Photomask clamp and photomask cleaning machine

Abstract

The utility model provides a photomask plate clamp and a photomask plate cleaning machine, and relates to the technical field of photomask plate processing. The photomask clamp comprises a base and a first telescopic assembly arranged on the base, the first telescopic assembly is provided with at least two telescopic ends, each telescopic end is provided with a limiting block, each limiting block is provided with a bearing face and two limiting faces perpendicular to the bearing face, and the bearing faces are arranged on the base. The two limiting surfaces are perpendicular to each other and are symmetrically distributed relative to the telescopic path of the telescopic end where the two limiting surfaces are located, the bearing surface is used for supporting the lower surface of the photomask, and the two limiting surfaces are used for abutting against the two side walls, perpendicular to each other, of the photomask respectively. According to the photomask clamp, the first telescopic assembly is adopted to drive the at least two limiting blocks to change the positions, when photomasks of different sizes need to be switched, the requirements can be met by changing the size of the photomask clamp, a new photomask clamp or machine does not need to be purchased, the production cost of the photomasks can be reduced, and the production efficiency of the photomasks is improved. And the production efficiency can also be improved.

Description

Technical Field

[0001] The present application relates to the technical field of photomask processing, and in particular to a photomask clamp and a photomask cleaning machine. Background Art

[0002] When cleaning a photomask, a photomask cleaning machine needs to place the photomask in a fixture for fixing, and then the photomask rotates with the fixture to perform the photomask cleaning process. However, the photomask fixture on the existing photomask cleaning machine is a circular fixture with a fixed size, which can only meet the cleaning requirements of a single size of photomask. When cleaning photomasks of different sizes, different photomask cleaning machines need to be used, which has low production efficiency and high cost. Utility Model Content

[0003] The purpose of the present application is to provide a photomask clamp and a photomask cleaning machine to address the deficiencies in the above-mentioned prior art, which can reduce the production cost of the photomask and improve the production efficiency.

[0004] To achieve the above purpose, the technical solution adopted in the embodiment of the present application is as follows:

[0005] According to one aspect of an embodiment of the present application, a photomask clamp is provided, comprising: a base and a first telescopic assembly arranged on the base, the first telescopic assembly having at least two telescopic ends, each telescopic end being provided with a limit block, the limit block having a bearing surface and two limit surfaces respectively perpendicular to the bearing surface, the two limit surfaces being perpendicular to each other, the bearing surface being used to support the lower surface of the photomask, and the two limit surfaces being used to abut against two side walls respectively perpendicular to the photomask.

[0006] Optionally, the first telescopic assembly includes at least two telescopic members, the fixed ends of the telescopic members are fixed on the base, and a limit block is provided at the telescopic end of each telescopic member.

[0007] Optionally, the number of the telescopic members is four, and two opposite telescopic members are located on the same straight line.

[0008] Optionally, a second telescopic component is provided between two adjacent telescopic members, one end of the second telescopic component is connected to the telescopic end of one telescopic member, and the other end of the second telescopic component is connected to the telescopic end of the other telescopic member.

[0009] Optionally, the second telescopic assembly includes a first sleeve and a second sleeve slidably arranged at one end of the first sleeve, and ends of the first sleeve and the second sleeve that are far away from each other are respectively fixedly connected to the telescopic ends of two adjacent telescopic members.

[0010] Optionally, the second telescopic assembly further includes a third sleeve, which is slidably disposed at an end of the first sleeve away from the second sleeve, and the end of the first sleeve away from the second sleeve is fixedly connected to the telescopic end of the telescopic member through the third sleeve.

[0011] Optionally, the second sleeve and the third sleeve are symmetrically distributed relative to a center line of the first sleeve, wherein the center line of the first sleeve is perpendicular to the axis of the first sleeve.

[0012] Optionally, a first through hole is provided on the first sleeve, and at least two second through holes are provided on the second sleeve, and at least one of the two second through holes is aligned with the first through hole; or, at least two first through holes are provided on the first sleeve, and a second through hole is provided on the second sleeve, and at least one of the two first through holes is aligned with the second through hole; a first connecting member is passed between the first through hole and the second through hole to achieve relative fixation.

[0013] Optionally, a third through hole is provided on the first sleeve, and at least two fourth through holes are provided on the third sleeve, and at least one of the at least two fourth through holes is aligned with the third through hole; or, at least two third through holes are provided on the first sleeve, and a fourth through hole is provided on the third sleeve, and at least one of the third through holes is aligned with the fourth through hole; a second connecting member is passed between the third through hole and the fourth through hole to achieve relative fixation.

[0014] According to another aspect of the embodiments of the present application, a photomask cleaning machine is provided, comprising the photomask clamp as described above.

[0015] The beneficial effects of this application include:

[0016] The present application provides a photomask clamp, comprising: a base and a first telescopic component arranged on the base, the first telescopic component having at least two telescopic ends, each telescopic end being provided with a stop block, the stop block having a bearing surface and two stop surfaces respectively perpendicular to the bearing surface, the two stop surfaces being perpendicular to each other and symmetrically distributed relative to the telescopic path of the telescopic end where they are located, the bearing surface being used to support the lower surface of the photomask, and the two stop surfaces being used to abut against two side walls respectively perpendicular to each other of the photomask. The photomask clamp is provided with a first telescopic component, and the first telescopic component is used to drive at least two stop blocks to change positions, thereby adjusting the size of the photomask clamp to adapt to photomasks of different sizes. When it is necessary to switch to photomasks of different sizes, the needs can be met by changing the size of the photomask clamp, without the need to purchase a new photomask clamp or machine, which can not only reduce the production cost of the photomask, but also improve production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 A schematic diagram of the structure of a photomask clamp provided in an embodiment of the present application;

[0019] Figure 2 A schematic diagram of the structure of a limit block in a photomask clamp provided in an embodiment of the present application;

[0020] Figure 3 A schematic diagram of a photomask supported and fixed by a limiting block in a photomask clamp provided in an embodiment of the present application;

[0021] Figure 4 A schematic structural diagram of a second telescopic assembly in a photomask clamp provided in an embodiment of the present application.

[0022] Icon: 100-photomask clamp; 110-base; 120-first telescopic assembly; 121-telescopic member; 130-limiting block; 131-bearing surface; 132-limiting surface; 140-second telescopic assembly; 141-first sleeve; 1411-first through hole; 1412-third through hole; 142-second sleeve; 1421-second through hole; 143-third sleeve; 1431-fourth through hole; 200-photomask. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for protection, but merely represents selected embodiments of the present application. It should be noted that, in the absence of conflict, the various features in the embodiments of the present application can be combined with each other, and the combined embodiments are still within the scope of protection of the present application.

[0025] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0026] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the application is usually placed when in use. They are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0027] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0028] In one aspect of the embodiment of the present application, please refer to Figure 1 , a photomask clamp 100 is provided, comprising: a base 110 and a first telescopic assembly 120 disposed on the base 110, the first telescopic assembly 120 having at least two telescopic ends, each of which is provided with a stop block 130, please refer to Figure 2 and Figure 3 The limiting block 130 has a bearing surface 131 and two limiting surfaces 132 respectively perpendicular to the bearing surface 131. The two limiting surfaces 132 are perpendicular to each other. The bearing surface 131 is used to support the lower surface of the photomask 200, and the two limiting surfaces 132 are used to abut against two side walls of the photomask 200 that are respectively perpendicular to each other.

[0029] The limit block 130 is located above the first telescopic assembly 120, and is used to support and limit the photomask 200. The limit block 130 has a horizontal bearing surface 131 and two vertical limiting surfaces 132, and the two limiting surfaces 132 are also perpendicular to each other, thereby forming a limiting angle. When the photomask fixture 100 is working, the photomask 200 is placed on the bearing surface 131 of the limit block 130, and the bearing surfaces 131 of at least two limit blocks 130 are located in the same plane to jointly support the lower surface of the photomask 200. At the same time, the limiting angle formed by the two limiting surfaces 132 on the limit block 130 wraps a corner of the photomask 200 to limit and fix it on the side of the photomask 200. There are at least two limiting blocks 130 , so at least two corners of the photomask 200 are wrapped and fixed by the limiting blocks 130 . Thus, when the photomask fixture 100 drives the photomask 200 to rotate, the photomask 200 will not shift.

[0030] The limiting block 130 is disposed on the telescopic end of the first telescopic assembly 120 . The telescopic first telescopic assembly 120 can drive the limiting block 130 to change its position by extending or retracting, thereby changing the size of the photomask fixture 100 . Figure 1 The schematic diagram of the structure of the photomask clamp before and after the first telescopic assembly 120 is also shown. It can be understood that the setting of the limit block 130 should ensure that after its position is changed, the two limit surfaces 132 thereon can still abut against the two side walls connected to each other of the photomask 200. When it is necessary to switch to a photomask 200 of different sizes, the demand can be met by changing the size of the photomask clamp 100, without the need to purchase a new photomask clamp 100 or machine, which can not only reduce the production cost of the photomask 200, but also improve production efficiency.

[0031] Since the photomask 200 is generally rectangular, preferably, the first telescopic component 120 has four telescopic ends, each of which is provided with a limit block 130, and the four limit blocks 130 are respectively used to support and fix the four corners of the photomask 200, so that the photomask clamp 100 can fix the photomask 200 more firmly.

[0032] In other embodiments, the first telescopic component 120 may also have two telescopic ends, and the limit blocks 130 on the two telescopic ends are symmetrically distributed relative to the rotation center of the base 110. The two limit blocks 130 respectively wrap the two opposite corners of the photomask 200, thereby fixing the photomask 200.

[0033] Optionally, the first telescopic assembly 120 includes at least two telescopic members 121 , the fixed ends of the telescopic members 121 are fixed on the base 110 , and a limiting block 130 is provided at the telescopic end of each telescopic member 121 .

[0034] The telescopic member 121 has a fixed end and a telescopic end relative to each other, and the telescopic end can reciprocate along a straight line relative to the fixed end to achieve telescoping. The telescopic member 121 can be a cylinder, a hydraulic cylinder, an electric push rod, etc. The telescopic ends of at least two telescopic members 121 correspond to the telescopic ends of the first telescopic assembly 120, and the limit block 130 is arranged at the telescopic end. The telescopic end can adjust the position of the limit block 130 by telescoping, and then adjust the size of the photomask clamp 100, so as to adapt to different photomasks 200.

[0035] Optionally, the number of the telescopic members 121 is four, and two opposite telescopic members 121 are located on the same straight line.

[0036] The limit blocks 130 on the four telescopic members 121 respectively fix the four corners of the photomask 200. When the photomask 200 is square, the four telescopic members 121 are distributed in a cross shape; when the photomask 200 is rectangular, the four telescopic members 121 are distributed in an X shape.

[0037] Please refer to Figure 1 and Figure 4 When the angle between two adjacent telescopic members 121 is less than 180°, a connection structure may be provided between the telescopic ends of the two adjacent telescopic members 121 to improve the stability of the movement of the telescopic ends and the stopper 130. Optionally, a second telescopic assembly 140 is provided between the two adjacent telescopic members 121, one end of the second telescopic assembly 140 is connected to the telescopic end of one telescopic member 121, and the other end is connected to the telescopic end of the other telescopic member 121. When the telescopic end of the telescopic member 121 moves, the second telescopic assembly 140 can be adaptively adjusted by telescoping.

[0038] Furthermore, the second telescopic assembly 140 includes a first sleeve 141 and a second sleeve 142 slidably disposed at one end of the first sleeve 141 , and the ends of the first sleeve 141 and the second sleeve 142 that are away from each other are fixedly connected to the telescopic ends of two adjacent telescopic members 121 .

[0039] The first sleeve 141 and the second sleeve 142 are nested, and the end of the second sleeve 142 is inserted into the first sleeve 141 and slides in the first sleeve 141, or the end of the first sleeve 141 is inserted into the second sleeve 142 and slides in the second sleeve 142, thereby changing the total length of the second telescopic assembly 140 to adapt to the movement of the telescopic end of the telescopic member 121.

[0040] Optionally, the first sleeve 141 is provided with a first through hole 1411, and the second sleeve 142 is provided with at least two second through holes 1421, and one of the at least two second through holes 1421 is aligned with the first through hole 1411; or, the first sleeve 141 is provided with at least two first through holes 1411, and the second sleeve 142 is provided with a second through hole 1421, and one of the at least two first through holes 1411 is aligned with the second through hole 1421. After the first through hole 1411 and the second through hole 1421 are aligned, the first connecting member passes between the two to achieve relative fixation, so that the structure of the second telescopic assembly 140 remains stable, and the second telescopic assembly 140 is prevented from being deformed during the rotation of the photomask clamp 100 or after being subjected to force.

[0041] It should be noted that the connection between the first sleeve 141 and the telescopic end of the telescopic member 121 and the connection between the second sleeve 142 and the telescopic end of the telescopic member 121 may be direct connection or may be indirect connection through other parts.

[0042] For example, the second telescopic assembly 140 also includes a third sleeve 143, which is slidably disposed at one end of the first sleeve 141 away from the second sleeve 142, and the end of the first sleeve 141 away from the second sleeve 142 is fixedly connected to the telescopic end of the telescopic member 121 through the third sleeve 143.

[0043] That is to say, the end of the first sleeve 141 away from the second sleeve 142 is also nested with the third sleeve 143, the end of the third sleeve 143 is inserted into the first sleeve 141 and slides in the first sleeve 141, or the end of the first sleeve 141 is inserted into the third sleeve 143 and slides in the third sleeve 143, and the end of the third sleeve 143 away from the first sleeve 141 is directly fixedly connected to the telescopic end of the telescopic member 121. The total length of the second telescopic assembly 140 is changed by the relative sliding of the first sleeve 141, the second sleeve 142 and the third sleeve 143. The addition of the third sleeve 143 can make the adjustment range of the total length of the second telescopic assembly 140 larger.

[0044] Optionally, the second sleeve 142 and the third sleeve 143 are symmetrically distributed relative to the center line of the first sleeve 141, wherein the center line of the first sleeve 141 ( Figure 4 The center line in the middle is perpendicular to the axis of the first sleeve 141. The second sleeve 142 and the third sleeve 143 are symmetrically distributed, so that the structure of the second telescopic assembly 140 is more symmetrical, which facilitates the adjustment of the second telescopic assembly 140.

[0045] Optionally, the first sleeve 141 is provided with a third through hole 1412, the third sleeve 143 is provided with at least two fourth through holes 1431, and one of the at least two fourth through holes 1431 is aligned with the third through hole 1412; or, the first sleeve 141 is provided with at least two third through holes 1412, the third sleeve 143 is provided with a fourth through hole 1431, and one of the at least two third through holes 1412 is aligned with the fourth through hole 1431. After the third through hole 1412 is aligned with the fourth through hole 1431, the second connecting member is passed between the two to achieve relative fixation, so that the structure of the second telescopic assembly 140 remains stable, and the second telescopic assembly 140 is prevented from being deformed during the rotation of the photomask clamp 100 or after being subjected to force.

[0046] This embodiment further provides a photomask cleaning machine, comprising any one of the photomask clamps 100 described above.

[0047] The photomask cleaning machine includes the same structure and benefits as the photomask holder 100 in the above embodiment. The structure and benefits of the photomask holder 100 have been described in detail in the above embodiment, and will not be repeated here.

[0048] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A photomask holder, characterized in that: include: A base and a first telescopic component arranged on the base, the first telescopic component has at least two telescopic ends, each of the telescopic ends is provided with a limit block, the limit block has a bearing surface and two limit surfaces respectively perpendicular to the bearing surface, the two limit surfaces are perpendicular to each other, the bearing surface is used to support the lower surface of the photomask, and the two limit surfaces are used to respectively abut against two side walls of the photomask that are perpendicular to each other.

2. The photomask holder according to claim 1, wherein: The first telescopic assembly includes at least two telescopic members, the fixed ends of the telescopic members are fixed on the base, and the telescopic end of each telescopic member is provided with a limiting block.

3. The photomask holder according to claim 2, wherein: The number of the telescopic members is four, and two opposite telescopic members are located on the same straight line.

4. The photomask holder according to claim 2, wherein: A second telescopic component is provided between two adjacent telescopic members, one end of the second telescopic component is connected to the telescopic end of one of the telescopic members, and the other end of the second telescopic component is connected to the telescopic end of the other telescopic member.

5. The photomask holder according to claim 4, wherein: The second telescopic assembly includes a first sleeve and a second sleeve slidably disposed at one end of the first sleeve, and ends of the first sleeve and the second sleeve that are away from each other are respectively fixedly connected to the telescopic ends of two adjacent telescopic members.

6. The photomask holder according to claim 5, wherein: The second telescopic assembly also includes a third sleeve, which is slidably disposed at an end of the first sleeve away from the second sleeve, and the end of the first sleeve away from the second sleeve is fixedly connected to the telescopic end of the telescopic member through the third sleeve.

7. The photomask holder according to claim 6, wherein: The second sleeve and the third sleeve are symmetrically distributed relative to a center line of the first sleeve, wherein the center line of the first sleeve is perpendicular to an axis of the first sleeve.

8. The photomask holder according to claim 5, wherein: The first sleeve is provided with a first through hole, and the second sleeve is provided with at least two second through holes, and at least one of the second through holes is aligned with the first through hole; or, the first sleeve is provided with at least two first through holes, and the second sleeve is provided with a second through hole, and at least one of the first through holes is aligned with the second through hole; a first connecting piece is passed between the first through hole and the second through hole to achieve relative fixation.

9. The photomask holder according to claim 6, wherein: The first sleeve is provided with a third through hole, the third sleeve is provided with at least two fourth through holes, and at least one of the fourth through holes is aligned with the third through hole; or, the first sleeve is provided with at least two third through holes, the third sleeve is provided with a fourth through hole, and at least two of the third through holes are aligned with the fourth through hole; a second connecting piece is passed between the third through hole and the fourth through hole to achieve relative fixation.

10. A photomask cleaning machine, characterized in that: The invention comprises a photomask holder as claimed in any one of claims 1 to 9.

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