Protective device for knocking quartz crucible during single crystal production by Czochralski method

Abstract

The utility model discloses a protective device for knocking a quartz crucible during single crystal production by a czochralski method, and particularly relates to the technical field of quartz crucible protection, the protective device comprises a base plate, two guide pipes are arranged at the top of the base plate, a placing pipe is arranged between the two guide pipes, and clamping mechanisms are arranged in the guide pipes and the placing pipe. Hydraulic rods are arranged in the guide pipes and the containing pipes correspondingly, supporting plates are arranged at the tops of the hydraulic rods, protection mechanisms are arranged at the tops of the supporting plates, and limiting mechanisms are arranged on the two sides of the chassis correspondingly. The base plate, the guide pipe, the placing pipe and the supporting plate are matched with one another, so that a crucible edge can be supported when the crucible is smashed, knocking damage caused by the fact that the crucible edge is stressed and is not supported is avoided, and the crucible can be protected when the crucible is in contact with the crucible through the silica gel cushion at the top of the supporting plate.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz crucible protection, and more specifically, to a protective device for striking a quartz crucible in producing single crystals by a Czochralski method. Background Art

[0002] The direct pulling method for producing single crystal silicon is currently the main method for preparing single crystal silicon. The thermal field system is one of the most important conditions for the crystallization of silicon materials. The temperature gradient distribution of the thermal field directly affects whether the single crystal can be pulled out smoothly and whether the quality of the single crystal can be controlled. The carbon / carbon composite crucible or graphite crucible used to carry the molten silicon raw material and the quartz crucible is the key core component in the thermal field system. The carbon / carbon composite crucible or graphite crucible is mainly used to carry the quartz crucible filled with molten silicon raw material at high temperature. It has to bear the weight of the quartz crucible and the molten silicon raw material. Therefore, a protective device for knocking the quartz crucible is required for producing single crystals by the direct pulling method.

[0003] However, the following problems may occur during use: the crucible is placed on the car and struck directly with a tungsten hammer. The crucible has no protective structure, and the strong striking force may easily cause the carbon fiber to break. When the crucible is struck, the outer wall of the crucible has no support, resulting in direct damage. Utility Model Content

[0004] In order to overcome the above defects of the prior art, the utility model provides a protective device for striking a quartz crucible in producing single crystals by a Czochralski method, so as to solve the problems raised in the above background technology.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A protective device for striking a quartz crucible for producing single crystals by a Czochralski method comprises a chassis, two guide tubes are arranged on the top of the chassis, a placement tube is arranged between the two guide tubes, clamping mechanisms are arranged inside the guide tubes and the placement tubes, hydraulic rods are arranged inside the guide tubes and the placement tubes, a support plate is arranged on the top of the hydraulic rods, a protective mechanism is arranged on the top of the support plate, limiting mechanisms are arranged on both sides of the chassis, the protective mechanism comprises a connecting groove opened on the top of the support plate, a connecting block is arranged inside the connecting groove, flexible rubber foam layers are arranged on both sides of the connecting block, a silicone pad is arranged on the top of the connecting block, fixing plates are arranged on both sides of the silicone pad, the two fixing plates are connected to the support plate, two screws are arranged on the surface of the fixing plate, and the above technical scheme is adopted to facilitate the support and protection of the crucible.

[0007] As a further description of the above technical scheme: the limiting mechanism includes placement grooves opened on both sides of the bottom plate, and slides are slidably provided inside the two placement grooves, an extension plate is provided on the top of the slide, and a movable groove is opened inside the extension plate, and two electric telescopic rods 1 are provided inside the movable groove, and connecting plates are provided on the top of the two electric telescopic rods 1, and two electric telescopic rods 2 are provided on one side of the connecting plate, and limiting plates are provided at one end of the two electric telescopic rods 2. The above technical scheme can prevent the device from tipping over and causing the crucible to fall and be damaged.

[0008] As a further description of the above technical solution: the clamping mechanisms include multiple springs arranged inside the guide tube and the placement tube, one end of each of the multiple springs is provided with a clamping plate, the surface of the clamping plate is provided with a rubber pad, the surface of the guide tube is penetrated with multiple fixing holes, and the fixing holes are provided with stud bolts. The above technical solution is adopted, which is convenient for application to hydraulic rods of different sizes.

[0009] Technical effects and advantages of the utility model:

[0010] 1. Through the guide tube, placement tube, hydraulic rod, support plate and protection mechanism, the two guide tubes play a role of fixed guidance. The support plate and the chassis are adjusted in height through the hydraulic rod. The support plate provides a support for the crucible when smashing the crucible to avoid the crucible being damaged by knocking due to lack of support. The support plate and the chassis are connected by disassembly, which makes it more convenient and quick. The silicone pad on the top of the support plate protects the crucible when it contacts the crucible to prevent friction on the crucible surface. The silicone pad can also be replaced to prevent the silicone pad from affecting its use effect after long-term use.

[0011] 2. By setting a limit mechanism, the slide plate is slid out of the placement slot, and the electric telescopic rod 1 on the top of the slide plate raises the connecting plate according to the height of the crucible, and then the electric telescopic rod 2 on one side of the connecting plate drives the limit plate to clamp and limit the crucible to prevent the crucible from falling when it is moved or processed on the support plate, which can avoid the device from tipping over and causing the crucible to fall and be damaged. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0013] Figure 2 For this utility model Figure 1 Schematic diagram of the local enlarged structure at point A in the middle.

[0014] Figure 3 It is a schematic diagram of the clamping structure of the utility model.

[0015] Figure 4It is a side structural schematic diagram of the utility model.

[0016] Figure 5 This is a schematic diagram of the connection block structure of the utility model.

[0017] The accompanying drawings are marked as follows: 1. chassis; 2. guide tube; 3. placement tube; 4. hydraulic rod; 5. support plate; 6. connecting groove; 7. connecting block; 8. flexible rubber foam layer; 9. silicone cushion; 10. fixing plate; 11. screw; 12. placement groove; 13. slide plate; 14. extension plate; 15. connecting plate; 16. electric telescopic rod 2; 17. limit plate; 18. spring; 19. clamping plate; 20. fixing hole; 21. stud bolt. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0019] The present application embodiment discloses Figure 1-5A protective device for striking a quartz crucible for producing single crystals by the Czochralski method is shown, specifically comprising a chassis 1, two guide tubes 2 are arranged on the top of the chassis 1, a placement tube 3 is arranged between the two guide tubes 2, a clamping mechanism is arranged inside the guide tube 2 and the placement tube 3, a hydraulic rod 4 is arranged inside the guide tube 2 and the placement tube 3, a support plate 5 is arranged on the top of the hydraulic rod 4, a protective mechanism is arranged on the top of the support plate 5, and a limiting mechanism is arranged on both sides of the chassis 1, the protective mechanism comprises a connecting groove 6 opened on the top of the support plate 5, a connecting block 7 is arranged inside the connecting groove 6, flexible rubber foam layers 8 are arranged on both sides of the connecting block 7, a silicone pad 9 is arranged on the top of the connecting block 7, and a fixing plate 10 is arranged on both sides of the silicone pad 9, the two fixing plates 10 are connected to the support plate 5, and the surface of the fixing plate 10 is provided with two The two guide tubes 2 play a role of fixing and guiding. The height of the support plate 5 and the chassis 1 is adjusted by a hydraulic rod 4. The support plate 5 provides a support for the crucible when smashing the crucible to prevent the crucible from being damaged by knocking due to lack of support. The support plate 5 and the chassis 1 are connected by disassembly, which makes it more convenient and quick. After the installation is completed, the crucible is placed on the top of the support plate 5. The silicone pad 9 is connected to the connecting groove 6 on the surface of the support plate 5 through the connecting block 7. The flexible rubber foam layer 8 on both sides of the connecting block 7 can provide a certain protection for the crucible. The silicone pad 9 on the top of the support plate 5 protects the crucible when it contacts the crucible to prevent friction on the crucible surface. The silicone pad 9 can also be replaced to prevent the silicone pad 9 from affecting its use effect after long-term use.

[0020] Reference Figure 1 and Figure 2 As shown, the limiting mechanism includes a placement groove 12 opened on both sides of the bottom plate, and a slide plate 13 is slidably provided inside the two placement grooves 12, an extension plate 14 is provided on the top of the slide plate 13, and a moving groove is opened inside the extension plate 14, and two electric telescopic rods 1 are provided inside the moving groove, and a connecting plate 15 is provided on the top of the two electric telescopic rods 1, and two electric telescopic rods 2 16 are provided on one side of the connecting plate 15, and a limiting plate 17 is provided at one end of the two electric telescopic rods 2 16. The slide plate 13 is slid out of the placement groove 12, and the electric telescopic rod 1 on the top of the slide plate 13 raises the connecting plate 15 according to the height of the crucible, and then the electric telescopic rod 2 16 on one side of the connecting plate 15 drives the limiting plate 17 to clamp and limit the crucible, so as to prevent the crucible from falling when being moved or processed on the support plate 5, and to avoid the device from tipping over and causing the crucible to fall and be damaged.

[0021] Reference Figure 3 and Figure 4As shown, the clamping mechanisms include a plurality of springs 18 arranged inside the guide tube 2 and the placement tube 3, a clamping plate 19 is arranged at one end of the plurality of springs 18, a rubber pad is arranged on the surface of the clamping plate 19, a plurality of fixing holes 20 are penetrated through the surface of the guide tube 2, stud bolts 21 are arranged inside the fixing holes 20, the hydraulic rod 4 is placed inside the guide tube 2 and the placement tube 3, the springs 18 inside the guide tube 2 and the placement tube 3 drive the clamping plate 19 to clamp the hydraulic rod 4, which is not only suitable for hydraulic rods 4 of different sizes, but also can clamp and limit the hydraulic rod 4.

[0022] Working principle of the utility model: first, the chassis 1 is placed to the required position, and the two guide tubes 2 play a role of fixed guidance. The height between the support plate 5 and the chassis 1 is adjusted by the hydraulic rod 4. The support plate 5 provides a support for the crucible when smashing the crucible to prevent the crucible from being damaged by knocking due to lack of support. The support plate 5 and the chassis 1 are connected by disassembly, which makes it more convenient and quick. The hydraulic rod 4 is placed inside the guide tube 2 and the placement tube 3. The spring 18 inside the guide tube 2 and the placement tube 3 drives the clamping plate 19 to clamp the hydraulic rod 4, which can not only be suitable for hydraulic rods 4 of different sizes, but also can clamp and limit the hydraulic rod 4. After the installation is completed, the crucible is placed on the top of the support plate 5. The silicone cushion 9 is connected to the connecting groove 6 on the surface of the support plate 5 through the connecting block 7. The flexible rubber foam layer 8 on both sides of the connecting block 7 can provide a certain protection for the crucible.

[0023] The silicone pad 9 on the top of the support plate 5 is used to protect the crucible when it contacts the crucible to prevent friction on the crucible surface. The silicone pad 9 can also be replaced to prevent the silicone pad 9 from affecting its use effect after long-term use. Then the slide plate 13 is slid out of the placement groove 12, and the electric telescopic rod 1 on the top of the slide plate 13 raises the connecting plate 15 according to the height of the crucible, and then the electric telescopic rod 2 16 on one side of the connecting plate 15 drives the limiting plate 17 to clamp and limit the crucible to prevent the crucible from falling when it is moved or processed on the support plate 5, which can avoid the device from tipping over and causing the crucible to fall and be damaged.

[0024] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A protective device for striking a quartz crucible for producing single crystals by a Czochralski method, comprising a chassis (1), characterized in that: Two guide tubes (2) are arranged on the top of the chassis (1), a placement tube (3) is arranged between the two guide tubes (2), a clamping mechanism is arranged inside the guide tube (2) and the placement tube (3), a hydraulic rod (4) is arranged inside the guide tube (2) and the placement tube (3), a support plate (5) is arranged on the top of the hydraulic rod (4), a protective mechanism is arranged on the top of the support plate (5), and limiting mechanisms are arranged on both sides of the chassis (1).

2. The protective device for striking a quartz crucible for producing single crystals by the Czochralski method according to claim 1, characterized in that: The protective mechanism comprises a connection groove (6) opened on the top of the support plate (5), a connection block (7) is arranged inside the connection groove (6), flexible rubber foam layers (8) are arranged on both sides of the connection block (7), a silicone cushion (9) is arranged on the top of the connection block (7), fixing plates (10) are arranged on both sides of the silicone cushion (9), the two fixing plates (10) are connected to the support plate (5), and two screws (11) are arranged on the surface of the fixing plates (10).

3. The protective device for striking a quartz crucible for producing single crystals by the Czochralski method according to claim 1, characterized in that: The limiting mechanism comprises placement grooves (12) provided on both sides of the bottom plate, a slide plate (13) being slidably provided inside the two placement grooves (12), an extension plate (14) being provided on the top of the slide plate (13), and a movable groove being provided inside the extension plate (14).

4. The protective device for striking a quartz crucible for producing single crystals by the Czochralski method according to claim 3, characterized in that: Two electric telescopic rods (1) are arranged inside the movable groove, and a connecting plate (15) is arranged on the top of the two electric telescopic rods (1), and two electric telescopic rods (16) are arranged on one side of the connecting plate (15), and a limiting plate (17) is arranged on one end of the two electric telescopic rods (16).

5. The protective device for striking a quartz crucible for producing single crystals by the Czochralski method according to claim 1, characterized in that: The clamping mechanisms each comprise a plurality of springs (18) arranged inside the guide tube (2) and the placement tube (3), one end of each of the plurality of springs (18) being provided with a clamping plate (19), and a surface of the clamping plate (19) being provided with a rubber pad.

6. The protective device for striking a quartz crucible for producing single crystals by the Czochralski method according to claim 1, characterized in that: A plurality of fixing holes (20) are provided through the surface of the guide tube (2), and stud bolts (21) are provided inside the fixing holes (20).

Images