Temperature measurement adjusting device

Abstract

The utility model relates to the technical field of semiconductor or photovoltaic processing, in particular to a temperature measurement adjusting device. The problems of high operation difficulty, poor accuracy and inconvenience in operation when the position of the cantilever is adjusted by integrally moving the lifting mechanism and then the position of the thermocouple is adjusted in the prior art are solved. The adjusting device comprises a cantilever, a first adjusting mechanism, a lifting mechanism and a second adjusting mechanism. The position and the angle of the temperature sensor can be adjusted through the first adjusting mechanism, the relative position of the cantilever and the movable part can be adjusted in the horizontal direction and / or the vertical direction through the second adjusting mechanism, the adjusting requirement can be met without integrally moving the lifting mechanism, and the lifting mechanism has the advantages of being easy to operate and high in adjusting accuracy.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor or photovoltaic processing technology, and in particular to a temperature measuring and regulating device. Background Art

[0002] In semiconductor or photovoltaic processing, the constant temperature zone of the furnace tube of the vertical furnace needs to be measured and verified by thermocouples. The thermocouple is connected to the lifting mechanism through a cantilever, and the lifting mechanism is used to drive the thermocouple to rise and fall in the constant temperature zone of the furnace tube, so as to measure the temperature at different positions in the constant temperature zone.

[0003] During the lifting process, if the concentricity of the thermocouple and the furnace tube deviates, it is easy to cause the thermocouple and the furnace tube to be scratched and broken, so the position and angle of the thermocouple need to be adjusted. In the related art, the cantilever position is often adjusted by moving the lifting mechanism as a whole, and then the position of the thermocouple is adjusted. The operation is difficult and the accuracy is poor. Utility Model Content

[0004] In view of this, an embodiment of the present disclosure provides a temperature measurement and adjustment device, which solves the problem in the related art that the position of the cantilever is adjusted by moving the lifting mechanism as a whole, and then the position of the thermocouple is adjusted, which is difficult to operate, has poor accuracy, and is inconvenient to operate.

[0005] In a first aspect, an embodiment of the present disclosure provides an adjustment device configured to adjust the posture of a temperature sensor; wherein the adjustment device includes: a cantilever; a first adjustment mechanism connecting the temperature sensor and the cantilever, the first adjustment mechanism being configured to enable the temperature sensor to be positionally adjusted and angle-adjusted relative to the cantilever; a lifting mechanism including a movable part and a lifting drive assembly connected to each other, the movable part being lifted and lowered under the drive of the lifting drive assembly; a second adjustment mechanism connecting the cantilever and the movable part, the second adjustment mechanism being configured to be able to adjust the relative position of the cantilever and the movable part in the horizontal direction and / or the vertical direction.

[0006] In some embodiments, the second adjustment mechanism includes: a first fixing clamp, the first fixing clamp includes a first body, a first bolt and a second bolt, the first body has a first component, a second component, a third component and a fourth component, the first component and the second component are arranged at intervals, and a first through hole is provided between the first component and the second component, the third component and the fourth component are arranged at intervals, and a second through hole is provided between the third component and the fourth component, the first bolt is slidably connected and fitted with the first component, and is threadedly fitted with the second component, the second bolt is slidably connected and fitted with the third component, and is threadedly fitted with the fourth component; a support member, vertically arranged, passed through the first through hole, and connected to the movable member; wherein the cantilever is passed through the second through hole.

[0007] In some embodiments, the second adjustment mechanism also includes: a second fixing clamp, the second fixing clamp includes a second body and a third bolt, the second body is fixedly connected to the movable part, the second body has a fifth component and a sixth component, the fifth component and the sixth component are arranged at intervals, and a third through hole is provided between the fifth component and the sixth component, the third bolt is slidably connected with the fifth component and threadedly connected with the sixth component; wherein the support member is passed through the third through hole.

[0008] In some embodiments, a first scale is provided on the cantilever, and the first scale indicates the relative position of the cantilever and the first fixing clamp; and / or, a second scale is provided on the support member, and the second scale indicates the relative position of the first fixing clamp or the second fixing clamp and the support member.

[0009] In some embodiments, the lifting mechanism further includes: a frame; a lifting rail, vertically arranged and fixedly connected to the frame; a lifting slider, slidably connected to the lifting rail and connected to the movable part and the lifting drive assembly.

[0010] In some embodiments, the lifting drive assembly includes: a rotation drive source fixedly connected to the frame; and a transmission structure located on the frame and connected to the rotation drive source and the lifting slider, respectively.

[0011] In some embodiments, the lifting mechanism further includes: an electric control box fixedly connected to the frame; and a support leg assembly disposed at the bottom of the electric control box; wherein the rotary drive source is located inside the electric control box.

[0012] In some embodiments, the cantilever is detachably connected to the second adjustment mechanism; the adjustment device also includes: a storage assembly fixedly connected to at least one of the electrical control box and the rack, and the storage assembly is configured to be able to store the cantilever.

[0013] In some embodiments, the storage assembly includes: a first fixed plate; a second fixed plate, which is vertically fixed to the first fixed plate; a third fixed plate, which is arranged on the upper side of the electric control box and is fixedly connected to the bottom end of the first fixed plate and the bottom end of the second fixed plate, respectively; a fixed frame, which is located above the third fixed plate and is fixedly connected to the first fixed plate and the second fixed plate, respectively; wherein at least one of the first fixed plate and the second fixed plate is fixedly connected to the frame; wherein, when the storage assembly stores the cantilever, the fixed frame is sleeved on the outside of the cantilever, and the third fixed plate is supported under the cantilever.

[0014] In some embodiments, the lifting mechanism also includes: a detection member, which is arranged on the upper side of the electric control box or on the third fixed plate, and the detection member is used to detect the horizontality of the upper side of the electric control box or the third fixed plate to determine the level state of the multiple legs in the leg assembly.

[0015] In some embodiments, the lifting mechanism further includes: a detection unit, which is arranged on the frame and is used to collect position information of the lifting slider; a control unit, which is respectively communicated with the detection unit and the lifting drive assembly, and the control unit is configured to control the operation of the lifting drive assembly based on the position information of the lifting slider.

[0016] In some embodiments, the first adjustment mechanism includes: a third fixing clamp connected to the cantilever; a first guide rail pair including a first slide rail and a first slider, the first slide rail is fixedly connected to the third fixing clamp, and the first slider is slidably connected to the first slide rail; a second guide rail pair including a second slide rail and a second slider, the extension direction of the second slide rail intersects with the extension direction of the first slide rail, the second slide rail is fixedly connected to the first slider, and the second slider is slidably connected to the second slide rail; a rotating assembly includes a fixing ring, a support seat, a fastener, a universal bearing and a bearing seat, the fixing ring is configured to be fixedly connected to the temperature sensor and to the support seat, the support seat is connected to the universal bearing via the fastener, the universal bearing is connected to the bearing seat, and the bearing seat is fixedly connected to the second slider.

[0017] In some embodiments, the third fixing clamp includes: a third body, the third body is fixedly connected to the first slide rail, the third body has a seventh component and an eighth component, the seventh component and the eighth component are arranged at intervals, and a fourth through hole is provided between the seventh component and the eighth component; a fourth bolt, which is slidably connected to the seventh component and threadedly engaged with the eighth component; wherein the cantilever is passed through the fourth through hole.

[0018] A temperature measuring and adjusting device provided by an embodiment of the present disclosure can adjust the position and angle of a temperature sensor through a first adjusting mechanism, and can adjust the relative position of a cantilever and a movable part in a horizontal direction and / or a vertical direction through a second adjusting mechanism, thereby avoiding the problem of scratching, breaking and damage of the thermocouple and the furnace tube caused by deviation in the concentricity of the thermocouple and the furnace tube, thereby improving the safety of measurement. Compared with the related art in which the position of the cantilever is adjusted by means of an overall moving lifting mechanism to further adjust the position of the thermocouple, the present disclosure can meet the adjustment requirements without the need for an overall moving lifting mechanism, and has the advantages of easy operation and high adjustment accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 Shown is a schematic diagram of the overall structure of an adjustment device provided in one embodiment of the present disclosure.

[0020] Figure 2 Shown is an exploded view of an adjustment device provided in one embodiment of the present disclosure.

[0021] Figure 3 Shown is a front view of the upper portion of the adjustment device provided in one embodiment of the present disclosure.

[0022] Figure 4 Shown is a schematic structural diagram of a first fixing clamp in an adjustment device provided in an embodiment of the present disclosure.

[0023] Figure 5 Shown is a schematic structural diagram of a second fixing clamp in an adjustment device provided in an embodiment of the present disclosure.

[0024] Figure 6 Shown Figure 2 Enlarged view of point A in .

[0025] Figure 7 Shown is an exploded view of the first adjustment mechanism in the adjustment device provided in one embodiment of the present disclosure.

[0026] Figure 8 Shown is a schematic structural diagram of a third fixing clamp in an adjustment device provided in an embodiment of the present disclosure.

[0027] Reference numerals:

[0028] 100, temperature sensor; 101, temperature measuring section; 102, non-temperature measuring section; 103, connecting wire;

[0029] 200, cantilever; 201, first scale;

[0030] 300, first adjustment mechanism; 310, third fixing clip; 311, third body; 312, fourth bolt; 313, seventh component; 314, eighth component; 315, fourth through hole; 316, fourth gap; 320, first guide rail pair; 330, second guide rail pair; 340, rotating assembly; 341, fixing ring; 342, supporting seat; 343, fastener; 344, universal bearing; 345, bearing seat;

[0031] 400, lifting mechanism; 401, frame; 402, lifting rail; 403, lifting slider; 404, rotation drive source; 405, transmission structure; 406, electric control box; 407, support leg assembly; 408, storage assembly; 409, first fixed plate; 410, second fixed plate; 411, third fixed plate; 412, fixed frame; 413, induction sheet; 414, first slot-type photoelectric sensor; 415, second slot-type photoelectric sensor; 416, third slot-type photoelectric sensor; 417, movable part; 418, detection part;

[0032] 500, second adjustment mechanism; 510, first fixing clip; 511, first body; 512, first bolt; 513, second bolt; 514, first component; 515, second component; 516, third component; 517, fourth component; 518, first through hole; 519, first gap; 520, second through hole; 521, second gap; 530, support member; 540, second fixing clip; 541, second body; 543, fifth component; 544, sixth component; 545, third through hole; 546, third gap. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0034] In semiconductor or photovoltaic processing, the constant temperature zone of the furnace tube of the vertical furnace needs to be measured and verified by thermocouples. The thermocouple is connected to the lifting mechanism through a cantilever, and the lifting mechanism is used to drive the thermocouple to rise and fall in the constant temperature zone of the furnace tube, so as to measure the temperature at different positions in the constant temperature zone.

[0035] During the lifting process, if the concentricity of the thermocouple and the furnace tube deviates, it is easy to cause the thermocouple and the furnace tube to be scratched and broken, so the position and angle of the thermocouple need to be adjusted. In the related art, the cantilever position is often adjusted by moving the lifting mechanism as a whole, and then the position of the thermocouple is adjusted. The operation is difficult and the accuracy is poor.

[0036] In response to the above problems, the present invention provides a temperature measuring and adjusting device, which can adjust the position and angle of the temperature sensor through a first adjusting mechanism, and can adjust the relative position of the cantilever and the movable part in the horizontal direction and / or vertical direction through a second adjusting mechanism, thereby avoiding the problem of concentricity deviation between the thermocouple and the furnace tube causing scratching and breakage of the thermocouple and the furnace tube, thereby improving the safety of measurement. Compared with the form of adjusting the cantilever position and then adjusting the position of the thermocouple by means of an overall moving lifting mechanism in the related art, the present invention does not require an overall moving lifting mechanism to meet the adjustment requirements, and has the advantages of easy operation and high adjustment accuracy.

[0037] Combine the following Figures 1 to 8 The temperature measuring and adjusting device of this embodiment is described.

[0038] like Figures 1 to 3 As shown, the adjustment device of this embodiment is configured to adjust the posture of the temperature sensor 100. The temperature sensor 100 may be a thermocouple or a thermistor. The temperature sensor 100 includes a temperature measuring section 101, a non-temperature measuring section 102 and a connecting line 103. The adjustment device is connected to the non-temperature measuring section 102, and adjusts the position and angle of the temperature sensor 100 through the non-temperature measuring section 102, so as to realize the insertion of the temperature measuring section 101 into the constant temperature zone of the furnace tube for mobile measurement.

[0039] The adjusting device includes a cantilever 200, a first adjusting mechanism 300, a lifting mechanism 400 and a second adjusting mechanism 500. The first adjusting mechanism 300 connects the temperature sensor 100 and the cantilever 200, and the first adjusting mechanism 300 is configured to enable the temperature sensor 100 to be adjusted in position and angle relative to the cantilever 200. The lifting mechanism 400 includes a movable part 417 and a lifting drive assembly connected to each other, and the movable part 417 is lifted and lowered under the drive of the lifting drive assembly. The second adjusting mechanism 500 connects the cantilever 200 and the movable part 417, and the second adjusting mechanism 500 is configured to be able to adjust the relative position of the cantilever 200 and the movable part 417 in the horizontal direction and / or the vertical direction.

[0040] In this embodiment, the temperature sensor 100 can be adjusted in relative position and angle with the cantilever 200 by the first adjustment mechanism 300, so that the temperature sensor 100 can avoid contact with the furnace tube to generate friction or collision during the lifting and lowering process in the furnace tube. In addition, the cantilever 200 and the movable part 417 can be adjusted in relative position in the horizontal direction and / or vertical direction by the second adjustment mechanism 500 to meet the application requirements in different scenarios. Therefore, during the adjustment process, it is not necessary to move the lifting mechanism 400 as a whole, which effectively reduces the difficulty of operation, and the position of the temperature sensor 100 can be adjusted more accurately than the overall movement, and the adjustment accuracy is higher.

[0041] In some embodiments, the cantilever 200 is a rod-shaped structure.

[0042] Combination Figure 2 and Figure 4 In some embodiments, the second adjustment mechanism 500 includes a support member 530 and a first fixing clamp 510. The first fixing clamp 510 includes a first body 511, a first bolt 512 and a second bolt 513. The first body 511 includes a first component 514, a second component 515, a third component 516 and a fourth component 517. The first component 514 and the second component 515 are arranged at intervals, and a first through hole 518 is provided between the first component 514 and the second component 515. The third component 516 and the fourth component 517 are arranged at intervals, and a second through hole 520 is provided between the third component 516 and the fourth component 517. The first bolt 512 is slidably connected with the first component 514 and is threadedly engaged with the second component 515. The second bolt 513 is slidably connected with the third component 516 and is threadedly engaged with the fourth component 517. The support member 530 is vertically disposed, penetrates the first through hole 518 , and is connected to the movable member 417 . The cantilever 200 penetrates the second through hole 520 .

[0043] Optionally, the support member 530 is a rod-shaped structure arranged vertically, and the cantilever 200 is a rod-shaped structure arranged horizontally.

[0044] The first body 511 is a rectangular parallelepiped or a block structure similar to a rectangular parallelepiped. The first component 514 and the second component 515 are located at one end of the first body 511 , and the third component 516 and the fourth component 517 are located at the other end of the first body 511 .

[0045] The first component 514 and the second component 515 are symmetrical about a vertical plane passing through the center line of the first body 511. A first through hole 518 and a first gap 519 are provided between the first component 514 and the second component 515. The first through hole 518 extends from the upper side of the first body 511 to the lower side of the first body 511. The shape of the first through hole 518 is adapted to the shape of the support member 530. For example, if the cross section of the support member 530 is rectangular, the cross section of the first through hole 518 is rectangular. The cross section size of the first through hole 518 is equal to the cross section size of the support member 530, or the cross section size of the first through hole 518 is slightly larger than the cross section size of the support member 530. The first gap 519 extends from the upper side of the first body 511 to the lower side of the first body 511. The width of the first gap 519 is smaller than the width of the first through hole 518 and smaller than the width of the support member 530, so that when the support member 530 is plugged into the first through hole 518, the support member 530 is prevented from slipping out of the first gap 519. By providing the first gap 519, the first fixing clamp 510 can be deformed to move the first component 514 and the second component 515 closer to or farther from each other, thereby changing the size of the first through hole 518 to achieve clamping or loosening of the support member 530.

[0046] The first component 514 is provided with a first through hole, and the second component 515 is provided with a first threaded hole, and the first through hole is coaxial with the first threaded hole. The first bolt 512 is passed through the first through hole and threadedly matched with the first threaded hole. When the first bolt 512 is tightened, the first component 514 and the second component 515 can be brought close to each other, clamping the support member 530, so as to achieve the fixing of the relative position of the first fixing clamp 510 and the support member 530; when the first bolt 512 is loosened, the first component 514 and the second component 515 are reset, and the support member 530 can be loosened, so that the first fixing clamp 510 can slide relative to the support member 530, and then the position of the cantilever 200 can be adjusted vertically.

[0047] The third component 516 and the fourth component 517 are symmetrical about a horizontal plane passing through the center line of the first body 511. A second through hole 520 and a second gap 521 are provided between the third component 516 and the fourth component 517. The extension direction of the second through hole 520 is perpendicular to the extension direction of the first through hole 518. The shape of the second through hole 520 is adapted to the shape of the cantilever 200. For example, if the cross section of the cantilever 200 is rectangular, the cross section of the second through hole 520 is rectangular. The cross-sectional size of the second through hole 520 is equal to the cross-sectional size of the cantilever 200, or the cross-sectional size of the second through hole 520 is slightly larger than the cross-sectional size of the cantilever 200. The width of the second gap 521 is smaller than the width of the second through hole 520 and smaller than the width of the cantilever 200, so as to prevent the cantilever 200 from slipping out of the second gap 521 when the cantilever 200 is plugged into the second through hole 520. By providing the second gap 521 , the first fixing clamp 510 can be deformed to move the third component 516 and the fourth component 517 closer to or farther from each other, thereby changing the size of the second through hole 520 to achieve clamping or loosening of the cantilever 200 .

[0048] The third component 516 is provided with a second through hole, and the fourth component 517 is provided with a second threaded hole, and the second through hole is coaxial with the second threaded hole. The second bolt 513 is passed through the second through hole and threadedly engaged with the second threaded hole. When the second bolt 513 is tightened, the third component 516 and the fourth component 517 can be brought close to each other, clamping the cantilever 200, and fixing the relative position of the first fixing clamp 510 and the cantilever 200; when the second bolt 513 is loosened, the third component 516 and the fourth component 517 are reset, and the cantilever 200 can be loosened, so that the first fixing clamp 510 can slide relative to the cantilever 200, and then the position of the cantilever 200 can be adjusted horizontally.

[0049] Optionally, a plurality of first bolts 512 and / or second bolts 513 are provided to increase stability.

[0050] In this embodiment, the cantilever 200 and the support member 530 are connected by the first fixing clamp 510, which not only enables the relative position adjustment between the cantilever 200 and the movable member 417 along the vertical direction or horizontal direction, but also facilitates the disassembly of the cantilever 200, thereby reducing the space occupied by the adjustment device when moving or storing.

[0051] Combination Figure 2 and Figure 5In some embodiments, the second adjustment mechanism 500 also includes a second fixing clamp 540, the second fixing clamp 540 includes a second body 541 and a third bolt, the second body 541 is fixedly connected to the movable part 417, the second body 541 has a fifth component 543 and a sixth component 544, the fifth component 543 and the sixth component 544 are arranged at intervals, and a third through hole 545 is provided between the fifth component 543 and the sixth component 544, the third bolt is slidably connected with the fifth component 543, and is threadedly connected with the sixth component 544; wherein, the support member 530 is passed through the third through hole 545.

[0052] The fifth component part 543 and the sixth component part 544 are symmetrical about a vertical plane passing through the center line of the second body 541. A third through hole 545 and a third gap 546 are provided between the fifth component part 543 and the sixth component part 544. The shape of the third through hole 545 matches the shape of the support member 530. For example, if the cross section of the support member 530 is rectangular, the cross section of the third through hole 545 is rectangular. The cross section size of the third through hole 545 is equal to the cross section size of the support member 530, or the cross section size of the third through hole 545 is slightly larger than the cross section size of the support member 530. The width of the third gap 546 is smaller than the width of the third through hole 545 and smaller than the width of the support member 530, so that when the support member 530 is plugged into the third through hole 545, the support member 530 is prevented from sliding out of the third gap 546. By providing the third gap 546 , the second fixing clamp 540 can be deformed to move the fifth component 543 and the sixth component 544 closer to or farther from each other, thereby changing the size of the third through hole 545 to achieve clamping or loosening of the support member 530 .

[0053] The fifth component 543 is provided with a third through hole, and the sixth component 544 is provided with a third threaded hole, and the third through hole is coaxial with the third threaded hole. The third bolt is passed through the third through hole and threadedly matched with the third threaded hole. When the third bolt is tightened, the fifth component 543 and the sixth component 544 can be brought close to each other, clamping the support member 530, so as to achieve the fixation of the relative position of the second fixing clamp 540 and the support member 530; when the third bolt is loosened, the fifth component 543 and the sixth component 544 are reset, and the support member 530 can be loosened, so that the second fixing clamp 540 can slide relative to the support member 530, so as to adjust the relative position of the support member 530 and the movable member 417 in the vertical direction, and then adjust the relative position of the cantilever 200 and the movable member 417 in the vertical direction.

[0054] In this embodiment, the movable member 417 and the support member 530 are connected by the second fixing clip 540, and the relative position of the cantilever 200 and the movable member 417 can be adjusted in the vertical direction by adjusting the relative position of the support member 530 and the movable member 417, thereby increasing the operation mode of vertical adjustment of the cantilever 200 and being applicable to more usage scenarios. In addition, when the adjustment device needs to be moved or stored, the space occupied by the adjustment device can be reduced by lowering the height of the support member 530.

[0055] Optionally, the second fixing clip 540 is detachably connected to the movable member 417. For example, the movable member 417 is a plate-shaped structure, the movable member 417 is provided with a threaded hole, the second body 541 is provided with through holes at positions on both sides of the fifth component 543 and the second component 515, and the second fixing clip 540 is connected to the movable member 417 by bolts that penetrate through the through holes on both sides of the second body 541 and are threadedly matched with the threaded holes. Of course, in some other optional methods, the second fixing clip 540 and the movable member 417 can also be detachably connected by, for example, a snap connection.

[0056] Optionally, a first scale 201 is provided on the cantilever 200, and the first scale 201 indicates the relative position of the cantilever 200 and the first fixing clip 510. The first scale 201 is provided on a side wall of the cantilever 200, and a plurality of scale lines of the first scale 201 are arranged along the length direction of the cantilever 200. The relative position of the cantilever 200 and the first fixing clip 510 can be determined by the correspondence between the first fixing clip 510 and the plurality of scale lines on the first scale 201.

[0057] Optionally, the support member 530 is provided with a second scale, and the second scale indicates the relative position of the first fixing clip 510 or the second fixing clip 540 and the support member 530. The multiple scale lines of the second scale are arranged along the length direction of the support member 530, and the relative position of the support member 530 and the first fixing clip 510 can be determined by the correspondence between the first fixing clip 510 and the multiple scale lines on the second scale, and the relative position of the support member 530 and the first fixing clip 510 can be determined by the correspondence between the second fixing clip 540 and the multiple scale lines on the second scale.

[0058] The first scale line 201 or the second scale line can be used to easily determine and record the positions of the cantilever 200 and the support member 530, thereby providing an accurate position for subsequent temperature measurement and avoiding repeated debugging.

[0059] Combination Figure 2 and Figure 3In some embodiments, the lifting mechanism 400 further includes a frame 401, a lifting rail 402 and a lifting slider 403. The lifting rail 402 is vertically arranged and fixedly connected to the frame 401. The lifting slider 403 is slidably connected to the lifting rail 402 and is connected to the movable part 417 and the lifting drive assembly.

[0060] Optionally, the rack 401 is arranged vertically, the lifting rail 402 is arranged on a side wall of the rack 401, two lifting rails 402 are arranged, the two lifting rails 402 are parallel to each other, and the lifting slider 403 is slidably connected to the two lifting rails 402 at the same time.

[0061] In this embodiment, the lifting slider 403 can slide along the lifting rail 402 under the drive of the lifting drive assembly, thereby driving the movable part 417 to move up and down. Through the frame 401, the lifting rail 402 and the lifting slider 403, the lifting of the movable part 417 can be made more stable, the lifting resistance of the movable part 417 can be reduced, and it is beneficial to improve the accuracy.

[0062] In some embodiments, the lifting drive assembly includes a rotary drive source 404 and a transmission structure 405. The rotary drive source 404 is fixedly connected to the frame 401, and the frame 401 is used to support and fix the rotary drive source 404 to prevent the rotary drive source 404 from shaking. The fixing method between the rotary drive source 404 and the frame 401 can be bolt connection, welding or clamping, etc. The rotary drive source 404 can be a rotary motor, a hydraulic motor or a vane pneumatic motor, etc. Preferably, the rotary drive source 404 is a rotary motor. The transmission structure 405 is located on the frame 401, and is respectively connected to the rotary drive source 404 and the lifting slider 403. The transmission structure 405 can convert the rotary motion of the rotary drive source 404 into linear motion, thereby driving the movable part 417 to rise and fall.

[0063] In an optional manner, the transmission structure 405 includes a first synchronous wheel, a second synchronous wheel and a synchronous belt, the first synchronous wheel and the second synchronous wheel are respectively located at the two ends of the frame 401 in the vertical direction, and the synchronous belt is simultaneously wound around the outside of the first synchronous wheel and the second synchronous wheel, and one of the first synchronous wheel and the second synchronous wheel is connected to the output end of the rotation driving source 404, so that it rotates under the drive of the rotation driving source 404, so that the synchronous belt performs circumferential rotation. The synchronous belt is connected to the lifting slider 403, and when the synchronous belt rotates, it can drive the lifting slider 403 to move, and then drive the movable part 417 to rise and fall.

[0064] Optionally, the output end of the rotation driving source 404 is connected to the first synchronous wheel or the second synchronous wheel via a structure such as a gear set or a coupling.

[0065] In another optional manner, the transmission structure 405 includes a screw and a nut, wherein the screw is arranged vertically, the screw is rotatably connected to the frame 401 through a bearing, and the screw is connected to the output end of the rotary drive source 404 through a structure such as a gear set, a synchronous belt, a chain or a coupling. The nut is sleeved on the outside of the screw and matched with the screw thread, and the nut is fixedly connected to the lifting slider 403. When the rotary drive source 404 is running, it can drive the screw to rotate circumferentially, so as to drive the lifting slider 403 to slide along the lifting slide rail 402 through the nut, thereby driving the movable part 417 to rise and fall.

[0066] In some embodiments, the lifting mechanism 400 further includes an electric control box 406 and a support leg assembly 407 .

[0067] The electric control box 406 is disposed at the lower side of the frame 401 and is fixedly connected to the frame 401 . The electric control box 406 can be used to shield and protect components such as circuit boards and controllers to prevent them from being damaged.

[0068] The foot assembly 407 is disposed at the bottom of the electric control box 406, and can support the electric control box 406, thereby increasing the stability of the electric control box 406 and the rack 401. Optionally, the foot assembly 407 includes a plurality of adjustable feet, and at least one of the plurality of adjustable feet is not in line with the other adjustable feet. The adjustable feet have height adjustment capability, so that they can adapt to different ground environments.

[0069] The rotary drive source 404 is located in the electric control box 406. Specifically, a mounting port is provided on the top of the electric control box 406, and one end of the frame 401 and the transmission assembly passes through the mounting port. The rotary drive source 404 is provided in the electric control box 406 and is connected to the part of the transmission assembly located in the electric control box 406.

[0070] By setting the rotating drive source 404 in the electrical control box 406, on the one hand, the height of the rotating drive source 404 can be lowered, thereby lowering the overall center of gravity of the adjusting device and improving stability. On the other hand, the electrical control box 406 can be used to shield and protect the rotating drive source 404 to prevent damage. On the other hand, setting the rotating drive source 404 in the electrical control box 406 can realize the centralized arrangement of the rotating drive source 404 and other electrical components, which is convenient for cooling the rotating drive source 404 and other electrical components at the same time through the same set of cooling equipment, reducing the complexity of the equipment and saving the use cost.

[0071] Combination Figure 2 and Figure 6In some embodiments, the lifting mechanism 400 further includes a detection unit and a control unit. The detection unit is disposed on the frame 401 and is used to collect position information of the lifting slider 403. The control unit is respectively connected to the detection unit and the lifting drive assembly in communication, and the control unit is configured to control the operation of the lifting drive assembly based on the position information of the lifting slider 403. Real-time monitoring and precise control of the motion state of the lifting slider 403 are achieved, which significantly improves the automation level and operation accuracy of the adjustment device, thereby facilitating the improvement of the accuracy of the temperature measurement results.

[0072] Optionally, the detection unit includes a sensing sheet 413, a first slot-type photoelectric sensor 414, and a second slot-type photoelectric sensor 415. The first slot-type photoelectric sensor 414 and the second slot-type photoelectric sensor 415 are fixedly connected to the frame 401 and are in communication connection with the control unit, and the second slot-type photoelectric sensor 415 is arranged above the first slot-type photoelectric sensor 414. The sensing sheet 413 is fixedly connected to the lifting slider 403. When the lifting slider 403 is at the starting position, the sensing sheet 413 cooperates with the first slot-type photoelectric sensor 414 to block the light beam in the slot of the first slot-type photoelectric sensor 414. When the lifting slider 403 is at the ending position, the sensing sheet 413 cooperates with the first slot-type photoelectric sensor 414 to block the light beam in the slot of the first slot-type photoelectric sensor 414. When the sensing sheet 413 moves with the lifting slider 403 into the slot of the first slot-type photoelectric sensor 414 or the second slot-type photoelectric sensor 415 and blocks the light beam, the first slot-type photoelectric sensor 414 or the second slot-type photoelectric sensor 415 transmits a disconnection signal to the control unit. The control unit identifies the position of the lifting slider 403 according to the disconnection signal and controls the rotation drive source 404 to stop running or reverse running.

[0073] Optionally, the detection unit further includes a third slot-type photoelectric sensor 416, which is fixedly connected to the frame 401 and is in communication connection with the control unit. The third slot-type photoelectric sensor 416 is arranged on the upper side of the second slot-type photoelectric sensor 415. When the rising height of the lifting slider 403 exceeds the end position, the induction sheet 413 cooperates with the third slot-type photoelectric sensor 416 to block the light beam in the slot of the third slot-type photoelectric sensor 416. At this time, the third slot-type photoelectric sensor 416 transmits a disconnection signal to the control unit. The control unit identifies the position of the lifting slider 403 according to the disconnection signal and controls the rotation drive source 404 to stop running or reverse running. The position of the third slot-type photoelectric sensor 416 is a safety position, which can provide safety protection. When the second slot-type photoelectric sensor 415 fails or fails, the third slot-type photoelectric sensor 416 will take over the work.

[0074] The above structure is only an optional form of the detection unit. In some other embodiments, the detection unit may also adopt structures such as a micro switch and a stopper matching structure, an image acquisition device, or an encoder arranged on the rotating shaft of the rotating drive source 404.

[0075] Optionally, the control unit includes a controller, which is respectively connected to the detection unit and the rotation drive source 404. For example, when the rotation drive source 404 is a rotary motor, the controller is connected to the driver of the rotary motor and controls the rotary motor to stop running or reverse rotation based on the detection signal of the detection unit.

[0076] Combination Figure 1 and Figure 2 In some embodiments, the cantilever 200 is detachably connected to the second adjustment mechanism 500, for example, by the above-mentioned first fixing clip 510. The adjustment device further includes a storage assembly 408, which is fixedly connected to at least one of the electric control box 406 and the frame 401, and the storage assembly 408 is configured to store the cantilever 200.

[0077] Therefore, when temperature measurement is not needed, the cantilever 200 can be removed and stored in the storage assembly 408, thereby reducing the space occupied by the adjustment device and facilitating movement or storage.

[0078] In some embodiments, the storage assembly 408 includes a first fixing plate 409, a second fixing plate 410, a third fixing plate 411 and a fixing frame 412. The first fixing plate 409 and the second fixing plate 410 are both long strips arranged vertically, and the second fixing plate 410 is fixed vertically to the first fixing plate 409. At least one of the first fixing plate 409 and the second fixing plate 410 is fixedly connected to the rack 401. Optionally, the first fixing plate 409 is fixedly connected to one side of the rack 401, and the second fixing plate 410 is fixedly connected to the other side of the rack 401. The third fixing plate 411 is arranged horizontally and arranged on the upper side of the electric control box 406. The third fixing plate 411 and the electric control box 406 can be fixedly connected by bolts, screws or clamps. The third fixing plate 411 is fixedly connected to the bottom end of the first fixing plate 409 and the bottom end of the second fixing plate 410 respectively. The fixing frame 412 is located above the third fixing plate 411 and at the angle formed by the first fixing plate 409 and the second fixing plate 410. Two adjacent sides of the third fixing plate 411 are fixedly connected to the first fixing plate 409 and the second fixing plate 410 respectively.

[0079] When the storage assembly 408 stores the cantilever 200, the fixing frame 412 is sleeved on the outside of the cantilever 200 to limit the lateral position of the cantilever 200, and the third fixing plate 411 is supported below the cantilever 200 to support the cantilever 200. In this way, the cantilever 200 can be kept in a vertical state, and the size of the adjustment device in the horizontal direction can be reduced.

[0080] Optionally, a limiting protrusion is provided on the upper side of the third fixing plate 411, and the limiting protrusion can be plugged into and matched with a groove or a hole at the end of the cantilever 200 to increase the limitation of the cantilever 200 and prevent the cantilever 200 from shaking due to external force in the stored state.

[0081] In actual operation, when the cantilever 200 needs to be stored, the temperature sensor 100 can be removed from the cantilever 200 and then the cantilever 200 can be stored to avoid collision and damage to the temperature sensor 100.

[0082] In some embodiments, the lifting mechanism 400 further includes a detection member 418 , which is used to detect the levelness of the upper side of the electric control box 406 or the third fixing plate 411 to determine the levelness of the multiple legs in the leg assembly 407 .

[0083] Optionally, the detection member 418 is disposed on the upper side of the electric control box 406 , and the levelness of the plurality of legs in the leg assembly 407 is determined by detecting the levelness of the upper side of the electric control box 406 .

[0084] Optionally, the detection member 418 is disposed on the third fixing plate 411 , and the leveling state of the plurality of legs in the leg assembly 407 is determined by detecting the horizontality of the third fixing plate 411 .

[0085] Of course, the detection member 418 may also be arranged at other positions, and any solution that can determine the flush state of the multiple legs in the leg assembly 407 should fall within the protection scope of this embodiment.

[0086] Optionally, the detection member 418 is a level, such as a digital level or a mechanical level.

[0087] In this embodiment, by ensuring that the detection member 418 determines the level state of multiple legs in the leg assembly 407, it is possible to ensure that the frame 401, cantilever 200, temperature sensor 100, etc. are in a horizontal or vertical state without tilting, thereby ensuring the accuracy of the detection result and preventing the temperature sensor 100 from being scratched and damaged.

[0088] Combination Figure 2 and Figure 7 In some embodiments, the first adjustment mechanism 300 includes a third fixing clamp 310 , a first guide rail pair 320 , a second guide rail pair 330 and a rotating assembly 340 .

[0089] The third fixing clamp 310 is connected to the cantilever 200 , and the first adjusting mechanism 300 can be installed through the third fixing clamp 310 .

[0090] The first guide rail pair 320 includes a first slide rail and a first slider, the first slide rail is fixedly connected to the third fixing clamp 310, and the first slider is slidably connected to the first slide rail. The second guide rail pair 330 includes a second slide rail and a second slider, the extension direction of the second slide rail intersects with the extension direction of the first slide rail, the second slide rail is fixedly connected to the first slider, and the second slider is slidably connected to the second slide rail.

[0091] The rotating assembly 340 includes a fixing ring 341, a support seat 342, a fastener 343, a universal bearing 344 and a bearing seat 345. The fixing ring 341 is configured to be fixedly connected to the temperature sensor 100 and to the support seat 342, the support seat 342 is connected to the universal bearing 344 through the fastener 343, the universal bearing 344 is connected to the bearing seat 345, and the bearing seat 345 is fixedly connected to the second slider.

[0092] Optionally, the extension direction of the second slide rail is parallel to the extension direction of the cantilever 200 and perpendicular to the extension direction of the first slide rail.

[0093] Optionally, the fixing ring 341 includes two relatively arranged semicircular rings and bolts connecting the two semicircular rings. When the non-temperature measuring section 102 of the temperature sensor 100 is located between the two semicircular rings, the temperature sensor 100 can be fixed by adjusting the distance between the two semicircular rings by bolts.

[0094] Optionally, a support ring is provided at the upper end of the support seat 342, and the fixing ring 341 is detachably connected to the support ring by means of, for example, bolt connection or clamping.

[0095] Optionally, a wire groove is provided on one side of the support base 342 , and the connecting wire 103 of the temperature sensor 100 can be arranged in the wire groove.

[0096] Optionally, the fastener 343 includes a fastening bolt and a fastening nut, the head of the fastening bolt is located in the support seat 342, the threaded section of the fastening bolt is simultaneously penetrated through the support seat 342 and the universal bearing 344, and the fastening nut is threadedly connected to the fastening bolt.

[0097] Optionally, the bearing seat 345 and the second sliding block are detachably connected by means of, for example, a bolt and nut structure, screws, or a clamping connection.

[0098] In this embodiment, by providing the first guide rail pair 320 and the second guide rail pair 330, the position of the rotating assembly 34 and the temperature sensor 100 fixed on the rotating assembly 34 can be finely adjusted in the extension direction of the first slide rail and the extension direction of the second slide rail, so that the temperature sensor 100 can be inserted into the furnace tube more accurately. By providing the rotating assembly 340 to be able to rotate a certain angle, the temperature measurement requirements of the furnace tube at different angles can be met, and the temperature sensor 100 can also be prevented from scratching the furnace tube during the measurement process by adjusting the angle, which is conducive to preventing the temperature sensor 100 from being damaged.

[0099] Combination Figure 8 In some embodiments, the third fixing clamp 310 includes a third body 311 and a fourth bolt 312. The third body 311 is fixedly connected to the first slide rail, and the third body 311 has a seventh component 313 and an eighth component 314, the seventh component 313 and the eighth component 314 are arranged at intervals, and a fourth through hole 315 is provided between the seventh component 313 and the eighth component 314. The fourth bolt 312 is slidably connected and matched with the seventh component 313, and is threadedly matched with the eighth component 314. The cantilever 200 is provided in the fourth through hole 315.

[0100] Specifically, the third body 311 is located below the first slide rail and is fixedly connected to the first slide rail by bolts. The seventh component 313 and the eighth component 314 are symmetrical about a vertical plane passing through the center line of the third body 311 (the center line of the third body 311 is parallel to the extension direction of the cantilever 200). There is a fourth through hole 315 and a fourth gap 316 between the seventh component 313 and the eighth component 314. The shape of the fourth through hole 315 is adapted to the shape of the cantilever 200. For example, if the cross section of the cantilever 200 is rectangular, the cross section of the fourth through hole 315 is rectangular. The cross-sectional size of the fourth through hole 315 is equal to the cross-sectional size of the cantilever 200, or the cross-sectional size of the fourth through hole 315 is slightly larger than the cross-sectional size of the cantilever 200. The width of the fourth gap 316 is smaller than the width of the fourth through hole 315 and smaller than the width of the cantilever 200, so that when the cantilever 200 is plugged into the fourth through hole 315, the cantilever 200 is prevented from slipping out of the fourth gap 316. By providing the fourth gap 316, the third fixing clamp 310 can have the deformation ability to make the seventh component 313 and the eighth component 314 move closer to or away from each other, thereby changing the size of the fourth through hole 315 to achieve clamping or loosening of the cantilever 200.

[0101] The seventh component 313 is provided with a third through hole, and the eighth component 314 is provided with a third threaded hole, and the third through hole is coaxial with the third threaded hole. The third bolt is passed through the third through hole and threadedly engaged with the third threaded hole. When the third bolt is tightened, the seventh component 313 and the eighth component 314 can be brought close to each other, clamping the cantilever 200, so as to fix the relative position of the third fixing clamp 310 and the cantilever 200; when the third bolt is loosened, the seventh component 313 and the eighth component 314 are reset, and the cantilever 200 can be loosened, so that the third fixing clamp 310 can slide relative to the cantilever 200, so as to adjust the relative position of the cantilever 200 and the second adjustment mechanism 500 in the horizontal direction.

[0102] Optionally, the third fixing clip 310 is detachably connected to the first slide rail. For example, the first slide rail is provided with a threaded hole, and the third body 311 is provided with through holes at positions on both sides of the seventh component 313 and the second component 515, respectively. The third fixing clip 310 is connected to the first slide rail via bolts that penetrate through the through holes on the third body 311 and threadably engage with the threaded holes on the first slide rail. Of course, in some other optional methods, the third fixing clip 310 and the movable member 417 can also be detachably connected, for example, by means of a snap connection.

[0103] In this embodiment, when the first scale 201 is provided on the cantilever 200 , the first scale 201 also indicates the relative position of the cantilever 200 and the third fixing clip 310 .

[0104] The phrases "one embodiment", "an embodiment", etc. mentioned in the specification indicate that the embodiment described may include a specific feature, structure or characteristic, but not every embodiment may include the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments, whether explicitly or not explicitly described.

[0105] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).

[0106] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.

[0107] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0108] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A regulating device, characterized in that: is configured to adjust the posture of the temperature sensor; wherein the adjusting device comprises: cantilever; a first adjustment mechanism, connecting the temperature sensor and the cantilever, wherein the first adjustment mechanism is configured to enable the temperature sensor to be positionally adjusted and angle-adjusted relative to the cantilever; The lifting mechanism comprises a movable part and a lifting drive assembly connected to each other, wherein the movable part is lifted and lowered under the drive of the lifting drive assembly; The second adjusting mechanism connects the cantilever and the movable member, and the second adjusting mechanism is configured to be able to adjust the relative position of the cantilever and the movable member in the horizontal direction and / or the vertical direction.

2. The adjusting device according to claim 1, characterized in that: The second adjustment mechanism comprises: A first fixing clip, the first fixing clip comprises a first body, a first bolt and a second bolt, the first body comprises a first component, a second component, a third component and a fourth component, the first component and the second component are arranged at intervals, and a first through hole is provided between the first component and the second component, the third component and the fourth component are arranged at intervals, and a second through hole is provided between the third component and the fourth component, the first bolt is slidably connected and fitted with the first component, and is threadedly fitted with the second component, the second bolt is slidably connected and fitted with the third component, and is threadedly fitted with the fourth component; A support member, arranged vertically, passing through the first through hole and connected to the movable member; Wherein, the cantilever is penetrated through the second through hole.

3. The adjusting device according to claim 2, characterized in that: The second adjustment mechanism also includes: a second fixing clip, the second fixing clip comprising a second body and a third bolt, the second body being fixedly connected to the movable member, the second body comprising a fifth component and a sixth component, the fifth component and the sixth component being spaced apart, and a third through hole being provided between the fifth component and the sixth component, the third bolt being slidably connected and engaged with the fifth component, and being threadedly engaged with the sixth component; Wherein, the support member is penetrated through the third through hole.

4. The adjusting device according to claim 3, characterized in that: A first scale is provided on the cantilever, and the first scale indicates the relative position of the cantilever and the first fixing clamp; And / or, the support member is provided with a second scale, and the second scale indicates the relative position of the first fixing clip or the second fixing clip and the support member.

5. The adjusting device according to any one of claims 1 to 4, characterized in that: The lifting mechanism also includes: frame; A lifting slide rail is vertically arranged and fixedly connected to the frame; The lifting slide block is slidably connected to the lifting slide rail and is connected to the movable part and the lifting drive assembly.

6. The adjusting device according to claim 5, characterized in that: The lifting drive assembly comprises: A rotating driving source, fixedly connected to the frame; The transmission structure is located on the frame and is connected to the rotation drive source and the lifting slider respectively.

7. The adjusting device according to claim 6, characterized in that: The lifting mechanism also includes: An electric control box, fixedly connected to the frame; A foot assembly is arranged at the bottom of the electric control box; Wherein, the rotation driving source is located in the electric control box.

8. The adjusting device according to claim 7, characterized in that: The cantilever is detachably connected to the second adjusting mechanism; The adjusting device also includes: A storage assembly is fixedly connected to at least one of the electric control box and the rack, and the storage assembly is configured to be able to store the cantilever.

9. The adjusting device according to claim 8, characterized in that The storage assembly comprises: a first fixing plate; A second fixing plate, fixed vertically to the first fixing plate; A third fixing plate is disposed on the upper side of the electric control box and is fixedly connected to the bottom end of the first fixing plate and the bottom end of the second fixing plate respectively; A fixing frame, located above the third fixing plate and fixedly connected to the first fixing plate and the second fixing plate respectively; Wherein, at least one of the first fixing plate and the second fixing plate is fixedly connected to the frame; Wherein, when the storage assembly stores the cantilever, the fixing frame is sleeved on the outer side of the cantilever, and the third fixing plate is supported below the cantilever.

10. The adjustment device according to claim 9, characterized in that The lifting mechanism also includes: A detection member is arranged on the upper side of the electric control box or on the third fixed plate, and is used to detect the horizontality of the upper side of the electric control box or the third fixed plate to determine the levelness of the multiple legs in the leg assembly.

11. The adjusting device according to claim 6, characterized in that: The lifting mechanism also includes: A detection unit, disposed on the frame, for collecting position information of the lifting slide block; A control unit is respectively connected to the detection unit and the lifting drive assembly for communication, and the control unit is configured to control the operation of the lifting drive assembly based on the position information of the lifting slider.

12. The adjusting device according to any one of claims 1 to 4, characterized in that: The first adjustment mechanism comprises: a third fixing clip connected to the cantilever; A first guide rail pair, comprising a first slide rail and a first slider, wherein the first slide rail is fixedly connected to the third fixing clamp, and the first slider is slidably connected to the first slide rail; A second guide rail pair includes a second slide rail and a second slider, wherein the extension direction of the second slide rail intersects with the extension direction of the first slide rail, the second slide rail is fixedly connected to the first slider, and the second slider is slidably connected to the second slide rail; The rotating assembly includes a fixing ring, a support seat, a fastener, a universal bearing and a bearing seat, wherein the fixing ring is configured to be fixedly connected to the temperature sensor and to the support seat, the support seat is connected to the universal bearing via the fastener, the universal bearing is connected to the bearing seat, and the bearing seat is fixedly connected to the second slider.

13. The adjustment device according to claim 12, characterized in that The third fixing clip comprises: a third body, the third body being fixedly connected to the first slide rail, the third body comprising a seventh component and an eighth component, the seventh component and the eighth component being arranged at intervals, and a fourth through hole being provided between the seventh component and the eighth component; a fourth bolt, slidably engaging with the seventh component and threadably engaging with the eighth component; Wherein, the cantilever is penetrated through the fourth through hole.

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