented by a linear bearing.

[0028] Structural reinforcement components include:

[0029] A reinforcing crossbeam is located between the load-bearing frames, and both ends of the reinforcing crossbeam are fixedly connected to the middle of the load-bearing frames by connecting bolts respectively, so that the structure between the load-bearing frames is reinforced by the reinforcing crossbeam.

[0030] The advantages of the utility model are:

[0031] The bearing frame of the sliding support mechanism is installed on the support base body through the adapter end head, and can be deflected on the support base body, so that the entire sliding support mechanism can be flexibly deflected within a certain range to adapt to the different positions and angle requirements of the ion implantation target chamber. The deflection limit assembly ensures that the deflection range of the adapter bearing assembly is limited, thereby ensuring the stability of the mechanism. The design of the adapter bearing assembly and the bearing frame enables the mechanism to have a strong bearing capacity, which can support the weight of the ion implantation target chamber and related equipment to ensure the normal operation of the equipment. The guide sleeve of the matching guide assembly cooperates with the guide rod body on the back of the ion implantation target chamber to provide precise guidance for the movement of the ion implantation target chamber, thereby ensuring the accuracy and stability of the equipment. It has the advantages of flexibility, stability, easy installation and maintenance, strong bearing capacity, precise guidance, high structural strength and modular design, etc., which provides reliable support and guidance for the ion implantation target chamber, thereby ensuring the normal operation and accuracy of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a structural schematic diagram of the sliding support mechanism of the ion implantation target chamber proposed by the utility model;

[0033] Figure 2 is a side view of the support mechanism;

[0034] Figure 3 is a schematic diagram of the cross-sectional structure of the support mechanism;

[0035] Figure 4 It is a structural schematic diagram of the deflection limit assembly. DETAILED DESCRIPTION

[0036] In order to make the purpose, technical scheme and advantages of the embodiment of the utility model clearer, the technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. The components of the embodiment of the utility model generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the utility model provided in the drawings is not intended to limit the scope of the utility model claimed for protection, but merely represents the selected embodiment of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the utility model.

[0037] like Figure 1 to Figure 4 As shown, the ion implantation target chamber sliding support mechanism proposed by the utility model includes a support assembly component, a transfer bearing component, a deflection limit component, a drive support component, a matching guide component and a structure reinforcement component. The support assembly component is installed on the ion implantation machine frame through a connector, and has an assembly space inside. The transfer bearing component is installed on the support assembly component through a deflection structure and can be deflected on the support assembly component. The deflection limit component is installed on the transfer bearing component through a movable connection structure and is connected to the ion implantation machine frame through the movable connection structure. The frame is connected, and the deflection limit component limits the deflection range of the transfer bearing assembly. The driving support assembly is installed on the transfer bearing assembly and can deflect together with the transfer bearing assembly. The driving support assembly has a supporting space for installing a driving motor. The matching guide assembly is installed between the transfer bearings and can deflect together with the transfer bearing assembly. The matching guide assembly has a matching space that matches the guide shaft. The deflection process of the transfer bearing assembly is guided by the matching guide assembly. The structural reinforcement assembly is installed in the transfer bearing assembly to strengthen the structure of the transfer bearing assembly.

[0038] In the first embodiment, the support assembly component includes a support seat body 100, and a pair of support seat bodies are provided. Each support seat body is respectively installed on the ion implantation machine frame by connecting bolts, and has an assembly space inside.

[0039] The adapter bearing assembly includes an adapter terminal 210 and a bearing stand 220. A pair of adapter terminals are provided, each of which is installed on the top of the supporting seat body through a rotating pin shaft and can be deflected on the supporting seat body. A pair of bearing stands are provided, each of which is installed on the adapter terminal and extends above the adapter terminal and can be deflected together with the adapter terminal.

[0040] The deflection limit assembly includes a limit joint 310 and a limit chain 320. A pair of limit joints are provided, and each limit joint is installed in the middle of the supporting frame through a connecting bolt. A pair of limit chains are provided, and each limit joint is connected to the limit joint at one end and connected to the ion implanter frame at the other end. The deflection range of the supporting frame is limited by the limit chain. The deflection and extension flexibility of the limit chain is relatively large, so that the supporting frame can be adjusted as needed within the deflection range.

[0041] The driving support assembly includes a driving base plate 400, which is located between the supporting frames. Its two ends are fixedly connected to the lower section of the supporting frames by connecting bolts. The driving base plate has a supporting space for installing a driving motor, and the driving motor of the ion implantation target chamber is installed on the driving base plate.

[0042] The matching guide assembly includes a matching top beam 510 and a guide sleeve 520. The matching top beam is located between the supporting frames, and its two ends are fixedly connected to the top of the supporting frames by connecting bolts. A pair of guide sleeves are provided, and each guide sleeve is installed in the matching top beam respectively. The axes thereof are parallel to each other and can cooperate with the guide rod body on the back of the ion implantation target chamber to guide the movement process of the ion implantation target chamber. The ion implantation target chamber can also deflect along with the supporting frames during the rising or falling process.

[0043] The structural reinforcement component includes a reinforcement beam 600, which is located between the load-bearing frames. Both ends of the reinforcement beam are fixedly connected to the middle of the load-bearing frames by connecting bolts, and the reinforcement beam is used to strengthen the structure between the load-bearing frames.

[0044] In the second embodiment, the support assembly component includes a support seat body 100, and a pair of support seat bodies are provided. Each support seat body is respectively installed on the ion implantation machine frame by connecting bolts, and has an assembly space inside.

[0045] In this embodiment, the support seat body is formed by bending a stainless steel plate, the bottom of which extends in the transverse direction and is connected to the ion implantation machine frame through connecting bolts, and the top of which is bent upward.

[0046] The adapter bearing assembly includes an adapter terminal 210 and a bearing stand 220. A pair of adapter terminals are provided, each of which is installed on the top of the supporting seat body through a rotating pin shaft and can be deflected on the supporting seat body. A pair of bearing stands are provided, each of which is installed on the adapter terminal and extends above the adapter terminal and can be deflected together with the adapter terminal.

[0047] In this embodiment, the adapter end is made of a joint bearing, and the supporting frame is formed by connecting rods. The deflection process of the supporting frame is driven by a deflection cylinder installed in the ion implanter frame. It adopts existing technology and is irrelevant to the technical purpose of this technical solution, so it is not elaborated.

[0048] The deflection limit assembly includes a limit joint 310 and a limit chain 320. A pair of limit joints are provided, and each limit joint is installed in the middle of the supporting frame through a connecting bolt. A pair of limit chains are provided, and each limit joint is connected to the limit joint at one end and connected to the ion implanter frame at the other end. The deflection range of the supporting frame is limited by the limit chain. The deflection and extension flexibility of the limit chain is relatively large, so that the supporting frame can be adjusted as needed within the deflection range.

[0049] The driving support assembly includes a driving base plate 400, which is located between the supporting frames. Its two ends are fixedly connected to the lower section of the supporting frames by connecting bolts. The driving base plate has a supporting space for installing a driving motor, and the driving motor of the ion implantation target chamber is installed on the driving base plate.

[0050] The matching guide assembly includes a matching top beam 510 and a guide sleeve 520. The matching top beam is located between the supporting frames, and its two ends are fixedly connected to the top of the supporting frames by connecting bolts. A pair of guide sleeves are provided, and each guide sleeve is installed in the matching top beam respectively. The axes thereof are parallel to each other and can cooperate with the guide rod body on the back of the ion implantation target chamber to guide the movement process of the ion implantation target chamber. The ion implantation target chamber can also deflect along with the supporting frames during the rising or falling process.

[0051] In this embodiment, the guide sleeve is implemented by a linear bearing.

[0052] In this embodiment, the drive motor is connected to the ion implantation target chamber through a screw nut pair to drive the ion implantation target chamber to rise or fall. The guide rod body guides the rising or falling process of the ion implantation target chamber. Its transmission structure adopts the existing technology, so it is not described in detail.

[0053] The structural reinforcement component includes a reinforcement beam 600, which is located between the load-bearing frames. Both ends of the reinforcement beam are fixedly connected to the middle of the load-bearing frames by connecting bolts, and the reinforcement beam is used to strengthen the structure between the load-bearing frames.

[0054] In the description of the present utility model, it should be noted that when terms such as "upper", "lower", "inner", "outer", "left", "right" and the like indicating orientation or positional relationship appear, it should be understood that the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is usually placed when in use, or the orientation or positional relationship commonly understood by those skilled in the art, is only for the convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the equipment or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, when terms such as "first" and "second" appear, they are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. In the description of the present utility model, it should also be noted that, unless otherwise clearly specified and limited, terms such as "installation", "setting", and "connection" should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal connection of two elements. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

Claims

1. An ion implantation target chamber sliding support mechanism, characterized in that: include: A support assembly component is installed on the ion implanter frame through a connector and has an assembly space inside; A transfer bearing assembly, which is mounted on the support assembly assembly through a deflection structure, can be deflected on the support assembly assembly, and has a bearing space inside; A deflection limiting assembly, which is installed on the transfer bearing assembly through a movable connection structure and connected to the ion implanter frame through the movable connection structure, and the deflection limiting assembly limits the deflection range of the transfer bearing assembly; A driving support assembly is installed on the transfer bearing assembly and can deflect together with the transfer bearing assembly. The driving support assembly has a support space for installing a driving motor; A matching guide assembly is installed between the transfer bearings and can deflect with the transfer bearing assembly. The matching guide assembly has a matching space adapted to the guide shaft rod inside, and the matching guide assembly guides the deflection process of the transfer bearing assembly; The structural reinforcement component is installed in the transfer load-bearing component and can strengthen the structure of the transfer load-bearing component.

2. The ion implantation target chamber sliding support mechanism according to claim 1, characterized in that: The support assembly includes: A pair of supporting seats are provided, each supporting seat body is respectively installed on the ion implantation machine frame through connecting bolts, and has an assembly space inside.

3. The ion implantation target chamber sliding support mechanism according to claim 2, characterized in that: The transfer bearing assembly includes: A transfer end, a pair of which are provided, each transfer end being mounted on the top of the support seat body through a rotating pin shaft; A pair of load-bearing frames are provided, each of which is installed on the transfer end and extends above the transfer end.

4. The ion implantation target chamber sliding support mechanism according to claim 3, characterized in that: The deflection limit assembly includes: A limit joint, a pair of which is provided, each limit joint being installed at the middle of the supporting frame through connecting bolts; A pair of limiting iron chains are provided, one end of each limiting joint is respectively connected to the limiting joint, and the other end is respectively connected to the ion implantation machine frame.

5. The ion implantation target chamber sliding support mechanism according to claim 3, characterized in that: The drive bracket assembly includes: The driving seat plate is located between the supporting frames, and its two ends are fixedly connected to the lower section of the supporting frames by connecting bolts. The driving seat plate has a supporting space for installing a driving motor, and the driving motor of the ion implantation target chamber is installed on the driving seat plate.

6. The ion implantation target chamber sliding support mechanism according to claim 3, characterized in that: The mating guide assembly includes: A matching top beam, which is located between the supporting frames, and whose two ends are fixedly connected to the top of the supporting frames by connecting bolts; A pair of guide sleeves are provided, each guide sleeve is installed in the matching top beam respectively, and the axes thereof are parallel to each other.

7. The ion implantation target chamber sliding support mechanism according to claim 1, characterized in that: Structural reinforcement components include: A reinforcing crossbeam is located between the load-bearing frames, and both ends of the reinforcing crossbeam are fixedly connected to the middle of the load-bearing frames by connecting bolts.

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