Pump set system of large-cavity vacuum pump

Abstract

The utility model relates to a large-cavity vacuum pump set system which comprises a cavity, a rough vacuumizing pump set, a fine vacuumizing pump set, a pipeline set, a switch valve set, a pressure sensor and a control device, the pressure sensor is arranged on the cavity, and the rough vacuumizing pump set and the fine vacuumizing pump set are both connected and communicated with the cavity through the pipeline set. A switch valve group is arranged between the rough vacuumizing pump unit and the cavity, the control device is electrically connected to the pressure sensor, the rough vacuumizing pump unit, the fine vacuumizing pump unit and the switch valve group, and the control device controls opening and closing of the rough vacuumizing pump unit, the fine vacuumizing pump unit and the switch valve group according to data of the pressure sensor. Through matching and combination of pump sets in different forms, the working efficiency is improved, and the performance of the vacuum pump is utilized to the maximum extent, so that the pump sets stably operate in different pressure sections; the controller controls unit operation in different stages through data of the pressure sensor, so that the unit operation is optimal, the process pressure requirement is met, and energy saving is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum pumps, in particular to a large-cavity vacuum pump group system. Background Art

[0002] The vacuum pump is an important exhaust equipment for obtaining a vacuum environment. Various forms of vacuum pumps or vacuum pump units are used to obtain the required vacuum degree under different vacuum requirements in different fields. However, obtaining vacuum in a large cavity evacuation environment places more stringent requirements on the performance, form and system configuration of the vacuum pump. A suitable vacuum pump unit and a reliable system control method are required to achieve long-term and stable operation of the vacuum unit.

[0003] At present, most of the large-cavity vacuum pumps on the market are dry screw pumps, oil-sealed or other types of pumps used with Roots pumps. The above units will have the following risks and hidden dangers when operating in the rough vacuum stage:

[0004] (1) First, if the dry screw pump unit is used to run in the rough vacuum section for a long time, the unit will cause high temperature and high current due to high load, affecting the stable operation of the unit; in addition, due to performance and structural limitations, the screw unit has low efficiency and high power consumption when running in the rough vacuum section for a long time, affecting the chamber evacuation time and failing to meet the customer's technical requirements. If the customer's needs are to be met, it must be achieved by increasing the number of vacuum pumps, which increases the customer's use cost;

[0005] (2) Secondly, when screw units, oil-sealed or other types of vacuum pumps are used in conjunction with Roots pumps, the Roots pumps are limited by the pressure difference in the rough vacuum stage and cannot be turned on or run at a lower frequency. The foreline pump will also have the above high temperature and high current problems, and the oil-sealed vacuum pump will have the risk of oil injection in the rough vacuum stage (>400mbar). At the same time, because the pump unit uses a foreline pump + Roots pump combination, the power of the entire vacuum system will increase significantly, but it cannot increase the chamber evacuation time in the rough vacuum stage;

[0006] (3) Finally, the large-cavity vacuum pumping units currently on the market are all controlled by a single unit, with a low degree of automation, and cannot accurately match the actual needs of customers; the units required for different vacuum levels are not optimally allocated, resulting in high energy consumption for the entire system. At the same time, the system pressure regulation cannot respond in a timely manner. Utility Model Content

[0007] The utility model aims to provide a large cavity vacuum pump system in view of the defects of poor stability, low efficiency, high energy consumption and high cost of vacuum units of large cavity evacuation systems in the prior art.

[0008] The utility model solves the above technical problems through the following technical solutions:

[0009] The utility model provides a large-cavity vacuum pump group system, which is characterized in that it includes a cavity, a rough vacuum pump group, a fine vacuum pump group, a pipeline group, a switch valve group, a pressure sensor and a control device, the pressure sensor is arranged on the cavity, the rough vacuum pump group and the fine vacuum pump group are connected and communicated with the cavity through the pipeline group, the switch valve group is arranged between the rough vacuum pump group and the cavity, the control device is electrically connected to the pressure sensor, the rough vacuum pump group, the fine vacuum pump group and the switch valve group, and the control device controls the opening and closing of the rough vacuum pump group, the fine vacuum pump group and the switch valve group according to data from the pressure sensor.

[0010] Preferably, the pipeline group includes a fine pumping pipeline and a rough pumping pipeline, the rough pumping pipeline is arranged between the rough vacuum pump unit and the cavity, and the fine pumping pipeline is arranged between the fine vacuum pump unit and the cavity.

[0011] Preferably, the rough vacuum pump unit includes multiple rough vacuum pumps, the switch valve group includes multiple first switch valves and multiple second switch valves, the rough suction pipeline includes multiple first pipelines and multiple second pipelines, the suction ends of the multiple rough vacuum pumps are respectively connected and communicated with the cavity through the first pipelines, the second pipelines are respectively arranged on the exhaust ends of the multiple rough vacuum pumps, each of the first pipelines is respectively provided with at least one first switch valve, and each of the second pipelines is respectively provided with at least one second switch valve.

[0012] Preferably, a plurality of the rough vacuum pumps are arranged in parallel, the switch valve group also includes a plurality of third switch valves, and the rough vacuum pipeline also includes a plurality of third pipelines. Along the direction of parallel arrangement, between two adjacent rough vacuum pumps, the second pipeline of the previous rough vacuum pump and the first pipeline of the next rough vacuum pump are connected and communicated through the third pipeline, and at least one third switch valve is arranged on each of the plurality of third pipelines.

[0013] Preferably, along the parallel arrangement direction, one end of each of the third pipelines is respectively connected between the previous rough vacuum pump and the second switch valve, and the other end of each of the third pipelines is respectively connected between the next rough vacuum pump and the first switch valve.

[0014] Preferably, when the system pressure is greater than the first value preset by the pressure sensor and the system pressure is less than the atmospheric pressure value, the control device preferentially opens the second switch valve, and then starts the rough vacuum pumps in sequence and simultaneously opens the first switch valves corresponding to each of the rough vacuum pumps, and the rough vacuum pumps start to operate.

[0015] Preferably, when the system pressure is less than the first value preset by the pressure sensor, and the system pressure is greater than the second value preset by the pressure sensor, the first value is greater than the second value, the control device controls the third switch valve to open and keep the rough vacuum pump running, and the control device controls one of the second switch valves to operate and closes the other second switch valves.

[0016] Preferably, there are multiple pressure sensors.

[0017] Preferably, the pipeline group is connected to and communicates with the cavity, and the cavity, the rough vacuum pump unit and the fine vacuum pump unit are arranged in sequence along the direction of exhaust.

[0018] Preferably, the fine vacuum pump group includes multiple fine vacuum pumps, the switch valve group includes multiple fourth switch valves, the pipeline group includes multiple fourth pipelines, the exhaust ends of the multiple fine vacuum pumps are respectively connected and communicated with the cavity through the fourth pipelines, the exhaust ends of the multiple fine vacuum pumps are communicated, and at least one fourth switch valve is arranged on each of the multiple fourth pipelines.

[0019] On the basis of conforming to the common sense in the art, the above-mentioned preferred conditions can be arbitrarily combined to obtain the preferred embodiments of the present utility model.

[0020] The positive progressive effect of the present invention is that: on the one hand, the large-cavity vacuum pump group system of the present invention, through the matching and combination of different forms of pump groups, makes good use of the characteristics of the rough vacuum pump in the rough vacuum section, such as high pumping efficiency and strong pressure resistance, and the high vacuum pump in the high vacuum section, and high pumping rate and excellent vacuum degree, thereby improving work efficiency, maximizing the use of vacuum pump performance, and enabling the pump group to operate stably in different pressure sections; on the other hand, the controller receives the data detected by the pressure sensor through the control device, controls the operation of the unit at different stages, and optimizes the operation of the unit, which not only meets the process pressure requirements, but also achieves the energy-saving effect of the pump group. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural schematic diagram of the large-cavity vacuum pump system of the utility model.

[0022] Figure 2 It is a schematic diagram of the structure of the parallel evacuation of the rough vacuum pump unit of the utility model.

[0023] Figure 3 It is a schematic diagram of the structure of the rough vacuum pump unit connected in series to evacuate air according to the utility model.

[0024] Figure 4 It is a structural schematic diagram of the precision vacuum pump unit of the utility model.

[0025] Figure 5 It is a structural schematic diagram of the combination of a rough vacuum pump unit and a fine vacuum pump unit of the utility model.

[0026] Description of reference numerals:

[0027] Cavity 1

[0028] Rough vacuum pump unit 2

[0029] Rough vacuum pump 21

[0030] Fine vacuum pump group 3

[0031] Fine vacuum pump 31

[0032] Pipeline group 4

[0033] First pipeline 41

[0034] Second pipeline 42

[0035] The third pipeline 43

[0036] Fourth pipeline 44

[0037] Switch valve group 5

[0038] First opening and closing valve 51

[0039] Second on-off valve 52

[0040] The third switch valve 53

[0041] Fourth switch valve 54

[0042] Pressure sensor 6

[0043] First pressure sensor 61

[0044] Second pressure sensor 62

[0045] The third pressure sensor 63

[0046] Fourth pressure sensor 64 DETAILED DESCRIPTION

[0047] The present invention will be described more clearly and completely below by way of embodiments in conjunction with the accompanying drawings, but the present invention is not limited to the scope of the embodiments.

[0048] The utility model discloses a large cavity vacuum pump system. Figure 1-5As shown, it includes a cavity 1, a rough vacuum pump unit 2, a fine vacuum pump unit 3, a pipeline group 4, a switch valve group 5, a pressure sensor 6 and a control device. The pressure sensor 6 is arranged on the cavity 1. The rough vacuum pump unit 2 and the fine vacuum pump unit 3 are connected and communicated with the cavity 1 through the pipeline group 4. The switch valve group 5 is arranged between the rough vacuum pump unit 2 and the cavity 1. The control device is electrically connected to the pressure sensor 6, the rough vacuum pump unit 2, the fine vacuum pump unit 3 and the switch valve group 5. The control device controls the opening and closing of the rough vacuum pump unit 2, the fine vacuum pump unit 3 and the switch valve group 5 according to the data of the pressure sensor 6.

[0049] Specifically, the control device is a controller. The rough vacuum pump 21 can be a rough vacuum pump such as a centrifugal vacuum pump or a Roots blower. The fine vacuum pump 31 can be a dry screw, a micro-oil screw, an oil-sealed high vacuum pump, etc. The number of the above units can be 1 or N according to the process configuration; the pump group combination can be a rough vacuum pump / high vacuum pump group used in parallel or in series or used alone, or a rough vacuum pump can be used with a high vacuum pump. The specific pump group combination method is reasonably configured according to the process parameter requirements. The overall flexibility is strong. On the one hand, through the matching and combination of different forms of pump groups, the rough vacuum pump has high vacuum efficiency and strong pressure resistance in the rough vacuum section, and the high vacuum pump has high vacuum rate and excellent vacuum degree in the high vacuum section. The work efficiency is improved, the vacuum pump performance is maximized, and the pump group can be stably operated in different pressure sections; on the other hand, the controller controls the operation of the unit at different stages through the data of the pressure sensor 6, so that the unit operation is optimized, which not only meets the process pressure requirements, but also achieves the energy-saving effect of the pump group.

[0050] In this embodiment, the pipeline group 4 includes a fine pumping pipeline and a rough pumping pipeline. The rough pumping pipeline is arranged between the rough vacuum pump unit 2 and the cavity 1, and the fine pumping pipeline is arranged between the fine vacuum pump unit 3 and the cavity 1.

[0051] Specifically, the rough vacuum pump unit 2 and the fine vacuum pump unit 3 are respectively connected to the cavity 1, and the two are arranged in parallel, so that they can be better used in combination, and can be used simultaneously or separately.

[0052] In this embodiment, the rough vacuum pump unit 2 includes multiple rough vacuum pumps 21, the switch valve group 5 includes multiple first switch valves 51 and multiple second switch valves 52, the rough vacuum pipeline includes multiple first pipelines 41 and multiple second pipelines 42, the exhaust ends of the multiple rough vacuum pumps 21 are respectively connected and communicated with the cavity 1 through the first pipelines 41, and the second pipelines 42 are respectively arranged on the exhaust ends of the multiple rough vacuum pumps 21, and each first pipeline 41 is respectively provided with at least one first switch valve 51, and each second pipeline 42 is respectively provided with at least one second switch valve 52.

[0053] Specifically, in the first stage: the rough vacuum pump 21 is connected to the cavity 1 through the rough pumping pipeline, and a control switch valve is installed on each rough pumping pipeline, and the pump groups operate in parallel; the pressure sensor 6 is connected to the control device, and the control device controls the opening of the rough vacuum pump 21 and the switch valves, i.e., the first switch valve 51 and the second switch valve 52 (exhaust switch valve priority) according to the data of the pressure sensor 6. The function of the pressure sensor 6 is: when the vacuum degree in the cavity 1 does not reach the preset vacuum degree, the exhaust switch valve, i.e., the second switch valve 52, is controlled to work and the rough vacuum pump is controlled to keep working, and the system enters the next stage of working mode.

[0054] In this embodiment, multiple rough vacuum pumps 21 are arranged in parallel, the switch valve group 5 also includes multiple third switch valves 53, and the rough vacuum pipeline also includes multiple third pipelines 43. Along the direction of parallel arrangement, between two adjacent rough vacuum pumps 21, the second pipeline 42 of the previous rough vacuum pump 21 is connected and communicated with the first pipeline 41 of the next rough vacuum pump 21 through the third pipeline 43, and at least one third switch valve 53 is arranged on each of the multiple third pipelines 43.

[0055] In this embodiment, along the parallel arrangement direction, one end of each third pipeline 43 is respectively connected between the previous rough vacuum pump 21 and the second switch valve 52, and the other end of each third pipeline 43 is respectively connected between the next rough vacuum pump 21 and the first switch valve 51.

[0056] Specifically, in the second stage: the rough vacuum pumps 21 groups are connected in series through rough pumping pipes, and the third switch valve 53 is installed in the third pipeline 43; the controller controls the opening of the third switch valve 53 (priority) and then closes the second switch valve 52 according to the data of the pressure sensor 6. The function of the pressure sensor 6 is: when the vacuum degree in the cavity 1 reaches the preset vacuum degree, the controller can control the opening number of the rough vacuum pumps 21 according to the pressure of the cavity 1 to achieve energy saving effect; when the vacuum degree in the cavity 1 does not reach the preset vacuum degree, the controller can control the rough vacuum pump 21 to stop working and control the fine vacuum pump 31 to start working to enter the next stage of working mode.

[0057] In this embodiment, when the system pressure is greater than the first value preset by the pressure sensor 6 and the system pressure is less than the atmospheric pressure value, the control device preferentially opens the second switch valve 52, and then sequentially opens the rough vacuum pumps 21 and simultaneously opens the first switch valve 51 corresponding to each rough vacuum pump 21, and the rough vacuum pump 21 starts to operate.

[0058] In this embodiment, when the system pressure is less than a first value preset by the pressure sensor 6, and the system pressure is greater than a second value preset by the pressure sensor 6, the first value is greater than the second value, the control device controls the third switch valve 53 to open and keep the rough vacuum pump 21 running, the control device controls a second switch valve 52 to run, and closes the other second switch valves 52.

[0059] In the present embodiment, there are plural pressure sensors 6 .

[0060] In this embodiment, the pipeline group 4 is connected and communicated with the cavity 1, and the cavity 1, the rough vacuum pump unit 2, and the fine vacuum pump unit 3 are arranged in sequence along the direction of exhaust.

[0061] Specifically, Figure 5 As shown, a plurality of rough vacuum pumps 21 are arranged in parallel, and each rough vacuum pump 21 is connected and communicated with the cavity 1 through each second pipeline 42. Along the direction of parallel arrangement, between two adjacent rough vacuum pumps 21, the outlet end of the third pipeline 43 of the previous rough vacuum pump 21 is connected to the first pipeline 41 of the next rough vacuum pump 21, and the outlet end of the third pipeline 43 is located between the first switch valve 51 and the rough vacuum pump 21, and so on. The air inlet ends of each fine vacuum pump 31 are interconnected and are connected and communicated with the exhaust end of the second pipeline 42 of the rough vacuum pump 21.

[0062] In this embodiment, the fine vacuum pump group 3 includes multiple fine vacuum pumps 31, the switch valve group 5 includes multiple fourth switch valves 54, the pipeline group 4 includes multiple fourth pipelines 44, the exhaust ends of the multiple fine vacuum pumps 31 are respectively connected and communicated with the cavity 1 through the fourth pipelines 44, the exhaust ends of the multiple fine vacuum pumps 31 are communicated, and at least one fourth switch valve 54 is arranged on each of the multiple fourth pipelines 44.

[0063] Specifically, in the third stage: the fine vacuum pumps 31 are connected to the cavity 1 through the fine pumping pipeline, and a control switch valve, namely the fourth switch valve 54, is installed on each fine pumping pipeline. The controller controls the rough vacuum pump 21 to stop working and keeps the rough pumping switch valves closed, namely the first switch valve 51, the second switch valve 52, and the third switch valve 53 according to the data of the pressure sensor 6. The fine vacuum pumps 31 are controlled to be turned on one by one; when the vacuum degree in the cavity 1 reaches the preset vacuum degree and is better than the preset vacuum degree within a certain period of time, the controller controls one or more fine vacuum pumps 31 to stop according to the data of the pressure sensor 6, so as to achieve energy saving effect.

[0064] The fine vacuum pump 31 can also realize the following control modes in the stage of maintaining the pressure of the cavity 1:

[0065] (1) Pump group start and stop time priority: The controller will judge based on the running time of the fine vacuum pump 31 and give priority to starting the unit with the shortest running time to ensure that the running time of the pump groups is consistent and convenient for unit maintenance;

[0066] (2) Automatic switching of pump group failure: When the pressure of the chamber 1 reaches the preset vacuum degree and the fine vacuum pump 31 is in the pressure maintenance stage, if one of the fine vacuum pumps 31 encounters an accident or failure, the controller will automatically switch the unopened fine vacuum pump 31 to start working, ensuring that the system pressure value is within the set range;

[0067] (3) Multi-speed operation of the pump group: To further achieve energy saving, the pump group uses variable frequency regulation. In the stage of maintaining the pressure of cavity 1, the controller judges based on the data of pressure sensor 6 to make the pump group operate at low speed to maintain pressure. The power of low speed operation is lower than that of high speed. At the same time, the noise, vibration and other data of the unit will be significantly reduced, and the stability will be higher, which is conducive to extending the service life of the unit;

[0068] (4) Pump group control: The fine vacuum pump group 3 can realize group control. Just set one of the vacuum pumps as the master pump and the other pump groups as slave pumps. The master pump controller adjusts and controls the slave pump according to the pressure data of cavity 1 to ensure that the system pressure is accurately maintained within the set pressure range.

[0069] like Figure 1 As shown, the large cavity vacuum pump group system includes a cavity 1 and a first pressure sensor 61, a second pressure sensor 62, a third pressure sensor 63, and a fourth pressure sensor 64, and the displayed values ​​Pi1, Pi2, Pi3, and Pi4 represent the preset pressure requirements of the vacuum pump group in different working modes. From the right to left direction in the figure, the rough vacuum pump 21PBi...PBn is connected to the cavity 1 through the first pipeline 41 and the second pipeline 42 of the rough pumping pipeline, the first switch valve 51 (intake switch valve) VA1...VAn, and the second switch valve 52 (exhaust switch valve) VC1...VCn to form a parallel working mode. The rough vacuum pump 21PBi...PBn is connected to the cavity 1 through the first pipeline 41, the second pipeline 42 and the third pipeline 43 of the rough pumping pipeline, and the third switch valve 53 (exhaust switch valve) VB1...VB3 to form a series working mode. The fine vacuum pump 31PDi...PDn is connected to the chamber 1 through the fourth pipeline 44 of the fine pumping pipeline and the fourth switch valve 54 (intake switch valve) VD1.....VDn to form a fine vacuum system (where i=123...n). Specific embodiments of the working modes of the vacuum pump group of different pressure systems are as follows:

[0070] Rough vacuum pump 21 pumps parallel mode as follows Figure 2 As shown, Pi1 is the preset pressure value of the first pressure sensor 61.系统 ,Pi1 < P 系统 When the pressure is <P atmospheric pressure, the controller will, based on the data feedback of the pressure sensor 6Pi1, first open the second switching valve 52 (exhaust switching valve) VC1.....VCn, and then turn on the roughing vacuum pump 21PBi......PBn and simultaneously open the first switching valve 51 (intake switching valve) VA1.....VAn, and the pump set starts to operate. When the system pressure P system < Pi1, the vacuum pump set enters the next working mode.

[0071] The series mode of the roughing vacuum pump 21 pumps is as Figure 3 shown. Pi2 is the preset pressure value of the second pressure sensor 62. When the system pressure P 系统 ,Pi2 < P 系统 < Pi1, the controller will, based on the data feedback of the pressure sensor 6Pi2, control the opening of the third switching valve 53 (exhaust switching valve) VB1.....VB3 and keep the roughing vacuum pump 21PBi......PBn running continuously and the second switching valve 52 (exhaust switching valve) VCn open, and then close the second switching valve 52 (exhaust switching valve) VC1.....VC3 to maintain the operation of the pump set. When the system pressure P 系统 < Pi2, the vacuum pump set enters the next working mode.

[0072] The fine vacuum pump 31 pump set works independently as Figure 4 shown. Pi3 is the preset pressure value of the third pressure sensor 63. When the system pressure P 系统 ,Pi3 < P 系统 < Pi2, the controller will, based on the data feedback of the pressure sensor 6Pi3, control the opening of the fine vacuum pump set 3PDi.....PDn and the fourth switching valve 54 (intake switching valve) VD1.....VDn. At the same time, control the shutdown of the roughing vacuum pump 21 set and the first switching valve 51 (intake switching valve) VA1.....VAn to maintain the operation of the fine vacuum pump set 3.

[0073] In other embodiments, as Figure 5 shown, Pi4 is the preset pressure value of the fourth pressure sensor 64. When the pressure Pi4 in the cavity 1 < P 系统 < Pi3, the controller will perform further logical judgment based on the data of the pressure sensor 6, and the fine vacuum pump set 3 will execute the energy-saving mode. First, on the premise of maintaining the pressure, the pump set will enter the low-speed mode of operation to achieve the energy-saving effect; second, if after the pump set operates in the low-speed mode, the pressure in the cavity 1 is still higher than the preset pressure Pi3, the pump set in operation will be gradually stopped until the preset pressure is reached, and this command will be stopped, and the pump set will maintain the preset pressure operation.

[0074] In other embodiments, when the system process requires a higher vacuum degree (P 系统 <Pi4), reference may be made to, as shown in Figure 5 Figure, the rough vacuum pump 21 and the fine vacuum pump group 3 are combined to evacuate the system, and the specific implementation manner will not be described in detail.

[0075] In the applicable installation of the present utility model, the form of the rough vacuum pump 21 pump group PBi can be selected according to the requirements of the process end, and the form is not limited to blowers / roots pumps, etc. The form of the fine vacuum pump 31 pump group PDi is not limited to oil-sealed / dry screw, etc.; the number and combination form of the pump groups are selected according to the process parameter requirements. In addition, in the actual use and installation of the pump group, the positions of the pipelines, switching valves, and the pump group are not limited to the form of the attached drawings, and can be adjusted according to the actual situation and the on-site environment to ensure that the system control operation logic can be satisfied.

[0076] Although the specific implementation manners of the present utility model have been described above, those skilled in the art should understand that this is only an example, and the protection scope of the present utility model is defined by the appended claims. Without departing from the principles and essence of the present utility model, those skilled in the art can make various changes or modifications to these implementation manners, but these changes and modifications all fall within the protection scope of the present utility model.

Claims

1. A large-cavity vacuum pump system, characterized in that: It includes a cavity, a rough vacuum pump unit, a fine vacuum pump unit, a pipeline group, a switch valve group, a pressure sensor and a control device, the pressure sensor is arranged on the cavity, the rough vacuum pump unit and the fine vacuum pump unit are connected and communicated with the cavity through the pipeline group, the switch valve group is arranged between the rough vacuum pump unit and the cavity, the control device is electrically connected to the pressure sensor, the rough vacuum pump unit, the fine vacuum pump unit and the switch valve group, and the control device controls the opening and closing of the rough vacuum pump unit, the fine vacuum pump unit and the switch valve group according to the data of the pressure sensor.

2. The large-cavity vacuum pump system according to claim 1, characterized in that: The pipeline group includes a fine pumping pipeline and a rough pumping pipeline. The rough pumping pipeline is arranged between the rough vacuum pump unit and the cavity, and the fine pumping pipeline is arranged between the fine vacuum pump unit and the cavity.

3. The large-cavity vacuum pump system as claimed in claim 2, characterized in that: The rough vacuum pump unit includes multiple rough vacuum pumps, the switch valve group includes multiple first switch valves and multiple second switch valves, the rough suction pipeline includes multiple first pipelines and multiple second pipelines, the suction ends of the multiple rough vacuum pumps are respectively connected and communicated with the cavity through the first pipelines, the second pipelines are respectively arranged on the exhaust ends of the multiple rough vacuum pumps, each of the first pipelines is respectively provided with at least one first switch valve, and each of the second pipelines is respectively provided with at least one second switch valve.

4. The large-cavity vacuum pump system as claimed in claim 3, characterized in that: Multiple rough vacuum pumps are arranged in parallel, the switch valve group also includes multiple third switch valves, and the rough vacuum pipeline also includes multiple third pipelines. Along the direction of parallel arrangement, between two adjacent rough vacuum pumps, the second pipeline of the previous rough vacuum pump and the first pipeline of the next rough vacuum pump are connected and communicated through the third pipeline, and at least one third switch valve is arranged on each of the multiple third pipelines.

5. The large-cavity vacuum pump system as claimed in claim 4, characterized in that: Along the parallel arrangement direction, one end of each of the third pipelines is respectively connected between the previous rough vacuum pump and the second switch valve, and the other end of each of the third pipelines is respectively connected between the next rough vacuum pump and the first switch valve.

6. The large-cavity vacuum pump system as claimed in claim 4, characterized in that: When the system pressure is greater than a first value preset by the pressure sensor and is less than the atmospheric pressure value, the control device preferentially opens the second switch valve, and then sequentially opens the rough vacuum pumps and simultaneously opens the first switch valves corresponding to the rough vacuum pumps, and the rough vacuum pumps start to operate.

7. The large-cavity vacuum pump system according to claim 6, characterized in that: When the system pressure is less than the first value preset by the pressure sensor, and the system pressure is greater than the second value preset by the pressure sensor, the first value is greater than the second value, the control device controls the third switch valve to open and keeps the rough vacuum pump running, and the control device controls one of the second switch valves to operate and closes the other second switch valves.

8. The large-cavity vacuum pump system according to claim 7, characterized in that: The number of the pressure sensors is plural.

9. The large-cavity vacuum pump system according to claim 1, characterized in that: The pipeline group is connected to and communicates with the cavity, and the cavity, the rough vacuum pump unit, and the fine vacuum pump unit are arranged in sequence along the direction of exhaust.

10. The large-cavity vacuum pump system according to claim 1, characterized in that: The fine vacuum pump group includes multiple fine vacuum pumps, the switch valve group includes multiple fourth switch valves, and the pipeline group includes multiple fourth pipelines. The exhaust ends of the multiple fine vacuum pumps are respectively connected and communicated with the cavity through the fourth pipelines, and the exhaust ends of the multiple fine vacuum pumps are communicated. At least one fourth switch valve is arranged on each of the multiple fourth pipelines.

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