Radio frequency power supply device

Abstract

The utility model discloses a radio frequency power supply device. The radio-frequency power supply device comprises a frame, a plurality of radio-frequency power supplies arranged in the frame through a supporting mechanism, a cooling system and an electrical control loop electrically connected with the radio-frequency power supplies and used for controlling the radio-frequency power supplies to work, and the radio-frequency power supplies are electrically connected with the reaction chamber through the electrical control loop; the supporting mechanism comprises a supporting strip connected with the frame and a supporting guide rail arranged on the supporting strip, at least one outward end of the supporting guide rail is wedge-shaped, the device further comprises a positioning mechanism used for positioning the radio frequency power supply device and the reaction chamber, and the positioning mechanism comprises an elastic fixing assembly for transverse positioning and a telescopic rod assembly for longitudinal positioning. The radio frequency power supply device provided by the utility model is reasonable in layout, saves space, and meets the requirements of limiting the space and position of the radio frequency power supply device in the existing semiconductor process link; through the design of the elastic fixing assembly and the threaded telescopic rod, transverse and longitudinal positioning of the radio frequency power supply in the reaction chamber is realized.

Description

Technical Field

[0001] The utility model relates to semiconductor process equipment, in particular to a radio frequency power supply device used for providing radio frequency power to a reaction chamber of the semiconductor process equipment. Background Art

[0002] The manufacture of each semiconductor product requires hundreds of process links, and the entire manufacturing process is roughly divided into eight steps: wafer processing-oxidation-photolithography-etching-thin film deposition-interconnection-testing-packaging.

[0003] Among them, the equipment in the etching process is basically a radio frequency power supply. Since there will be radiation and other reasons in the etching process, the semiconductor etching equipment needs to be completed in the reaction chamber. Due to the special working principle of the radio frequency power supply, it needs to be used in conjunction with other components, such as cooling devices, electrical control circuits, etc. When working in different reaction chambers, the radio frequency power supply needs to be moved to the reaction chamber, causing other components to move with it, and the reaction chamber has space limitations and fixed position requirements, which requires the radio frequency power supply and other matching components to be easy to move, have reasonable space design and automatic positioning. Utility Model Content

[0004] Purpose of the invention: The utility model provides a radio frequency power supply device, which solves the problem that the reaction chamber of semiconductor process equipment has space limitations and fixed position requirements for the radio frequency power supply; at the same time, it solves the problem of convenient movement of the radio frequency power supply and its matching components.

[0005] Technical solution: The radio frequency power supply device of the utility model is used to provide radio frequency power to the reaction chamber of the process equipment. The radio frequency power supply device includes a frame, a radio frequency power supply, a cooling system and an electrical control circuit. The radio frequency power supply and the cooling system are encapsulated in the frame. The cooling system and the radio frequency power supply are thermally matched. The electrical control circuit is electrically connected to the radio frequency power supply. The electrical control circuit can also be electrically connected to the reaction chamber of the process equipment. It also includes a positioning mechanism for positioning the radio frequency power supply device and the reaction chamber. When the radio frequency power supply device is moved into the reaction chamber, it can be positioned horizontally (horizontally) and longitudinally (vertically) and fixed to the reaction chamber through the positioning mechanism.

[0006] The positioning mechanism comprises an elastic fixing component for transverse positioning and a telescopic rod component for longitudinal positioning.

[0007] Preferably, the positioning mechanism includes an elastic fixing component, and the elastic fixing component includes an elastic positioning column and a positioning hole used in conjunction with the positioning column. Further preferably, the elastic positioning column is an elastic knob plunger connected to the bottom of the frame; the reaction chamber is provided with a crossbeam that contacts the bottom of the frame and is used for horizontal directional movement of the RF power supply device, and the crossbeam is provided with a slot hole that cooperates with the elastic knob plunger, i.e., a positioning hole. When the frame of the RF power supply device moves horizontally on the crossbeam, the elastic knob plunger contacts the surface of the crossbeam and is in a compressed state. When it moves horizontally to the slot hole on the crossbeam, the elastic knob plunger pops out and snaps into the slot hole, thereby completing the horizontal positioning of the RF power supply device.

[0008] Wherein, the frame is provided with a magnetic suction door on the side of the positioning mechanism. When the height of the elastic knob plunger needs to be adjusted, the magnetic suction door can be opened for adjustment, which is convenient and quick.

[0009] Preferably, the telescopic rod assembly includes a plurality of pulleys disposed at the bottom of the frame, and a plurality of threaded telescopic rods connecting the frame and the pulleys. After the RF power supply device is positioned in the horizontal direction by the elastic fixing assembly, the vertical height of the device can be adjusted by rotating the threaded telescopic rod above the pulley, and when adjusted to a suitable height, it is fixed to the reaction chamber by a fixing member. At this point, the RF power supply device is positioned in the horizontal and vertical directions.

[0010] The inner layer of the frame is provided with a plurality of support mechanisms for supporting each RF power supply, and the support mechanism includes a support bar connected to the frame, and a support rail provided on the support bar and having at least one end facing outwards in an oblique wedge shape. Each RF power supply in the frame is placed in the frame in a layered design, and each RF power supply is reasonably arranged to make full use of the space in the frame. The support rail is wedge-shaped at one or both ends facing outwards, and the slope design can facilitate the adjustment of the angle of the heavier RF power supply when sliding into the frame, so as to facilitate sliding in and installation.

[0011] The material of the support rail is PTFE, which has good heat resistance, insulation stability and low friction, and is very convenient for sliding installation of heavy RF power supplies.

[0012] The support bar is connected to the frame through the strip hole. The connection mode of the strip hole can adjust the layer height according to the height of the radio frequency power supply.

[0013] There are two electrical control circuits, one of which is located at the top of the frame, electrically connected to the RF power supply and controls its operation; the other is located on the side of the frame, used to electrically connect the RF power supply to the reaction chamber, and both electrical control circuits are built into the box body. The electrical control circuit placed on the top of the frame includes a circuit breaker, a contactor, a terminal block, a door-operated safety switch, and a programmable output module to form a power control and safety protection circuit. The miniature circuit breaker has an operable surface at the top, and the position and height meet the humanized and convenient operation of the circuit on and off. The door-operated safety switch includes a flip-type PC cover plate, which is provided with a contact switch. The opening and closing of the cover plate can make the contact control circuit on and off, and is also convenient for the maintenance and visual monitoring of the circuit breaker. The box cover uses a key-inserted safety door switch to ensure personnel safety. The box body on the side of the frame is a connector line. Such a cable layout is more hidden and more convenient to achieve electrical connection with the reaction chamber.

[0014] The cooling system is arranged in the frame, preferably a water cooling system, including a total inlet, a total outlet, and cooling pipelines for cooling each of the RF power supplies, each of the cooling pipelines includes an inlet and an outlet, and each inlet and outlet are respectively connected to the total inlet and total outlet pipelines, and the cooling liquid is diverted to the inlet of each RF power supply through the total inlet, and the cooling water flows out from each outlet after passing through each cooling pipeline. The water cooling system controls the total water inlet by a ball valve, and then branches into several branch water inlets through pipeline connection, and is controlled by a pilot solenoid valve respectively. The water inlet and return water are connected to the water inlet and outlet of the RF power supply through pipelines and quick connectors respectively. The staggered design of the water inlet and return water circuits realizes external water circulation cooling of the RF power supply, and the circuit is beautiful. The use of a pilot solenoid valve can be more controllable in the water flow control circuit of the RF power supply.

[0015] The frame of the RF power supply device is welded by C-shaped steel and square tubes, which has good integrity and stability. The overall strength of the welded structure is large, and the gap will not change under the action of external force and produce excessive deformation. The bottom layer of square tubes is detachable to meet the requirements of space restrictions.

[0016] Beneficial effects: 1. The layout design of the RF power supply device of the utility model is reasonable, which saves space and meets the requirements of the space and position restrictions of the RF power supply device in the existing semiconductor process links; 2. The design of the elastic fixing component and the threaded telescopic rod realizes the lateral and longitudinal positioning of the RF power supply in the reaction chamber; 3. The use of PTFE as the support rail makes the rail more heat-resistant, wear-resistant and insulating, and is very suitable for the heavier RF power supply to slide into the frame on the support rail, and the wedge-shaped design at the end of the support rail makes it more convenient for the RF power supply to slide in and adjust, making the installation and maintenance of the RF power supply more convenient; 4. The electrical control circuit is divided into two boxes outside the frame, which makes the operation more user-friendly and convenient to electrically connect to the reaction chamber; 5. The cooling system adopts water cooling and a staggered design, which is practical, economical and beautiful, and the use of a pilot solenoid valve is more controllable. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 It is a structural schematic diagram of one viewing angle of the utility model;

[0019] Figure 2 It is a structural schematic diagram of another viewing angle of the utility model;

[0020] Figure 3 It is a structural schematic diagram of the elastic knob plunger in the utility model;

[0021] Figure 4 It is a structural schematic diagram of the telescopic rod assembly in the utility model;

[0022] Figure 5 It is a structural schematic diagram of the frame and the supporting guide rails in the utility model;

[0023] Figure 6 It is a schematic diagram of the end wedge structure of the support guide rail in the utility model;

[0024] Figure 7 It is a schematic diagram of the structure of the water cooling system in the utility model. DETAILED DESCRIPTION

[0025] The present invention will be more fully understood through the following specific embodiments that should be read together with the accompanying drawings. Detailed embodiments of the present invention are disclosed herein; however, it should be understood that the disclosed embodiments are only exemplary of the present invention, and the present invention can be embodied in various forms. Therefore, the specific functional details disclosed herein should not be interpreted as limiting, but only as the basis of the claims and as a representative basis for teaching those skilled in the art to adopt the present invention in different ways in any appropriate detailed embodiment.

[0026] See also Figures 1 to 7 The radio frequency power supply device described in a preferred embodiment of the utility model is used to provide radio frequency power to the reaction chamber of the process equipment, such as Figure 1 and 2 As shown, it includes a frame 1 welded by C-shaped steel and square tubes, a plurality of RF power supplies 3 arranged in the frame through two layers of supporting mechanisms, a water cooling system 4 for each RF power supply arranged in the frame 1, and an electrical control circuit box, wherein two electrical control circuit boxes are arranged, a first electrical control circuit box 51 arranged on the top of the frame 1 and a second electrical control circuit box 52 arranged on the outer side of the frame; it also includes a positioning mechanism for positioning the RF power supply device and the reaction chamber. When the RF power supply device is moved into the reaction chamber, the positioning mechanism can be used to achieve transverse (horizontal direction) and longitudinal (vertical direction) positioning and fix it to the reaction chamber.

[0027] The positioning mechanism includes an elastic fixing component for transverse positioning and a telescopic rod component 6 for longitudinal positioning.

[0028] The elastic fixing assembly includes an elastic positioning column and a positioning hole used in conjunction with the positioning column. Figure 3 As shown, in this embodiment, the elastic positioning column uses an elastic knob plunger 7 and is connected to the bottom of the frame 1. The reaction chamber is provided with a beam that contacts the bottom of the frame 1 and is used for horizontal directional movement of the radio frequency power supply device. The beam is provided with a slot hole that cooperates with the elastic knob plunger 7, namely, a positioning hole.

[0029] like Figure 4 As shown, the telescopic rod assembly 6 includes four pulleys 61 arranged at the bottom corners of the frame 1 and four threaded telescopic rods 62 connecting the frame 1 and the pulleys 61 .

[0030] The frame 1 is provided with a magnetic suction door 8 at the side of the positioning mechanism for adjusting and maintaining the elastic knob plunger 7.

[0031] like Figure 5 and 6As shown, the support mechanism 2 includes a support bar 21 connected to the frame 1 through a waist-shaped hole, and a support rail 22 arranged on the support bar 21, and both ends of the support rail 22 are wedge-shaped. The material of the support rail 22 is PTFE.

[0032] The first electrical control circuit box 51 is electrically connected to the RF power source 3 and controls its operation, and includes a circuit breaker 511, a terminal block 512, a door-operated safety switch 513, a contactor 514, and a programmable output module to form a power control and safety protection circuit. The door-operated safety switch includes a flip-type PC cover plate, which is provided with a contact switch. The opening and closing of the cover plate can make the contact control circuit on and off. The box cover plate uses a key-inserted safety door switch. The second electrical control circuit box 52 is used to electrically connect the RF power source 3 to the reaction chamber.

[0033] like Figure 7 As shown, the water cooling system 4 includes a total inlet 41 controlled by a ball valve, a total outlet 42, and cooling pipelines for cooling each of the RF power supplies, each cooling pipeline includes an inlet and an outlet, and each inlet and outlet are respectively connected to the total inlet 41 and the total outlet 42 through a quick connector and a pipeline, and each inlet is controlled by a pilot solenoid valve 44. The cooling water is divided from the total inlet 41 to the inlet of each RF power supply through a branch water inlet pipe 45, and the cooling water passes through each cooling pipeline and is collected from each outlet through a branch return water pipe 43 to flow out of the total outlet 42.

[0034] The bottom layer of square tubes of the frame 1 is detachable, which meets the requirements of space limitation.

[0035] The working principle of the utility model is:

[0036] When the RF power supply device in the above embodiment needs to be moved to the reaction chamber for operation, the frame 1 of the RF power supply device slides horizontally on the beam and through the pulley 61. At this time, the elastic knob plunger 7 contacts the surface of the beam and is in a compressed state. When sliding horizontally to the slot on the beam, the elastic knob plunger 7 pops out and snaps into the slot, thereby completing the horizontal positioning of the RF power supply device.

[0037] After being positioned in the horizontal direction by the elastic fixing assembly, the height of the device in the vertical direction is adjusted by rotating the threaded telescopic rod 62 above the pulley 61, and when adjusted to a suitable height, it is fixed to the reaction chamber by the fixing member. At this point, the positioning of the RF power supply device in the horizontal and vertical directions is completed.

[0038] The second electrical control circuit box 52 is electrically connected to the reaction chamber, and the radio frequency power source 3 works by controlling the first electrical control circuit box 51 .

[0039] The various aspects, embodiments, features and examples of the present invention should be considered as illustrative in all aspects and are not intended to limit the present invention, the scope of which is defined solely by the claims. Other embodiments, modifications and uses will be apparent to those skilled in the art without departing from the spirit and scope of the present invention as claimed.

[0040] Although the utility model has been described with reference to illustrative embodiments, it will be understood by those skilled in the art that various other changes, omissions and / or additions may be made without departing from the spirit and scope of the utility model, and the elements of the embodiments may be replaced by substantial equivalents. In addition, many modifications may be made without departing from the scope of the utility model to adapt specific situations or materials to the teachings of the utility model. Therefore, it is not intended herein to limit the utility model to the disclosed specific embodiments for performing the utility model, but it is intended that the utility model will include all embodiments within the scope of the appended claims. In addition, unless specifically stated, any use of the terms first, second, etc. does not indicate any order or importance, but uses the terms first, second, etc. to distinguish one element from another element.

Claims

1. A radio frequency power supply device, used to provide radio frequency power to a reaction chamber of a process equipment, the radio frequency power supply device comprising a frame, a radio frequency power supply, a cooling system and an electrical control circuit, the radio frequency power supply and the cooling system are encapsulated in the frame, the cooling system and the radio frequency power supply are thermally matched, the electrical control circuit is electrically connected to the radio frequency power supply, and the electrical control circuit can also be electrically connected to the reaction chamber of the process equipment, characterized in that: It also includes a positioning mechanism for positioning the radio frequency power supply device and the reaction chamber.

2. The radio frequency power supply device according to claim 1, characterized in that: The positioning mechanism comprises an elastic fixing component for transverse positioning and a telescopic rod component for longitudinal positioning.

3. The radio frequency power supply device according to claim 2, characterized in that: The elastic fixing assembly includes an elastic positioning column and a positioning hole used in conjunction with the positioning column.

4. The radio frequency power supply device according to claim 2 or 3, characterized in that: The elastic fixing assembly includes an elastic knob plunger arranged at the bottom of the frame, and the reaction chamber is provided with a beam that contacts the bottom of the frame and is used for horizontal directional movement of the radio frequency power supply device, and the beam is provided with a slot hole that cooperates with the elastic knob plunger.

5. The radio frequency power supply device according to claim 2, characterized in that: The telescopic rod assembly comprises a plurality of pulleys arranged at the bottom of the frame and a plurality of threaded telescopic rods connecting the frame and the pulleys.

6. The radio frequency power supply device according to claim 1, characterized in that: The inner layer of the frame is provided with a plurality of supporting mechanisms for supporting each radio frequency power source, and the supporting mechanisms include a supporting bar connected to the frame, and a supporting guide rail provided on the supporting bar and having at least one end facing outwards in a wedge shape.

7. The radio frequency power supply device according to claim 6, characterized in that: The support bar is connected to the frame through the bar-shaped holes.

8. The radio frequency power supply device according to claim 1, characterized in that: The electrical control circuits are provided with two, one of which is provided at the top of the frame, electrically connected to the RF power supply and controls its operation; the other is provided at the side of the frame, and is used for electrically connecting the RF power supply to the reaction chamber.

9. The radio frequency power supply device according to claim 1, characterized in that: The cooling system is arranged in the frame, including a main inlet, a main outlet, and cooling pipelines respectively used to cool each of the RF power supplies. Each of the cooling pipelines includes an inlet and an outlet, and each inlet and outlet is respectively connected to the main inlet and main outlet pipelines. The cooling liquid is diverted to the inlets of each RF power supply through the main inlet. After passing through each cooling pipeline, the cooling liquid is collected from each outlet and flows out from the main outlet.

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