Die bonding equipment jig

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By designing limit blocks, pads, substrates, fine-tuning mechanisms and induction sensors in the solid crystal equipment fixture, the problem of material skewed design on the fixture is solved, and the flexible contact correction and position adjustment of the material are achieved, avoiding the difficulty of material damage and skewed adjustment.

CN222600912UActive Publication Date: 2025-03-11SHENZHEN QUANTIAN TECH CO LTD

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Patent Information

Application Number: CN202421234605.2
Authority / Receiving Office: CN · China
Patent Type: Utility models(China)
Current Assignee / Owner
Filing Date: 2024-05-31
Publication Date: 2025-03-11
Estimated Expiration: 2034-05-31

AI Technical Summary

Technical Problem

When placing materials in solid crystal equipment, there is a design problem that there is no fine-tuning of the skewed position of the material, resulting in skewed, bumped or damaged materials, and it is inconvenient to adjust.

Method used

A crystal-fixing equipment fixing fixture is designed, including limiting blocks, pads, substrates, fine-tuning mechanisms and induction sensors. The limit block is slidally connected to the pad, and flexible contact is achieved through the contraction spring to correct material skew; the fine-tuning mechanism includes adjustment gears, rack plates and fine-tuning push plates. Through the coordination of the knob and rack plates, the fine-tuning of the material position is achieved.

Benefits of technology

It effectively avoids bumping or damage to the material on the fixture. Through flexible contact and the coordination of the fine-tuning mechanism, the deflection of the material is corrected and the fine-tuning position is achieved.

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Abstract

The utility model discloses a die bonding equipment jig, which comprises die bonding jig plates for limiting materials, a base plate and a base plate, the base plate is arranged between the symmetrically distributed die bonding jig plates, the base plate is arranged at the center of the surface of the die bonding jig plates, the base plate is provided with a limiting block and a cover plate, and a contraction spring is arranged between the cover plate and the base plate. A limiting cylinder is arranged on the inner surface of the bottom end of the cover plate, one end of the contraction spring is embedded into the limiting cylinder, the other end of the contraction spring is connected with the limiting block, a fine adjustment mechanism is arranged on the die bonding jig plate and comprises a fixing block, a knob, a rack plate, a connecting column and a fine adjustment push plate, and an adjusting gear is arranged in the fixing block; when materials are corrected, the materials are in flexible contact with the limiting block, the limiting block moves downwards, the materials are prevented from being damaged, the limiting block corrects the materials, large deflection of the materials is avoided, the materials are finely adjusted by moving the fine adjustment push plate and moving the positions of the materials through the fine adjustment push plate, and the design of finely adjusting the deflection positions of the materials is achieved.

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Description

Technical Field

[0001] The utility model belongs to the technical field of fixtures, and in particular relates to a fixture for crystal bonding equipment. Background Art

[0002] Die bonding equipment is an important mechanical equipment in semiconductor chip manufacturing. Its main function is to combine the wire and the chip surface to achieve circuit connection and fixation. Die bonding equipment is usually equipped with a fixture to position the material for subsequent processing.

[0003] When the material is placed on the jig, a fixed limit block is provided on the jig, which serves to limit the material. However, the material will be skewed, and the skewed material will come into hard contact with the limit block, causing the material to be bumped or even damaged. Secondly, it is inconvenient to adjust the position of the skewed material, and uneven force will be applied during manual adjustment, which will significantly change the position of the material and cause it to come into hard contact with the limit block. When the material is placed on the jig, the material will be skewed, and there is no design for fine-tuning the skewed position of the material. For this reason, the present application proposes a jig for a crystal bonding device. Utility Model Content

[0004] The utility model aims to provide a fixture for a crystal bonding device to solve the problem in the background art that when placing materials on the fixture, there is no design for fine-tuning the skewed position of the materials.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a crystal bonding equipment fixture, including a crystal bonding fixture plate for limiting the material, a pad and a base plate, the pad is installed between the symmetrically distributed crystal bonding fixture plates, the base plate is installed at the center of the surface of the crystal bonding fixture plate, a limiting block and a cover plate are provided on the pad, a contraction spring is provided between the cover and the pad, a limiting cylinder is provided on the inner surface of the bottom end of the cover, one end of the contraction spring is embedded in the limiting cylinder and the other end is connected to the limiting block, a fine-tuning mechanism is provided on the crystal bonding fixture plate, the fine-tuning mechanism includes a fixed block, a knob, a rack plate, a connecting column and a fine-tuning push plate, an adjusting gear is provided inside the fixed block, one end of the knob inserted into the fixed block is connected to the adjusting gear, the rack plate passes through the side of the fixed block, both ends of the connecting column are respectively connected to the end of the fine-tuning push plate and the rack plate, and a connecting block and an induction sensor are provided on the surface of the pad.

[0006] Preferably, the limit block is slidably connected to the backing plate and the cover plate, the top surface of the limit block is an inclined surface, and the top surface of the inclined surface of the limit block is flush with the surface of the material.

[0007] Preferably, guide blocks and baffles which are symmetrically distributed on the left and right are provided on the sides of the crystal bonding fixture plate.

[0008] Preferably, the connecting block includes a vertical portion and an inclined portion, the bottom end of the vertical portion of the connecting block is connected to the surface of the die-bonding fixture plate, the inductive sensor passes through the inclined portion of the connecting block, and the inclined inductive sensor is positioned opposite to the side of the material.

[0009] Preferably, the fixing block is a rectangular parallelepiped structure, a movable cavity is provided inside the fixing block, a sliding groove penetrating the movable cavity is provided on the side of the fixing block, and a rectangular limiting groove is provided on the top surface of the fixing block.

[0010] Preferably, teeth are provided on the outer surface of the adjusting gear, and the teeth on the adjusting gear are meshedly connected with the toothed protrusions on the bottom surface of the rack plate.

[0011] Preferably, the connecting column is slidably connected to the fixed block, the cross-section of the fine-tuning push plate is a right-angled trapezoid, the inclined surface of the fine-tuning push plate is opposite to the side of the material, and the bottom surface of the fine-tuning push plate is consistent with the surface of the base plate.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] In the utility model, when the material is corrected, it is in flexibly contact with the limit block, and the limit block moves downward to avoid damaging the material. The limit block corrects the material to avoid large material deflection. The push plate is moved by fine-tuning the position of the material to fine-tune the material. There is a design for fine-tuning the deflected position of the material. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the structure of the utility model;

[0015] Figure 2 It is a schematic diagram of the top view of the crystal bonding fixture plate of the utility model;

[0016] Figure 3 This is a schematic diagram of the main structure of the pad of the utility model;

[0017] Figure 4 It is a cross-sectional structural schematic diagram of the cover plate of the utility model;

[0018] Figure 5 This is a schematic diagram of the main structure of the connection block of the utility model;

[0019] Figure 6 For the utility model Figure 2 A schematic diagram of the enlarged structure of the middle part A;

[0020] Figure 7 It is a cross-sectional structural schematic diagram of the fixing block of the utility model;

[0021] In the figure: 1. crystal fixing fixture plate; 2. pad; 3. base plate; 4. material; 5. fixing block; 6. fine-tuning push plate; 11. guide block; 12. baffle; 13. connecting block; 14. induction sensor; 21. limit block; 22. cover plate; 51. knob; 52. rack plate; 53. connecting column; 54. adjusting gear; 221. limiting cylinder; 222. contraction spring. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] Example

[0024] See also Figures 1 to 7The utility model provides a technical solution: a crystal bonding equipment fixture, including a crystal bonding fixture plate 1, a pad 2 and a base plate 3 for limiting a material 4, the pad 2 is installed between the symmetrically distributed crystal bonding fixture plates 1, the base plate 3 is installed at the center of the surface of the crystal bonding fixture plate 1, the crystal bonding fixture plate 1 is combined with the pad 2 and the base plate 3 by a conventional method, the material 4 is placed on the surface of the base plate 3, the material 4 is a main body at the side position and a connecting part at the center position, the connecting part is circular, and a connecting strip connected to the main body is provided on the connecting part, there is a gap between the connecting part, the main body and the connecting strip, and the middle position of the material 4 The connecting part is placed on the pad 2, and a limit block 21 and a cover plate 22 are provided on the pad 2. The limit block 21 is telescopically and slidably connected to the pad 2, and the limit block 21 is placed in the above-mentioned gap. When the placed material 4 is deflected, the material 4 contacts the inclined surface of the limit block 21, and the limit block 21 moves downward and telescopes and presses the contraction spring 222 downward. The material 4 is in flexible contact with the limit block 21 to avoid damage to the material 4. Secondly, the contraction spring 222 contracts to generate elastic force to move the limit block 21, and the limit block 21 generates a force on the material 4 to correct the position of the material 4; the cover plate 22 is combined with the pad 2 by a conventional method, and the cover plate 22 and the pad 2 are connected. A contraction spring 222 is provided between the pads 2, and the contraction spring 222 plays the role of correcting the position of the limit block 21. A limiting cylinder 221 is provided on the inner surface of the bottom end of the cover plate 22. One end of the contraction spring 222 is embedded in the limiting cylinder 221 and the other end is connected to the limit block 21. The limiting cylinder 221 limits the bottom end of the contraction spring 222. A fine-tuning mechanism is provided on the solid crystal fixture plate 1. The fine-tuning mechanism includes a fixed block 5, a knob 51, a rack plate 52, a connecting column 53 and a fine-tuning push plate 6. The fixed block 5 is combined with the solid crystal fixture plate 1 by a conventional method. An adjusting gear 54 is provided inside the fixed block 5. The knob 51 is inserted into the fixed One end of the block 5 is connected to the adjusting gear 54, the rack plate 52 runs through the side of the fixed block 5, and the two ends of the connecting column 53 are respectively connected to the end of the fine-tuning push plate 6 and the rack plate 52. At the same time, the knobs 51 opposite to each other are rotated to rotate the adjusting gear 54, and the adjusting gear 54 drives the rack plate 52 to move, and the rack plate 52, the connecting column 53 and the fine-tuning push plate 6 move along the a direction. The fine-tuning push plate 6 moves the position of the material 4 to move the material 4. There is a design for fine-tuning the skewed position of the material 4. A connecting block 13 and an induction sensor 14 are provided on the surface of the pad 2. The induction sensor 14 senses the material 4 and can know the arrival status of the material 4.

[0025] In this embodiment, the limit block 21 is slidably connected to the pad 2 and the cover plate 22. The top surface of the limit block 21 is a slope. The top surface of the slope of the limit block 21 is flush with the surface of the material 4. The limit block 21 plays the role of limiting the material 4. The side position of the solid crystal fixture plate 1 is provided with a guide block 11 and a baffle 12 which are symmetrically distributed on the left and right. The guide block 11 and the baffle 12 limit the material 4.

[0026] In this embodiment, the connecting block 13 includes a vertical portion and an inclined portion. The bottom end of the vertical portion of the connecting block 13 is connected to the surface of the die-bonding fixture plate 1. The inductive sensor 14 passes through the inclined portion of the connecting block 13. The inclined inductive sensor 14 is opposite to the side of the material 4.

[0027] In this embodiment, the fixed block 5 is a rectangular parallelepiped structure, an active cavity is provided inside the fixed block 5, a slide groove penetrating the active cavity is provided on the side of the fixed block 5, a rectangular limiting groove is provided on the top surface of the fixed block 5, teeth are provided on the outer surface of the adjusting gear 54, the teeth on the adjusting gear 54 are meshed and connected with the toothed protrusions on the bottom surface of the rack plate 52, the connecting column 53 is slidably connected with the fixed block 5, the cross-section of the fine-tuning push plate 6 is a right-angled trapezoid, the inclined surface of the fine-tuning push plate 6 is opposite to the side of the material 4, the bottom surface of the fine-tuning push plate 6 is consistent with the surface of the base plate 3, and the opposite knobs 51 are rotated at the same time to rotate the adjusting gear 54, the adjusting gear 54 drives the rack plate 52 to move, the rack plate 52, the connecting column 53 and the fine-tuning push plate 6 move along the a direction, the fine-tuning push plate 6 moves the position of the material 4, so that the material 4 moves, and there is a design for fine-tuning the skewed position of the material 4.

[0028] The working principle and use process of this utility model:

[0029] When the material 4 is placed on the surface of the substrate 3, the limiting block 21, the guide block 11 and the baffle 12 limit the material 4;

[0030] The induction sensor 14 senses the material 4 and can know the arrival status of the material 4;

[0031] When the material 4 is deflected, the crystal bonding equipment corrects the material 4. During the correction, the material 4 flexibly contacts the limit block 21, the limit block 21 moves downward, and compresses the contraction spring 222. The contraction spring 222 corrects the limit block 21 to reset, avoiding damage to the material 4. The limit block 21 corrects the material 4 to avoid large deflection of the material 4.

[0032] When the deflection amplitude of the material 4 is adjusted to be small, the opposite knobs 51 are rotated at the same time to rotate the adjusting gear 54, and the adjusting gear 54 drives the rack plate 52 to move, and the rack plate 52, the connecting column 53 and the fine-tuning push plate 6 move along the direction a, and the fine-tuning push plate 6 moves the position of the material 4, so that the material 4 moves, and the design of fine-tuning the deflection position of the material 4 is provided;

[0033] To sum up: when material 4 is corrected, it is in flexibly contact with the limit block 21, and the limit block 21 moves down to avoid damage to material 4. The limit block 21 corrects material 4 to prevent material 4 from being deflected too much. By fine-tuning the push plate 6, the position of material 4 is moved by fine-tuning the push plate 6 to fine-tune the material 4. There is a design for fine-tuning the deflected position of material 4.

[0034] Although the embodiments of the present invention have been shown and described (see the above detailed description for details), it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A die bonding equipment fixture, comprising a die bonding fixture plate (1) for limiting a material (4), a pad (2) and a base plate (3), wherein the pad (2) is installed between symmetrically distributed die bonding fixture plates (1), and the base plate (3) is installed at the center of the surface of the die bonding fixture plate (1), characterized in that: The backing plate (2) is provided with a limit block (21) and a cover plate (22), a contraction spring (222) is provided between the cover plate (22) and the backing plate (2), a limit tube (221) is provided on the inner surface of the bottom end of the cover plate (22), one end of the contraction spring (222) is embedded in the limit tube (221) and the other end is connected to the limit block (21), and a fine adjustment mechanism is provided on the crystal fixing fixture plate (1), the fine adjustment mechanism comprising a fixing block (5), a knob (51), and a rack The fixing block (5) is provided with an adjusting gear (54) inside, the end of the knob (51) that penetrates into the fixing block (5) is connected with the adjusting gear (54), the rack plate (52) passes through the side of the fixing block (5), the two ends of the connecting column (53) are respectively connected with the end of the fine adjustment push plate (6) and the rack plate (52), and the surface of the pad (2) is provided with a connecting block (13) and an induction sensor (14).

2. The die bonding equipment fixture according to claim 1, characterized in that: The limit block (21) is slidably connected to the backing plate (2) and the cover plate (22); the top surface of the limit block (21) is an inclined surface; and the top surface of the inclined surface of the limit block (21) is flush with the surface of the material (4).

3. The die bonding equipment fixture according to claim 1, characterized in that: The side of the crystal fixing fixture plate (1) is provided with a guide block (11) and a baffle (12) which are symmetrically distributed on the left and right.

4. The die bonding equipment fixture according to claim 1, characterized in that: The connecting block (13) comprises a vertical portion and an inclined portion, the bottom end of the vertical portion of the connecting block (13) is connected to the surface of the crystal fixing fixture plate (1), the inductive sensor (14) passes through the inclined portion of the connecting block (13), and the inclined inductive sensor (14) is located opposite to the side of the material (4).

5. The die bonding equipment fixture according to claim 1, characterized in that: The fixing block (5) is a rectangular parallelepiped structure, an active cavity is provided inside the fixing block (5), a sliding groove penetrating the active cavity is provided on the side of the fixing block (5), and a rectangular limiting groove is provided on the top surface of the fixing block (5).

6. The die bonding equipment fixture according to claim 1, characterized in that: The outer surface of the adjusting gear (54) is provided with teeth, and the teeth on the adjusting gear (54) are meshedly connected with the toothed protrusions on the bottom surface of the rack plate (52).

7. The die bonding equipment fixture according to claim 1, characterized in that: The connecting column (53) is slidably connected to the fixed block (5); the cross section of the fine-adjusting push plate (6) is a right-angled trapezoid; the inclined surface of the fine-adjusting push plate (6) is opposite to the side of the material (4); and the bottom surface of the fine-adjusting push plate (6) is consistent with the surface of the base plate (3).