Nitrogen sealing system

Abstract

The utility model provides a nitrogen sealing system which comprises a liquid storage device used for storing liquid, and a cavity of the liquid storage device is sealed by nitrogen; the nitrogen-sealed tank comprises a tank body and a nitrogen-sealed tank body; the nitrogen pipe extends to the bottom of the tank body from the top of the tank body; the liquid seal area is located at the bottom end of the tank body, and the liquid level of the liquid seal area is configured to be higher than the bottom end of the nitrogen pipe; the liquid inlet pipeline is connected with the tank body and used for introducing liquid into the nitrogen-sealed tank, and the liquid inlet pipeline is provided with a liquid inlet valve; the liquid level monitor is used for monitoring the liquid level height of the liquid sealing area and sending out a liquid level height abnormal signal when the liquid level height is lower than a preset liquid level height; and the controller is electrically connected with the liquid level monitoring device and the liquid inlet valve, and is used for receiving the liquid level height abnormal signal and controlling the opening and closing of the liquid inlet valve. According to the nitrogen sealing system, the probability that air enters the nitrogen sealing device can be reduced.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a nitrogen sealing system. Background Art

[0002] A nitrogen sealant is typically connected to a liquid storage device, isolating the liquid inside from the air by maintaining a nitrogen atmosphere on the liquid surface. For example, during chip manufacturing processes, such as polishing and assembly, ultrapure water tanks are connected to a nitrogen sealant to isolate the ultrapure water from the air, reducing the oxygen content in the water and preventing problems such as bacterial growth and excessive total organic carbon (TOC) levels.

[0003] However, for some nitrogen sealing devices, air may enter the nitrogen sealing device and nitrogen may overflow during use. The air entering the nitrogen sealing device will affect the nitrogen sealing effect of the liquid in the liquid storage device, and the nitrogen overflow will reduce the oxygen concentration in the environment where the nitrogen sealing device is located. In severe cases, it will endanger the life and health of the operators in the environment.

[0004] Therefore, it is necessary to develop a nitrogen sealing system to prevent air from entering the nitrogen sealing device and reduce the health impact of nitrogen overflow on operators. Utility Model Content

[0005] The purpose of this application is to develop a nitrogen sealing system to avoid the probability of air entering the nitrogen sealing device and reduce the health impact of nitrogen overflow on operators.

[0006] The purpose of the present application is to provide a nitrogen sealing system, comprising: a liquid storage device for storing liquid, the cavity of the liquid storage device being sealed by nitrogen, and the nitrogen being discharged from the liquid storage device when the liquid level in the liquid storage device exceeds a set value; a nitrogen sealing tank, the nitrogen sealing tank comprising: a tank body; a nitrogen pipe, the nitrogen pipe extending from the top of the tank body to the bottom of the tank body, for receiving the nitrogen discharged from the liquid storage device; a liquid sealing area located at the bottom end of the tank body, the liquid level in the liquid sealing area being configured to be higher than the bottom end of the nitrogen pipe; and a liquid inlet pipeline connected to the tank body and for introducing liquid into the nitrogen sealing tank, the liquid inlet pipeline being provided with a liquid inlet valve; a liquid level monitor for monitoring the liquid level height of the liquid sealing area and issuing a liquid level abnormality signal when the liquid level height is lower than a preset liquid level height; and a controller, the controller being electrically connected to the liquid level monitoring device and the liquid inlet valve, for receiving the liquid level abnormality signal and controlling the opening and closing of the liquid inlet valve.

[0007] In some embodiments, the nitrogen sealing system further includes an oxygen concentration monitoring device, which is disposed in the workshop where the nitrogen sealing tank is located, and is used to monitor the oxygen concentration in the workshop. The oxygen concentration monitoring device is electrically connected to the controller, and sends an abnormal oxygen concentration signal to the controller when the oxygen concentration is lower than a set concentration.

[0008] In some embodiments, the nitrogen sealing system further includes an exhaust device, disposed in the workroom, for exhausting the gas in the workroom.

[0009] In some embodiments, the controller is also electrically connected to the exhaust device to control the opening and closing of the exhaust device.

[0010] In some embodiments, the nitrogen sealing system further includes an alarm device, which is electrically connected to the controller and is configured to issue an alarm.

[0011] In some embodiments, there are multiple alarm devices.

[0012] In some embodiments, the nitrogen sealing system further includes a recovery device, which is configured to be connected to an exhaust port provided on a side wall of the nitrogen sealing tank for recovering gas discharged from the exhaust port.

[0013] In some embodiments, the recovery device includes a transition tank and a gas processing device, the transition tank is connected to the exhaust port through a first connecting pipe, and the transition tank is connected to the gas processing device through a second connecting pipe, and the length of the first connecting pipe in the transition tank is greater than the length of the second connecting pipe in the transition tank; the gas processing device is used to process the gas discharged from the exhaust port.

[0014] In some embodiments, the nitrogen sealing system further includes a nitrogen source, and the nitrogen is connected to the liquid storage device through a gas transmission pipeline for transmitting nitrogen into the liquid storage device.

[0015] In some embodiments, the nitrogen sealing system further includes a pressure monitoring device, which is used to monitor the air pressure in the liquid storage device. The pressure monitoring device is electrically connected to the controller and sends a low pressure signal when the air pressure is lower than a preset pressure value.

[0016] The beneficial effects of the nitrogen sealing system provided in this application include but are not limited to the following:

[0017] The nitrogen sealing system provided in the present application monitors the liquid level height in the liquid sealing area of ​​the nitrogen sealing tank by setting a liquid level monitor, and continuously sends a liquid level abnormality signal to the controller when the liquid level height is lower than the preset liquid level height. After receiving the liquid level abnormality signal, the controller controls the liquid inlet valve to open and replenishes liquid to the liquid sealing area in time to prevent air from entering the nitrogen pipe and affecting the sealing effect of the liquid storage device.

[0018] In addition, the nitrogen sealing system provided by this application is also equipped with an oxygen concentration monitoring device, an alarm device, and an exhaust device. When the oxygen concentration in the workroom where the nitrogen sealing tank is located is too low due to nitrogen overflow, the oxygen concentration monitoring device will promptly send an oxygen concentration abnormality signal to the controller. Upon receiving the oxygen concentration abnormality signal, the controller can control the alarm device to sound an alarm and activate the exhaust device to ensure the safety of the operators in the workroom.

[0019] In addition, the present application also provides a recovery device connected to the nitrogen sealing tank to recover the nitrogen discharged from the nitrogen sealing tank to prevent nitrogen from overflowing into the workshop. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The following figures describe in detail exemplary embodiments disclosed in this application. Like reference numerals denote similar structures throughout the several views of the drawings. Those skilled in the art will appreciate that these embodiments are non-limiting, exemplary embodiments, and that the drawings are provided for illustration and description purposes only and are not intended to limit the scope of this application. Other embodiments may also achieve the inventive intent of this application. It should be understood that the drawings are not drawn to scale.

[0021] in:

[0022] Figure 1 Schematic diagram of the structure of a nitrogen sealing system according to some embodiments of the present application. DETAILED DESCRIPTION

[0023] The following description provides specific application scenarios and requirements of the present application, with the purpose of enabling those skilled in the art to make and use the content of this application. Various local modifications to the disclosed embodiments will be apparent to those skilled in the art, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of this application. Therefore, this application is not limited to the embodiments shown, but is intended to be of the widest scope consistent with the claims.

[0024] The present application provides a nitrogen sealing system, comprising: a liquid storage device for storing liquid, the cavity of the liquid storage device being sealed by nitrogen, and when the liquid level in the liquid storage device exceeds a set value, the nitrogen is discharged from the liquid storage device; a nitrogen sealing tank, comprising: a tank body; a nitrogen pipe, the nitrogen pipe extending from the top of the tank body being used to receive the nitrogen discharged from the liquid storage device; a liquid sealing area located at the bottom end of the tank body, the liquid level in the liquid sealing area being configured to be higher than the bottom end of the nitrogen pipe; and a liquid inlet pipeline connected to the tank body and used to introduce liquid into the nitrogen sealing tank, the liquid inlet pipeline being provided with a liquid inlet valve; a liquid level monitor for monitoring the liquid level height of the liquid sealing area and issuing a liquid level abnormality signal when the liquid level height is lower than a preset liquid level height; and a controller, the controller being electrically connected to the liquid level monitoring device and the liquid inlet valve, and used to receive the liquid level abnormality signal and control the opening and closing of the liquid inlet valve.

[0025] When the liquid seal area is lower than the bottom of the nitrogen tank, the nitrogen in the nitrogen pipe will flow out of the nitrogen seal tank. At the same time, the air in the nitrogen seal tank will also enter the nitrogen pipe and then enter the liquid storage device, affecting the nitrogen sealing effect of the liquid storage device. By setting up a liquid level detection device to monitor the height of the liquid seal area, the liquid seal area can be replenished in time to avoid nitrogen leakage.

[0026] The nitrogen sealing system provided in this application will be described in detail below with reference to specific embodiments and accompanying drawings.

[0027] refer to Figure 1 An embodiment of the present application provides a nitrogen sealing system, which includes a liquid storage device 100, a nitrogen sealing tank 200 and a controller 300.

[0028] The liquid storage device 100 is used to store liquid, for example, ultrapure water.

[0029] An air inlet 101 is provided at the top of the liquid storage device 100. The air inlet 101 is connected to the nitrogen source 400 through a gas transmission pipeline 102. Nitrogen enters the liquid storage device 100 from the nitrogen source 400 through the gas transmission pipeline 102, so that the cavity above the liquid surface of the liquid storage device 100 is sealed by nitrogen, isolating the liquid in the liquid storage device 100 from contact with air, and thus nitrogen-sealing the liquid in the liquid storage device 100.

[0030] In some embodiments, the liquid storage device 100 is also connected to a pressure monitoring device 103, which is used to monitor the air pressure in the liquid storage device 100. The pressure monitoring device 103 is electrically connected to the controller 300 and sends a low pressure signal when the air pressure is lower than a preset pressure value.

[0031] In some embodiments, the gas transmission pipeline 102 is provided with an air intake valve 102a, and the air intake valve 102a is electrically connected to the controller 300. The controller 300 is used to receive the low-pressure signal and control the opening and closing of the air intake valve 102a.

[0032] Specifically, the air inlet valve 102a is in a normally closed state. When the air pressure in the liquid storage device 100 is lower than a preset pressure value, for example, when the liquid level in the liquid storage device 100 drops, causing the air pressure in the liquid storage device 100 to decrease, the pressure monitoring continuously sends the low pressure signal to the controller 300. After receiving the low pressure signal, the controller 300 controls the air inlet valve 102a to open, so that nitrogen flows from the nitrogen source 400 into the liquid storage device 100.

[0033] The liquid storage device 100 is further provided with a gas outlet 104, which is connected to the nitrogen sealing tank 200 via a first pipe 104a, so that the nitrogen in the liquid storage device 100 can flow into the nitrogen sealing tank 200. When the liquid level in the liquid storage device 100 exceeds a set value, the nitrogen can be discharged from the liquid storage device 100 to the nitrogen sealing tank 200 through the first pipe 104a.

[0034] In some embodiments, the liquid storage device 100 is further provided with a liquid outlet 105, which is provided on the side of the gas outlet 104 close to the liquid surface, and the liquid outlet 105 is connected to the nitrogen sealing tank 200 through a second pipeline 105a. When the liquid level in the liquid storage device 100 reaches the height of the liquid outlet 105, the liquid in the liquid outlet device can flow into the nitrogen sealing tank 200 through the second pipeline 105a to avoid the liquid level in the liquid storage device 100 exceeding the safety height.

[0035] The nitrogen sealing tank 200 includes a tank body 201 and a nitrogen pipe 202 . The nitrogen pipe 202 extends from the top of the tank body 201 to the bottom of the tank body 201 and is used to receive nitrogen discharged from the liquid storage device 100 .

[0036] The nitrogen sealing tank 200 further includes a liquid sealing area 203 located at the bottom end of the tank body 201. The liquid level of the liquid sealing area 203 is configured to be higher than the bottom end of the nitrogen pipe 202, thereby sealing the port of the nitrogen pipe 202, preventing the nitrogen in the nitrogen pipe 202 from overflowing on the one hand, and preventing air from entering the nitrogen pipe 202 on the other hand.

[0037] The nitrogen sealing tank 200 further includes a liquid inlet pipe 204 connected to the tank body 201 and configured to introduce liquid into the nitrogen sealing tank 200 to form the liquid seal area 203 at the bottom of the tank body 201. The liquid introduced into the nitrogen sealing tank 200 may be the same as or different from the liquid in the liquid storage device 100, and may be, for example, ultrapure water or tap water.

[0038] The liquid inlet pipe 204 is provided with a liquid inlet valve 204a. The liquid inlet valve 204a is in a normally closed state. When liquid needs to be introduced into the nitrogen sealing tank 200, the liquid inlet valve 204a is opened, and the liquid enters the nitrogen sealing tank 200 through the liquid inlet pipe 204.

[0039] In some embodiments, an air inlet connection port 205 is provided on the top of the tank body 201 , and the air inlet connection port 205 is connected to the first pipeline 104 a , and the nitrogen in the liquid storage device 100 enters the interior of the tank body 201 and enters the nitrogen pipe 202 through the air inlet connection port 205 .

[0040] In some embodiments, a liquid inlet connection port 206 is further provided on the top of the tank body 201, and the liquid inlet connection port 206 is connected to the second pipeline 105a. When the liquid level in the liquid storage device 100 reaches the liquid outlet 105, the liquid can flow into the nitrogen-sealed tank 200 through the second pipeline 105a and the liquid inlet connection port 206 to prevent the liquid level in the liquid storage device 100 from exceeding the safe height.

[0041] In some embodiments, the outer wall of the nitrogen pipe 202 is connected to the inner wall of the nitrogen sealing tank 200 via a connecting plate 207, dividing the interior of the tank body 201 into a first zone and a second zone. The first zone is the area of ​​the tank body 201 located above the connecting plate 207 (i.e., the side of the connecting plate 207 close to the top of the tank body 201), and the second zone is the area of ​​the tank body 201 located below the connecting plate 207 (i.e., the side of the connecting plate 207 close to the bottom of the tank body 201). The first zone and the second zone are connected by the nitrogen pipe 202. In some embodiments, the diameter of the portion of the nitrogen pipe 202 located in the first zone is larger than the diameter of the portion of the nitrogen pipe 202 located in the second zone.

[0042] The outer wall of the nitrogen pipe 202, the connecting plate 207, and the inner wall of the tank body 201 form an annular liquid replenishing area 208 in the first area. Liquid can flow into the liquid replenishing area 208 through the liquid inlet pipe 204. When the liquid level in the liquid replenishing area 208 exceeds the top of the nitrogen pipe 202, the liquid flows from the nitrogen pipe 202 to the second area, forming the liquid sealing area 203 at the bottom of the tank body 201.

[0043] The nitrogen sealing tank 200 is further provided with an exhaust port 209 in the second zone. The height of the exhaust port 209 is higher than the set height of the liquid level in the liquid sealing zone 203. When the liquid in the liquid replenishing zone 208 flows into the second zone, the gas in the second zone can be discharged from the exhaust port 209.

[0044] In some embodiments, the nitrogen sealing tank 200 is further provided with a connecting pipe 210 in the first area, connecting the liquid replenishing area 208 to the atmospheric environment. By allowing the liquid in the liquid replenishing area 208 to move within the connecting pipe 210, the pressure changes of the gas in the nitrogen sealing tank 200 and the liquid storage device 100 caused by the normal range of liquid level fluctuations in the liquid storage device 100 can be balanced, thereby preventing the nitrogen in the nitrogen pipe 202 from overflowing from the nitrogen pipe 202 into the liquid sealing area 203 due to excessive gas pressure.

[0045] In some embodiments, the material of the tank body 201 is transparent material.

[0046] The nitrogen sealing tank 200 generally operates as follows: the liquid inlet valve 204a is opened to allow liquid to enter the nitrogen sealing tank 200, and the liquid reaches the bottom of the nitrogen sealing tank 200 through the liquid replenishing area 208, forming the liquid seal area 203 at the bottom of the nitrogen sealing tank 200, and the liquid inlet valve 204a is closed; nitrogen is introduced into the liquid storage device 100, filling the cavity above the liquid surface of the liquid storage device 100 with nitrogen. Simultaneously, nitrogen enters the nitrogen sealing tank 200 through the first pipeline 104a and the air inlet connection port 205, and exhausts the air originally in the nitrogen pipe 202 through the nitrogen pipe 202 and the exhaust port 209, filling the nitrogen pipe 202 with nitrogen, thereby isolating the liquid in the liquid storage device 100 from contact with air. When the air pressure in the liquid storage device 100 reaches a set pressure value, the nitrogen supply to the liquid storage device 100 is stopped. The set pressure value is greater than atmospheric pressure.

[0047] When the liquid level in the liquid storage device 100 fluctuates normally, the connecting pipe 210 and the liquid sealing area 203 can absorb small fluctuations in the liquid level to ensure that the bottom end of the nitrogen pipe 202 is still sealed by the liquid sealing area 203 to prevent nitrogen from overflowing.

[0048] However, when the liquid level in the liquid storage device 100 rises rapidly, the air pressure in the nitrogen pipe 202 will rise extremely rapidly, causing disturbances in the air-liquid interface at the bottom of the nitrogen pipe 202, resulting in nitrogen overflow. At the same time, the liquid in the liquid sealing area 203 may flow out from the exhaust port 209. When the air pressure in the nitrogen pipe 202 returns to a normal range, the liquid level in the liquid sealing area 203 cannot seal the bottom of the nitrogen pipe 202, causing air to enter the nitrogen pipe 202, thereby affecting the nitrogen sealing effect of the liquid in the liquid storage device 100.

[0049] In response to the above-mentioned problems, the nitrogen sealing system provided in the present application further provides a liquid level monitor 500 for monitoring the liquid level height of the liquid sealing area 203. The liquid level monitor 500 is electrically connected to the controller 300, and continuously sends a liquid level abnormality signal to the controller 300 when the liquid level height is lower than the preset liquid level height. After receiving the liquid level abnormality signal, the controller 300 controls the liquid inlet valve 204a to open, allowing the liquid to enter the nitrogen sealing tank 200. When the liquid level reaches the liquid level, the liquid level monitor 500 stops sending the liquid level abnormality signal to the controller 300, and the controller 300 further controls the liquid inlet valve 204a to close to stop the liquid from entering the nitrogen sealing tank 200.

[0050] By monitoring the liquid level in the liquid sealing area 203 in real time, liquid can be added to the liquid sealing area 203 in a timely manner when the liquid level in the liquid sealing area 203 is lower than a preset liquid level, thereby preventing air from entering the nitrogen pipe 202 and affecting the sealing effect of the liquid storage device 100.

[0051] In some embodiments, the liquid level monitor 500 is disposed outside the tank body 201. The liquid level detection device may be fixedly connected to the tank body 201 or independently fixed outside the tank body 201 to maintain a fixed relative position to the tank body 201.

[0052] In some embodiments, the liquid level detection device includes a photoelectric liquid level sensor.

[0053] Nitrogen overflow may threaten the health and life of operators in the workshop where the nitrogen sealing tank 200 is located. Therefore, in some embodiments, the nitrogen sealing system provided in the present application is also provided with an oxygen concentration monitoring device 600, an alarm device 700 and an exhaust device 800.

[0054] In some embodiments, the oxygen concentration monitoring device 600 is arranged in the workshop where the nitrogen sealing tank 200 is located, and is used to monitor the oxygen concentration in the workshop. The oxygen concentration monitoring device 600 is electrically connected to the controller 300, and sends an oxygen concentration abnormality signal to the controller 300 when the oxygen concentration is lower than the set concentration.

[0055] In some embodiments, the alarm device 700 is electrically connected to the controller 300 and is configured to issue an alarm. Specifically, upon receiving the abnormal oxygen concentration signal, the controller 300 controls the alarm device 700 to issue an alarm. In some embodiments, there are multiple alarm devices 700, each installed in the workroom and the control room, so that when the oxygen concentration in the workroom is too low, both the operator in the workroom and the monitoring personnel in the control room are alerted.

[0056] In some embodiments, the exhaust device 800 is provided in the workshop for exhausting the gas in the workshop. The exhaust device 800 can be opened and closed manually by an operator or controlled by the controller 300.

[0057] In some embodiments, the exhaust device 800 is electrically connected to the controller 300, and the controller 300 controls the opening and closing of the exhaust device 800. The exhaust device 800 is in a normally closed state. When the controller 300 receives the abnormal oxygen concentration signal, the controller 300 controls the exhaust device 800 to open. When the controller 300 no longer receives the abnormal oxygen concentration signal, the controller 300 controls the exhaust device 800 to close. To ensure the safety of operators in the workshop, in some embodiments, the exhaust device 800 can be manually closed by the operator; in other embodiments, the exhaust device 800 can also be set to a normally open state.

[0058] In some embodiments, the exhaust device 800 includes an exhaust fan.

[0059] In other embodiments, the nitrogen sealing system provided in the present application further prevents nitrogen from overflowing by providing a recovery device 900 , and the recovery device 900 is connected to the exhaust port 209 for recovering the nitrogen discharged from the exhaust port 209 .

[0060] In some embodiments, the recovery device 900 includes a transition tank 901 and a gas processing device 902. The transition tank 901 is connected to the exhaust port 209 through a first connecting pipe 901a, and the transition tank 901 is connected to the gas processing device 902 through a second connecting pipe 902a. The length of the first connecting pipe 901a in the transition tank 901 is greater than the length of the second connecting pipe 902a in the transition tank 901. When the liquid in the liquid seal area 203 is discharged from the exhaust port 209 due to abnormal fluctuations in the liquid level, it can be collected in the transition tank 901; the gas processing device 902 can process the gas discharged from the exhaust port 209 to prevent nitrogen from overflowing into the workshop.

[0061] The beneficial effects of the nitrogen sealing system provided in this application include but are not limited to the following:

[0062] The nitrogen sealing system provided in the present application monitors the liquid level height in the liquid sealing area of ​​the nitrogen sealing tank by setting a liquid level monitor, and continuously sends a liquid level abnormality signal to the controller when the liquid level height is lower than the preset liquid level height. After receiving the liquid level abnormality signal, the controller controls the liquid inlet valve to open and replenishes liquid to the liquid sealing area in time to prevent air from entering the nitrogen pipe and affecting the sealing effect of the liquid storage device.

[0063] In addition, the nitrogen sealing system provided by this application is also equipped with an oxygen concentration monitoring device, an alarm device, and an exhaust device. When the oxygen concentration in the workroom where the nitrogen sealing tank is located is too low due to nitrogen overflow, the oxygen concentration monitoring device will promptly send an oxygen concentration abnormality signal to the controller. Upon receiving the oxygen concentration abnormality signal, the controller can control the alarm device to sound an alarm and activate the exhaust device to ensure the safety of the operators in the workroom.

[0064] In addition, the present application also provides a recovery device connected to the nitrogen sealing tank to recover the nitrogen discharged from the nitrogen sealing tank to prevent nitrogen from overflowing into the workshop.

[0065] It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other possible beneficial effects.

[0066] The basic concepts have been described above. It will be apparent to those skilled in the art that the detailed disclosure above is merely illustrative and does not limit this specification. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements, and revisions to this application. Such modifications, improvements, and revisions are suggested in this specification and remain within the spirit and scope of the exemplary embodiments of this application.

[0067] It should be noted that, in the description of this application, unless otherwise expressly specified or limited, the terms "installed," "connected," "connected," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integration; mechanical connections, electrical connections; rotational connections, or sliding connections; direct connections, or indirect connections through an intermediate medium; and can refer to internal communication between two components or the interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this application in light of specific circumstances.

[0068] In addition, when terms such as "first", "second", and "third" are used in the specification of this application to describe various features, these terms are only used to distinguish these features and cannot be understood as indicating or implying the relationship between the features, the relative importance, or implicitly indicating the number of features indicated.

[0069] In addition, this specification describes exemplary embodiments by reference to idealized exemplary cross-sectional views and / or plan views and / or perspective views. Therefore, differences from the illustrated shapes due to, for example, manufacturing techniques and / or tolerances are foreseeable. Therefore, the exemplary embodiments should not be interpreted as limited to the shapes of the regions shown herein, but should include deviations in shapes due to, for example, manufacturing. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to illustrate the actual shapes of the regions of the device nor to limit the scope of the exemplary embodiments.

[0070] At the same time, this application uses specific terms to describe the embodiments of this specification. For example, "one embodiment," "an embodiment," and / or "some embodiments" refer to a certain feature, structure, or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment," "an embodiment," or "an alternative embodiment" mentioned twice or multiple times in different locations in this application does not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of the present application may be appropriately combined.

[0071] Similarly, it should be noted that, in order to simplify the presentation of this application and thus facilitate understanding of one or more embodiments of the invention, the foregoing descriptions of the embodiments of this application sometimes combine multiple features into a single embodiment, figure, or description thereof. However, this disclosure method does not mean that the subject matter of this application requires more features than those recited in the claims. In fact, an embodiment may have fewer features than all of the features of a single embodiment disclosed above.

[0072] Finally, it should be understood that the embodiments described in this application are merely illustrative of the principles of the embodiments of this application. Other variations may also fall within the scope of this application. Therefore, by way of example and not limitation, alternative configurations of the embodiments of this application may be considered consistent with the teachings of this application. Accordingly, the embodiments of this application are not limited to the embodiments explicitly introduced and described in this application.

Claims

1. A nitrogen blanketing system, characterized in that: include: A liquid storage device, used for storing liquid, wherein the cavity of the liquid storage device is sealed by nitrogen, and when the liquid level of the liquid storage device exceeds a set value, the nitrogen is discharged from the liquid storage device; A nitrogen sealed tank, comprising: a tank body; a nitrogen pipe, the nitrogen pipe extending from the top of the tank body to the bottom of the tank body, for receiving nitrogen discharged from a liquid storage device; a liquid sealing area located at the bottom end of the tank body, the liquid level of the liquid sealing area being configured to be higher than the bottom end of the nitrogen pipe; and a liquid inlet pipeline connected to the tank body, for introducing liquid into the nitrogen sealed tank, and the liquid inlet pipeline is provided with a liquid inlet valve; a liquid level monitor, used to monitor the liquid level height of the liquid seal area and send a liquid level abnormality signal when the liquid level height is lower than a preset liquid level height; and A controller is electrically connected to the liquid level monitoring device and the liquid inlet valve, and is used to receive the abnormal liquid level height signal and control the opening and closing of the liquid inlet valve.

2. The nitrogen sealing system according to claim 1, characterized in that: It also includes an oxygen concentration monitoring device, which is arranged in the workshop where the nitrogen sealing tank is located, and is used to monitor the oxygen concentration in the workshop. The oxygen concentration monitoring device is electrically connected to the controller, and sends an oxygen concentration abnormality model to the controller when the oxygen concentration is lower than the set concentration.

3. The nitrogen sealing system according to claim 2, characterized in that: It also includes an exhaust device, which is arranged in the workshop and is used to exhaust the gas in the workshop.

4. The nitrogen sealing system according to claim 3, characterized in that: The controller is also electrically connected to the exhaust device to control the opening and closing of the exhaust device.

5. The nitrogen sealing system according to claim 2, characterized in that: It also includes an alarm device, which is electrically connected to the controller and is used to issue an alarm.

6. The nitrogen sealing system according to claim 5, characterized in that: The number of the alarm devices is multiple.

7. The nitrogen sealing system according to claim 1, characterized in that: It also includes a recovery device, which is configured to be connected to an exhaust port arranged on the side wall of the nitrogen-sealed tank and is used to recover the gas exhausted from the exhaust port.

8. The nitrogen sealing system according to claim 7, characterized in that: The recovery device includes a transition tank and a gas processing device, the transition tank is connected to the exhaust port through a first connecting pipe, the transition tank is connected to the gas processing device through a second connecting pipe, the length of the first connecting pipe in the transition tank is greater than the length of the second connecting pipe in the transition tank; the gas processing device is used to process the gas discharged from the exhaust port.

9. The nitrogen sealing system according to claim 1, characterized in that: A nitrogen source is also included, and the nitrogen is connected to the liquid storage device through a gas transmission pipeline, so as to transmit the nitrogen into the liquid storage device.

10. The nitrogen sealing system according to claim 9, characterized in that: It also includes a pressure monitoring device, which is used to monitor the air pressure in the liquid storage device. The pressure monitoring device is electrically connected to the controller and sends a low pressure signal when the air pressure is less than a preset pressure value.

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