Space-saving automatic feeding evaporation equipment

Abstract

The utility model belongs to the technical field of evaporation, and relates to space-saving automatic feeding evaporation equipment, which comprises an evaporation cavity, a plurality of crucibles uniformly distributed around a vertical shaft at the lower part of the evaporation cavity, and a rotary positioning mechanism positioned at the upper part of the evaporation cavity, a feeder and a plurality of feeding pipes are also arranged in the evaporation cavity, and a plurality of storage chambers are uniformly distributed around the vertical shaft in the feeder; a plurality of storage chambers are evenly distributed in the feeder around a vertical shaft, each storage chamber is communicated with the upper end of a feeding pipe, the lower end of each feeding pipe extends to the inclined upper portion of the corresponding crucible, each feeding pipe is provided with a feeding switch, a conical space is formed between the edge of each crucible and the evaporation face, and the feeder is lower than all the conical spaces. And a heating mechanism is arranged at the lower part of the crucible. According to the device, the space in the evaporation equipment can be reasonably utilized, the feeding distance is short, the position of the crucible is kept still, film thickness calibration does not need to be carried out, time is saved, material waste is reduced, and operation efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of evaporation, in particular to a space-saving automatic feeding evaporation device. Background Art

[0002] Vacuum evaporation coating is a method of heating the raw materials to be formed into a thin film in an evaporation container in a vacuum chamber, so that its atoms or molecules escape from its surface, form a vapor flow, incident on the surface of the substrate, and condense to form a solid film. During the evaporation process, the coating rate is monitored by a film thickness monitor to achieve precise control of the film thickness. The film formed by this method has high purity and good quality. The crucible materials mainly used in existing point evaporation sources are aluminum oxide, boron nitride, tantalum, molybdenum, etc. The type of crucible is selected according to the melting point and characteristics of different evaporation materials. The existing technology breaks the vacuum of the cavity, opens the cavity to add materials to the crucibles corresponding to each source, and then closes the cavity and evacuates it for evaporation testing.

[0003] The amount of material filled in the evaporation crucible is limited. After the material is exhausted, it is often necessary to open the warehouse and refill it, which will bring the following problems:

[0004] 1. The evaporation source needs to be cooled down before opening the chamber, the evaporation chamber needs to be opened and filled with materials after the vacuum is broken, and then the vacuum is pumped again and the temperature is raised for testing. This process takes a long time and affects the production rhythm of the evaporation equipment.

[0005] 2. After adding materials, slight differences in the position of the crucible will affect the film thickness of the substrate, so that the film thickness needs to be calibrated again, resulting in waste of materials and affecting the utilization rate of the materials. In addition, other gas molecules will enter the chamber after multiple openings, thus affecting the performance of the device.

[0006] Chinese patent CN110284106A discloses a metal evaporation machine with an automatic crucible system, including a main chamber and a sub-chamber. The main chamber has a first rotatable pressure-sensitive carrier with a crucible for rotary evaporation, and the sub-chamber is charged with evaporation materials through a charging module. On the one hand, the sub-chamber increases the space occupied by the equipment, and on the other hand, the position of the crucible will change after the transfer, and the coaxiality of the position of the crucible after it is re-positioned cannot be guaranteed, which poses a risk of uneven coating.

[0007] Therefore, it is necessary to improve the evaporation structure to solve the above problems. Utility Model Content

[0008] The main purpose of the utility model is to provide a space-saving automatic feeding evaporation device, which can avoid the need for film thickness calibration, thereby saving time, reducing material waste and improving operating efficiency.

[0009] The utility model achieves the above-mentioned purpose through the following technical scheme: a space-saving automatic feeding evaporation equipment, comprising an evaporation chamber, a plurality of crucibles evenly distributed around a vertical axis at the lower part of the evaporation chamber, and a rotating positioning mechanism located at the upper part of the evaporation chamber, the rotating positioning mechanism supports the evaporation substrate and exposes the evaporation surface below the evaporation substrate, a feeder and a plurality of feeding pipes are also provided in the evaporation chamber, a plurality of storage chambers evenly distributed around the vertical axis in the feeder, each storage chamber is connected to the upper end of a feeding pipe, the lower end of the feeding pipe extends to the oblique upper part of the crucible, a feeding switch is provided on each feeding pipe, a conical space is formed between the edge of each crucible and the evaporation surface, the feeder and all feeding pipes are located outside all conical spaces, and a heating mechanism is provided at the lower part of the crucible.

[0010] Specifically, a rotating mechanism for driving the storage chamber to rotate and transpose around the vertical axis is provided below the feeder, and the feeding pipe maintains a one-to-one connection relationship with the storage chamber.

[0011] Specifically, a lifting mechanism for driving the feeder to rise and fall is provided below the feeder, and the feeder is higher than all crucibles when it is at the highest position.

[0012] Specifically, the number of the crucibles is an even number.

[0013] The beneficial effects of the technical solution of the utility model are:

[0014] This equipment can use the feeder located in the evaporation chamber to feed each crucible. The feeder is located outside the evaporation path of all crucibles and does not affect the evaporation process. It rationally utilizes the space in the evaporation equipment and allows a relatively short feeding distance. Before and after feeding, the position of the crucible remains stationary, so there is no need to calibrate the film thickness, which saves time, reduces material waste, and improves work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is the layout diagram of the rotating mechanism in the evaporation chamber;

[0016] Figure 2 This is the evaporation principle diagram of the automatic feeding evaporation equipment;

[0017] Figure 3 It is a position relationship diagram of a single crucible and a feeder;

[0018] Figure 4 A cross-sectional view of the feeding tube.

[0019] The numbers in the figure represent:

[0020] 1-Automatic feeding evaporation equipment,

[0021] 11-evaporation chamber, 12-crucible, 121-heating mechanism, 13-rotation positioning mechanism, 14-feeder, 141-storage chamber, 15-feeding pipe, 151-feeding switch, 152-anti-plating sleeve, 16-rotation mechanism, 17-lifting mechanism;

[0022] 2-Evaporation substrate. DETAILED DESCRIPTION

[0023] The utility model is further described in detail below in conjunction with specific embodiments.

[0024] Example:

[0025] like Figures 1 to 3 As shown, the space-saving automatic feeding evaporation equipment 1 of the utility model comprises an evaporation chamber 11, a plurality of crucibles 12 evenly distributed around a vertical axis at the lower part of the evaporation chamber 11, and a rotation positioning mechanism 13 located at the upper part of the evaporation chamber 11, wherein the rotation positioning mechanism 13 supports the evaporation substrate 2 and exposes the evaporation surface below the evaporation substrate 2, a feeder 14 and a plurality of feeding tubes 15 are also provided in the evaporation chamber 11, a plurality of storage chambers 141 evenly distributed around the vertical axis in the feeder 14, each storage chamber 141 is connected to the upper end of a feeding tube 15, the lower end of the feeding tube 15 extends to the oblique upper part of the crucible 12, a feeding switch 151 is provided on each feeding tube 15, a conical space is formed between the edge of each crucible 12 and the evaporation surface, the feeder 14 and all the feeding tubes 15 are located outside all the conical spaces, and a heating mechanism 121 is provided at the lower part of the crucible 12.

[0026] Evaporation can be regarded as the process in which the evaporation material moves from each crucible 12 along a straight line to the evaporation surface to form a film, so this conical space is the range of the evaporation path of the evaporation material, and no matter whether there are obstacles at other positions in the evaporation chamber 11, the coating will not be affected. According to the rule of the position arrangement of the crucible 12, there must be a vacant area in the middle of the lower part of the evaporation chamber 11, so the feeder 14 is set using this vacant area, which can ensure that the feeder 14 does not affect the evaporation process, reasonably utilize the space in the evaporation equipment, and allow a relatively short distance for feeding. The evaporation material is in a granular state in the storage chamber 141. When the feeding switch 151 is turned on, the evaporation material in the storage chamber 141 can roll down the feeding pipe 15 into the crucible 12 under the action of gravity, thereby realizing feeding. Because the relative rotation of the crucible 12 and the evaporation substrate 2 is to rotate the evaporation substrate 2 around the vertical axis by the rotation positioning mechanism 13, the heating mechanism 121 will melt the evaporation material in the crucible 12 to achieve evaporation. The position of the crucible 12 remains unchanged, so there is no need to calibrate the film thickness, which saves time, reduces material waste, and improves work efficiency. In this embodiment, the number of crucibles 12 is 6, but in actual applications, if space permits, the number of crucibles 12 can be increased or decreased, but it is best to be an even number, so that every two crucibles 12 are in a centrally symmetrical position, so that the film thickness is more uniform during rotary evaporation.

[0027] like Figure 2 As shown, a rotating mechanism 16 for driving the storage chamber 141 to rotate and transpose around a vertical axis is provided below the feeder 14 , and the feed pipe 15 maintains a one-to-one connection with the storage chamber 141 .

[0028] In actual application, different storage chambers 141 can be used to place different evaporation materials. Then, when different crucibles 12 need to be filled with specific evaporation materials, the rotating mechanism 16 can be used to rotate the corresponding storage chamber 141 to the corresponding feeding pipe 15, so that the specific evaporation material can flow into the selected crucible 12, meeting the selection requirements of multiple evaporation materials.

[0029] like Figure 2 and Figure 3 As shown, a lifting mechanism 17 for driving the feeder 14 to move up and down is provided below the feeder 14 . When the feeder 14 is at the highest position, it is higher than all the crucibles 12 .

[0030] Here, the addition of the evaporation material is achieved by gravity. Since the molten evaporation material is a viscous fluid, it is easier to allow the evaporation material to flow into the crucible 12 under a sufficient height difference. The smaller the density of the evaporation material, the slower the addition. Therefore, the feeder 14 needs to be raised, which will allow the feeder 14 to fall into the conical space. Therefore, when adding materials, the lifting mechanism 17 needs to temporarily raise the feeder 14 into the conical space, and before evaporation, the feeder 14 needs to fall back below the conical space. This will not affect the evaporation, but will also increase the feeding speed and make more reasonable use of the equipment space.

[0031] like Figure 4 As shown, the outer surface of the feeding tube 15 is provided with a detachable anti-plating sleeve 152.

[0032] The feeding tube 15 is in the evaporation chamber 11. It is inevitable that some evaporation materials will be deposited on the outer surface of the feeding tube 15 during evaporation, and even affect the sensitivity of the feeding switch 151. However, because the feeding tube 15 is connected to the storage chamber 141, it cannot be removed separately, which is inconvenient for maintenance. In order to avoid this problem, an anti-plating sleeve 152 is provided on the outer surface of the feeding tube 15, so that the evaporation material will mainly be deposited on the anti-plating sleeve 152, and the anti-plating sleeve 152 can be removed from the outside of the feeding tube 15 for cleaning or replacement, which simplifies the maintenance operation.

[0033] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A space-saving automatic feeding evaporation equipment, characterized in that: It includes an evaporation chamber, a plurality of crucibles evenly distributed around a vertical axis at the lower part of the evaporation chamber, and a rotation positioning mechanism located at the upper part of the evaporation chamber, wherein the rotation positioning mechanism holds the evaporation substrate and exposes the evaporation surface below the evaporation substrate. A feeder and a plurality of feeding pipes are also provided in the evaporation chamber, a plurality of storage chambers evenly distributed around the vertical axis in the feeder, each storage chamber is connected to the upper end of a feeding pipe, the lower end of the feeding pipe extends to the oblique upper part of the crucible, a feeding switch is provided on each feeding pipe, a conical space is formed between the edge of each crucible and the evaporation surface, the feeder and all feeding pipes are located outside all conical spaces, and a heating mechanism is provided at the lower part of the crucible.

2. The space-saving automatic feeding evaporation equipment according to claim 1 is characterized in that: A rotating mechanism for driving the storage chamber to rotate and transpose around the vertical axis is provided below the feeder, and the feeding pipe maintains a one-to-one connection with the storage chamber.

3. The space-saving automatic feeding evaporation equipment according to claim 1, characterized in that: A lifting mechanism for driving the feeder to rise and fall is provided below the feeder, and the feeder is higher than all crucibles when in the highest position.

4. The space-saving automatic feeding evaporation equipment according to claim 1, characterized in that: The number of the crucibles is an even number.

Images