Clean room temperature and humidity control system

Abstract

The utility model discloses a clean room temperature and humidity control system which comprises an air inlet pipeline, a branch pipeline is fixed at the bottom of the air inlet pipeline, automatic valve assemblies are fixed at the two ends, away from the air inlet pipeline, of the branch pipeline, each automatic valve assembly comprises a shell, a motor is fixed at the top of each shell, and a gear is fixed on an output shaft of each motor. A fixed baffle is arranged on the side, away from the branch pipeline, of the shell, the middle of the fixed baffle is rotationally connected with a rotating baffle through a rotating shaft, the rotating baffle is located in the shell, a second gear is arranged on the edge of the rotating baffle and connected with the second gear in a meshed mode, and air outlets are formed in the two sides of the shell. By means of the fixed baffle, the rotating baffle and the motor, when the temperature of a designated area reaches a specified temperature range, the rotating baffle rotates to be matched with the fixed baffle under the action of the motor to block gas from flowing to the comprehensive pipeline, the blocked gas can flow to the adjacent comprehensive pipeline through the circulating pipeline, and rising or lowering of the temperature of the adjacent area can be accelerated.

Description

Technical Field

[0001] The utility model relates to the technical field of temperature and humidity control, in particular to a clean room and humidity control system. Background Art

[0002] Clean room, also known as dust-free workshop, clean room or clean room, refers to a closed room with strict requirements on air temperature, humidity, pressure, and especially dust concentration. The main function of a clean room is to control the cleanliness, temperature and humidity of the atmosphere that products (such as silicon chips, etc.) come into contact with, so that the products can be produced and manufactured in a good environment.

[0003] In the production of products in a clean room, large equipment is generally required, but not all equipment may be turned on according to production needs. When the equipment is running, it will generate heat, which will cause a large difference in temperature and humidity between the equipment-on area and the equipment-off area. The heating or cooling system of the clean room is unified, and it is difficult to adjust and control the temperature and humidity locally, so it is difficult to adapt to the increasingly stringent clean room standards. Therefore, it is urgent to design a clean room temperature and humidity control system to solve the above problems. Utility Model Content

[0004] The utility model aims to provide a clean room temperature and humidity control system to solve the above-mentioned deficiencies in the prior art.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A clean room temperature and humidity control system, comprising an air intake duct, a branch duct being fixed at the bottom of the air intake duct, automatic valve assemblies being fixed at both ends of the branch duct away from the air intake duct, the automatic valve assembly comprising a shell, a motor being fixed at the top of the shell, a gear being fixed to the output shaft of the motor, a fixed baffle being arranged at a side of the shell away from the branch duct, a rotating baffle being rotatably connected to the middle portion of the fixed baffle via a rotating shaft, and the rotating baffle being located inside the shell, a second gear being arranged at the edge of the rotating baffle, and the second gear being meshed with the gear, air outlets being arranged at both sides of the shell, a circulation duct being fixedly connected to the outer wall of the air outlet, an integrated pipeline being fixedly connected to one side of the shell where the fixed baffle is arranged, a fan being fixed at the bottom of the integrated pipeline, a humidifier being fixed to one side of the integrated pipeline, and a water pipe being fixed to the side of the humidifier away from the integrated pipeline.

[0007] Preferably, a temperature and humidity controller is correspondingly provided in the area below the fan, and the temperature and humidity controller is connected to the motor and the humidifier through wires.

[0008] Preferably, area A, area B, area C, and area D are arranged on both sides of the air intake duct, and fans are installed above area A, area B, area C, and area D respectively.

[0009] Preferably, the air intake duct is located above the circulation duct, and the circulation duct is connected to each automatic valve assembly within the range.

[0010] Preferably, both the fixed baffle and the rotating baffle are provided with fan-shaped air outlets, and the fan-shaped air outlets are in the shape of a quarter circle.

[0011] Preferably, the fixed baffle and the rotating baffle are both disc-shaped, and the rotation angle of the rotating baffle along the fixed baffle is from zero to ninety degrees.

[0012] In the above technical solution, the utility model provides a clean room temperature and humidity control system, the beneficial effects are:

[0013] (1) By setting up a fixed baffle, a rotating baffle and a motor, when the temperature in a designated area reaches a specified temperature range, the rotating baffle rotates under the action of the motor to cooperate with the fixed baffle to block the gas from flowing to the integrated pipeline. The blocked gas will flow to the adjacent integrated pipeline through the circulation pipeline, which can accelerate the increase or decrease of the temperature in the adjacent area.

[0014] (2) Through the automatic valve assembly, circulation pipeline and temperature and humidity controller, the gas in the circulation pipeline will form an internal circulation. When the temperature and humidity controller detects that the temperature of the clean room needs to be changed, it will control the automatic valve assembly to open and release the gas in the circulation pipeline into the designated area for temperature control.

[0015] (3) Through the integrated pipeline and fan, when the clean room needs to use the gas in the circulating pipeline, the fan is turned on to draw the gas in the circulating pipeline into the clean room through the integrated pipeline, and at the same time, the gas flow in the circulating pipeline can be accelerated. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present utility model. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0017] Figure 1 A schematic diagram of the three-dimensional structure of pipelines provided in an embodiment of a clean room temperature and humidity control system of the utility model.

[0018] Figure 2 A schematic diagram of a clean room top view provided in an embodiment of a clean room temperature and humidity control system of the utility model.

[0019] Figure 3 The present invention is a schematic diagram of a partial cross-sectional structure of an automatic valve assembly provided in an embodiment of a clean room temperature and humidity control system according to the present invention.

[0020] 1 air inlet duct, 2 branch duct, 3, fan-shaped air outlet, 4 automatic valve assembly, 5 housing, 6 motor, 7 gear, 8 fixed baffle, 9 rotating baffle, 10 gear two, 11 air outlet, 12 circulation duct, 13 integrated duct, 14 fan, 15 humidifier, 16 water pipe, 17 temperature and humidity controller. DETAILED DESCRIPTION

[0021] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0022] like Figure 1-3 As shown, a clean room temperature and humidity control system provided by an embodiment of the utility model comprises an air intake duct 1, a branch duct 2 is fixed at the bottom of the air intake duct 1, automatic valve assemblies 4 are fixed at both ends of the branch duct 2 away from the air intake duct 1, the automatic valve assembly 4 comprises a shell 5, a motor 6 is fixed on the top of the shell 5, a gear 7 is fixed on the output shaft of the motor 6, a fixed baffle 8 is arranged on the side of the shell 5 away from the branch duct 2, a rotating baffle 9 is rotatably connected to the middle part of the fixed baffle 8 through a rotating shaft, and the rotating baffle 9 is located inside the shell 5, a gear 2 10 is arranged on the edge of the rotating baffle 9, and the gear 2 10 is meshed with the gear 7, air outlets 11 are arranged on both sides of the shell 5, a circulation duct 12 is fixedly connected to the outer wall of the air outlet 11, an integrated duct 13 is fixedly connected to the side of the shell 5 where the fixed baffle 8 is arranged, a fan 14 is fixed at the bottom of the integrated duct 13, a humidifier 15 is fixed on one side of the integrated duct 13, and a water pipe 16 is fixed on the side of the humidifier 15 away from the integrated duct 13.

[0023] Specifically, in this embodiment, an air intake pipe 1 is included, a branch pipe 2 is fixed at the bottom of the air intake pipe 1, and the air after air conditioning enters the branch pipe 2 from the air intake pipe 1. Automatic valve assemblies 4 are fixed at both ends of the branch pipe 2 away from the air intake pipe 1. The automatic valve assembly 4 includes a shell 5, a motor 6 is fixed on the top of the shell 5, and a gear 7 is fixed on the output shaft of the motor 6. A fixed baffle 8 is provided on the side of the shell 5 away from the branch pipe 2. A rotating baffle 9 is rotatably connected to the middle part of the fixed baffle 8 through a rotating shaft, and the rotating baffle 9 is located inside the shell 5. A gear 2 10 is provided on the edge of the rotating baffle 9, and the gear 2 10 is meshed with the gear 7. When the motor 6 is operated, the gear 2 10 is connected to the gear 7. The lower gear 7 cooperates with the gear 2 10 to drive the rotating baffle 9 to rotate, so as to realize the effect of the automatic valve. Air outlets 11 are arranged on both sides of the shell 5, and the outer wall of the air outlet 11 is fixedly connected with the circulation pipe 12. The side of the shell 5 provided with the fixed baffle 8 is fixedly connected with the integrated pipe 13. The gas flow to the integrated pipe 13 or the circulation pipe 12 can be controlled by the automatic valve assembly 4. A fan 14 is fixed at the bottom of the integrated pipe 13, and a humidifier 15 is fixed on one side of the integrated pipe 13. A water pipe 16 is fixed on the side of the humidifier 15 away from the integrated pipe 13. Under the action of the fan 14, the humidified gas and the gas in the circulation pipe 12 can be drawn into the clean room.

[0024] The utility model provides a clean room temperature and humidity control system, which is provided with a fixed baffle 8, a rotating baffle 9 and a motor 6. When the temperature in a designated area reaches a specified temperature range, the rotating baffle 9 rotates under the action of the motor 6 to cooperate with the fixed baffle 8 to block the gas from flowing to the integrated pipeline 13. The blocked gas will flow to the adjacent integrated pipeline 13 through the circulation pipeline 12, which can accelerate the increase or decrease of the temperature in the adjacent area.

[0025] In an embodiment provided by the utility model, a temperature and humidity controller 17 is correspondingly provided in the area below the fan 14, and the temperature and humidity controller 17 is connected to the motor 6 and the humidifier 15 through a wire. Through the temperature and humidity controller 17, automatic control of the temperature and humidity of the clean room can be achieved.

[0026] In another embodiment provided by the utility model, area A, area B, area C, and area D are arranged on both sides of the air intake duct 1, and the fan 14 is correspondingly installed above area A, area B, area C, and area D. By setting corresponding air supply ducts for designated areas, the temperature and humidity of the clean room can be adjusted more efficiently.

[0027] In another embodiment provided by the utility model, the air intake pipe 1 is located above the circulation pipe 12, and the circulation pipe 12 is connected to each automatic valve assembly 4 within the range. The excess gas can be delivered to the area where it is needed through the circulation pipe 12, thereby improving the efficiency of temperature control.

[0028] In an embodiment provided by the utility model, fan-shaped air outlets 3 are provided inside the fixed baffle 8 and the rotating baffle 9, and the fan-shaped air outlets 3 are quarter-circles. The gas passing rate of the fan-shaped air outlets can be controlled by rotating and misaligning the rotating baffle 9, thereby controlling the efficiency of temperature regulation.

[0029] In another embodiment provided by the utility model, the fixed baffle 8 and the rotating baffle 9 are both disc-shaped, and the rotation angle of the rotating baffle 9 along the fixed baffle 8 is zero to ninety degrees. The rotation of the rotating baffle 9 from zero to ninety degrees can just control the fan-shaped air outlet 3 to be fully opened and fully closed.

[0030] In another embodiment provided by the utility model, the circulation pipes between the branch pipes 2 and the automatic valve assembly 4 are five meters long. By arranging the air supply pipes at equal distances, the temperature and humidity of the clean room can be controlled more efficiently.

[0031] Working principle: When in use, the gas after the temperature is changed by the air conditioner flows to the branch pipe 2 through the air inlet pipe 1, and then flows to the integrated pipe 13 through the automatic valve assembly 4 connected to the branch pipe 2. Then, the gas is drawn into the clean room under the action of the fan 14. At the same time, if the temperature and humidity controller 17 detects that the temperature of the designated area reaches the specified temperature range, it will control the motor 6 to rotate, and the motor 6 drives the gear 2 10 meshing with the gear 7 to rotate. Because the gear 2 10 is integrated with the rotating baffle 9, the rotating baffle 9 rotates and forms a closed state with the fixed baffle 8, blocking the fan-shaped air outlet 3 so that the gas cannot flow to the integrated pipe 13. Then, the gas will flow to the circulation pipe 12 through the air outlet 11 to form an internal circulation of the gas, and then flow to the adjacent integrated pipe 13 to accelerate the heating or cooling of the adjacent area. At the same time, the gas treated by the air conditioner is relatively dry. If the temperature and humidity controller 17 detects that the air humidity in the clean room is lower than the set value range, it will control the humidifier 15 to humidify the air in the clean room.

[0032] The above only describes some exemplary embodiments of the present invention by way of illustration. It is undoubted that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A clean room temperature and humidity control system, comprising an air intake duct (1), characterized in that: A branch pipe (2) is fixed at the bottom of the air intake pipe (1), and automatic valve assemblies (4) are fixed at both ends of the branch pipe (2) away from the air intake pipe (1), and the automatic valve assembly (4) comprises a housing (5), a motor (6) is fixed at the top of the housing (5), and a gear (7) is fixed to the output shaft of the motor (6), and a fixed baffle (8) is provided on the side of the housing (5) away from the branch pipe (2), and a rotating baffle (9) is rotatably connected to the middle part of the fixed baffle (8) via a rotating shaft, and the rotating baffle (9) is located inside the housing (5), and the rotating baffle (8) is arranged on the side of the housing (5) away from the branch pipe (2). A second gear (10) is provided at the edge of the plate (9), and the second gear (10) is meshed with the gear (7). Air outlets (11) are provided on both sides of the housing (5), and the outer wall of the air outlet (11) is fixedly connected to a circulation pipeline (12). The housing (5) is provided with a fixed baffle (8) on one side thereof, which is fixedly connected to an integrated pipeline (13). A fan (14) is fixed at the bottom of the integrated pipeline (13). A humidifier (15) is fixed on one side of the integrated pipeline (13), and a water pipe (16) is fixed on the side of the humidifier (15) away from the integrated pipeline (13).

2. A clean room temperature and humidity control system according to claim 1, characterized in that: A temperature and humidity controller (17) is correspondingly arranged in the area below the fan (14), and the temperature and humidity controller (17) is connected to the motor (6) and the humidifier (15) through a wire.

3. A clean room temperature and humidity control system according to claim 1, characterized in that: Area A, area B, area C and area D are arranged on both sides of the air intake duct (1), and fans (14) are installed above area A, area B, area C and area D respectively.

4. A clean room temperature and humidity control system according to claim 1, characterized in that: The air intake pipe (1) is located above the circulation pipe (12), and the circulation pipe (12) is connected to each automatic valve assembly (4) within the range.

5. A clean room temperature and humidity control system according to claim 1, characterized in that: The fixed baffle (8) and the rotating baffle (9) are both provided with fan-shaped air outlets (3) inside, and the fan-shaped air outlets (3) are in the shape of a quarter circle.

6. A clean room temperature and humidity control system according to claim 1, characterized in that: The fixed baffle (8) and the rotating baffle (9) are both disc-shaped, and the rotating baffle (9) has a rotation angle along the fixed baffle (8) ranging from zero to ninety degrees.

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