Coating equipment

Abstract

The utility model discloses coating equipment, which comprises a transmission area, a coating area and a coating area, and is characterized in that the transmission area is used for transmitting a film; the film coating area is arranged on the side of the transmission area, and a target material is arranged in the film coating area; the conveying roller comprises a film coating part and a conveying part, the film coating part is located in the film coating area and is opposite to the target material, and the conveying part is located in the conveying area; the shielding assembly is located between the film coating area and the conveying area and located on the side of the conveying rollers, the shielding assembly comprises a first shielding face and a second shielding face, and the first shielding face is opposite to the target material; the second shielding face is located on the side, away from the target, of the first shielding face and is opposite to the surface of the conveying part. The utility model solves the problem that in the magnetron sputtering coating process in the prior art, metal atoms are easy to deposit on a roller system, so that the film surface is damaged when a film is in contact with the roller surface.

Description

Technical Field

[0001] The present application relates to the technical field of current collector manufacturing, and in particular to a coating device. Background Art

[0002] A composite current collector is a current collector with a polymer plastic as the base film and a metal layer plated on both sides of the base film. Compared with traditional current collectors, it has higher safety and energy density. During the preparation process, vacuum evaporation or magnetron sputtering is required to coat the metal to be plated onto the plastic base film.

[0003] Among them, magnetron sputtering coating refers to the use of functional particles to bombard the surface of the target material under vacuum conditions, so that the atoms on the target surface gain enough energy to escape and sputter onto the thin film. The film is uniform and has good bonding strength, and has been widely used.

[0004] In the double-sided magnetron sputtering coating equipment, two coating main rollers are included, which are used to coat the two surfaces of the film respectively. The two coating main rollers are symmetrically arranged, and a plurality of roller systems for winding and unwinding and transmitting the film are arranged in the middle of the chamber. A plurality of target materials are arranged on the side of the main roller close to the edge of the chamber. During the magnetron sputtering process, part of the atoms separated from the target material are deposited on the surface of the base film, and some atoms will move to the middle of the chamber and deposit on the surface of the roller system. After the metal atoms are deposited on the roller surface, the roller surface will be uneven. In the prior art, in order to prevent the atoms from being deposited on the film-carrying roller system, a baffle is usually arranged on the side of the roller system to block the sputtered atoms. However, some sputtered atoms will still pass through the gap between the baffle and the roller system and deposit on the roller, so that the film surface will be damaged when the film contacts the roller surface. Utility Model Content

[0005] The main purpose of the present application is to provide a coating device to solve the problem in the prior art that metal atoms are easily deposited on the roller system during the magnetron sputtering coating process, thereby causing damage to the film surface when the film contacts the roller surface.

[0006] According to one aspect of the present application, a coating device is provided, comprising: a transmission zone, the transmission zone is used to transmit a thin film; a coating zone, arranged on the side of the transmission zone, and a target material is arranged in the coating zone; a conveying roller, the conveying roller comprises a coating part and a conveying part, the coating part is located in the coating zone and opposite to the target material, and the conveying part is located in the transmission zone; a shielding component, located between the coating zone and the transmission zone, and located on the side of the conveying roller, the shielding component comprises a first shielding surface and a second shielding surface, the first shielding surface is opposite to the target material; the second shielding surface is located on the side of the first shielding surface away from the target material, and the second shielding surface is opposite to the surface of the conveying part.

[0007] Furthermore, the first shielding surface and / or the second shielding surface is a rough surface; the surface roughness of the rough surface is Ra, Ra>10μm.

[0008] Furthermore, the second shielding surface is an arc-shaped surface, and the axis center of the circumferential surface where the arc-shaped surface is located is located on the same straight line as the axis of the conveying roller.

[0009] Furthermore, the shielding assembly includes: a first shielding plate, arranged on the side of the conveying roller and opposite to the target material, and a first shielding surface is arranged on the first shielding plate; a second shielding plate, arranged on the side of the first shielding plate away from the target material, and a second shielding surface is arranged on the second shielding plate; there is a through gap between the first shielding plate and the surface of the conveying roller.

[0010] Further, the minimum distance between the second shielding surface and the surface of the conveying roller is greater than the height passing through the gap.

[0011] Furthermore, the coating device further comprises: a cooling component, which is arranged on a side of the second shielding plate away from the second shielding surface, and at least a part of the cooling component is in contact with the second shielding plate to cool the second shielding plate.

[0012] Furthermore, the cooling component includes: a medium circulation channel, which is arranged on the second shielding plate and is used for circulating cooling medium; a medium inlet and a medium outlet, and both ends of the medium circulation channel are respectively connected to the medium inlet and the medium outlet.

[0013] Further, the medium circulation channel extends along the circumferential direction of the second baffle plate; or, the medium circulation channel extends along a curved track.

[0014] Furthermore, mounting portions are respectively provided at both ends of the second shielding plate, and the second shielding plate is fixed to a predetermined position through the mounting portions.

[0015] Furthermore, there are two groups of shielding components, which are symmetrically arranged, and the axis of the conveying roller is located in the symmetry plane of the two groups of shielding components.

[0016] Compared with the prior art, the technical solution of this application has at least the following technical effects:

[0017] The coating equipment provided by the utility model is provided with a shielding component between the coating area and the transmission area, wherein the shielding component includes a first shielding surface and a second shielding surface, wherein the first shielding surface is opposite to the target material; the second shielding surface is located on the side of the first shielding surface away from the target material, and the second shielding surface is opposite to the surface of the transmission part. In this way, the first shielding surface is used to shield the atoms sputtered in the coating area, and the second shielding surface is used to prevent the atoms sputtered in the coating area from being deposited on the intermediate transition roller in the transmission area, thereby avoiding the problem of particles deposited on the surface of the conveying roller and in the transmission area during the transmission of the film, thereby damaging the film surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0019] Figure 1 It is a structural schematic diagram of an embodiment of the coating equipment disclosed in the utility model;

[0020] Figure 2 It is a side view of the coating device disclosed in the utility model;

[0021] Figure 3 It is a schematic structural diagram of the second shielding plate in the coating equipment disclosed in the utility model.

[0022] The above drawings include the following reference numerals:

[0023] 100, transmission area; 200, film; 300, coating area; 1, target material; 2, conveying roller; 20, coating part; 21, transmission part; 3, shielding assembly; 30, first shielding surface; 31, second shielding surface; 32, first shielding plate; 33, second shielding plate; 4, cooling component; 40, medium flow channel; 41, medium inlet; 42, medium outlet; 330, installation part; 5, through the gap. DETAILED DESCRIPTION

[0024] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0025] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0026] Unless otherwise specifically stated, the relative arrangement, numerical expressions and numerical values ​​of the parts and steps set forth in these embodiments do not limit the scope of the present application. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, methods and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but in appropriate cases, the technology, methods and equipment should be considered as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, and therefore, once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0027] As mentioned in the background technology, in the existing magnetron sputtering coating equipment, during the magnetron sputtering process, atoms detached from the target material will be deposited on the surface of the roller system, resulting in an uneven roller surface, and the film surface will be damaged when the film contacts the roller surface. Therefore, in the coating equipment provided by the present application, a shielding component 3 is arranged between the transmission area 100 and the coating area 300. Specifically, the shielding component 3 includes a first shielding surface 30 and a second shielding surface 31. The first shielding surface 30 is opposite to the target material 1 and the first shielding surface 30 is parallel to the axis of the conveying roller 2. A part of the atoms detached from the target material is blocked by the first shielding surface 30. During the production process, in order to ensure that the film can pass between the shielding component 3 and the conveying roller 2, there is a gap between the shielding component 3 and the conveying roller 2. In order to prevent some atoms from passing through the gap and depositing on the surface of the intermediate transition roller in the transmission area 100, a second shielding surface 31 is set. The second shielding surface 31 is set on the side of the first shielding surface 30 away from the target material 1. After some atoms pass through the gap, they are deposited on the second shielding surface 31 through the shielding effect of the second shielding surface 31, thereby avoiding the deposition of particles on the surface of the conveying roller 2 and the intermediate transition roller, thereby avoiding the problem of damage to the film surface when the film passes through the roller surface due to the uneven surface of the roller system.

[0028] See also Figures 1 to 3As shown, the present application provides a coating device, including: a transmission area 100, the transmission area 100 is used to transmit a thin film 200; a coating area 300, which is arranged on the side of the transmission area 100, and a target material 1 is arranged in the coating area 300; a conveying roller 2, the conveying roller 2 includes a coating part 20 and a conveying part 21, the coating part 20 is located in the coating area 300 and opposite to the target material 1, and the conveying part 21 is located in the transmission area 100; a shielding component 3, which is located between the coating area 300 and the transmission area 100 and is located on the side of the conveying roller 2, the shielding component 3 includes a first shielding surface 30 and a second shielding surface 31, the first shielding surface 30 is opposite to the target material 1; the second shielding surface 31 is located on the side of the first shielding surface 30 away from the target material 1, and the second shielding surface 31 is opposite to the surface of the conveying part 21.

[0029] According to the coating equipment provided in the present application, it includes a transmission area 100, a coating area 300 and a conveying roller 2, the transmission area 100 is used to transmit the thin film 200, and the coating area 300 is used to coat the thin film, wherein the conveying roller 2 includes a coating part 20 and a conveying part 21, the coating part 20 is located in the coating area 300 and opposite to the target material 1, and the conveying part 21 is located in the transmission area 100; a shielding component 3 is arranged between the coating area 300 and the transmission area 100, the shielding component 3 includes a first shielding surface 30 and a second shielding surface 31, the first shielding surface 30 is opposite to the target material 1; the second shielding surface 31 is located on the side of the first shielding surface 30 away from the target material 1, and the second shielding surface 31 is opposite to the surface of the conveying part 21. In this way, the first shielding surface 30 is used to shield the sputtered atoms in the coating area 300, and the second shielding surface 31 is used to prevent the sputtered atoms in the coating area 300 from being deposited on the intermediate transition roller in the transmission area 100, thereby avoiding the problem of particle deposition on the surface of the conveying roller 2 and the transmission area 100 during the transmission of the thin film and causing damage to the film surface.

[0030] Specifically, the first shielding surface 30 and / or the second shielding surface 31 are rough surfaces; the surface roughness of the rough surface is Ra, Ra>10μm. Preferably, a concave-convex structure is provided on the first shielding surface 30 and / or the second shielding surface 31, that is, a plurality of groove structures or grid-like protrusion structures are provided to form a rough surface, which increases the friction between the first shielding surface 30 and the second shielding surface 31 and the particles, and at the same time, by limiting the surface roughness of the rough surface, it is easier for metal particles to adhere to the first shielding surface 30 and the second shielding surface 31. If the surface roughness is too small, the surface friction of the first shielding surface 30 and the second shielding surface 31 is reduced, and the metal particles are easy to slide on the first shielding surface 30 and the second shielding surface 31, thereby sputtering onto the surface of the conveying roller 2 or the surface of the intermediate transition roller system in the transmission area 100.

[0031] In the present invention, the second shielding surface 31 is an arc-shaped surface, and the axis of the circumferential surface of the arc-shaped surface is located on the same straight line as the axis of the conveying roller 2. In this way, the curvature of the second shielding surface 31 is adapted to the curvature of the surface of the conveying roller 2, making the overall structure more compact and making it easier for metal particles to adhere to the second shielding surface 31.

[0032] In the specific implementation process, the shielding assembly 3 includes: a first shielding plate 32, which is arranged on the side of the conveying roller 2 and opposite to the target material 1, and the first shielding surface 30 is arranged on the first shielding plate 32; a second shielding plate 33, which is arranged on the side of the first shielding plate 32 away from the target material 1, and the second shielding surface 31 is arranged on the second shielding plate 33. Preferably, the first shielding plate 32 and the second shielding plate 33 are made of stainless steel or aluminum alloy, and the coating area 300 and the transmission area 100 are separated by the first shielding plate 32, and the rollers and tension rollers in the transmission area 100 are protected by the second shielding plate 33.

[0033] Furthermore, in order to prevent the second baffle plate 33 from being overheated and the plate body from being deformed due to the overhigh atomic sputtering temperature, the coating equipment also includes: a cooling component 4, which is arranged on the side of the second baffle plate 33 away from the second shielding surface 31, and at least a portion of the cooling component 4 is in contact with the second baffle plate 33 to cool the second baffle plate 33.

[0034] In a specific implementation, the cooling component 4 includes: a medium circulation channel 40, which is arranged on the second shielding plate 33, and the medium circulation channel 40 is used to circulate the cooling medium; a medium inlet 41 and a medium outlet 42, and the two ends of the medium circulation channel 40 are respectively connected to the medium inlet 41 and the medium outlet 42. Preferably, the cooling component 4 is a cooling pipe, which is arranged on the side of the second shielding plate 33 away from the second shielding surface 31, and the medium circulation channel 40 is arranged in the cooling pipe. The cooling medium is water, and the medium inlet 41 and the medium outlet 42 are respectively connected to the cooling water circulation mechanism in the coating equipment, so as to cool the second shielding plate 33.

[0035] Preferably, the medium circulation channel 40 extends along the circumferential direction of the second shielding plate 33; or, the medium circulation channel 40 extends along a curved track. When the medium circulation channel 40 is extended along the curved track, the medium circulation channel 40 covers the entire surface of the second shielding plate 33, so that the second shielding plate 33 can be cooled uniformly and quickly.

[0036] In order to fix the second shielding plate 33, mounting parts 330 are respectively provided at both ends of the second shielding plate 33, and the second shielding plate 33 is fixed to a predetermined position through the mounting parts 330. The mounting parts 330 are preferably mounting holes, which are locked on the mounting frames on both sides of the conveying roller 2 by mounting screws.

[0037] In the specific implementation process, there is a through gap 5 between the first shielding plate 32 and the surface of the conveying roller 2; the minimum distance between the second shielding surface 31 and the surface of the conveying roller 2 is greater than the height of the through gap 5. This can avoid the problem that the metal particles directly hit the side of the second shielding plate 33 after passing through the through gap 5 and cannot be deposited on the second shielding surface 31. The minimum distance between the second shielding surface 31 and the surface of the conveying roller 2 is greater than the height of the through gap 5, so that the metal particles directly adhere to the second shielding surface 31 after passing through the through gap 5.

[0038] Preferably, there are two groups of shielding components 3 , which are symmetrically arranged, and the axis of the conveying roller 2 is located in the symmetry plane of the two groups of shielding components 3 .

[0039] In actual application, the coating device includes a coating chamber, which includes a transmission area 100 and two coating areas 300 located on both sides of the transmission area 100. A conveying roller 2 is arranged at the junction of the transmission area 100 and the coating area 300. The coating portion 20 of the conveying roller 2 is located in the coating area 300, and the conveying portion 21 is located in the transmission area 100. The film passes through the coating area 300 on the conveying roller 2 for coating. First shielding plates 32 are respectively arranged on both sides of the conveying roller 2 to separate the coating area 300 and the transmission area 100. 0 is separated to prevent atoms splashed from the coating area 300 from entering the transmission area 100. In order to allow the film to pass through, there is a certain gap between the bottom surface of the first shielding plate 32 and the conveying roller 2. On the side of the first shielding plate 32 facing the transmission area 100, a second shielding plate 33 is provided. Part of the particles sputtered from the coating area 300 are plated on the surface of the film, and the other part is deposited on the first shielding surface 30. The particles passing through the gap 5 will adhere to the second shielding surface 31 and will not contact other winding roller systems. Among them, a winding roller system is also provided in the transmission area 100, including a winding and unwinding roller, a passing roller, a tension roller, a flattening roller, etc. for unwinding or winding.

[0040] From the above description, it can be seen that the above embodiments of the present application achieve the following technical effects:

[0041] According to the coating equipment provided in the present application, it includes a transmission area 100, a coating area 300 and a conveying roller 2, the transmission area 100 is used to transmit the thin film 200, and the coating area 300 is used to coat the thin film, wherein the conveying roller 2 includes a coating part 20 and a conveying part 21, the coating part 20 is located in the coating area 300 and opposite to the target material 1, and the conveying part 21 is located in the transmission area 100; a shielding component 3 is arranged between the coating area 300 and the transmission area 100, the shielding component 3 includes a first shielding surface 30 and a second shielding surface 31, the first shielding surface 30 is opposite to the target material 1; the second shielding surface 31 is located on the side of the first shielding surface 30 away from the target material 1, and the second shielding surface 31 is opposite to the surface of the conveying part 21. In this way, the first shielding surface 30 is used to shield the sputtered atoms in the coating area 300, and the second shielding surface 31 is used to prevent the sputtered atoms in the coating area 300 from being deposited on the intermediate transition roller in the transmission area 100, thereby avoiding the problem of particle deposition on the surface of the conveying roller 2 and the transmission area 100 during the transmission of the thin film and causing damage to the film surface.

[0042] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0043] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of this application.

[0044] The above are only preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A coating device, characterized in that: include: A transmission area (100), wherein the transmission area (100) is used to transmit the film (200); A coating area (300) is arranged on the side of the transmission area (100), and a target material (1) is arranged in the coating area (300); A conveying roller (2), the conveying roller (2) comprising a coating portion (20) and a conveying portion (21), the coating portion (20) being located in the coating area (300) and opposite to the target material (1), and the conveying portion (21) being located in the transmission area (100); A shielding component (3) is located between the coating area (300) and the transmission area (100), and is located on the side of the conveying roller (2), the shielding component (3) comprising a first shielding surface (30) and a second shielding surface (31), the first shielding surface (30) being opposite to the target material (1); The second shielding surface (31) is located on a side of the first shielding surface (30) away from the target material (1), and the second shielding surface (31) is opposite to a surface of the conveying portion (21).

2. The coating device according to claim 1, characterized in that: The first shielding surface (30) and / or the second shielding surface (31) are rough surfaces; The surface roughness of the rough surface is Ra, Ra>10 μm.

3. The coating device according to claim 1, characterized in that: The second shielding surface (31) is an arc-shaped surface, and the axis center of the circumferential surface where the arc-shaped surface is located is located on the same straight line as the axis of the conveying roller (2).

4. The coating device according to any one of claims 1 to 3, characterized in that: The shielding component (3) comprises: A first shielding plate (32) is arranged on the side of the conveying roller (2) and opposite to the target material (1), and the first shielding surface (30) is arranged on the first shielding plate (32); A second shielding plate (33) is arranged on a side of the first shielding plate (32) away from the target material (1), and the second shielding surface (31) is arranged on the second shielding plate (33); There is a through gap (5) between the first shielding plate (32) and the surface of the conveying roller (2).

5. The coating device according to claim 4, characterized in that: The minimum distance between the second shielding surface (31) and the surface of the conveying roller (2) is greater than the height of the passing gap (5).

6. The coating device according to claim 4, characterized in that: The coating equipment also includes: A cooling component (4) is arranged on a side of the second shielding plate (33) away from the second shielding surface (31), and at least a portion of the cooling component (4) is in contact with the second shielding plate (33) to cool the second shielding plate (33).

7. The coating device according to claim 6, characterized in that: The cooling component (4) comprises: A medium circulation channel (40) is arranged on the second shielding plate (33), and the medium circulation channel (40) is used for circulating a cooling medium; A medium inlet (41) and a medium outlet (42), and two ends of the medium circulation channel (40) are respectively connected to the medium inlet (41) and the medium outlet (42).

8. The coating device according to claim 7, characterized in that: The medium circulation channel (40) extends along the circumferential direction of the second shielding plate (33); or, The medium circulation channel (40) extends along a curved track.

9. The coating device according to claim 4, characterized in that: Both ends of the second shielding plate (33) are respectively provided with mounting portions (330), and the second shielding plate (33) is fixed to a predetermined position via the mounting portions (330).

10. The coating device according to any one of claims 1 to 3 or 5 to 9, characterized in that: The shielding components (3) are divided into two groups, and the two groups of shielding components (3) are symmetrically arranged. The axes of the conveying rollers (2) are located within the symmetry planes of the two groups of shielding components (3).

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