Paper suction mechanism and equipment provided with same

Abstract

The utility model provides a paper suction mechanism which comprises a suction cup and a rubber mat arranged below the suction cup, and a plurality of vent holes are formed in the suction cup and penetrate through the rubber mat. The vent hole is connected with an air pipe; the suction pressure of the suction cup on the paper is controlled by controlling the air flow in the air pipe, so that a pressure difference exists between the upper surface and the lower surface of the paper, and the paper is smoothly sucked and does not make direct contact with the suction cup. The paper suction mechanism is simple in structure and easy to control, the flat suction cup is designed, the rubber mat is arranged between the suction cup and paper, and the suction pressure of the suction cup on the paper is controlled by controlling airflow penetrating through the suction cup and the rubber mat, so that the upper surface and the lower surface of the paper are sucked in a suspended mode due to the pressure difference, and the paper does not make direct contact with the suction cup; paper deformation is prevented, and it can be guaranteed that a single piece is sucked every time. The utility model further provides equipment provided with the paper suction mechanism.

Description

Technical Field

[0001] The present application belongs to the technical field of silicon wafer packaging or unpacking, and in particular, relates to a silicon wafer paper suction mechanism and a device provided with the paper suction mechanism. Background Art

[0002] When packaging silicon wafers, it is necessary to use a paper suction mechanism to take out the paper from the paper bin, and then place the taken paper on the surface of the silicon wafer for packaging; or, when unpacking the silicon wafer, it is necessary to use a paper suction mechanism to take out the paper on the surface of the unpacked silicon wafer, separate the paper from the silicon wafer, and then place the taken paper in the collection bin. Existing paper suction mechanisms all use a point-contact paper suction method controlled by four or three straws to suck up the paper, so that the paper is separated from the object, which can be paper or silicon wafers. However, this method of direct point contact between the straw and the surface of the paper not only easily deforms the paper, but also easily sucks up more than one sheet at a time. If the deformed paper is placed on the surface of the silicon wafer, it will be placed out of position with the silicon wafer, which will affect the packaging quality and require secondary regularization. When sucking up more than one sheet at a time, it is necessary to stop the machine for manual intervention, remove the excess paper, and then suck up the paper again, which directly affects the production progress. Summary of the invention

[0003] The present application provides a paper suction mechanism and a device provided with the paper suction mechanism, which solves the technical problem in the prior art that point contact suction of paper easily causes paper deformation or excessive suction of paper.

[0004] In order to solve at least one of the above technical problems, the technical solution adopted in this application is:

[0005] A paper suction mechanism, comprising:

[0006] The suction cup and the rubber pad placed under the suction cup,

[0007] A plurality of vent holes are constructed on the suction cup and penetrate the rubber pad;

[0008] The vent hole is connected to the trachea;

[0009] The adsorption pressure of the suction cup on the paper is controlled by controlling the air flow in the air pipe, so that a pressure difference occurs between the upper surface and the lower surface of the paper, so that the paper is sucked up smoothly without direct contact with the suction cup.

[0010] Further, the suction cup is constructed as an I-shaped structure and is symmetrically arranged relative to its central axis;

[0011] Preferably, the shortest width dimension of the suction cup is not less than 1 / 2 of the maximum width dimension of the paper.

[0012] Furthermore, the vent hole is configured at least at the center of gravity of the suction cup;

[0013] Preferably, the vent holes are arranged at the four corners of the suction cup.

[0014] Furthermore, at least two groups of ventilation holes are provided at each corner of the suction cup, and the ventilation holes disposed at the four corners are symmetrically arranged relative to the central axis thereof.

[0015] Furthermore, the rubber pad is adapted to the suction cup structure, and includes a main rubber pad located in the middle of the suction cup and auxiliary rubber pads arranged around the vent holes at the four corners of the suction cup;

[0016] A plurality of interconnected channels are constructed in the main rubber pad, and are connected to an air pipe arranged at the center of gravity of the suction cup through a hidden channel arranged inside the suction cup.

[0017] Furthermore, the channels arranged along the periphery of the main rubber pad are all constructed to diffuse outwards;

[0018] Preferably, the channel arranged in the middle section of the main rubber pad divides the main rubber pad into several sections, and the channels between adjacent sections are arranged to be aligned or staggered with the channels arranged to diffuse outwards;

[0019] Preferably, all channels are configured as an open structure, and an exhaust hole is provided at the end of each channel that is diffused outwards;

[0020] Preferably, a channel communicating with the vent hole at the center of gravity of the suction cup is configured in the middle area of ​​the suction cup, and the channels at the periphery of the rubber pad and configured to diffuse are all communicated with the air pipe disposed at the center of gravity of the suction cup.

[0021] A device is provided with the above-mentioned paper suction mechanism and a frame beam. The paper suction mechanism is connected to the frame beam through a connecting frame arranged on the side of the suction cup away from the rubber pad and is placed at both ends of the frame beam. The paper suction mechanism can work alternately along the length direction of the frame beam.

[0022] Furthermore, the frame beam is provided with a transverse block and a transverse cylinder for driving the paper suction mechanism to move along the length of the frame beam, and a longitudinal block and a longitudinal cylinder for driving the paper suction mechanism to rise and fall vertically; the transverse block cooperates with the frame beam, and the longitudinal block is respectively connected to the connecting frame and the transverse block.

[0023] Furthermore, it also includes a monitoring frame constructed above the frame beam, on which a monitor is arranged, and the monitor can be driven to telescopically move along a length direction perpendicular to the frame beam.

[0024] The paper suction mechanism designed by the present application is simple in structure and easy to control. A flat suction cup is designed and a rubber pad is arranged between the suction cup and the paper. The suction pressure of the suction cup on the paper is controlled by controlling the airflow passing through the suction cup and the rubber pad, so that the pressure difference between the upper and lower surfaces of the paper is caused to be suspended and sucked up without direct contact with the suction cup, thereby preventing the paper from being deformed and ensuring that a single sheet is sucked each time. The present application also proposes a device provided with the paper suction mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 is a three-dimensional diagram of a paper suction mechanism according to an embodiment of the present application;

[0026] Figure 2 is a front view of a paper suction mechanism according to an embodiment of the present application;

[0027] Figure 3 is a top view of a paper suction mechanism according to an embodiment of the present application;

[0028] Figure 4 is a bottom view of a paper suction mechanism according to an embodiment of the present application;

[0029] Figure 5 is a bottom view of a suction cup according to an embodiment of the present application;

[0030] Figure 6 It is a three-dimensional diagram of a device provided with the paper suction mechanism according to an embodiment of the present application.

[0031] In the figure:

[0032] 1. Paper suction mechanism 2. Equipment 10. Suction cup

[0033] 11. Main body 12. Ventilation hole 13. Exhaust hole

[0034] 14. Connecting hole 20, rubber pad 21, main rubber pad

[0035] 22, auxiliary rubber pad 23, channel 30, connecting frame

[0036] 40, air pipe 50, beam 51, transverse block

[0037] 52, transverse cylinder 53, longitudinal block 54, longitudinal cylinder

[0038] 60. Monitoring frame 61. Monitor 62. Sliding cylinder DETAILED DESCRIPTION

[0039] The present application is described in detail below with reference to the accompanying drawings and specific embodiments.

[0040] This embodiment provides a paper suction mechanism 1, such as Figure 1As shown, it includes a suction cup 10, a rubber pad 20 attached to the bottom below it, and a connecting frame 30 arranged on the side of the suction cup 10 away from the rubber pad, wherein the connecting frame 30 is used to connect the suction cup 10 with an external manipulator. A plurality of vents 12 are constructed on the suction cup 10 and are arranged through the rubber pad 20. When working, some of the vents 12 are connected to the air pipe 40 for ventilation. The adsorption pressure of the suction cup 10 on the paper is controlled by controlling the flow rate of the air flow in the air pipe 40, so that there is a pressure difference between the air pressure on the upper surface of the paper and the atmospheric pressure on the lower surface of the paper, so that the paper is separated from other objects flatly and suspended, and the sucked paper only contacts the rubber pad 20, but not directly contacted with the suction cup 10. This paper suction method can ensure that the paper is sucked and separated individually each time, and there will be no technical problem of using a straw to directly adsorb and easily sucking up multiple sheets of paper together as in the prior art. The rubber pad 20 is in smooth contact with the paper surface, which not only avoids direct contact between the suction cup and the paper, but also avoids the adsorption method similar to the direct point contact between the straw and the paper in the prior art. This surface contact paper suction structure will not cause paper deformation, nor will it cause the problem of paper sliding after falling. Therefore, it can avoid the problem of paper displacement or misalignment caused by air entering between the paper and the silicon wafer when the paper is placed on the silicon wafer for packaging, or the problem of paper displacement or misalignment caused by air entering between the paper and other papers when the sucked paper is moved into the paper bin, thereby improving the packaging or unpacking quality, saving operation time, and avoiding the occurrence of secondary regularization.

[0041] like Figure 2-3 As shown, in order to improve the flexibility of the suction cup 10, a connecting frame 30 connected to the external manipulator is arranged on the side of the suction cup 10 away from the rubber pad 20. The connecting frame 30 is connected to the top of the suction cup 10 through four supporting legs, so as to improve the adjustability of the connection frame 30 and the suction cup 10. The connecting frame 30 is an X-shaped structure.

[0042] like Figure 5As shown, the suction cup 10 is constructed as an I-shaped structure, and its body 11 is symmetrically arranged corresponding to the central axis of the body 11, and a plurality of vent holes 12 and exhaust holes 13 are arranged on the body 11. Among them, the shortest width dimension of the body 11 is not less than 1 / 2 of the maximum width dimension of the paper, so that the maximum middle area of ​​the body 11 in contact with the paper is larger than the area in contact with the periphery of the paper, and then the four side corners of the paper are in point contact with the bottom surface of the suction cup 10 through the rubber pad 20, and the middle position is in surface contact with the suction cup 10 through the rubber pad 20, so that in the process of adsorption and separation, most of the area of ​​the paper is in flat plane contact with the suction cup 10, so that the paper can be stably and horizontally suspended on the bottom surface of the suction cup 10, preventing the paper from deforming, thereby ensuring that the paper can be closely attached to the silicon wafer or other paper, and there will be no relative position dislocation problem, no air will enter between the paper and the silicon wafer or other paper, and there will be no problem of sucking more than a few sheets of paper at a time.

[0043] At least at the center of gravity of the suction cup 10, there is a vent hole 12 for connecting with the air pipe 40, that is, it must be ensured that the center of the paper is sucked by the airflow entering from the air pipe 40, so as to ensure that the paper and the suction cup 10 are in contact with the largest area, thereby improving the accuracy and safety of paper separation. Inside the body 11, there are also a dark channel and a number of connecting holes 14 connected to the dark channel, wherein the dark channel is connected to the vent hole 12 at the center of gravity of the body 11, and the airflow is transmitted to each channel 23 in the rubber pad 20 through the connecting holes 14. The connecting holes 14 are all arranged on the channels of each channel 23 in the rubber pad 20, and the airflow is then discharged from the exhaust holes 13 arranged on the body 11 along each channel 23. All exhaust holes 13 are arranged at the end of the channel 23 that is diffused outward in the rubber pad 20.

[0044] Ventilation holes 12 are provided at the four corners of the suction cup 10. In order to adapt to rectangular or square silicon wafers 79 of various sizes, at least two groups of vent holes 12 are provided at each corner of the suction cup 10, and the vent holes 12 at the four corners are symmetrically arranged relative to the central axis, so as to adjust the installation position of the air tube 40 in the suction cup 10 based on the size of the silicon wafer 79 to ensure that the air tube 40 can completely fit and adsorb on the four corners of the paper.

[0045] like Figure 2 and Figure 3 As shown, in this embodiment, seven air holes 12 are provided, the air hole 12 located at the center must be connected to the air pipe 40, and the other air holes 12 located at the four corners are each provided with an air pipe 40, that is, each suction cup 10 is connected to five air pipes 40, and the positions of the air pipes 40 located at the four corners are ensured to be symmetrical with respect to the midline of the main body 11.

[0046] like Figure 4As shown, in order to prevent the paper from directly contacting the suction cup 10, a rubber pad 20 is provided on the bottom surface of the suction cup 10, and the rubber pad 20 is adapted to the structure of the suction cup 10. The rubber pad 20 includes a main rubber pad 21 located in the middle of the suction cup 10 and auxiliary rubber pads 22 arranged around the vent holes 12 at the four corners of the suction cup 10. A plurality of interconnected channels 23 are constructed in the main rubber pad 21, and all the channels 23 are connected to the air pipe 40 placed at the center of gravity of the suction cup 10 through the connecting hole 14 and the hidden channel in the body 11.

[0047] On the main rubber pad 21, some channels 23 are arranged in the middle position thereof, and some channels 23 are arranged on the periphery thereof. And the channels 23 along the periphery of the main rubber pad 21 are all constructed as a structure that diffuses outward, that is, a number of channels 23 that diffuse outward are arranged along the four sides of the main rubber pad 21, which extend to the two side edges and four corners of the body 11, so that the airflow can spread around the body 11, and the channels 23 that diffuse outward are interconnected with the channels 23 arranged in the middle position of the main rubber pad 21. The channels 23 arranged in the middle section of the main rubber pad 21 divide the main rubber pad 21 into several sections, and the channels 23 between adjacent sections are arranged in alignment or staggered interconnection with the channels 23 that diffuse outward.

[0048] Among them, the channels 23 arranged at the periphery of the main rubber pad 21 and configured as a diffusion structure are all interconnected with the air pipe 40 placed at the center of gravity of the suction cup 10 through the connecting hole 13, that is, a dark channel (illustration omitted) is provided inside the suction cup 10 to communicate with the air pipe 1201 at the center of gravity of the suction cup 10. The air flow gradually diffuses through the channel 23, and flows through the channel 23 to the exhaust hole 13 arranged at the end of the channel 23 that diffuses outward, so that the gas flowing from the air pipe 40 at the center of gravity of the suction cup 10 can first pass through the dark channel and then enter each diffused channel 23, and then be discharged from the top of the suction cup 10 through the exhaust hole 13 along the diffused channel 23, so that the air flow is spread all over the rubber pad 20 placed at the center of gravity of the middle position of the suction cup 10, so that the suction cup 10 has a certain air pressure on the upper surface of the paper, which acts together with the atmospheric pressure on the lower surface of the paper to form a pressure difference between the upper and lower surfaces of the paper, so that the paper can be separated from other objects. This structure can also expand the suction force of adsorbing paper and improve the accuracy and stability of paper separation.

[0049] The structure of the channel 23 is a plurality of interconnected channels arranged at intervals, and a plurality of outwardly extending extension channels are also provided at the four corners near the suction cup 10, so that the airflow flowing in from the air pipe 40 at the center of gravity of the suction cup 10 can be diffused along each channel to maximize the coverage of the contact area between the rubber pad 20 and the paper, thereby improving the suction force of the rubber pad 20 and the paper, placing the paper horizontally better, faster and more steadily, and quickly separating it from other papers.

[0050] like Figure 6As shown, a device 2 is provided with the above-mentioned paper suction mechanism 1, and is also provided with a frame beam 50. The paper suction mechanism 1 is connected to the frame beam 50 through a connecting frame 30 configured on the side of the suction cup 10 away from the rubber pad 20, and is placed at both ends of the frame beam 50. The frame beam 50 is arranged across the width direction of the conveyor belt (omitted in the figure), that is, the silicon wafer moves on the conveyor belt, and its moving direction is perpendicular to the length direction of the frame beam 50.

[0051] The paper suction mechanism 1 is disposed at both ends of the frame beam 50, that is, at both sides of the conveyor belt. The suction mechanism 1 can move alternately along the length direction of the frame beam 50 toward one side of the conveyor belt at the middle position of the frame beam 50 to complete the paper transfer from the side position of the frame beam 50 to the middle position of the frame beam 50. The two sets of oppositely disposed paper suction mechanisms 1 perform alternate paper placement operations on silicon wafers, which can not only improve the packaging rhythm, save packaging time, and improve packaging efficiency; but also prevent any set of paper suction mechanisms 1 from having an abnormality, while the other paper suction mechanism 1 can continue to work, thereby ensuring the progress and quality of work.

[0052] Specifically, the frame beam 50 is provided with a transverse block 51 and a transverse cylinder 52 for driving the paper suction mechanism 1 to move along the length direction of the frame beam 50, and a longitudinal block 53 and a longitudinal cylinder 54 for driving the paper suction mechanism 1 to move vertically. The transverse block 51 is slidably matched with the frame beam 50, and the transverse cylinder 52 can drive the transverse block 51 to drive the paper suction mechanism 1 to move back and forth along the length direction of the frame beam 50. The longitudinal block 53 is fixedly connected to the connecting frame 30 and to the transverse block 51. At the same time, the longitudinal block 53 is a retractable slider, which is fixed on the longitudinal cylinder 54 and driven by the longitudinal cylinder 54, and can drive the paper suction mechanism 1 to extend and retract vertically.

[0053] A loading platform (not shown in the figure) is provided on the side of the frame beam 50 close to the paper suction mechanism 1. The loading platform is located directly below the monitor 61 and is used to place silicon wafers. The transverse cylinder 52 is a retractable movable cylinder arranged along the length direction of the frame beam 50. It is arranged on the side of the frame beam 50 close to the paper suction mechanism 1 and is placed on the frame beam 50 in an opposite direction. The two transverse cylinders 52 drive the paper suction mechanisms 1 at both ends to move back and forth alternately along the length direction of the frame beam 50 through the transverse block 51, so that paper can be placed on the surface of the silicon wafer on the loading platform.

[0054] During the paper sucking operation and the process of placing the paper on the loading table, the height can be adjusted by the longitudinal cylinder 54 to drive the longitudinal block 53 to extend and retract up and down, so as to drive the paper sucking mechanism 1 to move up and down, thereby adjusting the height position of the paper sucking mechanism 1, and then quickly and accurately adjusting the height of the position where the paper is located to meet the operation requirements at different positions.

[0055] Furthermore, the device 2 also includes a monitoring frame 60 constructed above the frame beam 50, and a monitor 61 for monitoring the regularity of the silicon wafers from above. The monitor 61 is arranged on the top of the monitoring frame 60, wherein the monitor 61 is located directly above the loading platform and is driven by a sliding cylinder 62 arranged on the top of the monitoring frame 61, and can be telescopically moved in a direction perpendicular to the length of the frame beam 50.

[0056] The monitoring frame 60 is located directly above the loading platform 60, fixed on the side of the frame beam 50 away from the paper suction mechanism 1 and located in the middle of the frame beam 50. The monitoring frame 60 can be a telescopic structure in the vertical direction, which is convenient for adjusting the height of the monitor 61 to adapt the radiation area of ​​the monitor 61 and completely cover and irradiate the silicon wafers horizontally set on the loading platform. The monitor 61 is fixed on the sliding cylinder 62 through a connecting block, and is driven by the sliding cylinder 62 to slide back and forth along the silicon wafer transmission direction to avoid the robot to pick up and place the silicon wafer.

[0057] By using this equipment, paper can be placed alternately on silicon wafers to quickly complete the placement of paper for silicon wafer packaging. At the same time, the silicon wafers to be packaged and the paper that has been placed can be monitored and organized to ensure the quality of silicon wafer packaging and avoid the problem of secondary organization.

[0058] The paper suction mechanism designed by the present application is simple in structure and easy to control. A flat suction cup is designed and a rubber pad is arranged between the suction cup and the paper. The suction pressure of the suction cup on the paper is controlled by controlling the airflow passing through the suction cup and the rubber pad, so that the pressure difference between the upper and lower surfaces of the paper is caused to be suspended and sucked up without direct contact with the suction cup, thereby preventing the paper from being deformed and ensuring that a single sheet is sucked each time. The present application also proposes a device provided with the paper suction mechanism.

[0059] The above detailed description of the embodiments of the present application is only a preferred embodiment of the present application and cannot be considered to limit the scope of implementation of the present application. All equivalent changes and improvements made within the scope of the present application should still fall within the scope of the patent coverage of the present application.

Claims

1. A paper suction mechanism, characterized in that: include: The suction cup and the rubber pad placed under the suction cup, A plurality of vent holes are constructed on the suction cup and penetrate the rubber pad; The vent hole is connected to the trachea; The adsorption pressure of the suction cup on the paper is controlled by controlling the air flow in the air pipe, so that a pressure difference occurs between the upper surface and the lower surface of the paper, so that the paper is sucked up smoothly without direct contact with the suction cup.

2. A paper suction mechanism according to claim 1, characterized in that: The suction cup is constructed as an I-shaped structure and is symmetrically arranged relative to its central axis.

3. A paper suction mechanism according to claim 2, characterized in that: The shortest width dimension of the suction cup is not less than 1 / 2 of the maximum width dimension of the paper.

4. A paper suction mechanism according to any one of claims 1 to 3, characterized in that: The vent hole is configured at least at the center of gravity of the suction cup.

5. A paper suction mechanism according to claim 4, characterized in that: The vent holes are arranged at the four corners of the suction cup.

6. A paper suction mechanism according to claim 5, characterized in that: At least two groups of ventilation holes are arranged at each corner of the suction cup, and the ventilation holes arranged at the four corners are symmetrically arranged relative to the central axis thereof.

7. A paper suction mechanism according to any one of claims 1-3, 5-6, characterized in that: The rubber pad is adapted to the suction cup structure, and includes a main rubber pad located in the middle of the suction cup and auxiliary rubber pads arranged around the vent holes at the four corners of the suction cup; A plurality of interconnected channels are constructed in the main rubber pad, and are connected to an air pipe arranged at the center of gravity of the suction cup through a hidden channel arranged inside the suction cup.

8. A paper suction mechanism according to claim 7, characterized in that: The channels arranged along the periphery of the main rubber pad are all constructed to be diffused outwards.

9. A paper suction mechanism according to claim 8, characterized in that: The channel arranged in the middle section of the main rubber pad divides the main rubber pad into several sections, and the channels between adjacent sections are arranged to be aligned or staggered with the channels arranged to diffuse outwards and communicate with each other.

10. A paper suction mechanism according to claim 8 or 9, characterized in that: All channels are configured as an open structure, and exhaust holes are provided at the end of each channel that is diffused outward.

11. A paper suction mechanism according to claim 10, characterized in that: A channel communicating with the vent hole at the center of gravity of the suction cup is arranged in the middle area of ​​the suction cup, and the channels arranged to diffuse around the rubber pad are all communicated with the air pipe arranged at the center of gravity of the suction cup.

12. A device, characterized in that: The paper suction mechanism is provided with a paper suction mechanism as described in any one of claims 1 to 11, and is also provided with a frame beam. The paper suction mechanism is connected to the frame beam through a connecting frame arranged on the side of the suction cup away from the rubber pad, and is placed at both ends of the frame beam. It can work alternately along the length direction of the frame beam.

13. A device according to claim 12, characterized in that: The frame beam is provided with a transverse block and a transverse cylinder for driving the paper suction mechanism to move along the length of the frame beam, and a longitudinal block and a longitudinal cylinder for driving the paper suction mechanism to rise and fall vertically; the transverse block cooperates with the frame beam, and the longitudinal block is respectively connected to the connecting frame and the transverse block.

14. A device according to claim 12 or 13, characterized in that: It also includes a monitoring frame arranged above the frame beam, on which a monitor is arranged, and the monitor can be driven to telescopically move along a length direction perpendicular to the frame beam.

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