Reaction chamber of photovoltaic tubular equipment

Abstract

The utility model provides a reaction chamber of photovoltaic tubular equipment. The reaction chamber comprises a furnace door, a quartz tube, a furnace opening water-cooling flange and a sealing assembly, the sealing assembly comprises a first front side sealing ring and a first rear side sealing ring. A reaction chamber is arranged in the quartz tube, and one end of the reaction chamber is open; the furnace door is movably arranged at the open end of the reaction chamber, a first mounting groove is formed in one end of the furnace door, and the first front side sealing ring is arranged in the first mounting groove; the furnace opening water-cooling flange is arranged at the opening end of the reaction chamber; a blocking part is arranged at the first end of the furnace opening water-cooling flange and protrudes out of the first end of the furnace opening water-cooling flange; the first rear side sealing ring is arranged at the second end of the furnace opening water-cooling flange so as to seal the end face of the furnace opening water-cooling flange. The reaction chamber of the photovoltaic tubular equipment further comprises a first heat insulation piece, and the quartz tube is sleeved with the first heat insulation piece. The reaction chamber of the photovoltaic tubular equipment provided by the utility model has the advantages of good sealing performance, long service life, simple structure and low cost.

Description

Technical Field

[0001] The utility model relates to the field of photovoltaic manufacturing, in particular to a reaction chamber of photovoltaic tube-type equipment. Background Art

[0002] Tubular equipment mainly includes: tubular PECVD, tubular diffusion, tubular ALD, tubular oxidation, tubular annealing, tubular LPCVD, etc. At present, tubular equipment is the most mainstream equipment in the photovoltaic industry. Among them, because of the high-temperature tubular equipment, the process temperature is high, the structure is easily damaged by heat, the equipment failure is more likely, and the difficulty is higher.

[0003] The core structure of the tubular equipment is the reaction chamber of the photovoltaic tubular equipment. In the reaction chamber of the photovoltaic tubular equipment, a certain temperature, vacuum and process gas are applied to implement the process reaction and realize the necessary structure of the battery. The existing high-temperature tubular furnace reaction chamber structure usually includes a quartz tube, a front water-cooled metal flange, a rear water-cooled flange, a rear water-cooled flange mounting plate and a furnace door. Among them, the quartz tube is a reaction chamber, and the reaction needs to be carried out under high temperature and high pressure conditions. Therefore, a sealing structure needs to be set at the open end of the reaction chamber for sealing. Most conventional sealing structures rely on the single-layer sealing ring on the furnace door to be squeezed with the front water-cooled metal flange and the single-layer sealing ring on the front water-cooled metal flange to be squeezed with the quartz tube, thereby relying on the self-deformation of the sealing ring to achieve the purpose of sealing. However, in a high temperature environment for a long time, the elasticity of the sealing ring will deteriorate or even fail, resulting in air leakage. Therefore, the sealing ring of the sealing structure of this reaction chamber has a short service life. In addition, when installing the furnace body, structures such as the rear water-cooled flange and the rear water-cooled flange mounting plate are used, the water-cooling structure is complex, the installation is relatively complex, and the equipment cost is high.

[0004] Therefore, it is necessary to design a reaction chamber of a photovoltaic tube device to solve at least one of the above problems. Utility Model Content

[0005] One purpose of the utility model is to provide a reaction chamber of a photovoltaic tube-type device, which has the advantages of good sealing performance of a furnace door sealing structure, long service life, simple structure and low cost.

[0006] In order to achieve the above-mentioned purpose, the reaction chamber of the photovoltaic tube-type equipment provided by the utility model comprises a furnace door, a quartz tube, a furnace mouth water-cooling flange and a sealing assembly; the sealing assembly comprises a first front side sealing ring and a first rear side sealing ring; a reaction chamber is arranged inside the quartz tube, and one end of the reaction chamber is open; the furnace door is movably arranged at the open end of the reaction chamber, and one end of the furnace door is provided with a first mounting groove, and the first front side sealing ring is arranged in the first mounting groove; the furnace mouth water-cooling flange is arranged at one end of the opening of the reaction chamber; the first end of the furnace mouth water-cooling flange has a blocking part, and the blocking part protrudes out of the first end of the furnace mouth water-cooling flange so that the blocking part can extend into the first mounting groove and contact with the first front side sealing ring in a sealing manner; the first rear side sealing ring is arranged at the second end of the furnace mouth water-cooling flange to seal the end face of the furnace mouth water-cooling flange; the reaction chamber of the photovoltaic tube-type equipment also includes a first thermal insulation member, and the first thermal insulation member is sleeved outside the quartz tube.

[0007] Compared with the prior art, the reaction chamber of the photovoltaic tube type equipment provided by the utility model is provided with the blocking part at the first end of the furnace mouth water cooling flange. When the furnace door closes one end of the reaction chamber opening, the blocking part extends into the first installation groove, and the first front side sealing ring is arranged in the first installation groove, so that the blocking part can block the hot air in the reaction chamber from blowing directly to the first front side sealing ring and delay the rate of aging failure of the first front side sealing ring due to heat, so that the service life of the first front side sealing ring is longer. At the same time, by arranging the first rear side sealing ring at the first end of the furnace mouth water cooling flange, the gap between the furnace mouth water cooling flange and the reaction chamber is sealed, and the sealing performance is better. In addition, by arranging the first thermal insulation member, the first thermal insulation member is sleeved outside the quartz tube, and the first thermal insulation member can insulate the quartz tube from the support supporting the quartz tube, thereby preventing the heat of the quartz tube from being conducted outward, and there is no need to use the traditional rear water cooling flange for installation, the structure is greatly simplified, and the cost is effectively reduced.

[0008] Preferably, the sealing assembly further comprises a second front sealing ring, which is arranged at the second end of the furnace mouth water cooling flange to be in sealing contact with one end of the furnace door. By arranging the second front sealing ring, it is equivalent to arranging two independent sealing rings at intervals along the axial direction of the reaction chamber of the photovoltaic tube device between the furnace door and the furnace mouth water cooling flange, so that the sealing is more reliable and the sealing performance is better.

[0009] Preferably, the sealing assembly further comprises a second rear side sealing ring, which is arranged with a gap between the second rear side sealing ring and the first rear side sealing ring and is located at the second end of the furnace port water cooling flange to seal the end face of the furnace port water cooling flange. By arranging the second rear side sealing ring, it is equivalent to arranging two independent sealing rings between the furnace port water cooling flange and the reaction chamber at intervals along the radial direction of the furnace port water cooling flange, which can more reliably seal the gap between the furnace port water cooling flange and the reaction chamber, and has good sealing performance.

[0010] Specifically, the first installation groove is an annular sunken groove, the blocking portion is a positioning step, and the sunken groove cooperates with the positioning step. The positioning step and the sunken groove are arranged to cooperate with each other, so that the furnace door can be more conveniently and quickly docked and positioned with the furnace mouth water cooling flange when closing one end of the reaction chamber opening, thereby improving the convenience of use. In addition, the first front side sealing ring can be pressed against each other, so that the sealing performance of the first front side sealing ring is better.

[0011] Preferably, one end of the reaction chamber opening has an annular transition step, and the first heat insulating member is located on a side of the annular transition step away from the furnace mouth water-cooling flange.

[0012] Preferably, the reaction chamber of the photovoltaic tube device further comprises a second heat insulating member and a fixing member, wherein the fixing member is sleeved outside the quartz tube, and the second heat insulating member is sleeved between the fixing member and the quartz tube; and the first heat insulating member is located between the fixing member and the annular transition step.

[0013] Specifically, the reaction chamber of the photovoltaic tube device further comprises an elastic pad, which is arranged between the first heat insulating member and the annular transition step. The elastic pad can buffer the annular transition step and the first heat insulating member, thereby preventing excessive squeezing and wear between the two.

[0014] Preferably, the first end of the furnace mouth water-cooling flange is also provided with a second installation groove for installing the second front side sealing ring, and the second end of the furnace mouth water-cooling flange is also provided with a third installation groove for installing the first rear side sealing ring and a fourth installation groove for installing the second rear side sealing ring.

[0015] Preferably, a limiting sleeve is provided at one end of the reaction chamber opening protruding toward the furnace door, and the furnace mouth water cooling flange is sleeved on the outside of the limiting sleeve. Providing a limiting sleeve protruding at one end of the reaction chamber opening toward the furnace door can not only facilitate the installation and accurate positioning of the furnace mouth water cooling flange, but also block the hot gas flow in the reaction chamber toward the first rear side sealing ring and the second rear side sealing ring, slowing down the rate of aging failure of the first rear side sealing ring and the second rear side sealing ring due to heat, thereby extending the service life of the first rear side sealing ring and the second rear side sealing ring.

[0016] Preferably, the first thermal insulation member is made of mica, ceramic fiber, nano thermal insulation material, graphite or glass fiber composite material. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a three-dimensional schematic diagram of a reaction chamber of a photovoltaic tube-type device provided by the utility model.

[0018] Figure 2 It is a cross-sectional view of a reaction chamber of the photovoltaic tube device provided by the utility model.

[0019] Figure 3 yes Figure 2 A partial enlarged view of point A in the middle.

[0020] Figure 4 It is a schematic diagram of a furnace mouth water cooling flange of a reaction chamber of a photovoltaic tube type device provided by the utility model.

[0021] Figure 5 It is a schematic diagram of a quartz tube in a reaction chamber of a photovoltaic tube-type device provided by the utility model.

[0022] Figure 6 It is a schematic diagram of a furnace door of a reaction chamber of a photovoltaic tube-type device provided by the utility model. DETAILED DESCRIPTION

[0023] The following is a clear and complete description of the technical solutions in the embodiments of the present application in combination with specific implementation examples and drawings, and an explanation of the technical solutions of the present utility model. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments.

[0024] See also Figure 1 to Figure 2 as well as Figure 4The reaction chamber 100 of the photovoltaic tube-type device provided by the utility model comprises a furnace door 1, a quartz tube 2, a furnace mouth water-cooling flange 3 and a sealing assembly 4. The sealing assembly 4 comprises a first front side sealing ring 41, a second front side sealing ring 42, a first rear side sealing ring 43 and a second rear side sealing ring 44. A reaction chamber 21 is arranged inside the quartz tube 2, and one end of the reaction chamber 21 is open. The furnace door 1 is movably arranged at the open end of the reaction chamber 21 to close the open end of the reaction chamber 21. The furnace door 1 is circumferentially provided with a first mounting groove 11 at one end close to the reaction chamber 21, and the first mounting groove 11 is used to install the first front side sealing ring 41. The furnace mouth water-cooling flange 3 is arranged at one end of the opening of the reaction chamber 21, and the first rear side sealing ring 43 and the second rear side sealing ring 44 are arranged at intervals at the second end 31 of the furnace mouth water-cooling flange 3. The first rear side sealing ring 43 and the second rear side sealing ring 44 are used to seal the connection between the furnace mouth water cooling flange 3 and one end of the opening of the reaction chamber 21. The first end 32 of the furnace mouth water cooling flange 3 includes a blocking portion 321, and the blocking portion 321 protrudes out of the first end 32 of the furnace mouth water cooling flange 3, so that the blocking portion 321 can extend into the first installation groove 11 and be in sealing contact with the first front side sealing ring 41. The second front side sealing ring 42 is arranged at the first end 32 of the furnace mouth water cooling flange 3 and is located outside the first end 32, so as to be in sealing contact with one end of the furnace door 1 close to the reaction chamber 21. Specifically, the second front side sealing ring 42 is arranged at a distance from the blocking portion 321 on the outer periphery of the first front side sealing ring 41, so that the second front side sealing ring 42 is staggered from the first installation groove 11. In this embodiment, in order to firmly install the second front sealing ring 42, the first rear sealing ring 43 and the second rear sealing ring 44 on the furnace mouth water cooling flange 3, the first end 32 of the furnace mouth water cooling flange 3 is further provided with a second mounting groove 32A for mounting the second front sealing ring 42, and the second end 31 of the furnace mouth water cooling flange 3 is further provided with a third mounting groove 31A and a fourth mounting groove 31B, the third mounting groove 31A is used to mount the first rear sealing ring 43, and the fourth mounting groove 31B is used to mount the second rear sealing ring 44. Specifically, the second mounting groove 32A, the third mounting groove 31A and the fourth mounting groove 31B are all annular grooves and the cross sections of the three are all trapezoidal.

[0025] See also Figure 2 and Figure 6, the first mounting groove 11 is an annular groove. The groove is divided into two sections, the cross section of the first end is rectangular, and the cross section of the second section is trapezoidal. The first front side sealing ring 41 is installed on the section of the groove with a trapezoidal cross section so that the first front side sealing ring 41 is firmly installed. The blocking portion 321 is a positioning step, and the groove and the positioning step cooperate with each other. The positioning step and the groove are arranged to cooperate with each other, so that the furnace door 1 can be more conveniently and quickly positioned on the furnace mouth water cooling flange 3 when closing one end of the opening of the reaction chamber 21, thereby improving the convenience of use. In addition, the first front side sealing ring can be pressed against each other, so that the sealing performance of the first front side sealing ring is better.

[0026] See also Figure 2 and Figure 5 The open end of the reaction chamber 21 includes an annular transition step 211, and the furnace mouth water cooling flange 3 is arranged on the first side 211A of the annular transition step 211, that is, the side close to the furnace door 1. The annular transition step 211 is arranged at the open end of the reaction chamber 21 to position the furnace mouth water cooling flange 3, which is convenient for the installation of the furnace mouth water cooling flange 3. Specifically, a limiting sleeve 211C is protruding toward the direction of the furnace door 1 on the annular transition step 211, and the furnace mouth water cooling flange 3 is sleeved on the outer side of the limiting sleeve 211C. In this way, the limiting sleeve 211C can not only facilitate the installation and accurate positioning of the furnace mouth water cooling flange 3, but also block the hot gas flow in the reaction chamber 21 from the first rear side sealing ring 43 and the second rear side sealing ring 44, delay the rate of aging failure of the first rear side sealing ring 43 and the second rear side sealing ring 44 due to heat, thereby extending the service life of the first rear side sealing ring 43 and the second rear side sealing ring 44.

[0027] See also Figure 2 , Figure 3 and Figure 5In order to support the quartz tube 2 of the reaction chamber 100 of the photovoltaic tube type device to improve the reliability of use, the reaction chamber 100 of the photovoltaic tube type device further includes a fixing member 5, which is sleeved outside the quartz tube 2 and located on the side of the annular transition step 211 away from the furnace door 1. In order to reduce the heat transferred from the annular transition step 211 to the fixing member 5 and prevent the fixing member 5 from being damaged due to overheating, the reaction chamber 100 of the photovoltaic tube type device further includes a first heat insulating member 7, which is sleeved outside the quartz tube 2 and located on the side of the annular transition step 211 away from the furnace door 1. The first heat insulating member 7 is arranged between the fixing member 5 and the second side 211B of the annular transition step 211. In addition, the reaction chamber 100 of the photovoltaic tube type device further includes an elastic pad 8 for buffering, which is arranged between the annular transition step 211 and the first heat insulating member 7. The elastic pad 8 can buffer the annular transition step 211 and the first thermal insulation member 7, thereby preventing the two from being excessively squeezed and worn. In order to reduce the heat conducted from the outer side of the quartz tube 2 to the fixing member 5 and increase the service life of the fixing member 5, the reaction chamber 100 of the photovoltaic tube device also includes a second thermal insulation member 6, and the first thermal insulation member 6 is sleeved between the quartz tube 2 and the fixing member 5. By setting the fixing member 5, the first thermal insulation member 6 and the second thermal insulation member 7 to cooperate with each other to reduce the heat in the reaction chamber 21 from being conducted to the surface of the opening end of the reaction chamber 21, there is no need to set a rear water-cooled metal flange for heat dissipation like the reaction chamber of a conventional photovoltaic tube device, so the installation is more convenient and simple, the structure is greatly simplified, and the cost is effectively reduced. The first thermal insulation member 6 and the second thermal insulation member 7 are made of mica, ceramic fiber, nano thermal insulation material, graphite or glass fiber composite material.

[0028] It should be pointed out that the structure and principle of the furnace mouth water cooling flange 3 of the reaction chamber 100 of the photovoltaic tube device provided by the present invention are well known to those skilled in the art and will not be elaborated herein.

[0029] The following is a description of the working principle of the reaction chamber 100 of the photovoltaic tube device provided by the utility model. First, the furnace door 1 is driven to close one end of the opening of the reaction chamber 21, and the blocking portion 321 of the furnace mouth water cooling flange 3 extends into the first installation groove 11 and is pressed against the first front side sealing ring 41 to seal the contact gap between the furnace door 1 and the blocking portion 321. At the same time, the second front side sealing ring 42 arranged on the first end 32 of the furnace mouth water cooling flange 3 is also pressed against the end face of the furnace door 1 to seal the contact gap between the furnace door 1 and the furnace mouth water cooling flange 3, thereby further making the furnace door 1 and the furnace mouth water cooling flange 3 in a sealed connection. At this time, the blocking portion 321 will also block the hot air from the reaction chamber 21, preventing the hot air from blowing directly to the first front side sealing ring 41 and the second front side sealing ring 42, and the furnace mouth water cooling flange 3 is in contact with the first front side sealing ring 41 and the second front side sealing ring 42 at the same time, so the furnace mouth water cooling flange 3 will also cool down the first front side sealing ring 41 and the second front side sealing ring 42 at this time, greatly delaying the aging failure rate of the first front side sealing ring 41 and the second front side sealing ring 42 due to heat. Similarly, the limiting sleeve 211C on the annular transition step 211 can also block the hot air in the reaction chamber 21 from flowing to the first rear side sealing ring 43 and the second rear side sealing ring 44, and the furnace mouth water cooling flange 3 will also cool down the first rear side sealing ring 43 and the second rear side sealing ring 44, thereby delaying the aging failure rate of the first rear side sealing ring 43 and the second rear side sealing ring 44 due to heat. At this time, the first rear side sealing ring 43 and the second rear side sealing ring 44 are arranged at intervals in the radial direction of the second end 31 of the furnace mouth water cooling flange 3, and the first rear side sealing ring 43 and the second rear side sealing ring 44 and the annular transition step 211 are pressed against each other so that the furnace mouth water cooling flange 3 is sealedly connected to the annular transition step 211. Similarly, the furnace mouth water cooling flange 3 and the annular transition step 211 also have two seals, and the sealing performance is better.

[0030] Compared with the prior art, the reaction chamber 100 of the photovoltaic tube type device provided by the utility model is provided with the blocking portion 321 at the first end 32 of the furnace mouth water cooling flange 3. When the furnace door 1 closes the open end of the reaction chamber 21, the blocking portion 321 extends into the first installation groove 11, and the first front side sealing ring 41 is arranged in the first installation groove 11, and the second front side sealing ring 42 is arranged at the first end 32 of the furnace mouth water cooling flange 3. In this way, the blocking portion 321 can prevent the hot air in the reaction chamber 21 from directly blowing toward the first front side sealing ring 41 and the second front side sealing ring 42, delaying the rate of aging failure of the first front side sealing ring and the second front side sealing ring due to heat, so that the service life of the first front side sealing ring 41 and the second front side sealing ring 42 is longer. Moreover, this is equivalent to arranging two independent sealing rings at intervals along the axial direction of the reaction chamber 100 of the photovoltaic tube type device between the furnace door 1 and the furnace mouth water cooling flange 3, so that the sealing is more reliable and the sealing performance is better. At the same time, the first rear side sealing ring 43 and the second rear side sealing ring 44 are arranged at intervals at the first end of the furnace mouth water-cooling flange 3, which is equivalent to arranging two independent sealing rings at intervals along the radial direction of the furnace mouth water-cooling flange 3 between the furnace mouth water-cooling flange 3 and the reaction chamber 21, which can more reliably seal the gap between the furnace mouth water-cooling flange 3 and the reaction chamber 21 and has good sealing performance.

[0031] The above disclosure is only the preferred embodiment of the present invention, which certainly cannot be used to limit the scope of rights of the present invention. Therefore, equivalent changes made according to the scope of the patent application of the present invention are still within the scope covered by the present invention.

Claims

1. A reaction chamber of a photovoltaic tube device, characterized in that: It comprises a furnace door, a quartz tube, a furnace mouth water-cooling flange and a sealing assembly; the sealing assembly comprises a first front side sealing ring and a first rear side sealing ring; a reaction chamber is arranged inside the quartz tube, and one end of the reaction chamber is open; the furnace door is movably arranged at the open end of the reaction chamber, one end of the furnace door is provided with a first mounting groove, and the first front side sealing ring is arranged in the first mounting groove; the furnace mouth water-cooling flange is arranged at one end of the opening of the reaction chamber; the first end of the furnace mouth water-cooling flange has a blocking part, and the blocking part protrudes out of the first end of the furnace mouth water-cooling flange so that the blocking part can extend into the first mounting groove and contact with the first front side sealing ring in a sealing manner; the first rear side sealing ring is arranged at the second end of the furnace mouth water-cooling flange to seal the end face of the furnace mouth water-cooling flange; the reaction chamber of the photovoltaic tube-type device also comprises a first thermal insulation member, and the first thermal insulation member is sleeved outside the quartz tube.

2. The reaction chamber of the photovoltaic tube device according to claim 1, characterized in that: The sealing assembly further comprises a second front side sealing ring, which is arranged at the second end of the furnace mouth water cooling flange to be in sealing contact with one end of the furnace door.

3. The reaction chamber of the photovoltaic tube device according to claim 2, characterized in that: The sealing assembly also includes a second rear sealing ring, which is arranged with a gap between the second rear sealing ring and the first rear sealing ring and is located at the second end of the furnace mouth water cooling flange to seal the end face of the furnace mouth water cooling flange.

4. The reaction chamber of the photovoltaic tube device according to claim 1, characterized in that: The first installation groove is an annular recessed groove, the blocking portion is a positioning step, and the recessed groove and the positioning step cooperate with each other.

5. The reaction chamber of the photovoltaic tube device according to claim 1, characterized in that: One end of the reaction chamber opening is provided with an annular transition step, and the first heat insulating member is located on a side of the annular transition step away from the furnace mouth water cooling flange.

6. The reaction chamber of the photovoltaic tube device according to claim 5, characterized in that: The reaction chamber of the photovoltaic tube device also includes a second heat insulating member and a fixing member. The fixing member is sleeved outside the quartz tube, and the second heat insulating member is sleeved between the fixing member and the quartz tube; the first heat insulating member is located between the fixing member and the annular transition step.

7. The reaction chamber of the photovoltaic tube device according to claim 5, characterized in that: The reaction chamber of the photovoltaic tube device further comprises an elastic pad, and the elastic pad is arranged between the first heat insulating member and the annular transition step.

8. The reaction chamber of the photovoltaic tube device according to claim 3, characterized in that: The first end of the furnace mouth water-cooling flange is also provided with a second installation groove for installing the second front side sealing ring; the second end of the furnace mouth water-cooling flange is also provided with a third installation groove for installing the first rear side sealing ring and a fourth installation groove for installing the second rear side sealing ring.

9. The reaction chamber of the photovoltaic tube device according to claim 1, characterized in that: One end of the reaction chamber opening is provided with a limiting sleeve protruding toward the furnace door, and the furnace mouth water cooling flange is sleeved on the outer side of the limiting sleeve.

10. The reaction chamber of the photovoltaic tube device according to claim 1, characterized in that: The first thermal insulation member is made of mica, ceramic fiber, nano thermal insulation material, graphite or glass fiber composite material.

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