Quartz heating tube sealing structure

Abstract

The utility model discloses a quartz heating tube sealing structure which comprises a quartz heating tube, a heating device is arranged on the outer wall of the quartz heating tube, and sealing structures are arranged at the two ends of the quartz heating tube. The sealing structure comprises a sealing plug, a base and a cover plate; the sealing plug is arranged at the tail end of the quartz heating pipe, and the outer wall of the sealing plug is sleeved with a cover plate. The utility model relates to the technical field of quartz heating tubes, and solves the problems of low heat transfer efficiency, high energy consumption and difficulty in adapting to the market requirements of high temperature rise and high flow rate in the current heating mode that a heating wire is wrapped in a PFA (Polyfluoroalkoxy) tube.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz heating tubes, in particular to a quartz heating tube sealing structure. Background Art

[0002] In the wet cleaning process of Pan Semiconductor, the cleaning tank volume has increased due to the increase in silicon wafer size and production capacity, and higher requirements have been placed on the liquid preparation time of the cleaning tank. The current heating method of the heating wire wrapped in the PFA tube has low heat transfer efficiency and high energy consumption, and it is increasingly difficult to adapt to the market demand for high temperature rise and large flow. Utility Model Content

[0003] The utility model aims to provide a quartz heating tube sealing structure to solve the problem that the current heating method of PFA tube with heating wire wrapped in it has low heat transfer efficiency, high energy consumption and is increasingly difficult to adapt to the market demand for high temperature rise and large flow.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a quartz heating tube sealing structure, comprising a quartz heating tube, the outer wall of which is provided with a heating device, and both ends of the quartz heating tube are provided with sealing structures; the sealing structure comprises a sealing plug, a base and a cover plate; the sealing plug is provided at the end of the quartz heating tube, the outer wall of the sealing plug is sleeved with a cover plate, the side of the cover plate away from the quartz heating tube is provided with a base, and the cover plate and the base form a sealed cavity.

[0005] Preferably, the heating device comprises a heating film and a silver paste high temperature curing conductive electrode; both ends of the heating film are electrically connected to the silver paste high temperature curing conductive electrode arranged on the outer wall of the quartz heating tube.

[0006] Preferably, the heating device further comprises a lead copper hoop, and the lead copper hoop is arranged on the outer wall of the silver paste high temperature curing conductive electrode.

[0007] Preferably, the sealing plug is provided with a sealing ridge.

[0008] Compared with the prior art, the utility model has the following advantages:

[0009] 1. Simple structure, easy to assemble, repair and replace;

[0010] 2. The liquid temperature rises quickly and can achieve large flow with low power consumption;

[0011] 3. Quartz tube has high heating efficiency and energy saving;

[0012] 4. In view of the current sealing methods of quartz tubes on the market that use metal screws, sealing rings, nuts and fixing plates at both ends, in the assembly process, the quartz tubes can be reduced from being broken due to over-tightening or liquid leakage due to insufficient tightening. The silicone or fluororubber plug hole structure with a water stop ring (sealing ridge) can adapt to a wider range of quartz tube inner diameter size errors, with high assembly efficiency, small loss rate and better sealing effect.

[0013] 5. The heating device is arranged on the outer wall of the quartz heating tube, which can form an ultra-pure and air-sealed heating cavity without any metal ion precipitation inside the quartz heating tube, which can be connected to the outside world at will, and is used to heat ultra-pure water, chemical solutions that do not allow metal ion precipitation, etc. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the structure of the utility model;

[0015] Figure 2 for Figure 1 Schematic diagram of the structure of the heating tube, silver paste high-temperature cured conductive electrode and sealing plug.

[0016] In the figure: 1. heating tube, 2. heating film, 3. silver paste high temperature curing conductive electrode, 4. lead copper hoop, 5. sealing plug, 6. base, 7. cover plate. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0018] The current heating method of wrapping heating wire inside PFA tube has low heat transfer efficiency and high energy consumption, and it is increasingly difficult to adapt to the market demand for high temperature rise and large flow.

[0019] In view of this, the utility model provides a quartz heating tube sealing structure, which reduces the breakage of the quartz tube due to excessive tightening or liquid leakage due to insufficient tightening during the assembly process. The silicone or fluororubber plugging structure with a water stop ring (sealing ridge) can adapt to a wider dimensional error of the inner diameter of the quartz tube, has high assembly efficiency, very small loss rate and better sealing effect.

[0020] See also Figure 1-2A quartz heating tube sealing structure comprises a quartz heating tube 1, a heating device is arranged on the outer wall of the quartz heating tube 1, and sealing structures are arranged at both ends of the quartz heating tube 1; the sealing structure comprises a sealing plug 5, a base 6 and a cover plate 7; the sealing plug 5 is arranged at the end of the quartz heating tube 1, the outer wall of the sealing plug 5 is sleeved with the cover plate 7, the side of the cover plate 7 away from the quartz heating tube 1 is installed with the base 6, and the cover plate 7 and the base 6 form a sealed cavity.

[0021] In the specific implementation process, it is worth pointing out that the sealing plug 5 can be made of silicone or fluororubber material and installed at the end of the quartz heating tube 1 to form a closed structure, wherein the base 6 and the cover plate 7 are used to fix the sealing plug 5, and at the same time are convenient for connection and fixation with external equipment and devices. Of course, the specific structure and shape of the base 6 and the cover plate 7 are not limited, and are subject to the adaptation of peripheral equipment and devices. The middle of the sealing plug 5 is a hole for liquid flow, which is super-tightly matched with the quartz heating tube 1, achieving sealing without the trouble of installing metal threads, screws and gaskets, and using the softness of rubber to achieve a sealing effect that can withstand a pressure of 0.5Mpa. The sealing plug 5 can be sleeved on the end of the outer wall of the quartz heating tube 1, or inserted into the end of the inner wall of the quartz heating tube 1.

[0022] Furthermore, the heating device includes a heating film 2 and a silver paste high temperature curing conductive electrode 3 ; both ends of the heating film 2 are electrically connected to the silver paste high temperature curing conductive electrode 3 arranged on the outer wall of the quartz heating tube 1 .

[0023] In the specific implementation process, it is worth pointing out that the heating film 2 silver paste high temperature curing conductive electrode 3 is only one feasible heating method for the quartz heating tube 1, not all embodiments. Of course, the silver paste high temperature curing conductive electrode 3 is arranged on the outer wall of the quartz heating tube 1, and can form an ultra-pure and air-sealed heating cavity without any metal ion precipitation inside the quartz heating tube 1, which can be connected to the outside world arbitrarily, and is used for heating ultra-pure water, chemical solutions that do not allow metal ions to precipitate, etc.

[0024] Furthermore, the heating device further comprises a lead copper hoop 4 , which is arranged on the outer wall of the silver paste high temperature curing conductive electrode 3 .

[0025] In the specific implementation process, it is worth pointing out that the arrangement of the lead copper ferrule 4 facilitates the connection of the silver paste high temperature cured conductive electrode 3, the heating film 2 and external wires.

[0026] Furthermore, the sealing plug 5 is provided with a sealing ridge.

[0027] In the specific implementation process, it is worth pointing out that the sealing ridges provided on the sealing plug 5 are intended to improve the sealing performance between the sealing plug 5 and other structures, such as the quartz heating tube 1 .

[0028] In the description of the present invention, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "top", "inside", "front", "center", "two ends", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0029] In the present utility model, unless otherwise clearly stipulated and limited, the terms such as "installation", "setting", "connection", "fixation" and "screw-on" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, ordinary technicians in this field can understand the specific meanings of the above terms in the utility model according to the specific circumstances.

[0030] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A quartz heating tube sealing structure, comprising a quartz heating tube (1), characterized in that: The outer wall of the quartz heating tube (1) is provided with a heating device, and both ends of the quartz heating tube (1) are provided with sealing structures; The sealing structure comprises a sealing plug (5), a base (6) and a cover plate (7); The sealing plug (5) is arranged at the end of the quartz heating tube (1), the outer wall of the sealing plug (5) is sleeved with a cover plate (7), a base (6) is installed on the side of the cover plate (7) away from the quartz heating tube (1), and the cover plate (7) and the base (6) form a sealed cavity.

2. The quartz heating tube sealing structure according to claim 1, characterized in that: The heating device comprises a heating film (2) and a silver paste high temperature curing conductive electrode (3); Both ends of the heating film (2) are electrically connected to silver paste high-temperature-cured conductive electrodes (3) arranged on the outer wall of the quartz heating tube (1).

3. The quartz heating tube sealing structure according to claim 2, characterized in that: The heating device further comprises a lead copper hoop (4), wherein the lead copper hoop (4) is arranged on the outer wall of the silver paste high temperature curing conductive electrode (3).

4. The quartz heating tube sealing structure according to claim 1, characterized in that: The sealing plug (5) is provided with a sealing ridge.

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