Ultrahigh-cleanliness purification workshop for chip packaging

Abstract

The utility model discloses an ultrahigh-cleanliness purification workshop for chip packaging, and relates to the technical field of purification workshops. The workshop ventilation device mainly comprises a workshop wall body, a ventilation pipeline, a ventilation fan, a filtering piece and an installation piece, the ventilation pipeline is horizontally arranged and penetrates through the workshop wall body, the ventilation fan and the filtering piece are both installed in the ventilation pipeline, the filtering piece comprises an installation frame, and a filtering plate is installed between the inner walls of the installation frame. The number of the installation parts is two, the installation parts are arranged on the two opposite sides of the ventilation pipeline respectively, each installation part comprises a U-shaped clamping plate, an opening of each U-shaped clamping plate is arranged on one side of the ventilation pipeline in a clamped mode, two limiting plates are fixed to the outer side wall of each U-shaped clamping plate, the installation frame is located between the two limiting plates, and a control plate is fixed to the outer side wall of each U-shaped clamping plate. Through the design of the U-shaped clamping plate and the limiting plate, the filter element can be quickly mounted and dismounted, so that the time required for replacing the filter screen is greatly shortened, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of cleanrooms, in particular to an ultra-high cleanliness cleanroom for chip packaging. Background Art

[0002] With the rapid development of the semiconductor industry, especially the continuous advancement of integrated circuit (IC) technology, the requirements for environmental cleanliness in the chip packaging process are becoming increasingly higher. Chip packaging is one of the key links in semiconductor manufacturing. It involves fixing the bare chip on a carrier, connecting it to the external circuit through connecting wires, and finally packaging it with insulating materials to protect the chip from physical damage and environmental influences. This process is extremely sensitive to environmental cleanliness, because pollutants such as dust, fibers, and metal particles may cause chip performance to degrade or even fail.

[0003] After ventilation ducts in traditional cleanrooms have been ventilated for a period of time, a large amount of pollutants will be attached to the filter nets. In order to ensure the subsequent filtering effect, the filter nets need to be replaced regularly. However, the current filter nets are generally fixed to the ports of the ventilation ducts by screws, and installation and removal will waste a lot of time. Some filter nets are also stuck inside the ventilation ducts, but they are not easy to remove. To this end, this application document provides an ultra-high cleanliness cleanroom for chip packaging. Summary of the invention

[0004] The purpose of the utility model is to solve the problems raised in the above background technology, and to provide an ultra-high cleanliness purification workshop for chip packaging.

[0005] In order to achieve the above-mentioned purpose, the utility model specifically adopts the following technical solutions:

[0006] A super-cleanliness purification workshop for chip packaging, comprising a workshop wall, a ventilation duct, a ventilation fan, a filter and a mounting member, wherein the ventilation duct is horizontally arranged and passes through the workshop wall, the ventilation fan and the filter are both installed inside the ventilation duct, the filter comprises a mounting frame, a filter plate is installed between the inner walls of the mounting frame, the number of the mounting members is two and they are respectively arranged on two opposite sides of the ventilation duct, the mounting member comprises a U-shaped card plate, the opening of the U-shaped card plate is clamped on one side of the ventilation duct, two limit plates are fixed on the outer side wall of the U-shaped card plate, the mounting frame is located between the two limit plates, and a control panel is fixed on the outer side wall of the U-shaped card plate.

[0007] Preferably, the longitudinal cross-section of the ventilation duct is rectangular, and two opposite inner walls of the ventilation duct are provided with accommodating grooves, one end of the two accommodating grooves passes through one end of the ventilation duct, and the two U-shaped clips respectively correspond to the two accommodating grooves, and the U-shaped clip is located on one side of the interior of the ventilation duct and is movably clamped inside the accommodating groove.

[0008] Preferably, fixings are installed on both sides opposite to each other of the ventilation duct, and the two fixings correspond to the two U-shaped clamps respectively. The fixings include a fixing block horizontally fixed on the ventilation duct, a horizontal elastic plastic rod is fixed on the fixing block, a vertical positioning block is fixed at one end of the elastic plastic rod, a positioning groove is penetrated on the control board, the elastic plastic rod movably penetrates the positioning groove and the positioning block is fitted with one side of the control board.

[0009] Preferably, one end of the positioning block is rounded, and one side of the positioning groove is rounded.

[0010] Preferably, two installation grooves are provided at one end of the ventilation duct, the two installation grooves respectively correspond to the inner walls of the two U-shaped clamping plates, and springs are installed inside the installation grooves.

[0011] Preferably, the number of the filter plates is two and they are respectively mounted at two ends of the mounting frame, and a cotton filter element located between the two filter plates is provided inside the mounting frame. Beneficial Effects

[0012] The utility model adopts the design of U-shaped clamping plate and limit plate, so the filter element can be quickly installed and disassembled, which greatly reduces the time required for replacing the filter screen and improves production efficiency. The simplified installation and disassembly process makes maintenance work easier, reduces dependence on professional technicians, and reduces maintenance costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0014] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0015] Figure 2 For this utility model Figure 1 Schematic diagram of the three-dimensional structure of the middle part;

[0016] Figure 3 For this utility model Figure 2 A three-dimensional cross-sectional view of

[0017] Figure 4 For this utility model Figure 3 A magnified view of the structure in center A;

[0018] Figure 5 For this utility model Figure 2 Exploded view of.

[0019] Figure 1-Figure 5 middle:

[0020] 1. Workshop wall; 2. Ventilation duct; 3. Ventilation fan; 4. Filter element; 5. Mounting piece; 11. Fixing block; 12. Elastic plastic rod; 13. Positioning block; 21. Accommodating groove; 22. Installation groove; 23. Spring; 41. Mounting frame; 42. Filter plate; 43. Cotton filter element; 51. U-shaped card plate; 52. Limiting plate; 53. Control board; 54. Positioning groove. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical solution and advantages of the embodiments of the present utility model clearer, the technical solution in the embodiments of the present utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the present utility model.

[0022] The present application provides an ultra-high cleanliness purification workshop for chip packaging, which is mainly used to solve the problem that after the ventilation ducts in traditional purification workshops are ventilated for a period of time, a large amount of pollutants will be attached to the filter net. In order to ensure the subsequent filtering effect, the filter net needs to be replaced regularly. However, the current filter net is generally fixed to the port of the ventilation duct by screws, and installation and removal will waste a lot of time. Some filter nets will also be stuck inside the ventilation duct, but it is not easy to remove. The following technical solutions are provided. Figure 1-Figure 5 Make a detailed description:

[0023] A super-high cleanliness purification workshop for chip packaging, mainly comprising a workshop wall 1, a ventilation duct 2, a ventilation fan 3, a filter 4 and a mounting member 5. The ventilation duct 2 is arranged horizontally and passes through the workshop wall 1. The ventilation fan 3 and the filter 4 are both installed inside the ventilation duct 2, and are used to suck air from one end and transport it to the inside of the workshop after passing through the filter 4. The design of the ventilation duct 2 ensures the continuity and uniformity of air flow, which helps to maintain the cleanliness and temperature and humidity balance inside the workshop. The efficient operation of the ventilation fan 3 ensures the continuity of the air purification process, which helps to quickly remove pollutants in the workshop and maintain the required cleanliness level. The filter 4 includes a mounting frame 41, and a filter plate 42 is installed between the inner walls of the mounting frame 41 to capture particles and pollutants in the air. The high-efficiency filtering performance of the filter 4 effectively removes particles in the air, ensuring that the air entering the workshop meets the ultra-high cleanliness requirements, which is crucial to the chip packaging process. There are two mounting members 5, which are respectively arranged on opposite sides of the ventilation duct 2. The mounting member 5 comprises a U-shaped card plate 51, an opening of the U-shaped card plate 51 is fixed on one side of the ventilation duct 2, two limiting plates 52 are fixed on the outer side wall of the U-shaped card plate 51, the mounting frame 41 is located between the two limiting plates 52, and a control board 53 is fixed on the outer side wall of the U-shaped card plate 51. During specific installation, the two U-shaped card plates 51 are installed on both sides of the mounting frame 41. Specifically, one side of the mounting frame 41 is fixed between the two limiting plates 52. At this time, the openings of the two U-shaped card plates 51 are respectively sleeved on the opposite sides of the ventilation duct 2. At this time, the mounting frame 41 can be installed inside the ventilation duct 2. The setting of the limiting plates 52 can limit the mounting frame 41. During disassembly, the two control boards 53 are controlled to move, and the two U-shaped card plates 51 are separated from the ventilation duct 2. The mounting frame 41 can be removed and the filter plate 42 can be replaced. The design of the mounting member 5 simplifies the installation and replacement process of the filter element 4, improves the maintenance efficiency, and reduces the production interruption time caused by replacing the filter plate 42.

[0024] For details, please refer to Figure 3 , Figure 4 and Figure 5 The longitudinal cross-section of the ventilation duct 2 is rectangular, and accommodating grooves 21 are provided on two opposite inner walls of the ventilation duct 2. One end of the two accommodating grooves 21 passes through one end of the ventilation duct 2, and two U-shaped clamps 51 correspond to the two accommodating grooves 21 respectively. The U-shaped clamp 51 is located on one side of the interior of the ventilation duct 2 and is movably clamped inside the accommodating groove 21. The advantage of such a design is that when the U-shaped clamp 51 is clamped on the ventilation duct 2, the U-shaped clamp 51 is located on one side of the interior of the ventilation duct 2 and is movably clamped inside the accommodating groove 21, which can ensure that the outer wall of the mounting frame 41 is tightly fitted with the inner wall of the ventilation duct 2, thereby preventing external pollutants from entering the interior of the workshop through the gap between the mounting frame 41 and the ventilation duct 2, thereby affecting chip production.

[0025] In this embodiment, in order to improve the stability of the filter element 4, please refer to Figure 2 , Figure 3 , Figure 4 and Figure 5 , fixings are installed on both sides of the ventilation duct 2, and the two fixings correspond to the two U-shaped card plates 51 respectively. The fixings include a fixing block 11 fixed horizontally on the ventilation duct 2, and a horizontal elastic plastic rod 12 is fixed on the fixing block 11. A vertical positioning block 13 is fixed at one end of the elastic plastic rod 12. A positioning groove 54 is penetrated on the control board 53, and the elastic plastic rod 12 movably penetrates the positioning groove 54 and the positioning block 13 is fitted with one side of the control board 53. The elastic plastic rod 12 and the positioning block 13 constitute a flexible connection mechanism. When installing, two Workers cooperate, one of them is responsible for installing the installation frame 41 between the two U-shaped card plates 51, and then the two U-shaped card plates 51 are sleeved on the ends of the ventilation duct 2, and another worker is responsible for pressing the two elastic plastic rods 12 until the U-shaped card plates 51 are completely installed on the ventilation duct 2. At this time, the positioning block 13 passes through the positioning groove 54, and another worker loosens the elastic plastic rod 12. The elastic plastic rod 12 is reset, and the two U-shaped card plates 51 can be fixed, allowing the filter element 4 to be stably positioned in the ventilation duct 2 and easy to remove. When disassembling, the opposite operation can be performed;

[0026] It should be noted that, in order to simplify the installation process, one end of the positioning block 13 has a rounded corner, and one side of the positioning groove 54 has a rounded corner. At this time, only one worker is needed to complete the installation. When the U-shaped card plate 51 is moved, the rounded corner on one side of the positioning groove 54 conflicts with the rounded corner on one end of the positioning block 13. Under the action of force, the elastic plastic rod 12 is deformed until the positioning block 13 passes through the positioning groove 54. This design simplifies the operation process and is more convenient for installation.

[0027] In order to simplify the disassembly process, two installation grooves 22 are opened at one end of the ventilation duct 2, and the two installation grooves 22 correspond to the inner walls of the two U-shaped card plates 51 respectively. A spring 23 is installed inside the installation groove 22. When disassembling, the two elastic plastic rods 12 are pressed, and the two positioning blocks 13 move to correspond to the positioning grooves 54. At this time, under the elastic force of the spring 23, the two U-shaped card plates 51 will be pushed to move a short distance to ensure that the positioning blocks 13 pass through the positioning grooves 54. At this time, the U-shaped card plates 51 can be removed by pulling the two control panels 53, which makes removal more convenient.

[0028] For further information, see Figure 3 and Figure 5There are two filter plates 42, which are respectively installed at both ends of the mounting frame 41. A cotton filter element 43 is arranged inside the mounting frame 41 between the two filter plates 42. The combination of the filter plate 42 and the cotton filter element 43 not only improves the filtering efficiency, but also the replaceability of the cotton filter element 43 ensures the filtering performance in long-term operation.

[0029] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An ultra-high cleanliness purification workshop for chip packaging, characterized in that: The invention comprises a workshop wall (1), a ventilation duct (2), a ventilation fan (3), a filter element (4) and a mounting member (5), wherein the ventilation duct (2) is arranged horizontally and passes through the workshop wall (1), the ventilation fan (3) and the filter element (4) are both installed inside the ventilation duct (2), the filter element (4) comprises a mounting frame (41), a filter plate (42) is installed between the inner walls of the mounting frame (41), the number of the mounting members (5) is two and they are respectively arranged on two opposite sides of the ventilation duct (2), the mounting member (5) comprises a U-shaped card plate (51), the opening of the U-shaped card plate (51) is clamped on one side of the ventilation duct (2), two limit plates (52) are fixed on the outer side wall of the U-shaped card plate (51), the mounting frame (41) is located between the two limit plates (52), and a control panel (53) is fixed on the outer side wall of the U-shaped card plate (51).

2. The ultra-high cleanliness purification workshop for chip packaging according to claim 1, characterized in that: The longitudinal cross-section of the ventilation duct (2) is rectangular. Two opposite inner walls of the ventilation duct (2) are provided with accommodating grooves (21). One end of each of the two accommodating grooves (21) passes through one end of the ventilation duct (2). The two U-shaped clamping plates (51) correspond to the two accommodating grooves (21) respectively. The U-shaped clamping plates (51) are located on one side of the interior of the ventilation duct (2) and are movably clamped inside the accommodating grooves (21).

3. The ultra-high cleanliness purification workshop for chip packaging according to claim 1, characterized in that: The ventilation duct (2) is provided with fixing parts on both sides opposite to each other, the two fixing parts respectively corresponding to the two U-shaped clamping plates (51), the fixing parts comprising a fixing block (11) fixed horizontally on the ventilation duct (2), a horizontal elastic plastic rod (12) fixed on the fixing block (11), a vertical positioning block (13) fixed on one end of the elastic plastic rod (12), a positioning groove (54) penetrating the control panel (53), the elastic plastic rod (12) movably penetrating the positioning groove (54) and the positioning block (13) being in contact with one side of the control panel (53).

4. The ultra-high cleanliness purification workshop for chip packaging according to claim 3, characterized in that: One end of the positioning block (13) has a rounded corner, and one side of the positioning groove (54) has a rounded corner.

5. The ultra-high cleanliness purification workshop for chip packaging according to claim 3, characterized in that: Two installation grooves (22) are provided at one end of the ventilation duct (2), the two installation grooves (22) respectively corresponding to the inner walls of the two U-shaped clamping plates (51), and a spring (23) is installed inside the installation groove (22).

6. The ultra-high cleanliness purification workshop for chip packaging according to claim 1, characterized in that: The number of the filter plates (42) is two and they are respectively mounted on two ends of the mounting frame (41); a cotton filter element (43) located between the two filter plates (42) is provided inside the mounting frame (41).

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