Target material hole site testing fixture

Abstract

The utility model relates to the technical field of target material detection tools, and discloses a target material hole site detection tool comprising a connecting rod, the bottom end of the connecting rod is fixedly connected with a first insertion stick, the outer wall of the connecting rod is provided with a plurality of detection rods, one end of each detection rod is symmetrically provided with a first connecting plate, and the other end of each detection rod is provided with a second connecting plate. Second connecting plates are fixedly connected to one sides of the first connecting plates through a plurality of bolts, and a fixing ring is fixedly arranged between the two second connecting plates. According to the utility model, the first connecting plate, the bolt, the second connecting plate and the fixing ring are arranged, the detection rods are fixedly connected to the connecting rods, and a plurality of detection rods can be connected to the connecting rods at the same time, so that the device can detect the hole site sizes of a plurality of target materials at the same time, the detection efficiency is improved, and the working intensity of detection personnel is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of target material inspection tools, in particular to a target material hole position inspection tool. Background Art

[0002] Chips are an essential component of electronic devices, and the manufacture of chips is inseparable from sputtering targets. In the chip manufacturing process, the target needs to be fixed on the sputtering machine for magnetron sputtering operations. In order to ensure the stability and safety of sputtering, the size of the hole used to fix the target is particularly important.

[0003] In the prior art, when detecting the hole size of a fixed target material, usually only one hole can be detected at the same time, resulting in low detection efficiency. Utility Model Content

[0004] The purpose of the utility model is to provide a target hole position inspection tool to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a target material hole position inspection tool, comprising a connecting rod, a first plug is fixedly connected to the bottom end of the connecting rod, a plurality of detection rods are arranged on the outer wall of the connecting rod, a first connecting plate is symmetrically arranged at one end of the detection rod, a second connecting plate is fixedly connected to one side of the first connecting plate by a plurality of bolts, and a fixing ring is fixedly arranged between the two second connecting plates.

[0006] The following improvements are made in the present application: a slide groove is provided through the top of the detection rod, a slider is provided inside the slide groove, a threaded hole is provided through the top of the slider, an adjusting rod is threadedly connected to the inside of the threaded hole, an adjusting block is fixedly provided on the top of the adjusting rod, and a second plug is fixedly connected to the bottom end of the adjusting rod.

[0007] The following improvement is made in the solution of the present application: a first limit block is fixedly provided at the top end of the sliding block, and a second limit block is fixedly provided at the bottom end of the sliding block.

[0008] The following improvements are made in the solution of the present application: a marking block is provided on the top of the first limit block, and a scale line is provided on one side of the detection rod.

[0009] The following improvement is made in the solution of the present application: the first plug and the second plug are both arranged in a cone shape, and the diameters of the two gradually decrease from top to bottom.

[0010] Compared with the prior art, the utility model provides a target hole position inspection tool, which has the following beneficial effects:

[0011] The target hole position inspection tool is provided with a first connecting plate, bolts, a second connecting plate and a fixing ring, wherein a detection rod is placed on one side of the connecting rod, and the fixing ring is placed on the other side of the connecting rod, and the first connecting plate and the second connecting plate are fixedly connected by a plurality of bolts, so that the detection rod is fixedly connected to the connecting rod, and a plurality of detection rods can be connected to the connecting rod at the same time, so that the device can inspect the hole position sizes of a plurality of target materials at the same time, thereby improving the inspection efficiency and reducing the work intensity of the inspection personnel. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative labor:

[0013] Figure 1 It is a three-dimensional diagram of the external structure of the utility model;

[0014] Figure 2 For the utility model Figure 1 A magnified view of the structure at center;

[0015] Figure 3 This is a schematic diagram of the slider structure of the utility model.

[0016] In the figure, 1 is a connecting rod; 2 is a first plug; 3 is a detection rod; 4 is a first connecting plate; 5 is a bolt; 6 is a second connecting plate; 7 is a fixing ring; 8 is a slide groove; 9 is a slider; 10 is a threaded hole; 11 is an adjusting rod; 12 is an adjusting block; 13 is a second plug; 14 is a first limit block; 15 is a second limit block; 16 is an identification block; 17 is a scale line. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0018] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0019] Example

[0020] like Figure 1-3 As shown, a target hole position inspection tool comprises a connecting rod 1, a first plug 2 is fixedly connected to the bottom end of the connecting rod 1, a plurality of detection rods 3 are arranged on the outer wall of the connecting rod 1, a first connecting plate 4 is symmetrically arranged at one end of the detection rod 3, a second connecting plate 6 is fixedly connected to one side of the first connecting plate 4 by a plurality of bolts 5, and a fixing ring 7 is fixedly arranged between the two second connecting plates 6.

[0021] A slide groove 8 is provided at the top end of the detection rod 3, a slider 9 is provided inside the slide groove 8, a threaded hole 10 is provided at the top end of the slider 9, an adjusting rod 11 is threadedly connected to the inside of the threaded hole 10, an adjusting block 12 is fixedly provided at the top end of the adjusting rod 11, and a second plug 13 is fixedly connected to the bottom end of the adjusting rod 11.

[0022] A first limit block 14 is fixedly provided at the top of the slider 9, and a second limit block 15 is fixedly provided at the bottom of the slider 9. The upper and lower ends of the slider 9 are limited by the first limit block 14 and the second limit block 15, thereby improving the movement effect of the slider 9 in the slide groove 8.

[0023] A marking block 16 is disposed on the top of the first limit block 14 , and a scale line 17 is disposed on one side of the detection rod 3 .

[0024] The first plug 2 and the second plug 13 are both arranged in a cone shape, and their diameters gradually decrease from top to bottom, so that the device can be applied to target holes of different aperture sizes, thereby improving the application range of the device and thus improving the practicability of the device.

[0025] Working principle: When in use, the detection rod 3 is placed on one side of the connecting rod 1, and the fixing ring 7 is placed on the other side of the connecting rod 1. The first connecting plate 4 and the second connecting plate 6 are fixedly connected by a plurality of bolts 5, so that the detection rod 3 is fixedly connected to the connecting rod 1, and then the slider 9 is moved so that the second plugging rod 13 is located directly above the target hole, and the adjusting block 12 is rotated. The adjusting block 12 drives the adjusting rod 11 to rotate, and the adjusting rod 12 is threadedly connected to the threaded hole 10 at the top of the slider 9, so that the adjusting rod 12 drives the second plugging rod 13 to move downward, so that the second plugging rod 13 enters the target hole, and the scale line 17 at the position of the identification block 16 is observed to record the measured length; when there are multiple target holes that need to be measured, multiple detection rods 3 can be installed on the connecting rod 1, so that the device can detect the hole sizes of multiple targets at the same time, thereby improving the detection efficiency and reducing the workload of the detection personnel.

Claims

1. A target hole position inspection tool, characterized in that: The invention comprises a connecting rod (1), the bottom end of which is fixedly connected to a first plug rod (2), a plurality of detection rods (3) are arranged on the outer wall of the connecting rod (1), a first connecting plate (4) is symmetrically arranged at one end of the detection rod (3), one side of the first connecting plate (4) is fixedly connected to a second connecting plate (6) via a plurality of bolts (5), and a fixing ring (7) is fixedly arranged between the two second connecting plates (6).

2. A target hole position inspection tool according to claim 1, characterized in that: The top end of the detection rod (3) is penetrated by a slide groove (8), the interior of the slide groove (8) is provided with a slider (9), the top end of the slider (9) is penetrated by a threaded hole (10), the interior of the threaded hole (10) is threadedly connected to an adjustment rod (11), the top end of the adjustment rod (11) is fixedly provided with an adjustment block (12), and the bottom end of the adjustment rod (11) is fixedly connected to a second plug (13).

3. A target hole position inspection tool according to claim 2, characterized in that: A first limiting block (14) is fixedly arranged at the top end of the sliding block (9), and a second limiting block (15) is fixedly arranged at the bottom end of the sliding block (9).

4. A target hole position inspection tool according to claim 3, characterized in that: A marking block (16) is arranged at the top end of the first limit block (14), and a scale line (17) is arranged on one side of the detection rod (3).

5. The target hole position inspection tool according to claim 2, characterized in that: The first plug (2) and the second plug (13) are both arranged in a cone shape, and the diameters of the two gradually decrease from top to bottom.

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