Clamp for magnetron sputtering coating

Abstract

The utility model relates to the field of film coating, in particular to a clamp for magnetron sputtering film coating. The clamp for magnetron sputtering coating comprises a clamp body, a film coating groove for placing a film is formed in the top of the fixture; wherein a fixing mechanism capable of loosening and clamping is arranged at the bottom of the fixture, so that a film in the film coating groove is fixed; a locking piece used for locking the fixing mechanism is arranged at the position, located on one side of the fixing mechanism, of the bottom of the clamp so as to lock the fixing mechanism and prevent the fixing mechanism from loosening. According to the clamp for magnetron sputtering coating, the fixing mechanism is arranged, a rotary disc in the fixing mechanism is driven by a rotary knob, so that a first traction rod can rotate, a second traction rod is pulled to move, a sliding rod can slide in a sliding groove, an abutting block abuts against the periphery of a film material at the same time, operation is easy, and the clamping efficiency is improved. And the working efficiency can be improved.

Description

Technical Field

[0001] The utility model relates to the field of film coating, in particular to a clamp for magnetron sputtering film coating. Background Art

[0002] Magnetron sputtering is a commonly used thin film deposition technology. It uses a magnetic field to control ions to sputter metal targets in a vacuum environment, so that metal atoms are deposited on the surface of the substrate to form a thin film. This technology is widely used in various fields, such as optics, electronics, semiconductors and other industries. In magnetron sputtering, some specially designed equipment is usually used, such as magnetron sputtering targets, vacuum chambers, ion sources, substrate fixtures, etc. The ion source will stimulate the metal target to release metal atoms, and the magnetic field will help control the direction and uniformity of sputtering. The substrate fixture is used to fix the substrate and ensure the accuracy of thin film deposition. The existing fixtures for magnetron sputtering are cumbersome to use, and the four sides of the film material need to be gradually fixed one by one. This process may take a lot of time and effort, which increases the complexity of the operation.

[0003] Therefore, it is necessary to provide a new magnetron sputtering coating fixture to solve the above technical problems. Utility Model Content

[0004] In order to overcome the defects of the prior art, a fixture for magnetron sputtering coating is provided to solve the above problems.

[0005] The utility model provides a fixture for magnetron sputtering coating, comprising: a fixture; a coating groove for placing a film is provided on the top of the fixture; wherein a fixing mechanism capable of being loosened and clamped is provided at the bottom of the fixture to fix the film in the coating groove; a locking piece for locking the fixing mechanism is provided at one side of the fixing mechanism at the bottom of the fixture to lock the fixing mechanism to prevent the fixing mechanism from loosening.

[0006] Preferably, the fixing mechanism includes a turntable rotatably connected to the bottom of the fixture, and the turntable is located on one side of the center of the bottom of the fixture, and a plurality of traction rods 1 are equidistantly installed on the circumferential side of the turntable, and each of the traction rods 1 is rotatably connected to a traction rod 2 on the side away from the turntable, and the top of each of the traction rods 2 at one end away from the traction rod 1 is connected to a guide block through a connecting rod, and each of the guide blocks is connected to a sliding rod on the side close to the fixture, and sliding grooves are provided around the fixture, and each of the sliding grooves is connected to a coating groove, and each of the sliding rods has an end away from the guide block that passes through the sliding groove and is respectively connected to a stop block.

[0007] Preferably, the fixing mechanism also includes a fixing plate fixedly mounted to the bottom of the fixture, and the fixing plate is located below the turntable, a ratchet is provided at the bottom of the fixing plate, the top of the ratchet passes through the fixing plate through a connecting shaft and is fixedly connected to the turntable, and a knob is fixedly connected to the bottom of the ratchet.

[0008] Preferably, the locking member includes a spring rod connected to the bottom of the fixed plate, the bottom of the spring rod is connected to a mounting block, the bottom of the mounting block is rotatably connected to a pawl, one end of the pawl is meshed with a ratchet, the bottom of the mounting block is provided with a spring sheet on one side of the pawl, one side of the spring sheet abuts against one side of the pawl, the bottom of the mounting block is fixedly connected to a push rod, and the bottom of the push rod is fixedly connected to a push block.

[0009] Preferably, the locking member comprises a limit block fixedly connected to the outer side of the push rod, and one side of the limit block is located between the ratchet and the knob.

[0010] Compared with the related art, the magnetron sputtering coating fixture provided by the utility model has the following beneficial effects:

[0011] The utility model provides a fixing mechanism, and a turntable in the fixing mechanism can rotate the traction rod one under the drive of a knob, thereby pulling the traction rod two to move, and then the slide bar can slide in the slide groove, so that the abutment block abuts against the four sides of the membrane material at the same time, the operation is simple, and the work efficiency can be improved.

[0012] The utility model provides a locking piece, and the pawl in the locking piece cooperates with the ratchet wheel. In the case of no unlocking operation, the fixing mechanism will maintain a stable state, thereby ensuring the stability of the fixing mechanism and preventing it from being loosened accidentally. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 A schematic structural diagram of a preferred embodiment of a fixture for magnetron sputtering coating provided by the utility model;

[0014] Figure 2 for Figure 1 A schematic structural diagram of the front view shown;

[0015] Figure 3 for Figure 1 The structural schematic diagram of the fixture shown;

[0016] Figure 4 for Figure 1 The structural schematic diagram of the fixing mechanism is shown.

[0017] Numbers in the figure: 1. clamp; 2. turntable; 21. traction rod 1; 22. traction rod 2; 23. guide block; 24. slide rod; 25. slide groove; 26. stop block; 3. fixed plate; 31. ratchet; 32. knob; 4. spring rod; 41. mounting block; 42. pawl; 43. spring piece; 44. push rod; 45. push block; 46. limit block. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0019] The specific implementation of the present utility model is described in detail below in conjunction with specific embodiments.

[0020] See also Figures 1 to 4 The utility model provides a fixture for magnetron sputtering coating, which includes: a fixture 1; a coating groove for placing a film is provided on the top of the fixture 1; wherein a fixing mechanism that can be loosened and clamped is provided at the bottom of the fixture 1 to fix the film in the coating groove; a locking piece for locking the fixing mechanism is provided at one side of the bottom of the fixture 1 to lock the fixing mechanism to prevent the fixing mechanism from loosening.

[0021] It should be noted that: by opening a coating tank at the top of the fixture 1, the film material can be conveniently placed to ensure the uniformity and accuracy of the coating. A fixing mechanism is set at the bottom of the fixture 1, which can be loosened and clamped. By clamping the film material, the film can be firmly fixed in the coating tank to avoid loosening, offset and other problems during the coating process. In order to ensure the stability of the fixing mechanism, the locking member is used to lock the fixing mechanism to prevent it from accidentally loosening, which can ensure the stability of the fixing mechanism and improve the reliability and stability of the coating process.

[0022] In the embodiments of the present invention, please refer to Figure 1 , Figure 2 and Figure 4The fixing mechanism includes a turntable 2 rotatably connected to the bottom of the fixture 1, and the turntable 2 is located on one side of the center of the bottom of the fixture 1, and a plurality of traction rods 21 are equidistantly installed on the circumferential side of the turntable 2, each traction rod 21 is rotatably connected to a traction rod 22 on the side away from the turntable 2, and each traction rod 22 is connected to a guide block 23 at the top of one end of the traction rod 21 away from the traction rod 1 through a connecting rod, and each guide block 23 is connected to a slide bar 24 on the side close to the fixture 1, and a slide groove 25 is provided around the fixture 1, and each slide groove 25 is connected to the coating groove, and each slide bar 24 penetrates the slide groove 25 at one end away from the guide block 23 and is respectively connected to a stop block 26, and the fixing mechanism also includes a fixed plate 3 fixedly installed with the bottom of the fixture 1, and the fixed plate 3 is located below the turntable 2, and a ratchet 31 is provided at the bottom of the fixed plate 3, and the top of the ratchet 31 penetrates the fixed plate 3 through a connecting shaft and is fixedly connected to the turntable 2, and a knob 32 is fixedly connected to the bottom of the ratchet 31.

[0023] It should be noted that the turntable 2 is rotatably connected to the center side of the bottom of the fixture 1 to support the rotation and fixation of other components. The turntable 2 is located at the center side of the bottom of the fixture 1 to better balance and support the traction rod and other connecting components. A plurality of traction rods 21 are equidistantly installed on the circumference of the turntable 2, and each traction rod 21 is connected to the traction rod 22 on the side away from the turntable 2. The other end of the traction rod 22 is connected to the guide block 23, and is connected to the guide block 23 through a connecting rod. The connecting rod and the guide block structure can provide fixing force and stability to ensure the firm fixation of the fixture and the film material during the coating process. Each guide block 23 is connected to a sliding rod 24 on the side close to the fixture 1, and a sliding groove 25 is provided around the fixture 1, and each sliding groove 25 is connected to the coating groove. The sliding rod 24 passes through the sliding groove 25 to realize sliding adjustment, and each sliding rod 24 is connected to a stopper 26 on the end away from the guide block 23. The function of the stopper 26 is to abut against the surrounding of the film material to fix it. In addition, the fixing mechanism also includes a fixing plate 3, which is located below the rotating plate 2 and connected to the rotating plate 2 via a connecting shaft. A ratchet 31 is provided at the bottom of the fixing plate 3, the top of the ratchet is fixedly connected to the rotating plate 2 via a connecting shaft, and the bottom is fixedly connected to a knob 32. The structure of the ratchet 31 and the knob 32 can be used to drive the rotating plate 2 to rotate, thereby driving the traction rod to drive the slide bar 24 to slide in the slide groove 25, so that the abutment 26 abuts against the membrane material for fixing.

[0024] In the embodiments of the present invention, please refer to Figure 1 and Figure 4The locking member includes a spring rod 4 connected to the bottom of the fixed disk 3, the bottom of the spring rod 4 is connected to a mounting block 41, the bottom of the mounting block 41 is rotatably connected to a pawl 42, one end of the pawl 42 is meshed with the ratchet 31, the bottom of the mounting block 41 is located on one side of the pawl 42 and a spring piece 43 is installed, one side of the spring piece 43 abuts against one side of the pawl 42, the bottom of the mounting block 41 is fixedly connected to a push rod 44, the bottom of the push rod 44 is fixedly connected to a push block 45, the locking member includes a limit block 46 fixedly connected to the outer side of the push rod 44, and one side of the limit block 46 is located between the ratchet 31 and the knob 32.

[0025] It should be noted that: the spring rod 4, as the main locking element, transmits the locking force to the pawl 42 through the mounting block 41 connected to its bottom, ensuring that the fixed disk 3 and the rotating disk 2 are firmly locked. The design of the spring sheet 43 can not only play a locking role, but also reduce the wear between the locking parts and extend the service life. The push rod 44 and the push block 45 provide additional support and position control through the limit block 46, while avoiding excessive movement and unnecessary vibration. The position of the limit block 46 is designed appropriately, so that it can be firmly fixed between the ratchet 31 and the knob 32, providing an appropriate limit function, ensuring that the locking part will not be subject to external interference or accidental movement during operation, and limiting the movement range of the spring rod 4. It can effectively lock and stabilize the ratchet 31, ensuring the stability and reliability of the fixing mechanism in use. By pushing the push block 45, the push rod 44 can be moved upward, the spring rod 4 can be contracted, and the pawl 42 is not engaged with the ratchet 31, so that the rotating disk 2 can be rotated forward and reversed, realizing the tightening and loosening of the touch material.

[0026] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A fixture for magnetron sputtering coating, characterized in that: include: Fixture (1); The top of the fixture (1) is provided with a coating groove for placing the film; Wherein, a fixing mechanism capable of loosening and clamping is provided at the bottom of the fixture (1) to fix the film in the coating tank; The bottom of the fixture (1) is located on one side of the fixing mechanism and is provided with a locking piece for locking the fixing mechanism, so as to lock the fixing mechanism and prevent the fixing mechanism from loosening; The fixing mechanism comprises a turntable (2) rotatably connected to the bottom of the fixture (1), and the turntable (2) is located on the central side of the bottom of the fixture (1), and a plurality of traction rods (21) are equidistantly installed on the circumferential side of the turntable (2), and each of the traction rods (21) is rotatably connected to a traction rod (22) on the side away from the turntable (2), and the top of each of the traction rods (22) away from the traction rod (21) is connected to a guide block (23) through a connecting rod, and each of the guide blocks (23) is connected to a sliding rod (24) on the side close to the fixture (1), and the fixture (1) is provided with sliding grooves (25) on all sides, and each of the sliding grooves (25) is connected to a coating groove, and each of the sliding rods (24) has an end away from the guide block (23) that passes through the sliding groove (25) and is respectively connected to a stop block (26).

2. The fixture for magnetron sputtering coating according to claim 1, characterized in that: The fixing mechanism also includes a fixing plate (3) fixedly mounted on the bottom of the fixture (1), and the fixing plate (3) is located below the turntable (2). A ratchet (31) is provided at the bottom of the fixing plate (3), and the top of the ratchet (31) passes through the fixing plate (3) through a connecting shaft and is fixedly connected to the turntable (2). A knob (32) is fixedly connected to the bottom of the ratchet (31).

3. The fixture for magnetron sputtering coating according to claim 2, characterized in that: The locking member comprises a spring rod (4) connected to the bottom of the fixed disk (3); the bottom of the spring rod (4) is connected to a mounting block (41); the bottom of the mounting block (41) is rotatably connected to a pawl (42); one end of the pawl (42) is meshedly connected to the ratchet (31); a spring sheet (43) is installed at the bottom of the mounting block (41) on one side of the pawl (42); one side of the spring sheet (43) abuts against one side of the pawl (42); the bottom of the mounting block (41) is fixedly connected to a push rod (44); the bottom of the push rod (44) is fixedly connected to a push block (45).

4. The fixture for magnetron sputtering coating according to claim 3, characterized in that: The locking member comprises a limit block (46) fixedly connected to the outer side of the push rod (44), and one side of the limit block (46) is located between the ratchet (31) and the knob (32).

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