Cooling device for heating platform of ball mounter
By designing a cooling device for the heating platform of the ball planter, the gas shunt and air outlet pipe system can be used to achieve rapid cooling, which solves the problem of damage in the wafer during the wafer picking at high temperatures in the prior art, and improves the utilization rate of the equipment and the yield of the gold-planting ball products.
Patent Information
- Application Number
- CN202421402745.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-19
- Publication Date
- 2025-03-21
- Estimated Expiration
- 2034-06-19
AI Technical Summary
The existing ball planting machine heating platform lacks cooling devices in the wafer gold ball planting process, which causes thermal expansion and damage when the wafer is taken at high temperature. The equipment is low in utilization during the cooling process, which cannot meet the production capacity needs.
A cooling device for heating platform of the ball planter is designed, including a gas shunt bracket and an outlet pipe connection bracket. The compressed air is distributed to the multiple outlet pipe through the gas shunt main pipe and the multiple gas shunt branch pipe. Multiple outlet holes are provided on the outlet pipe, and the gas is blown to the bottom of the heating platform of the ball planter to achieve rapid cooling.
It achieves rapid cooling of the heating platform under the conditions of ensuring product quality and meeting process requirements, improves the utilization rate of equipment, reduces wafer damage, and improves the yield of gold-planted ball products.
Smart Images
Figure CN222653924U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of wafer gold ball implantation, in particular to a temperature reduction device for a heating platform of a ball implantation machine. Background Art
[0002] In the current wafer gold ball implantation process, in order to avoid wafer fragments caused by thermal expansion when the wafer is taken out at high temperature, ensure the stability of the wafer yield during the processing, reduce the situation of wafer damage, and improve the yield of wafer gold ball implantation products, the wafer needs to be cooled during the process, but the ATP and ATPP heating platforms of the ball implantation equipment are not designed with cooling devices.
[0003] After each gold ball implantation on the wafer is completed, the wafer needs to be cooled down before being taken out. It takes about an hour to drop from the set temperature to room temperature. Nearly half of each shift is spent cooling down the equipment, resulting in very low equipment utilization and failure to meet production capacity requirements. Utility Model Content
[0004] In order to solve the above technical problems, the utility model designs a cooling device for the heating platform of a bulb planting machine, which can quickly cool down the heating platform and improve the utilization rate of the equipment while ensuring product quality and meeting process requirements.
[0005] The utility model adopts the following technical solutions:
[0006] A cooling device for a heating platform of a bulb planting machine comprises a cooling device body fixedly installed on the heating platform of the bulb planting machine, the cooling device body comprises a gas diversion bracket and an air outlet pipe connecting bracket, the gas diversion bracket and the air outlet pipe connecting bracket are fixedly connected, a gas diversion main pipe is installed in the gas diversion bracket, a gas diversion main pipe is installed in the gas diversion bracket, a plurality of gas diversion branches are connected to the gas diversion main pipe, a plurality of air outlet pipes are correspondingly connected to the air outlet pipe connecting bracket, a plurality of air outlet holes are evenly opened on each air outlet pipe, each gas diversion branch pipe is respectively connected to an air outlet pipe, and one end of the gas diversion main pipe is connected to a total air inlet of compressed air.
[0007] Preferably, the multiple air outlet pipes are distributed in parallel at the bottom of the heating platform of the ball planting machine.
[0008] Preferably, the main compressed air inlet is equipped with a compressed air regulating device.
[0009] Preferably, the air outlet pipe is a capillary air outlet pipe, and the air outlet pipe is welded and fixed on the air outlet pipe connecting bracket.
[0010] Preferably, the air outlet pipe connecting bracket is provided with fixing screw holes, and is fixedly mounted on the heating platform of the ball planting machine by screws.
[0011] Preferably, the gas diversion bracket is provided with a connecting screw hole, and the gas outlet pipe connecting bracket is fixedly connected by bolts.
[0012] The beneficial effects of the utility model are as follows: the utility model designs a cooling device for the heating platform of the ball planting machine, which is specially used for cooling the heating platform of the ball planting machine; in the wafer gold ball planting process, the wafer is cooled to ensure the stability of the wafer yield during the processing, reduce the possibility of wafer damage, and improve the yield of the wafer gold ball planting product. At the same time, under the condition of ensuring product quality and meeting process requirements, the heating platform can be quickly cooled and the utilization rate of the equipment can be improved. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] Figure 1 It is a stereogram of the utility model;
[0014] Figure 2 It is a front view of the utility model;
[0015] Figure 3 It is a schematic diagram of the internal structure of the utility model;
[0016] In the figure: 1. gas diversion main pipe, 2. gas diversion bracket, 3. outlet pipe connecting bracket, 4. outlet pipe, 5. outlet hole, 6. fixing screw hole, 7. connecting screw hole, 8. compressed air main inlet, 9. gas diversion branch pipe. DETAILED DESCRIPTION
[0017] The technical solution of the present invention is further described in detail below through specific embodiments and in conjunction with the accompanying drawings:
[0018] Example: Figure 1-Figure 2 As shown, a cooling device for a heating platform of a bulb planting machine includes a cooling device body fixedly installed on the heating platform of the bulb planting machine, the cooling device body includes a gas diversion bracket 2 and an air outlet pipe connecting bracket 3, the gas diversion bracket and the air outlet pipe connecting bracket are fixedly connected, a gas diversion main pipe 1 is installed in the gas diversion bracket, a gas diversion main pipe is installed in the gas diversion bracket, and a plurality of gas diversion branches 9 are connected to the gas diversion main pipe, and a plurality of air outlet pipes 4 are correspondingly connected to the air outlet pipe connecting bracket, and a plurality of air outlet holes 5 are evenly opened on each air outlet pipe, each gas diversion branch pipe is connected to an air outlet pipe respectively, and one end of the gas diversion main pipe is connected to a total compressed air inlet 8.
[0019] Multiple outlet pipes are distributed in parallel at the bottom of the heating platform of the ball planting machine. A compressed air regulating device is installed at the main air inlet of compressed air. The outlet pipe is a capillary outlet pipe, and the outlet pipe is welded and fixed on the outlet pipe connecting bracket. The outlet pipe connecting bracket is provided with a fixing screw hole 6, which is fixed on the heating platform of the ball planting machine by screws. The gas diversion bracket is provided with a connecting screw hole 7, which is fixedly connected to the outlet pipe connecting bracket by bolts.
[0020] The multi-way air outlet pipes consist of 6 air outlet pipes with a length of 230mm. Each air outlet pipe has 22 air outlet holes with a diameter of 0.8mm. The gas is distributed to the inside of the 6 air outlet pipes through the gas diversion branch pipe, and then the compressed air is released from the air outlet holes of the air outlet pipes. The gas is blown to the lower part of the heating platform of the ball planting machine to achieve a cooling effect.
[0021] The cooling device body is fixed to the bottom of the heating platform of the ball implanter with M3 screws through the three reserved M3 fixing screw holes. Make sure that the air outlet holes on the six air outlet pipes are facing the bottom of the heating platform. When in use, just turn on the gas switch. In order to avoid gas waste, a compressed air regulating device is specially added to evaluate the air intake to minimize gas usage while achieving the cooling effect.
[0022] The above-described embodiment is only a preferred solution of the present invention and does not limit the present invention in any form. There are other variations and modifications without exceeding the technical solution described in the claims.
Claims
1. A cooling device for a heating platform of a bulb planting machine, comprising a cooling device body fixedly mounted on the heating platform of the bulb planting machine, characterized in that: The cooling device body comprises a gas diversion bracket and an outlet pipe connecting bracket, which are fixedly connected with each other, a gas diversion main pipe is installed in the gas diversion bracket, a gas diversion main pipe is installed in the gas diversion bracket, and a plurality of gas diversion branches are connected to the gas diversion main pipe, and a plurality of outlet pipes are correspondingly connected to the outlet pipe connecting bracket, and a plurality of outlet holes are evenly arranged on each outlet pipe, and each gas diversion branch pipe is connected to one outlet pipe respectively, and one end of the gas diversion main pipe is connected to the main air inlet of compressed air.
2. The ball planting machine heating platform cooling device according to claim 1 is characterized in that: The multiple air outlet pipes are distributed in parallel at the bottom of the heating platform of the ball planting machine.
3. The ball planting machine heating platform cooling device according to claim 1 is characterized in that: The compressed air main air inlet is equipped with a compressed air regulating device.
4. The ball planting machine heating platform cooling device according to claim 1 is characterized in that: The air outlet pipe is a capillary air outlet pipe, and the air outlet pipe is welded and fixed on the air outlet pipe connecting bracket.
5. The ball planting machine heating platform cooling device according to claim 1 is characterized in that: The air outlet pipe connection bracket is provided with fixing screw holes, and is fixedly mounted on the heating platform of the ball planting machine by screws.
6. The ball planting machine heating platform cooling device according to claim 1 is characterized in that: The gas flow splitter bracket is provided with a connecting screw hole, and the gas outlet pipe connecting bracket is fixedly connected by bolts.