Novel high-rigidity steel structure anti-micro-vibration base

Abstract

The utility model provides a novel high-rigidity steel structure anti-micro-vibration base which comprises a top plate, a top beam and a bottom beam, supporting legs are vertically welded between the top beam and the bottom beam, oblique beams are welded between the supporting legs close to the periphery and the adjacent supporting legs, oblique supports are installed on the outer sides of the supporting legs close to the periphery, and the oblique supports are connected with the top beam and the bottom beam. Vertical rib plates are welded to the positions, corresponding to the centers of the supporting legs, of the top beam, the bottom beam and the floor, a grouting layer is filled between the bottom beam and the floor, a base plate A and a base plate B are welded to the top and the bottom of the oblique beam respectively, the oblique beam and the supporting legs are bolted and fixed through the base plate A by means of bolts A, and the oblique beam, the grouting layer and the floor are bolted and fixed through the base plate B by means of bolts B. The base is completely manufactured in a steel structure mode, the weight of the base is reduced, the manufacturing cost is reduced, and the micro-vibration prevention level of the base can reach VC-C.

Description

Technical Field

[0001] The utility model relates to the technical field of integrated circuit process devices, in particular to a novel high-rigidity steel-structured micro-vibration-proof base. Background Art

[0002] At present, the semiconductor industry is developing rapidly. Semiconductor production equipment, a kind of precision instrument, has higher and higher requirements for accuracy. The equipment is also becoming more and more sensitive to environmental requirements such as micro-vibration. A small amount of micro-vibration will reduce the output yield of the equipment, or even make the equipment unable to work normally. Therefore, the isolation of micro-vibration is becoming more and more important.

[0003] Traditional anti-micro-vibration bases include concrete bases and steel structure bases. Concrete bases have a larger deadweight and can reach an anti-micro-vibration level of VC-C, while steel structure bases have a lighter deadweight and can reach an anti-micro-vibration level of VC-B. However, many semiconductor factories need to place the base on the floor. Due to various factors in the surrounding area, the load-bearing capacity of the floor is limited and concrete bases cannot be installed. However, the equipment has a higher requirement for anti-micro-vibration level. A simple steel structure base cannot meet the requirements of such equipment for the vibration isolation standard VC-C. Utility Model Content

[0004] The purpose of the utility model is to provide a new type of high-rigidity steel structure anti-micro-vibration base to solve the problems existing in the above-mentioned background technology.

[0005] The technical solution of the utility model is achieved in this way:

[0006] A novel high-rigidity steel structure anti-micro-vibration base comprises a top plate, a top beam and a bottom beam, wherein legs are vertically welded between the top beam and the bottom beam, and oblique beams are welded between the legs close to the periphery and the adjacent legs, oblique supports are installed on the outer sides of the legs close to the periphery, vertical ribs are welded on the top beam, the bottom beam and the center of the corresponding legs, a grouting layer is filled between the bottom beam and the floor, pads A and B are respectively welded on the top and bottom of the oblique beam, pads A are used to bolt and fix the oblique beam to the legs by bolts A, and pads B are used to bolt and fix the oblique beam to the grouting layer and the floor by bolts B.

[0007] Furthermore, the top beam and the bottom beam are both made of H-shaped steel to form a frame structure.

[0008] Furthermore, the supporting legs and the inclined beams are both made of H-shaped steel.

[0009] Furthermore, the oblique support is made of square steel pipe.

[0010] Furthermore, the grouting layer is a concrete grouting layer.

[0011] The beneficial effects of the utility model are:

[0012] The utility model improves the rigidity of the base itself through the steel beam design of the double-layer H-shaped steel structure, and adopts the H-shaped steel legs and inclined beam design to further improve the rigidity of the base. In addition, the ribs are welded on the top beam and the bottom beam corresponding to the center of the legs, which not only improves the bearing capacity of the base, but also improves the rigidity of the base. Moreover, the rigidity of the base is further improved by setting inclined supports around the base and pouring concrete slurry into the bottom to form a grouting layer. The base of the utility model is completely made of steel structure, which reduces the weight of the base and the production cost, but the anti-micro-vibration level of the base can reach VC-C. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a structural schematic diagram of the utility model.

[0014] In the figure, 1-top plate, 2-top beam, 3-bottom beam, 4-leg, 5-inclined beam, 6-inclined support, 7-rib plate, 8-grouting layer, 9-pad A, 10-pad B, 10-bolt A, 12-bolt B, 13-floor. DETAILED DESCRIPTION

[0015] The following will clearly and completely describe the technical solution of the utility model in conjunction with the embodiments. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0016] like Figure 1 As shown, a new type of high-rigidity steel structure anti-micro-vibration base includes a top plate, a top beam and a bottom beam, legs are vertically welded between the top beam and the bottom beam, and oblique beams are welded between the legs close to the periphery and the adjacent legs, oblique supports are installed on the outer sides of the legs close to the periphery, vertical ribs are welded on the top beam, the bottom beam and the center of the corresponding legs, a grouting layer is filled between the bottom beam and the floor, pad A and pad B are welded on the top and bottom of the oblique beam respectively, pad A bolts the oblique beam to the legs through bolts A, pad B bolts the oblique beam to the grouting layer and the floor through bolts B.

[0017] The top beam and the bottom beam are both made of H-shaped steel to form a frame structure.

[0018] The supporting legs and the inclined beam are both made of H-shaped steel.

[0019] The oblique support is made of square steel pipe.

[0020] The grouting layer is a concrete grouting layer.

[0021] When installing the base of the utility model, the base is moved to a determined installation location, a template frame is installed between the bottom of the base and the base plate, and then a grouting material is poured and naturally cured to form a grouting layer. Thereafter, the template is removed, the base is leveled, and then the oblique support is bolted and fixed to the leg by bolts A, and then the oblique support is bolted and fixed to the grouting layer and the floor by bolts B.

[0022] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A new type of high-rigidity steel structure anti-micro-vibration base, including a top plate, a top beam and a bottom beam, characterized in that: Legs are vertically welded between the top beam and the bottom beam, and oblique beams are welded between the legs close to the periphery and the adjacent legs. Oblique supports are installed on the outer sides of the legs close to the periphery. Vertical ribs are welded on the top beam, the bottom beam and the center of the corresponding legs. A grouting layer is filled between the bottom beam and the floor. Pad A and pad B are welded on the top and bottom of the oblique beam respectively. Pad A bolts the oblique beam to the legs through bolts A, and pad B bolts the oblique beam to the grouting layer and the floor through bolts B.

2. According to claim 1, a novel high-rigidity steel structure anti-micro-vibration base is characterized in that: The top beam and the bottom beam are both made of H-shaped steel to form a frame structure.

3. The novel high-rigidity steel structure anti-micro-vibration base according to claim 1 is characterized in that: The supporting legs and the inclined beam are both made of H-shaped steel.

4. The novel high-rigidity steel structure anti-micro-vibration base according to claim 1 is characterized in that: The oblique support is made of square steel pipe.

5. The novel high-rigidity steel structure anti-micro-vibration base according to claim 1 is characterized in that: The grouting layer is a concrete grouting layer.

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