Novel VCD cavity

Abstract

The utility model relates to the technical field of perovskite coating vacuum drying, in particular to a novel VCD cavity, which comprises a lower cavity, an upper cavity and a lower cavity, the upper cavity is connected to the top of the lower cavity in a sealed mode and suitable for being enclosed with the lower cavity to form a drying cavity. A second cavity is formed in the bottom of the upper cavity, a plurality of first flow guide openings are formed in the top of the second cavity in the vertical direction, and the tops of the first flow guide openings are arranged in a sealed mode; and the valve assembly is arranged at the top of the upper cavity, communicates with the second cavity and is suitable for communicating with external vacuum equipment to extract air or intake air. The problems that in the air exhaust process of an existing VCD cavity, the flow direction of airflow in the cavity is disordered, airflow distribution is uneven, the air exhaust speed is low, and then the air exhaust pressure cannot meet the requirement are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of perovskite coating vacuum drying, in particular to a novel VCD cavity. Background Art

[0002] VCD (Vacuum Curing Drier) drying oven is a device that creates a vacuum environment by designing upper and lower cavities to quickly dry and cure the glass surface paint in the cavity. The VCD cavity is connected to the outside through an opening, and a baffle valve is connected to the opening. The baffle valve can intake and exhaust air into the cavity. When the upper cavity and the lower cavity are fitted and closed, the baffle valve exhausts air into the cavity to form a vacuum environment inside the cavity, thereby quickly drying and curing the glass surface paint; when the upper cavity and the lower cavity need to be separated, the baffle valve intakes air into the cavity to achieve a vacuum breaking effect.

[0003] The existing VCD cavity usually includes an upper cavity and a lower cavity. During the vacuum process, the airflow in the cavity flows in a disordered direction and the airflow distribution is uneven, resulting in a slow vacuum rate, which in turn causes the vacuum pressure to fail to meet the requirements. Utility Model Content

[0004] The utility model provides a novel VCD cavity, which solves the problem that in the existing VCD cavity, during the air extraction process, the air flow direction in the cavity is chaotic and the air flow distribution is uneven, resulting in a slow air extraction rate and further causing the air extraction pressure to fail to meet the requirements.

[0005] In view of this, the utility model provides a novel VCD cavity, comprising:

[0006] The lower cavity has a first cavity on the top for placing the glass substrate;

[0007] An upper cavity is sealed and connected to the top of the lower cavity, and is suitable for enclosing with the lower cavity to form a drying cavity; a second cavity is provided at the bottom of the upper cavity, and a plurality of first guide ports are provided at the top of the second cavity in a vertical direction, and the tops of the first guide ports are sealed;

[0008] The valve assembly is arranged on the top of the upper cavity and communicated with the second cavity, and is suitable for communicating with an external vacuum device to extract or intake air.

[0009] Optionally, the valve assembly includes a plurality of flapper valves, which are evenly arranged on the top of the upper cavity; one end of the flapper valve is connected to the second cavity through a first opening, and the other end is suitable for connecting to an external vacuum device to extract or intake air.

[0010] Optionally, a third cavity is provided at the bottom of the upper cavity, and the horizontal cross-sectional area of ​​the third cavity is larger than the horizontal cross-sectional area of ​​the second cavity; a flow guide is provided in the third cavity, and a plurality of flow guide channels are provided on the flow guide in the vertical direction, and the flow guide channels connect the second cavity and the drying cavity.

[0011] Optionally, the guide member includes a first guide plate and a second guide plate arranged in sequence from top to bottom; a fourth cavity is provided at the bottom of the first guide plate; a plurality of second guide ports are evenly provided on the first guide plate, and a plurality of third guide ports are evenly provided on the second guide plate; wherein the second guide ports, the fourth cavity and the third guide ports are connected to form the guide channel.

[0012] Optionally, a vacuum detection component is further included, wherein the vacuum detection component is arranged on the top of the upper cavity, and a detection end of the vacuum detection component is connected to the second cavity and is suitable for detecting the vacuum degree of the second cavity.

[0013] Optionally, the vacuum detection assembly includes multiple vacuum gauges, which are evenly distributed on the top of the upper cavity; the upper cavity is provided with a second opening corresponding to each vacuum gauge, and the second opening is connected to the second cavity; the detection end of the vacuum gauge is arranged in the second opening, suitable for detecting the vacuum degree of the second cavity.

[0014] Optionally, the first flow guide port passes through the upper cavity; a blind plate is sealed and detachably connected to the top of the upper cavity corresponding to each of the first flow guide ports, and is suitable for sealing the top of the first flow guide port through the blind plate.

[0015] Optionally, a mounting groove is provided at the top of the upper cavity corresponding to each of the first air guide ports, a plurality of threaded holes are provided in the mounting groove, and the blind plate is connected in the mounting groove by cooperating with the threaded holes through screws.

[0016] Optionally, a lifting component is further included, which is arranged at the bottom of the lower cavity, and the adjusting end of the lifting component is sealed and penetrated in the lower cavity, suitable for driving the adjusting end of the lifting component to lift the glass substrate after drying is completed.

[0017] Optionally, the lifting assembly includes a lifting frame, a driving member, a lifting plate and a plurality of ejectors; the lifting frame is connected to the bottom of the lower cavity; the lifting plate is slidably connected to the lifting frame in the vertical direction; a plurality of ejectors are arranged on the top of the lifting plate in the vertical direction; the lower cavity is penetrated by a through hole corresponding to each ejector, and a telescopic bellows is sleeved on the outer periphery of each ejector; one end of the telescopic bellows is sealed connected to the through hole, and the other end is sealed connected to the top of the lifting plate; the driving member is arranged on the lifting frame, and the output end of the driving member is connected to the lifting plate, suitable for driving the lifting plate to reciprocate in the vertical direction.

[0018] The technical solution of the utility model has the following advantages:

[0019] In the utility model, when the glass substrate needs to be dried, the glass substrate is placed in the first cavity at the top of the lower cavity, and then the upper cavity is sealed and connected to the top of the lower cavity to enclose a drying cavity, and an external vacuum device, such as a vacuum pump, is connected through a valve assembly. The external vacuum device evacuates the drying cavity through the valve assembly to evacuate all the gas in the drying cavity to form a vacuum for drying, and the flow space of the gas is increased through the second cavity. During the evacuation process, the evacuated gas will gather in the second cavity, and then flow into the first guide port in a vertical direction. As the gas is gradually evacuated, it returns to the second cavity through the first guide port and is evacuated out of the upper cavity through the valve assembly, so that the airflow in the second cavity is evacuated stably and orderly, and the airflow is prevented from squeezing each other due to the narrow space in the drying cavity to affect the evacuation rate, thereby improving the uniformity of the airflow distribution during the evacuation process, and then improving the evacuation rate, so that the evacuation pressure meets the requirements, and after the drying is completed, the external vacuum device can be used to intake air again to break the vacuum, so that the upper cavity can be opened to take out the glass substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 A schematic diagram of the overall structure of a novel VCD cavity provided by the utility model;

[0022] Figure 2 An exploded view of a novel VCD cavity provided by the utility model;

[0023] Figure 3A bottom view of the upper cavity provided by the utility model;

[0024] Figure 4 for Figure 3 Sectional view at AA in the figure;

[0025] Figure 5 A perspective view of the internal structure of the upper cavity provided by the utility model;

[0026] Figure 6 A bottom view of the first guide plate provided by the utility model;

[0027] Figure 7 for Figure 6 Sectional view at BB in the figure.

[0028] Description of reference numerals:

[0029] 1. Lower cavity; 2. Glass substrate; 3. First cavity; 4. Upper cavity; 5. Second cavity; 6. First guide port; 7. Baffle valve; 8. First opening; 9. Third cavity; 10. Guide member; 1001. First guide plate; 1002. Second guide plate; 1003. Fourth cavity; 1004. Second guide port; 1005. Third guide port; 11. Vacuum gauge; 12. Second opening; 13. Blind plate; 14. Mounting groove; 15. Lifting assembly; 1501. Lifting frame; 1502. Driving member; 1503. Lifting plate; 1504. Ejector pin; 1505. Telescopic bellows. DETAILED DESCRIPTION

[0030] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0031] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0032] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0034] Example 1

[0035] See also Figures 1 to 7 The present embodiment provides a novel VCD cavity, comprising: a lower cavity 1, a first cavity 3 for placing a glass substrate 2 is provided on the top; an upper cavity 4 is sealed and connected to the top of the lower cavity 1, and is suitable for being enclosed with the lower cavity 1 to form a drying cavity; a second cavity 5 is provided at the bottom of the upper cavity 4, a plurality of first guide ports 6 are provided at the top of the second cavity 5 in a vertical direction, and the top of the first guide ports 6 is sealed; a valve assembly is provided at the top of the upper cavity 4, and is connected to the second cavity 5, and is suitable for being connected to an external vacuum device for exhausting or inletting air.

[0036] It should be noted that the bottom of the second cavity 5 is communicated with the drying cavity.

[0037] In this embodiment, when the glass substrate 2 needs to be dried, the glass substrate 2 is placed in the first cavity 3 at the top of the lower cavity 1, and then the upper cavity 4 is sealed and connected to the top of the lower cavity 1 to enclose a drying cavity. The valve assembly is connected to an external vacuum device, such as a vacuum pump. The external vacuum device evacuates the drying cavity through the valve assembly to completely extract the gas in the drying cavity to form a vacuum for drying. The second cavity 5 is used to increase the flow space of the gas. During the evacuation process, the extracted gas will gather in the second cavity 5. Then it flows into the first guide port 6 along the vertical direction. As the gas is gradually extracted, it returns to the second cavity 5 through the first guide port 6 and is extracted out of the upper cavity 4 through the valve assembly, so that the airflow in the second cavity 5 is extracted stably and orderly, avoiding the mutual squeezing of airflows due to the narrow space in the drying cavity and affecting the exhaust rate, thereby improving the uniformity of airflow distribution during the exhaust process, and then improving the exhaust rate, so that the exhaust pressure meets the requirements. After the drying is completed, air can be introduced again through the external vacuum equipment to break the vacuum, so as to open the upper cavity 4 and remove the glass substrate 2.

[0038] In a specific application, the upper cavity 4 can be connected to an external lifting device, and the lower cavity 1 can be fixed. The upper cavity 4 can be controlled to rise and separate from the lower cavity 1 through the output end of the external lifting device to place the glass substrate 2, or the upper cavity 4 can be controlled to descend and fit and seal with the lower cavity 1 to facilitate vacuum drying of the glass substrate 2. Specifically, the external lifting device can be optionally a hydraulic cylinder or a pneumatic cylinder.

[0039] Example 2

[0040] As a further improvement to Example 1, Figure 1 and Figure 2 As shown, the valve assembly includes a plurality of flapper valves 7, which are evenly arranged on the top of the upper cavity 4; one end of the flapper valve 7 is connected to the second cavity 5 through the first opening 8, and the other end is suitable for connecting to an external vacuum device to extract or intake air.

[0041] In this embodiment, multiple baffle valves 7 are provided to communicate with external vacuum equipment to increase the pumping rate, and multiple baffle valves 7 are evenly arranged to increase the uniform flow of internal gas during the pumping process and improve the pumping effect.

[0042] Based on the above implementation, in a preferred implementation, Figures 3 to 5 As shown, a third cavity 9 is provided at the bottom of the upper cavity 4, and the horizontal cross-sectional area of ​​the third cavity 9 is larger than the horizontal cross-sectional area of ​​the second cavity 5; a flow guide 10 is provided in the third cavity 9, and a plurality of flow guide channels are provided on the flow guide 10 in the vertical direction, and the flow guide channels connect the second cavity 5 and the drying cavity.

[0043] It should be noted that the third cavity 9 is disposed correspondingly below the second cavity 5 , and the third cavity 9 communicates with the second cavity 5 and the first cavity 3 .

[0044] In this embodiment, by arranging the guide member 10 in the third cavity 9, during the air extraction, the guide channel on the guide member 10 further guides the gas, so that the gas in the drying cavity improves its flow uniformity after passing through the guide member 10, improves the air extraction rate, and stabilizes the distribution during the air extraction process, and at the same time improves the uniformity of the airflow distribution during the air intake.

[0045] Based on the above implementation, in a preferred implementation, Figure 2 , Figure 6 and Figure 7As shown, the guide member 10 includes a first guide plate 1001 and a second guide plate 1002 arranged in sequence from top to bottom; a fourth cavity 1003 is provided at the bottom of the first guide plate 1001; a plurality of second guide ports 1004 are evenly provided on the first guide plate 1001, and a plurality of third guide ports 1005 are evenly provided on the second guide plate 1002; wherein the second guide ports 1004, the fourth cavity 1003 and the third guide ports 1005 are connected to form a guide channel.

[0046] It should be noted that the second guide port 1004 vertically penetrates the first guide plate 1001 , and the third guide port 1005 vertically penetrates the second guide plate 1002 ; the second guide port 1004 and the third guide port 1005 are both arranged corresponding to the fourth cavity 1003 .

[0047] In this embodiment, a two-layer guide effect is formed by setting a first guide plate 1001 and a second guide plate 1002 to further improve the uniformity of gas flow. At the same time, a fourth cavity 1003 is set between the first guide plate 1001 and the second guide plate 1002 to increase the guide space, thereby avoiding the absence of gas guide space after the first guide plate 1001 and the second guide plate 1002 are connected during air extraction, and at the same time, the airflow distribution and flow uniformity during air intake are improved.

[0048] Based on the above implementation, in a preferred implementation, Figure 1 and Figure 2 As shown, it also includes a vacuum detection component, which is arranged on the top of the upper cavity 4. The detection end of the vacuum detection component is connected to the second cavity 5 and is suitable for detecting the vacuum degree of the second cavity 5.

[0049] In this embodiment, the vacuum degree in the second cavity 5 is monitored in real time by the vacuum detection component, so as to achieve the effect of stabilizing the cavity pressure monitoring data.

[0050] Based on the above implementation, in a preferred implementation, Figure 1 and Figure 2 As shown, the vacuum detection assembly includes multiple vacuum gauges 11, and the multiple vacuum gauges 11 are evenly distributed on the top of the upper cavity 4; the upper cavity 4 is provided with a second opening 12 corresponding to each vacuum gauge 11, and the second opening 12 is connected to the second cavity 5; the detection end of the vacuum gauge 11 is arranged in the second opening 12, which is suitable for detecting the vacuum degree of the second cavity 5.

[0051] In this embodiment, a plurality of vacuum gauges 11 are used to detect the vacuum degree in the second cavity 5 in real time, thereby improving the detection accuracy.

[0052] Based on the above implementation, in a preferred implementation, Figure 1 and Figure 2As shown, the first guide openings 6 penetrate the upper cavity 4 , and a blind plate 13 is sealed and detachably connected to the top of the upper cavity 4 corresponding to each first guide opening 6 , which is suitable for sealing the top of the first guide opening 6 through the blind plate 13 .

[0053] In this embodiment, the first guide port 6 is connected to the top of the upper cavity 4 and sealed with a blind plate 13, which can be used as a spare port. When it is necessary to add a baffle valve 7 to evacuate the vacuum or add a vacuum gauge 11 for detection, the blind plate 13 at the corresponding position can be removed and the baffle valve 7 or the vacuum gauge 11 can be connected.

[0054] Based on the above implementation, in a preferred implementation, Figure 1 and Figure 2 As shown, a mounting groove 14 is provided at the top of the upper cavity 4 corresponding to each first guide port 6, a plurality of threaded holes are provided in the mounting groove 14, and the blind plate 13 is connected in the mounting groove 14 by screws and the threaded holes.

[0055] It should be noted that the size of the blind plate 13 matches the size of the mounting groove 14 .

[0056] In this embodiment, by setting the installation groove 14, the blind plate 13 can be set in the installation groove 14, which is convenient for positioning and installation, and is fixed by screws and threaded holes, which is convenient for installation and disassembly, and at the same time improves the stability after installation; at the same time, by reserving threaded holes, it is convenient to connect the baffle valve 7 or the vacuum gauge 11.

[0057] Based on the above implementation, in a preferred implementation, Figure 1 and Figure 2 As shown, it also includes a lifting component 15, which is arranged at the bottom of the lower cavity 1, and the adjustment end of the lifting component 15 is sealed and penetrated in the lower cavity 1, which is suitable for driving the adjustment end of the lifting component 15 to lift the glass substrate 2 after drying is completed.

[0058] In this embodiment, by providing the lifting assembly 15 , after the glass substrate 2 is dried, the glass substrate 2 can be lifted by the adjusting end of the lifting assembly 15 , so that the glass substrate 2 can be taken out and placed conveniently.

[0059] Based on the above implementation, in a preferred implementation, Figure 2As shown, the lifting assembly 15 includes a lifting frame 1501, a driving member 1502, a lifting plate 1503 and a plurality of ejector pins 1504; the lifting frame 1501 is connected to the bottom of the lower cavity 1; the lifting plate 1503 is slidably connected to the lifting frame 1501 along the vertical direction; a plurality of ejector pins 1504 are arranged on the top of the lifting plate 1503 along the vertical direction; the lower cavity 1 is penetrated by a through hole corresponding to each ejector pin 1504, and a telescopic bellows 1505 is sleeved on the outer periphery of each ejector pin 1504; one end of the telescopic bellows 1505 is sealed and connected to the through hole, and the other end is sealed and connected to the top of the lifting plate 1503; the driving member 1502 is arranged on the lifting frame 1501, and the output end of the driving member 1502 is connected to the lifting plate 1503, suitable for driving the lifting plate 1503 to reciprocate in the vertical direction.

[0060] It should be noted that the top end of the telescopic bellows 1505 covers the through hole and is sealed and connected to the bottom of the lower cavity 1 .

[0061] In this embodiment, when it is necessary to lift the glass substrate 2, the lifting plate 1503 is driven by the driving member 1502 to move upward in the vertical direction on the lifting frame 1501, and at the same time, the ejector pin 1504 moves upward in the through hole to extend out of the top of the lower cavity 1 and lift the glass substrate 2. During the lifting process, the telescopic bellows 1505 can be compressed between the lower cavity 1 and the lifting plate 1503 as the ejector pin 1504 rises and falls, and at the same time, the telescopic bellows 1505 keeps sealing the through hole to avoid affecting the vacuum effect.

[0062] Specifically, Figure 2 As shown, a plurality of slide bars are provided on the lifting frame 1501 in the vertical direction, and the lifting plate 1503 is slidably sleeved on the plurality of slide bars.

[0063] Specifically, this embodiment does not impose any specific restrictions on the structure of the driving member 1502. Preferably, the driving member 1502 includes a driving motor and a screw rod. The driving motor is arranged on the lifting frame 1501. The screw rod is driven and connected to the output end of the driving motor in the vertical direction. The screw rod is connected to the lifting plate 1503 through a nut seat. The driving motor drives the screw rod to rotate, and then the nut seat drives the lifting plate 1503 to rise and fall. The driving member 1502 can also be a hydraulic cylinder or a pneumatic cylinder.

[0064] The specific working principle of the novel VCD cavity provided in this embodiment is as follows: when the glass substrate 2 needs to be dried, the upper cavity 4 can be driven to separate from the lower cavity 1 by an external lifting device, and the glass substrate 2 can be placed in the first cavity 3 on the top of the lower cavity 1. Then, the external lifting device drives the upper cavity 4 to fit and seal the lower cavity 1 to form a drying cavity. An external vacuum device, such as a vacuum pump, is connected through multiple baffle valves 7. The external vacuum device evacuates the drying cavity through multiple baffle valves 7 to completely extract the gas in the drying cavity to form a vacuum for drying. The gas flow space is increased through the second cavity 5. During the evacuation process, the gas first passes through the second guide plate 1002 and the first guide plate 1001 for guidance to improve the uniformity of gas flow. After passing through the second guide plate 1002 and the first guide plate 1001, the gas will converge in the second cavity 5, and then flow into the first guide port 6 in the vertical direction. As the gas is gradually drawn out, it returns to the second cavity 5 through the first guide port 6 and is drawn out of the upper cavity 4 through the baffle valve 7, so that the airflow in the second cavity 5 is drawn out stably and orderly, avoiding the airflows from squeezing each other due to the narrow space in the drying cavity, affecting the air extraction rate, improving the uniformity of the airflow distribution during the air extraction and intake process, and then improving the air extraction rate, so that the air extraction pressure meets the requirements. After the drying is completed, the air can be taken in again through the external vacuum equipment to break the vacuum, so that the upper cavity 4 can be opened to take out the glass substrate 2. At the same time, the vacuum gauge 11 can be used to achieve the effect of stabilizing the cavity pressure monitoring data. The existing VCD cavity is solved in the process of air extraction, the airflow direction in the cavity is chaotic, the airflow distribution is uneven, resulting in a slow air extraction rate, and then the air extraction pressure does not meet the requirements.

[0065] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention of the utility model.

Claims

1. A new type of VCD cavity, characterized in that: include: A lower cavity (1) having a first cavity (3) on the top thereof for placing a glass substrate (2); An upper cavity (4) is sealed and connected to the top of the lower cavity (1), and is suitable for enclosing with the lower cavity (1) to form a drying cavity; a second cavity (5) is provided at the bottom of the upper cavity (4), a plurality of first guide ports (6) are provided at the top of the second cavity (5) in a vertical direction, and the top of the first guide ports (6) is sealed; The valve assembly is arranged at the top of the upper cavity (4) and is connected to the second cavity (5), and is suitable for connecting to an external vacuum device to extract or intake air.

2. The novel VCD cavity according to claim 1, characterized in that: The valve assembly comprises a plurality of flapper valves (7), wherein the plurality of flapper valves (7) are evenly arranged on the top of the upper cavity (4); one end of the flapper valve (7) is connected to the second cavity (5) through a first opening (8), and the other end is suitable for connecting to an external vacuum device for exhausting or inletting air.

3. The novel VCD cavity according to claim 1, characterized in that: A third cavity (9) is provided at the bottom of the upper cavity (4), and the horizontal cross-sectional area of ​​the third cavity (9) is larger than the horizontal cross-sectional area of ​​the second cavity (5); a flow guide (10) is provided in the third cavity (9), and a plurality of flow guide channels are provided on the flow guide (10) in a vertical direction, and the flow guide channels are connected with the second cavity (5) and the drying cavity.

4. The novel VCD cavity according to claim 3 is characterized in that: The guide member (10) comprises a first guide plate (1001) and a second guide plate (1002) which are arranged in sequence from top to bottom; a fourth cavity (1003) is provided at the bottom of the first guide plate (1001); a plurality of second guide ports (1004) are evenly provided on the first guide plate (1001), and a plurality of third guide ports (1005) are evenly provided on the second guide plate (1002); wherein the second guide ports (1004), the fourth cavity (1003) and the third guide ports (1005) are connected to form the guide channel.

5. The novel VCD cavity according to claim 1, characterized in that: It also comprises a vacuum detection component, which is arranged on the top of the upper cavity (4), and the detection end of the vacuum detection component is connected to the second cavity (5) and is suitable for detecting the vacuum degree of the second cavity (5).

6. The novel VCD cavity according to claim 5, characterized in that: The vacuum detection component comprises a plurality of vacuum gauges (11), wherein the plurality of vacuum gauges (11) are evenly distributed on the top of the upper cavity (4); the upper cavity (4) is provided with a second opening (12) corresponding to each vacuum gauge (11), and the second opening (12) is connected to the second cavity (5); the detection end of the vacuum gauge (11) is arranged in the second opening (12) and is suitable for detecting the vacuum degree of the second cavity (5).

7. The novel VCD cavity according to any one of claims 1 to 6, characterized in that: The first flow guide opening (6) passes through the upper cavity (4); a blind plate (13) is sealed and detachably connected to the top of the upper cavity (4) corresponding to each of the first flow guide openings (6), and is suitable for sealing the top of the first flow guide opening (6) through the blind plate (13).

8. The novel VCD cavity according to claim 7, characterized in that: The top of the upper cavity (4) is provided with a mounting groove (14) corresponding to each of the first guide ports (6), and a plurality of threaded holes are provided in the mounting groove (14), and the blind plate (13) is connected in the mounting groove (14) by screws in cooperation with the threaded holes.

9. The novel VCD cavity according to any one of claims 1 to 6, characterized in that: The invention also comprises a lifting component (15), wherein the lifting component (15) is arranged at the bottom of the lower cavity (1), and an adjustment end of the lifting component (15) is sealed and penetrated in the lower cavity (1), and is suitable for driving the adjustment end of the lifting component (15) to lift the glass substrate (2) after drying is completed.

10. The novel VCD cavity according to claim 9, characterized in that: The lifting assembly (15) comprises a lifting frame (1501), a driving member (1502), a lifting plate (1503) and a plurality of ejector pins (1504); the lifting frame (1501) is connected to the bottom of the lower cavity (1); the lifting plate (1503) is slidably connected to the lifting frame (1501) along the vertical direction; the plurality of ejector pins (1504) are arranged on the top of the lifting plate (1503) along the vertical direction; the lower cavity (1) is penetrated by a through hole corresponding to each ejector pin (1504), and the outer periphery of each ejector pin (1504) is sleeved with a telescopic bellows (1505); One end of the telescopic bellows (1505) is sealed and connected to the through hole, and the other end is sealed and connected to the top of the lifting plate (1503); the driving member (1502) is arranged on the lifting frame (1501), and the output end of the driving member (1502) is connected to the lifting plate (1503), suitable for driving the lifting plate (1503) to move back and forth in the vertical direction.

Images