Heat treatment device for high-purity silver target production

Abstract

The utility model relates to a heat treatment device for high-purity silver target production, which comprises a bottom plate, two vertical plates are fixed on the upper surface of the bottom plate, connecting plates are fixed at the top ends of the two vertical plates, a same top plate is fixed at the top ends of the two connecting plates, and a purification mechanism is arranged below the top plate. A turnover mechanism is arranged on the right side of the vertical plate on the right side, the opposite sides of the two vertical plates are rotationally connected with movable columns through bearings, and the same atmosphere smelting furnace body is fixed between the two movable columns. According to the heat treatment device for high-purity silver target production, when the atmosphere smelting furnace body smelts silver target raw materials, internal impurities can be smelted into harmful gas and float upwards, after the harmful gas moves to the center of a heat conduction frame plate, part of heat is absorbed by the heat conduction frame plate, heat dissipation is conducted through cooling fins, and the harmful gas moves into an activated carbon plate; and the harmful gas is purified by the activated carbon plate and is guided by the fan, so that the harmful gas is purified and then discharged.

Description

Technical Field

[0001] The utility model relates to the technical field of silver target production, in particular to a heat treatment device for producing high-purity silver targets. Background Art

[0002] Physical vapor deposition is widely used in high-end manufacturing industries such as optics, electronics, and information. The target material used in PVD is one of the most important raw materials in the manufacturing process of liquid crystal displays, solar cells, and integrated circuits.

[0003] When producing high-purity silver targets, an atmospheric melting furnace is required to perform melting heat treatment on the silver raw materials. When passing through the atmospheric melting furnace, due to the presence of impurities inside the silver raw materials, the high temperature during melting will melt the impurities and cause the impurities to form harmful gases. Currently, the treatment of harmful gases is not perfect and is likely to cause environmental damage. Therefore, the present application proposes a heat treatment device for producing high-purity silver targets to solve the above problems. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides a heat treatment device for producing high-purity silver targets, which has the advantage of purifying harmful gases and solves the problem that the treatment of harmful gases is not perfect and easily causes damage to the environment.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: A heat treatment device for producing high-purity silver targets, comprising a bottom plate, two vertical plates are fixed to the upper surface of the bottom plate, the top ends of the two vertical plates are fixed with connecting plates, the top ends of the two connecting plates are fixed with the same top plate, a purification mechanism is provided below the top plate, a flip mechanism is provided on the right side of the right vertical plate, the opposite sides of the two vertical plates are rotatably connected with movable columns through bearings, and the same atmospheric smelting furnace body is fixed between the two movable columns;

[0006] The purification mechanism comprises two electric push rods fixed to the lower surface of the top plate, the same purification box is fixed to the outer side of the output shafts of the two electric push rods, two purification racks are fixed between the left and right side walls of the inner cavity of the purification box by bolts, activated carbon plates are placed inside the two purification racks, the inner wall of the inner cavity of the purification box is fixed with the same heat-conducting frame plate, a plurality of heat sinks are fixed to the outer side of the purification box, a mounting cover is fixed to the lower surface of the purification box, an air guide box is fixed to the upper surface of the purification box, and a fan is fixed to the inner bottom wall of the air guide box;

[0007] The flip mechanism includes a motor fixed on the right side of the right vertical plate, a first gear is fixed on the outer side of the motor output shaft, a second gear is meshed on the outer side of the first gear, and a cylinder is fixed on the left side of the left vertical plate.

[0008] Furthermore, the installation cover is located vertically above the atmospheric smelting furnace body, and a common purification port is provided between the installation cover and the purification box.

[0009] Furthermore, a replacement door is hinged on the front of the purification box, and the purification box is connected to the air guide box.

[0010] Furthermore, both upper and lower sides of the air guide box are provided with flow openings, and the two heat conduction frame plates are both located above the heat conduction frame plate.

[0011] Furthermore, a positioning block is fixed on the outer side of the cylinder output shaft, an arc-shaped positioning seat is fixed on the left side of the atmospheric smelting furnace body, and a plurality of slots which are gap-matched with the positioning block are opened on the left side of the arc-shaped positioning seat.

[0012] Furthermore, the second gear is fixed on the outer side of the right movable column, and the outer diameter of the second gear is greater than the outer diameter of the first gear.

[0013] Furthermore, a protection box is fixed to the left side of the vertical plate on the right side, and the first gear and the second gear are both located in the protection box.

[0014] Compared with the prior art, the technical solution of this application has the following beneficial effects:

[0015] 1. The heat treatment device for the production of high-purity silver targets, when the main body of the atmospheric smelting furnace melts the silver target raw materials, the impurities inside will be melted into harmful gases and float upward. When the harmful gases move to the center of the heat-conducting frame plate, part of the heat can be absorbed by the heat-conducting frame plate and dissipated through the heat sink. Then the harmful gases move to the inside of the activated carbon plate and are purified by the activated carbon plate. Finally, the fans are used to guide the harmful gases so that they are discharged after being purified.

[0016] 2. The heat treatment device for producing high-purity silver targets starts the motor, so that the first gear starts to drive the second gear to rotate, so that the main body of the atmospheric melting furnace starts to turn over. When the main body of the atmospheric melting furnace turns over a certain angle, the cylinder is started to insert the positioning block into the interior of the positioning seat, providing certain support for the main body of the atmospheric melting furnace, thereby achieving the purpose of turning the main body of the atmospheric melting furnace for easy discharge. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the structure of the utility model;

[0018] Figure 2 This is a schematic diagram of the purification mechanism of the utility model;

[0019] Figure 3 It is a three-dimensional diagram of the structure of the purification box of the utility model;

[0020] Figure 4 It is a schematic diagram of the turning mechanism of the utility model.

[0021] In the figure: 1 bottom plate, 2 purification mechanism, 201 electric push rod, 202 purification box, 203 activated carbon plate, 204 heat conduction frame plate, 205 heat sink, 206 installation cover, 207 air guide box, 208 fan, 3 vertical plate, 4 flip mechanism, 401 motor, 402 first gear, 403 second gear, 404 cylinder, 5 connecting plate, 6 top plate, 7 atmospheric smelting furnace body. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] See also Figure 1 A heat treatment device for producing a high-purity silver target in this embodiment includes a bottom plate 1, two vertical plates 3 are fixed to the upper surface of the bottom plate 1, connecting plates 5 are fixed to the tops of the two vertical plates 3, the same top plate 6 is fixed to the tops of the two connecting plates 5, a purification mechanism 2 is provided below the top plate 6, a flip mechanism 4 is provided on the right side of the right vertical plate 3, movable columns are rotatably connected to the opposite sides of the two vertical plates 3 through bearings, and the same atmospheric smelting furnace body 7 is fixed between the two movable columns.

[0024] See also Figure 2-3 In order to purify harmful gases before discharge, the purification mechanism 2 in this embodiment includes two electric push rods 201 fixed to the lower surface of the top plate 6, the same purification box 202 is fixed to the outer side of the output shaft of the two electric push rods 201, and two purification racks are fixed between the left and right side walls of the inner cavity of the purification box 202 by bolts. Activated carbon plates 203 are placed inside the two purification racks, and the same heat-conducting frame plate 204 is fixed to the inner wall of the inner cavity of the purification box 202. A plurality of heat sinks 205 are fixed to the outer side of the purification box 202, a mounting cover 206 is fixed to the lower surface of the purification box 202, an air guide box 207 is fixed to the upper surface of the purification box 202, and a fan 208 is fixed to the inner bottom wall of the air guide box 207.

[0025] In this example, the installation cover 206 is located vertically above the atmospheric smelting furnace body 7. The silver target raw material is poured into the atmospheric smelting furnace body 7. Then, the two electric push rods 201 are started to cover the top of the atmospheric smelting furnace body 7. The same purification port is opened between the installation cover 206 and the purification box 202. The front of the purification box 202 is hinged with a replacement door. The purification box 202 is connected to the air guide box 207. When the atmospheric smelting furnace body 7 is melting the silver target raw material, the inside Some impurities will be melted into harmful gases and float upward. When the harmful gases move to the center of the heat-conducting frame 204, part of the heat can be absorbed by the heat-conducting frame 204 and dissipated through the heat sink 205. Flow ports are opened on the upper and lower sides of the air guide box 207. The two heat-conducting frames 204 are both located above the heat-conducting frame 204. The harmful gases move to the inside of the activated carbon plate 203 and are purified by the activated carbon plate 203. Finally, they are guided by the fan 208 to purify the harmful gases and then discharge them.

[0026] It should be noted that when the atmospheric smelting furnace body 7 melts the silver target raw material, its internal impurities will be melted into harmful gases and float upward. When the harmful gases move to the center of the heat conducting frame plate 204, part of the heat can be absorbed by the heat conducting frame plate 204 and dissipated through the heat sink 205. Then the harmful gases move to the inside of the activated carbon plate 203 and are purified by the activated carbon plate 203. Finally, they are guided by the fan 208 so that the harmful gases are discharged after being purified.

[0027] See also Figure 4 In order to facilitate discharging, the flipping mechanism 4 in this embodiment includes a motor 401 fixed to the right side of the right vertical plate 3, a first gear 402 is fixed to the outside of the output shaft of the motor 401, a second gear 403 is meshed with the outside of the first gear 402, and a cylinder 404 is fixed to the left side of the left vertical plate 3.

[0028] In this example, a positioning block is fixed to the outer side of the output shaft of the cylinder 404, an arc-shaped positioning seat is fixed to the left side of the atmospheric melting furnace body 7, and a plurality of slots that are gap-matched with the positioning block are provided on the left side of the arc-shaped positioning seat. The second gear 403 is fixed to the outer side of the right movable column, and the two electric push rods 201 are started to move the mounting cover 206 upward, and the motor 401 is started to make the first gear 402 start to drive the second gear 403 to rotate, so that the right movable column starts to rotate, thereby causing the atmospheric melting furnace body 7 to start to flip, and the outer diameter of the second gear 403 is larger than the outer diameter of the first gear 402. When the atmospheric melting furnace body 7 flips over a certain angle, the cylinder 404 is started to insert the positioning block into the interior of the positioning seat to provide certain support for the atmospheric melting furnace body 7. At this time, the smelted high-purity silver target can be discharged, and a protective box is fixed to the left side of the right vertical plate 3, and the first gear 402 and the second gear 403 are both located in the protective box.

[0029] It should be noted that, when the motor 401 is started, the first gear 402 starts to drive the second gear 403 to rotate, so that the atmospheric smelting furnace body 7 starts to flip. When the atmospheric smelting furnace body 7 flips to a certain angle, the cylinder 404 is started to insert the positioning block into the interior of the positioning seat, thereby providing certain support for the atmospheric smelting furnace body 7, thereby achieving the purpose of flipping the atmospheric smelting furnace body 7 to facilitate discharge.

[0030] It can be understood that the electrical components appearing in the text are all electrically connected to the main controller and the power supply and the electrical components appearing in the text are all conventionally known devices, and this application will not go into too much detail. The main controller can be a conventionally known device that plays a control role for a computer, etc. The control circuit of the main controller can be realized by simple programming by technicians in this field, and the provision of power supply is also common knowledge in this field. In addition, the utility model is mainly used to protect mechanical devices, so the utility model will not explain the control method and circuit connection in detail. At the same time, the parts not described in detail in the utility model are all common knowledge to technicians in this field.

[0031] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0032] The working principle of the above embodiment is:

[0033] (1) When the heat treatment device for producing high-purity silver targets is needed, the silver target raw material is poured into the interior of the atmospheric smelting furnace body 7, and then the two electric push rods 201 are started to cover the top of the atmospheric smelting furnace body 7. When the atmospheric smelting furnace body 7 melts the silver target raw material, its internal impurities will be melted into harmful gases and float upward. When the harmful gases move to the center of the heat-conducting frame plate 204, part of the heat can be absorbed by the heat-conducting frame plate 204 and dissipated through the heat sink 205. Then the harmful gases move to the interior of the activated carbon plate 203 and are purified by the activated carbon plate 203. Finally, the fans 208 are used to guide the harmful gases so that they are discharged after being purified.

[0034] (2) After the heat treatment of the silver target raw material is completed, the two electric push rods 201 are started to move the installation cover 206 upward, and the motor 401 is started to make the first gear 402 start to drive the second gear 403 to rotate, so that the right movable column starts to rotate, thereby causing the atmospheric melting furnace body 7 to start to turn over. After the atmospheric melting furnace body 7 turns over a certain angle, the cylinder 404 is started to insert the positioning block into the interior of the positioning seat to provide certain support for the atmospheric melting furnace body 7. At this time, the smelted high-purity silver target can be discharged.

[0035] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0036] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that many changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention.

Claims

1. A heat treatment device for producing a high-purity silver target, comprising a base plate (1), characterized in that: Two vertical plates (3) are fixed on the upper surface of the bottom plate (1), and connecting plates (5) are fixed on the top ends of the two vertical plates (3). The same top plate (6) is fixed on the top ends of the two connecting plates (5). A purification mechanism (2) is provided below the top plate (6), and a turning mechanism (4) is provided on the right side of the right vertical plate (3). The opposite sides of the two vertical plates (3) are rotatably connected to movable columns through bearings, and the same atmospheric smelting furnace body (7) is fixed between the two movable columns; The purification mechanism (2) comprises two electric push rods (201) fixed to the lower surface of the top plate (6); the same purification box (202) is fixed to the outer sides of the output shafts of the two electric push rods (201); two purification racks are fixed between the left and right side walls of the inner cavity of the purification box (202) by bolts; activated carbon plates (203) are placed inside the two purification racks; the same heat conduction frame plate (204) is fixed to the inner wall of the inner cavity of the purification box (202); a plurality of heat sinks (205) are fixed to the outer side of the purification box (202); a mounting cover (206) is fixed to the lower surface of the purification box (202); an air guide box (207) is fixed to the upper surface of the purification box (202); and a fan (208) is fixed to the inner bottom wall of the air guide box (207); The turning mechanism (4) comprises a motor (401) fixed to the right side of the right vertical plate (3), a first gear (402) fixed to the outer side of the output shaft of the motor (401), a second gear (403) meshing with the outer side of the first gear (402), and a cylinder (404) fixed to the left side of the left vertical plate (3).

2. A heat treatment device for producing high-purity silver targets according to claim 1, characterized in that: The installation cover (206) is located vertically above the atmospheric smelting furnace body (7), and a common purification port is provided between the installation cover (206) and the purification box (202).

3. A heat treatment device for producing high-purity silver targets according to claim 1, characterized in that: A replacement door is hingedly connected to the front of the purification box (202), and the purification box (202) is connected to the air guide box (207).

4. A heat treatment device for producing high-purity silver targets according to claim 1, characterized in that: The air guide box (207) is provided with flow openings on both the upper and lower sides, and the two heat-conducting frame plates (204) are both located above the heat-conducting frame plates (204).

5. A heat treatment device for producing high-purity silver targets according to claim 1, characterized in that: A positioning block is fixed on the outer side of the output shaft of the cylinder (404), and an arc-shaped positioning seat is fixed on the left side of the atmospheric smelting furnace body (7). The left side of the arc-shaped positioning seat is provided with a plurality of slots that are gap-matched with the positioning block.

6. A heat treatment device for producing high-purity silver targets according to claim 1, characterized in that: The second gear (403) is fixed on the outer side of the right movable column, and the outer diameter of the second gear (403) is greater than the outer diameter of the first gear (402).

7. A heat treatment device for producing high-purity silver targets according to claim 1, characterized in that: A protection box is fixed to the left side of the right vertical plate (3), and the first gear (402) and the second gear (403) are both located in the protection box.

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