Cost-saving silver-containing large target assembly

Abstract

The utility model belongs to the technical field of target materials, and relates to a cost-saving silver-containing large-scale target material assembly which comprises a plurality of silver-containing target blanks and a plurality of strip-shaped back plates which are made of cheap metal materials and are used for fixedly connecting the silver-containing target blanks, at least two mounting grooves are formed in the surface, opposite to the sputtering surface, of the silver-containing target blank, notches of the mounting grooves of the adjacent silver-containing target blanks are connected, and the back plate is embedded into the two adjacent mounting grooves, so that the adjacent silver-containing target blanks are connected into a whole. According to the utility model, the large silver-containing target material is divided into a plurality of small silver-containing target blanks which are connected by using the cheap metal back plates, so that the manufacturing difficulty is reduced, and the cheap metal back plates are used for replacing parts which cannot be used for sputtering, thereby obviously reducing the weight and the cost of the target material.

Description

Technical Field

[0001] The utility model relates to the technical field of target materials, in particular to a cost-saving large-scale silver-containing target material component. Background Art

[0002] Sputtering is one of the main technologies for preparing thin film materials. It uses ions generated by an ion source to accelerate and gather in a vacuum to form a high-speed energy ion beam to bombard the solid surface. The ions and the atoms on the solid surface exchange kinetic energy, causing the atoms on the solid surface to leave the solid and deposit on the substrate surface. The bombarded solid is the raw material for depositing thin films by sputtering, called sputtering target. Various types of sputtered thin film materials have been widely used in semiconductor integrated circuits, recording media, flat panel displays, and workpiece surface coatings.

[0003] Large-sized square silver or silver alloy targets are occasionally used as the main material for silver film layers in glass coating or optoelectronics industries, and are mainly used in large-area low-emissivity glass coating, optoelectronics large-area panel coating, and photovoltaic solar cell coating. However, due to the low utilization rate of targets in the current market, and because silver is a precious metal, the investment cost of a single set of large silver or silver alloy targets is relatively high.

[0004] Therefore, it is necessary to develop a new large silver-containing target to solve the above problems. Utility Model Content

[0005] The main purpose of the utility model is to provide a cost-saving large silver-containing target assembly, which splits the large silver-containing target into several smaller silver-containing target embryos and then connects them with a cheap metal backing plate, which not only reduces the manufacturing difficulty but also replaces the part not used for sputtering with the cheap metal backing plate, thereby significantly reducing the cost of the target material.

[0006] The utility model achieves the above-mentioned purpose through the following technical scheme: a cost-saving large-scale silver-containing target material assembly, comprising a plurality of silver-containing target embryos and a plurality of strip-shaped and low-cost metal backing plates fixedly connected to the silver-containing target embryos, the silver-containing target embryos all have sputtering surfaces, the silver-containing target embryos are provided with at least two mounting grooves on the opposite surface of the sputtering surface, the mounting grooves of adjacent silver-containing target embryos are connected, and the backing plate is embedded in two adjacent mounting grooves to connect the adjacent silver-containing target embryos into one.

[0007] Specifically, the thickness h from the mounting groove to the sputtering surface is not less than 20 mm.

[0008] Furthermore, a plurality of threaded holes are arranged in the installation groove along the extension direction, and the back plate is provided with countersunk holes corresponding to the positions of the threaded holes one by one, and bolts are arranged through the countersunk holes, and the bolts cooperate with the threaded holes to fix the back plate and the silver-containing target embryo.

[0009] Specifically, the depth of the threaded hole is 10 mm smaller than the thickness h, and the diameter of the threaded hole is 4 to 10 mm.

[0010] Specifically, the installation groove is a straight groove, and the width of the installation groove is 2 to 20 mm greater than the width of the back plate.

[0011] The beneficial effects of the technical solution of the utility model are:

[0012] The utility model divides a large silver-containing target into several smaller silver-containing target embryos and then connects them with a cheap metal back plate, which not only reduces the manufacturing difficulty but also replaces the parts not used for sputtering with the cheap metal back plate, thereby significantly reducing the weight and cost of the target material. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 is a top perspective view of a large silver-containing target assembly according to an embodiment;

[0014] Figure 2 1 is a right perspective view of an embodiment of a large silver-containing target assembly.

[0015] The numbers in the figure represent:

[0016] 1a, 1b, 1c-silver-containing target blank, 11-sputtering surface, 12-mounting groove, 13-threaded hole;

[0017] 2-back plate, 21-counter hole;

[0018] 3- Bolts. DETAILED DESCRIPTION

[0019] The utility model is further described in detail below in conjunction with specific embodiments.

[0020] Example:

[0021] like Figure 1 and Figure 2 As shown, a cost-saving large-scale silver-containing target assembly of the utility model comprises a plurality of silver-containing target embryos 1a, 1b, 1c and a plurality of strip-shaped and low-cost metal back plates 2 for fixing the silver-containing target embryos, the silver-containing target embryos 1 all have a sputtering surface 11, the silver-containing target embryos 1a, 1b, 1c are provided with at least two mounting grooves 12 on the opposite sides of the sputtering surface, the mounting grooves 12 of adjacent silver-containing target embryos are connected by notches, and the back plate 2 is embedded in two adjacent mounting grooves 12 to connect the adjacent silver-containing target embryos into one.

[0022] The utility model splits a large silver-containing target material into several smaller silver-containing target embryos 1a, 1b, and 1c, wherein the silver-containing target embryo 1a is adjacent to the silver-containing target embryo 1b, and the silver-containing target embryo 1b is adjacent to the silver-containing target embryo 1c. The two groups of silver-containing target embryos are connected by a cheap metal backing plate 2, which not only reduces the manufacturing difficulty, but also replaces the part not used for sputtering with the cheap metal backing plate 2, thereby significantly reducing the weight and cost of the target material.

[0023] like Figure 2 As shown, the thickness h from the mounting groove 12 to the sputtering surface 11 is not less than 20 mm.

[0024] The sputtering surface 11 here may be a simple plane or an uneven curved surface, but in order to ensure the thickness of the useful part of the silver-containing target embryo, the thickness from the mounting groove 12 to the sputtering surface 11 cannot be too thin. Therefore, the mounting groove 12 is basically set on the reverse side of the protruding position of the sputtering surface 11.

[0025] like Figure 1 As shown, a plurality of threaded holes 13 are arranged in the installation groove 12 along the extension direction, and countersunk holes 21 corresponding to the positions of the threaded holes are arranged on the back plate 2. Bolts 3 are passed through the countersunk holes 21, and the bolts 3 cooperate with the threaded holes 13 to fix the back plate 2 to the silver-containing target embryo.

[0026] The back plate 2 and the mounting groove 12 need to be fixed by multiple fixing points to better ensure the position accuracy of the two, and to make the bottom surfaces of adjacent mounting grooves 12 flush and the gap between the silver-containing target embryos smaller.

[0027] like Figure 1 and Figure 2 As shown, the depth of the threaded hole 13 is 10 mm smaller than the thickness h, and the diameter of the threaded hole 13 is 4 to 10 mm.

[0028] The depth of the threaded hole 13 should not occupy too much of the thickness of the silver-containing target blank, so as to prevent the bolt 3 from being exposed from the sputtering surface 11 too early after sputtering and reducing the useful thickness of the silver-containing target blank. The threaded hole 13 should provide sufficient force for the bolt 3 to ensure the tightness between the back plate 2 and the mounting groove 12.

[0029] like Figure 1 and Figure 2 As shown, the installation groove 12 is a straight groove, and the width of the installation groove 12 is 2 to 40 mm greater than the width of the back plate 2.

[0030] In order to allow the back plate 2 to be normally embedded in the installation groove 12, the installation groove 12 is preferably a simple straight groove structure, and the width is appropriately reduced to ensure that the two can fit together.

[0031] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A cost-saving large silver-containing target assembly, characterized in that: It comprises a plurality of silver-containing target embryos and a plurality of strip-shaped back plates made of cheap metal to fix the silver-containing target embryos. The silver-containing target embryos all have a sputtering surface. The silver-containing target embryos are provided with at least two mounting grooves on the opposite surface of the sputtering surface. The mounting grooves of adjacent silver-containing target embryos are connected. The back plates are embedded in two adjacent mounting grooves to connect the adjacent silver-containing target embryos into one.

2. The cost-saving large-scale silver-containing target assembly according to claim 1, characterized in that: The thickness h from the mounting groove to the sputtering surface is not less than 20 mm.

3. The cost-saving large-scale silver-containing target assembly according to claim 2, characterized in that: A plurality of threaded holes are arranged in the installation groove along the extension direction, and the back plate is provided with countersunk holes corresponding to the positions of the threaded holes one by one. Bolts are passed through the countersunk holes, and the bolts cooperate with the threaded holes to fix the back plate and the silver-containing target embryo.

4. The cost-saving large-scale silver-containing target assembly according to claim 3, characterized in that: The depth of the threaded hole is 10 mm less than the thickness h, and the diameter of the threaded hole is 4-10 mm.

5. The cost-saving large-scale silver-containing target assembly according to claim 1, characterized in that: The mounting groove is a straight groove, and the width of the mounting groove is 2-40 mm greater than the width of the back plate.

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