Wafer turnover device

Abstract

The utility model belongs to the technical field of wafer turnover, and particularly relates to a wafer turnover device, which comprises a support frame, a mounting plate rotationally arranged on the support frame, a driven column arranged at the front end of the mounting plate, a driven gear sleeved on the driven column, and a clamping assembly arranged at the rear end of the mounting plate, the clamping plate is slidably arranged at the rear end of the mounting plate; a supporting plate is arranged at the front end of the supporting frame, a driving rack is slidably arranged on the supporting plate, and the driving rack is meshed with the driven gear; the pair of sliding clamping plates is arranged on the mounting plate, so that the wafer body can be clamped; the mounting plate is rotatably arranged on the supporting frame, so that the clamping plate clamping the wafer body can be overturned, and overturning of the wafer body is completed; through meshing of the driving rack and the driven gear, driving of the driven gear can be completed, linear motion can be converted into rotary motion, and the structure is simple and reliable.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer flipping, and in particular relates to a wafer flipping device. Background Art

[0002] With the continuous development of domestic high-end chip manufacturing technology, the materials of chips are constantly iterating, and the process requirements for chip raw materials - wafers are getting higher and higher. During the research process, it was found that the contamination on the back of the wafer has an important impact on the cleanliness of the surface. The contamination on the back of the wafer has also attracted more attention in the industry, and the demand for wafer back cleaning is also increasing. In the existing wafer processing process, the back side needs to be cleaned every two steps, so a wafer flipping device is needed. The existing flipping device is usually driven by a motor, but the humidity in the wafer flipping device is usually high, which is easy to cause motor failure;

[0003] Therefore, it is necessary to provide a wafer flipping device that can increase the service life of the flipping device. Utility Model Content

[0004] The utility model aims to provide a wafer turning device which can increase the service life of the turning device.

[0005] In order to solve the above technical problems, the utility model provides a wafer flipping device including: a support frame, a mounting plate is rotatably arranged on the support frame, a passive column is arranged at the front end of the mounting plate, a passive gear is sleeved on the passive column, a clamping assembly is arranged at the rear end of the mounting plate, the clamping assembly includes a pair of clamping plates, and the clamping plates are slidably arranged at the rear end of the mounting plate; a support plate is arranged at the front end of the support frame, an active rack is slidably arranged on the support plate, and the active rack is meshed with the passive gear.

[0006] Preferably, a mounting groove is provided at the front end of the mounting plate, and linear moving pairs are provided on both sides of the mounting groove, a pair of moving blocks are provided on the linear moving pairs, the ends of the clamping plate extend out of the mounting groove, and the protruding ends of the clamping plate are respectively connected to the moving blocks.

[0007] Preferably, a connecting plate is provided at the protruding end of the clamping plate, the side wall of the connecting plate is connected to the moving block, and moving rollers are respectively provided at both ends of the connecting plate; a pair of pushing blocks are provided on the side walls of the support frame, the front end of the pushing block is configured to be wedge-shaped, and the wedge-shaped end of the pushing block can slide between the moving rollers on the same side.

[0008] Preferably, a pair of guide seats are provided at the front end of the support frame, guide grooves are provided on the guide seats, a pair of guide wheels are provided in the guide grooves, and the side walls of the push block are in contact with the guide wheels.

[0009] Preferably, a guide rod is hinged on the guide seat, and waist-shaped grooves are provided at both ends of the guide rod; a pushing roller is rotatably provided on the side wall of the pushing block, and the waist-shaped groove at one end is sleeved on the outer side of the pushing roller; a pushing cylinder is provided at the front end of the support frame, and a pushing roller is rotatably provided on the piston rod of the pushing cylinder, and the waist-shaped groove at the other end is sleeved on the outer side of the pushing roller on the pushing cylinder.

[0010] Preferably, a return spring is provided at the end of the linear moving pair, the other end of the return spring is connected to the side wall of the moving block, and the return spring is always in a compressed state.

[0011] Preferably, a detection plate is provided on the connecting plate, and two detection heads are provided on the detection plate; a horizontal detector and a vertical detector are provided on the support frame, and the vertical detector is provided directly above the axis of the mounting plate, wherein when the horizontal detector detects one of the detection heads, the pushing cylinder is allowed to work so that the vertical detector detects the other detection head.

[0012] Preferably, a rotary cylinder is provided on the support plate, and a piston rod of the rotary cylinder is connected to the active rack.

[0013] Preferably, a damper is provided on the support plate, a fixed end of the damper is connected to the support plate, and a movable end of the damper is connected to the piston rod of the rotary cylinder.

[0014] Preferably, a warping detector and a missing piece detector are provided on the back side of the support frame.

[0015] The beneficial effects of the utility model are:

[0016] 1. By setting a pair of sliding clamping plates on the mounting plate, the wafer body can be clamped;

[0017] 2. By rotating the mounting plate on the support frame, the clamping plate holding the wafer body can be turned over to complete the turning of the wafer body;

[0018] 3. Through the meshing of the active rack and the passive gear, the passive gear can be driven and the linear motion can be converted into rotational motion. The structure is simple and reliable.

[0019] Other features and advantages of the present invention will be set forth in the following description, and in part will become apparent from the description, or may be understood by implementing the present invention.

[0020] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 It is a three-dimensional diagram of a preferred embodiment of the wafer flipping device of the utility model;

[0023] Figure 2 It is a three-dimensional diagram of a preferred embodiment of the wafer flipping device of the utility model;

[0024] Figure 3 yes Figure 2 The enlarged view of point A in the middle;

[0025] Figure 4 yes Figure 2 The enlarged view of point B in the middle;

[0026] Figure 5 It is a stereoscopic diagram of a preferred embodiment of the wafer flipping device of the present invention.

[0027] In the figure:

[0028] 000, wafer body;

[0029] 100, support frame; 101, mounting plate; 1011, mounting slide; 102, passive column; 103, passive gear; 104, support plate; 1041, rotary cylinder; 1042, damper; 105, active rack; 106, linear motion pair; 1061, moving block; 1062, return spring; 107, push block; 108, guide seat; 1081, guide groove; 1082, guide wheel; 1083, guide rod; 1084, waist groove; 109, push cylinder; 1091, push roller; 110, horizontal detector; 111, vertical detector; 112, warping detector; 113, missing piece detector;

[0030] 200, clamping assembly; 201, clamping plate; 202, connecting plate; 2021, moving roller; 203, detection sheet; 2031, detection head. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model. Example

[0032] like Figure 1-5 As shown, a wafer flipping device of the present embodiment includes: a support frame 100, a mounting plate 101 is rotatably provided on the support frame 100, a passive column 102 is provided at the front end of the mounting plate 101, a passive gear 103 is sleeved on the passive column 102, a clamping assembly 200 is provided at the rear end of the mounting plate 101, and the clamping assembly 200 includes a pair of clamping plates 201, and the clamping plates 201 are slidably provided at the rear end of the mounting plate 101; a support plate 104 is provided at the front end of the support frame 100, and an active rack is slidably provided on the support plate 104 105, the active rack 105 is meshed with the passive gear 103; in short, by setting a pair of sliding clamping plates 201 on the mounting plate 101, the wafer body 000 can be clamped; further, by rotating the mounting plate 101 on the support frame 100, the clamping plate 201 clamping the wafer body 000 can be turned over, thereby completing the turning of the wafer body 000; further, by the meshing of the active rack 105 and the passive gear 103, the driving of the passive gear 103 can be completed, and the linear motion can be converted into rotational motion, and the structure is simple and reliable.

[0033] The front end of the mounting plate 101 is provided with a mounting groove 1011, and linear moving pairs 106 are provided on both sides of the mounting groove 1011, and a pair of moving blocks 1061 are provided on the linear moving pair 106. The end of the clamping plate 201 extends out of the mounting groove, and the protruding ends of the clamping plate 201 are respectively connected to the moving blocks 1061; in short, a strip block extends from the end of the clamping plate 201, and the strip block passes through the mounting groove 1011 and is respectively connected to the two moving blocks 1061. By sliding the moving block 1061 on the linear moving pair 106, the clamping plate 201 can be clamped / loosened to complete the installation of the wafer body 000.

[0034] The protruding end of the clamping plate 201 is provided with a connecting plate 202, the side wall of the connecting plate 202 is connected to the moving block 1061, and the two ends of the connecting plate 202 are respectively provided with moving rollers 2021; the side wall of the support frame 100 is provided with a pair of pushing blocks 107, the front end of the pushing block 107 is set in a wedge shape, and the wedge-shaped end of the pushing block 107 can slide between the moving rollers 2021 on the same side; in short, the clamping plate 201 is connected to the moving block 1061 through the connecting plate 202, and the pushing block 107 can slide between the moving rollers 2021 on the same side of the two connecting plates 202 to loosen the clamping plate 201, and the structure is simple and reliable.

[0035] A pair of guide seats 108 are provided at the front end of the support frame 100, and a guide groove 1081 is provided on the guide seat 108. A pair of guide wheels 1082 are provided in the guide groove 1081, and the side walls of the push block 107 are in contact with the guide wheels 1082. In short, by providing the guide groove 1081 on the guide seat 108, the sliding setting of the push block 107 can be realized, and the sliding friction between the push block 107 and the guide groove 1081 can be converted into rolling friction in cooperation with the guide wheel 1082, thereby improving the service life of the push block 107.

[0036] A guide rod 1083 is hinged on the guide seat 108, and waist-shaped grooves 1084 are provided at both ends of the guide rod 1083; a pushing roller 1091 is rotatably provided on the side wall of the pushing block 107, and the waist-shaped groove 1084 at one end is sleeved on the outer side of the pushing roller 1091; a pushing cylinder 109 is provided at the front end of the support frame 100, and a pushing roller 1091 is rotatably provided on the piston rod of the pushing cylinder 109, and the waist-shaped groove 1084 at the other end is sleeved on the pushing roller 109 on the pushing cylinder 109. The outer side of the roller 1091; in short, the guide rod 1083 is hinged on the guide seat 108, and the guide rod 1083 can drive the pushing block 107 by rotating one end of the guide rod 1083; further, waist-shaped grooves 1084 are provided at both ends of the guide rod 1083, which are suitable for allowing the pushing roller 1091 to move up and down when pushing the guide rod 1083, so as to avoid interference between the pushing roller 1091 and the guide rod 1083; further, through the setting of the pushing cylinder 109, the pushing of one end of the guide rod 1083 can be completed.

[0037] A return spring 1062 is provided at the end of the linear moving pair 106, the other end of the return spring 1062 is connected to the side wall of the moving block 1061, and the return spring 1062 is always in a compressed state; in short, through the setting of the return spring 1062, the clamping plate 201 can always have a tendency to close, thereby preventing the wafer body 000 from slipping during rotation.

[0038] The connecting plate 202 is provided with a detection sheet 203, and the detection sheet 203 is provided with two detection heads 2031; the support frame 100 is provided with a horizontal detector 110 and a vertical detector 111, and the vertical detector 111 is arranged just above the axis of the mounting plate 101, wherein when the horizontal detector 110 detects one of the detection heads 2031, the push cylinder 109 is allowed to work so that the vertical detector 111 detects the other detection head 2031; in short, when the detection head 2031 rotates to be After the horizontal detector 110 detects, it is determined that the clamping assembly 200 has rotated to the horizontal position. At this time, the clamping plate 201 can be loosened. When the other detection head 2031 is detected by the vertical detector 111, the clamping plate 201 stops loosening and the wafer body 000 can be taken out. Among them, when the horizontal detector 110 does not detect the detection head 2031, the pushing cylinder 109 is prohibited from working. Similarly, when the clamping of the wafer body 000 is completed, the vertical detector 111 detects that the detection head 2031 has left, and the rotating cylinder 1041 is prohibited from working.

[0039] The support plate 104 is provided with a rotary cylinder 1041 , and the piston rod of the rotary cylinder 1041 is connected to the active rack 105 ; in short, the active rack 105 is pushed by the rotary cylinder 1041 , and the structure is simple and reliable.

[0040] The support plate 104 is provided with a damper 1042, the fixed end of the damper 1042 is connected to the support plate 104, and the movable end of the damper 1042 is connected to the piston rod of the rotating cylinder 1041; in short, through the setting of the damper 1042, when the active rack 105 slides, the process is smoother and will not cause excessive inertia, thereby damaging the wafer.

[0041] The back side of the support frame 100 is provided with a warping detector 112 and a missing chip detector 113; in short, the warping detector 112 is horizontally arranged, aligned with the wafer body 000, and is suitable for detecting whether the wafer body 000 is bent; the missing chip detector 113 is tilted, and is suitable for detecting whether the wafer body 000 has been between the clamping plates 201, so as to determine whether the wafer body 000 is correctly installed.

[0042] All devices (parts without specific structure) selected in this application are universal standard parts or parts known to those skilled in the art, and their structures and principles can be known by those skilled in the art through technical manuals or conventional experimental methods. In addition, the software programs involved in this application are all prior art, and this application does not involve any improvement to the software programs.

[0043] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0044] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0045] In the several embodiments provided in the present application, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interfaces, and the indirect coupling or communication connection of devices or units can be electrical, mechanical or other forms.

[0046] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0047] In addition, each functional unit in each embodiment of the present utility model may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0048] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without deviating from the technical concept of the utility model through the above description. The technical scope of the utility model is not limited to the content of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A wafer flipping device, characterized in that: include: A support frame, a mounting plate is rotatably arranged on the support frame, a passive column is arranged at the front end of the mounting plate, a passive gear is sleeved on the passive column, a clamping assembly is arranged at the rear end of the mounting plate, the clamping assembly includes a pair of clamping plates, and the clamping plate is slidably arranged at the rear end of the mounting plate; A support plate is arranged at the front end of the support frame, an active rack is slidably arranged on the support plate, and the active rack is meshed with the passive gear.

2. The wafer flipping device according to claim 1, characterized in that: A mounting groove is provided at the front end of the mounting plate, and linear moving pairs are provided on both sides of the mounting groove, a pair of moving blocks are provided on the linear moving pairs, the ends of the clamping plate extend out of the mounting groove, and the protruding ends of the clamping plate are respectively connected to the moving blocks.

3. The wafer flipping device according to claim 2, characterized in that: A connecting plate is provided at the protruding end of the clamping plate, a side wall of the connecting plate is connected to the moving block, and moving rollers are respectively provided at both ends of the connecting plate; A pair of pushing blocks are arranged on the side walls of the support frame. The front ends of the pushing blocks are arranged in a wedge shape. The wedge-shaped ends of the pushing blocks can slide between the moving rollers on the same side.

4. The wafer flipping device according to claim 3, characterized in that: A pair of guide seats are arranged at the front end of the support frame, guide grooves are arranged on the guide seats, a pair of guide wheels are arranged in the guide grooves, and the side walls of the push block are in contact with the guide wheels.

5. The wafer flipping device according to claim 4, characterized in that: A guide rod is hinged on the guide seat, and waist-shaped grooves are provided at both ends of the guide rod; The side wall of the pushing block is rotatably provided with a pushing roller, and the waist-shaped groove at one end is sleeved on the outer side of the pushing roller; A pushing cylinder is arranged at the front end of the support frame, a pushing roller is rotatably arranged on the piston rod of the pushing cylinder, and the waist-shaped groove at the other end is sleeved on the outer side of the pushing roller on the pushing cylinder.

6. The wafer flipping device according to claim 5, characterized in that: A return spring is arranged at the end of the linear moving pair, the other end of the return spring is connected to the side wall of the moving block, and the return spring is always in a compressed state.

7. The wafer flipping device according to claim 6, characterized in that: The connecting plate is provided with a detection sheet, and the detection sheet is provided with two detection heads; The support frame is provided with a horizontal detector and a vertical detector, wherein the vertical detector is arranged directly above the axis of the mounting plate. When the horizontal detector detects one of the detection heads, the push cylinder is allowed to operate so that the vertical detector detects the other detection head.

8. The wafer flipping device according to claim 7, characterized in that: A rotary cylinder is arranged on the support plate, and a piston rod of the rotary cylinder is connected to the active rack.

9. The wafer flipping device according to claim 8, characterized in that: A damper is arranged on the support plate, a fixed end of the damper is connected to the support plate, and a movable end of the damper is connected to the piston rod of the rotary cylinder.

10. The wafer flipping device according to claim 9, characterized in that: A warping detector and a missing piece detector are arranged on the back side of the support frame.

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