Conveying device of wet cleaning machine table

Abstract

The utility model provides a conveying device of a wet cleaning machine table, which comprises a grabbing mechanism and a moving mechanism, and is characterized in that the grabbing mechanism comprises a first grabbing piece and a second grabbing piece, and the first grabbing piece and the second grabbing piece are matched for grabbing a target object; the moving mechanism comprises a first direction moving assembly, a second direction moving assembly and a third direction moving assembly and is used for driving the grabbing mechanism to move in the first direction, the second direction and the third direction. Detection mechanisms are arranged on the two sides of the moving assembly in the second direction and the third direction correspondingly and used for detecting whether the first grabbing piece and / or the second grabbing piece deviates and / or inclines in the second direction or not. The conveying device of the wet cleaning machine can monitor in real time and ensure that the grabbing mechanism is kept within the safety standard in the second direction, so that the hidden danger of wafer carrier rollover caused by inclination or deviation of the grabbing mechanism is eradicated, the production safety and reliability are improved, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the field of wet cleaning machines, in particular to a conveying device for wet cleaning machines. Background Art

[0002] In the wet etching process, the conveyor of the wet cleaning machine is responsible for accurately transferring the wafer carrier from one process step to the next step. This process is crucial to maintaining wafer production efficiency and wafer quality.

[0003] The grasping mechanism in a conveyor device that has been in operation for a long time may shift and tilt due to mechanical wear, uneven load, vibration, temperature change and other factors. The structural deviation during the operation of this mechanical hardware will cause the gap between the grasping mechanism and the wafer carrier to accumulate and amplify, exceeding the error range allowed by the design. At this time, the grasping mechanism may not be able to accurately and stably grasp the wafer carrier, resulting in grasping failure, which will not only reduce production efficiency, but may also cause the wafer carrier to tilt or tip over, causing damage to the wafer and increasing production costs and risks.

[0004] Therefore, in order to improve the efficiency and reliability of the wafer manufacturing process, the present application provides a conveying device for a wet cleaning machine. Utility Model Content

[0005] In view of the problem that the conveying device of the wet cleaning machine in the prior art may reduce production efficiency and increase production costs and risks, the present application provides a conveying device of the wet cleaning machine. The conveying device of the wet cleaning machine is provided with detection mechanisms along the second direction, on both sides of the third-direction moving component, respectively, for detecting whether the first grasping member and / or the second grasping member in the grasping mechanism is offset and / or tilted along the second direction, and can monitor in real time and ensure that the grasping mechanism is kept within the safety reference in the second direction, thereby eliminating the hidden danger of the wafer carrier tipping over due to the tilt or offset of the grasping mechanism, improving production safety and reliability, and improving production efficiency.

[0006] One embodiment of the present application provides a conveying device for a wet cleaning machine, comprising:

[0007] A gripping mechanism, the gripping mechanism comprising a first gripping member and a second gripping member, the first gripping member and the second gripping member are connected via a rotating shaft, and at least one connecting member is provided between the first gripping member and the second gripping member, the first gripping member and the second gripping member cooperate to grip a target object;

[0008] A moving mechanism, the moving mechanism comprising a first direction moving component, a second direction moving component and a third direction moving component; the first direction moving component comprises a first track arranged along a first direction, and the second direction moving component moves along the first track; the second direction moving component comprises a second track arranged along a second direction, and the third direction moving component moves along the second track; the third direction moving component comprises a third track arranged along a third direction, and the grabbing mechanism moves along the third track; the first direction, the second direction and the third direction are perpendicular to each other;

[0009] Among them, the rotating shaft in the grasping mechanism is arranged along the first direction, and the first grasping member and the second grasping member in the grasping mechanism are arranged along the third direction; along the second direction, detection mechanisms are respectively arranged on both sides of the third direction moving component, and the detection mechanisms are used to detect whether the first grasping member and / or the second grasping member are offset and / or tilted along the second direction.

[0010] As an embodiment, the detection mechanism is a laser beam amplifier, the light beam emitted by the laser beam amplifier is along the first direction, and the laser beam amplifier is used to measure the angular deviation between the first gripping member and / or the second gripping member and a preset reference line.

[0011] As an implementation manner, the conveying device of the wet cleaning machine further includes an alarm, and the detection mechanism and the alarm are both connected to a controller.

[0012] As an implementation manner, the detection mechanism is disposed at one end of the third-direction moving component close to the second-direction moving component.

[0013] As an embodiment, the first gripping member includes a first fixing plate and a first gripper disposed at the bottom end of the first fixing plate, and along the second direction and the third direction, a cross section of the first gripper is a structure having two forks;

[0014] The second gripping member includes a second fixing plate and a second gripper disposed at the bottom end of the second fixing plate. Along the second direction and the third direction, the cross section of the second gripper is a rectangle with a pointed structure at the bottom end.

[0015] As an implementation manner, the bottom end of the detection mechanism is close to a connection point between the first fixing plate and the first gripper and / or close to a connection point between the second fixing plate and the second gripper.

[0016] As an implementation manner, the detection mechanisms located on both sides of the third-direction moving component are at the same or different heights of the third-direction moving component.

[0017] As an implementation manner, along the second direction, the width of the first fixing plate and / or the width of the second fixing plate is equal to the width of the third-direction moving component.

[0018] As an implementation manner, a spring proximity sensor is disposed above the top end of the first fixing plate and / or the second fixing plate.

[0019] As an implementation manner, the top end of the first fixing plate and the top end of the second fixing plate are rotatably connected via the rotating shaft;

[0020] The connecting member is arranged between the rotating shaft of the first fixing plate and the first gripper, and between the rotating shaft of the second fixing plate and the second gripper.

[0021] As an implementation manner, the connecting member is a connecting rod.

[0022] As described above, the conveying device of the wet cleaning machine of the present application has the following beneficial effects:

[0023] The conveying device of the wet cleaning machine of the present application is along the second direction. By arranging detection mechanisms on both sides of the moving component in the third direction, it can monitor in real time and ensure whether the first gripping member and / or the second gripping member remain within the safety reference in the second direction, thereby eliminating the risk of tipping over of the wafer carrier due to tilting or offset of the first gripping member and / or the second gripping member, effectively avoiding tipping over of the wafer carrier and damage to the wafer, significantly reducing the cost of wafer scrapping due to production accidents, and reducing economic losses; ensuring the stability and accuracy of the first gripping member and the second gripping member, reducing wafer losses due to transmission errors, and ensuring a higher shipment rate; improving the reliability of the entire conveying device and extending the service life of the conveying device. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram showing the structure of a grabbing mechanism in a conveying device of a wet cleaning machine in the prior art.

[0025] Figure 2 It is a schematic structural diagram showing an angle deviation between the first gripping member and a preset reference line.

[0026] Figure 3 It is a schematic structural diagram of a conveying device of a wet cleaning machine according to an embodiment of the present utility model.

[0027] Figure 4 It is a schematic structural diagram of a grabbing mechanism and a detecting mechanism in a conveying device of a wet cleaning machine according to an embodiment of the present utility model.

[0028] Component number description

[0029] 10, gripping mechanism; 11, first angular displacement; 12, second angular displacement; 20, moving mechanism; 30, detecting mechanism; 40, spring proximity sensor; 110, first gripping member; 111, first fixed plate; 112, first gripper; 120, second gripping member; 121, second fixed plate; 122, second gripper; 130, rotating shaft; 140, connecting member; 220, second direction moving component; 230, third direction moving component. DETAILED DESCRIPTION

[0030] The following is an explanation of the implementation of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific implementations, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0031] See also Figures 1 to 4 It should be noted that the illustrations provided in this embodiment are only used to illustrate the basic concept of the utility model in a schematic manner, and the illustrations only show the components related to the utility model rather than the number, shape and size of the components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0032] In the semiconductor manufacturing and integrated circuit production process, wet etching (ETCH WET) process is a common surface treatment technology used to remove specific parts of the material surface by chemical methods. In this process, the conveyor in the wet cleaning machine plays a vital role, responsible for accurately conveying the workpiece to be processed (such as a wafer carrier) into the etching equipment, and safely conveying it out of the equipment after the processing is completed.

[0033] However, as the conveyor runs for a long time, the operation process of the mechanical hardware often shows mechanism deviation. Especially in the wet etching process, due to the particularity of the processing environment (such as corrosive gas, high temperature, etc.), the mechanical parts are more susceptible to wear and deformation. The gripping mechanism in the conveyor is a key transmission component, and its accuracy and stability directly affect the accuracy and safety of workpiece transmission.

[0034] During long-term operation, the gripping mechanism of the conveyor is prone to deviation and tilt. The accumulation of these deviations will cause the gap between the gripping mechanism and the workpiece to gradually increase, making it impossible for the wet cleaning machine to completely and accurately pick up the wafer carrier when performing the gripping action. This will not only affect the processing effect of the etching process, but may also cause the wafer carrier to tilt or roll over, causing damage to the wafer.

[0035] Figure 1 The figure shows a schematic diagram of the structure of a gripping mechanism in a conveying device of a wet cleaning machine in the prior art. The gripping mechanism includes a first gripping member 110 and a second gripping member 120. A spring proximity sensor 40 is disposed on the top of the first gripping member 110 and the second gripping member 120. However, the existing spring proximity sensor 40 cannot fully detect the tilt angle of the gripping mechanism in different situations. For example, when the first gripping member 110 is relative to a preset reference line ( Figure 2 The direction of the preset reference line in is the direction of the plumb line in the plane, that is, Figure 2 When the angle of the dotted line along the plumb line is offset, Figure 2 As shown, when the first angular displacement 11 is smaller than the second angular displacement 12, the sensing accuracy of the spring proximity sensor 40 is insufficient, and there is a safety hazard in grabbing the wafer carrier.

[0036] In view of the above defects, the present application provides a conveying device for a wet cleaning machine, which is now described in detail through the following embodiments.

[0037] This embodiment provides a conveying device for a wet cleaning machine, such as Figure 3 As shown, the conveying device of the wet cleaning machine includes a gripping mechanism 10 and a moving mechanism 20. The moving mechanism 20 is used to move the gripping mechanism 10 to a target position. The gripping mechanism 10 is used to grip a wafer carrier or convey the wafer carrier to the target position.

[0038] like Figure 3 As shown, the gripping mechanism 10 includes a first gripping member 110 ( Figure 3 The structure of the first gripping member 110 is not shown in full) and the second gripping member 120 ( Figure 3 The structure of the second gripping member 120 is not fully illustrated in the figure), the first gripping member 110 and the second gripping member 120 are connected by a rotating shaft 130, and at least one connecting member 140 is provided between the first gripping member 110 and the second gripping member 120, and the gap between the first gripping member 110 and the second gripping member 120 is used to grip the target object (such as a wafer carrier).

[0039] like Figure 3 As shown, the moving mechanism 20 includes a first direction moving component ( Figure 3), a second direction moving component 220 and a third direction moving component 230. The first direction moving component includes a first track arranged along the first direction, and the second direction moving component 220 moves along the first track; the second direction moving component 220 includes a second track arranged along the second direction, and the third direction moving component 230 moves along the second track; the third direction moving component 230 includes a third track arranged along the third direction, and the grabbing mechanism 10 moves along the third track. The second direction moving component 220 and the first track, the third direction moving component 230 and the second track, and the grabbing mechanism 10 and the third direction moving component 230 can be respectively realized by gear rack meshing, motor drive wheel belt combination and other transmission methods to achieve the reciprocating movement of the second direction moving component 220 along the first track, the reciprocating movement of the third direction moving component 230 along the second track, and the reciprocating movement of the grabbing mechanism 10 along the third track. The first direction, the second direction and the third direction are all perpendicular to each other. The first direction can be, for example, the X-axis direction, the second direction can be, for example, the Y-axis direction, and the third direction can be, for example, the Z-axis direction.

[0040] like Figure 3 As shown, the rotating shaft 130 in the grasping mechanism 10 is arranged along the first direction, and the first grasping member 110 and the second grasping member 120 in the grasping mechanism 10 are arranged along the third direction; along the second direction, detection mechanisms 30 are respectively arranged on both sides of the third direction moving component 230, and the detection mechanism 30 is used to detect whether the first grasping member 110 and / or the second grasping member 120 are offset and / or tilted along the second direction.

[0041] The conveying device of the wet cleaning machine provided in this embodiment is provided with detection mechanisms 30 on both sides of the third-direction moving component 230 along the second direction, respectively, which can monitor in real time and ensure whether the first gripping member 110 and / or the second gripping member 120 are kept within the safety reference in the second direction, and eliminate the hidden danger of the wafer carrier tipping over due to the tilt or offset of the first gripping member 110 and / or the second gripping member 120, effectively avoid the tipping over of the wafer carrier and the damage of the wafer, significantly reduce the cost of wafer scrapping due to production accidents, reduce economic losses, ensure the stability and accuracy of the first gripping member 110 and the second gripping member 120, reduce the loss of wafers due to transmission errors, ensure a higher shipment rate, improve the reliability of the conveying device, and extend the service life of the conveying device.

[0042] In an optional embodiment, if Figure 3 As shown, the detection mechanism 30 is a laser beam amplifier, which emits and receives a laser beam along a first direction. The laser beam amplifier is used to measure the first gripping member 110 and / or the second gripping member 120 (surfaces located in the planes of the second direction and the third direction) and a preset reference line ( Figure 3The angle deviation between the preset reference line in the second direction and the third direction in the plane and along the third direction).

[0043] In an optional embodiment, the conveying device of the wet cleaning machine also includes an alarm, and the detection mechanism 30 and the alarm are both connected to the controller. When the detection mechanism 30 detects that the angle deviation between the first gripper 110 and / or the second gripper 120 and the preset reference line exceeds the preset deviation, the detection mechanism 30 sends a signal to the controller, and the controller sends a signal to the alarm. The alarm sounds an alarm, and the staff promptly repairs or adjusts the first gripper 110 and / or the second gripper 120. The alarm can be a buzzer and / or an indicator light. It can eliminate the hidden danger of the wafer carrier tipping over, reduce the scrap rate of the wafer, and ensure the shipment rate.

[0044] In an optional embodiment, if Figure 3 and Figure 4 As shown, the detection mechanism 30 is arranged at one end of the third-direction moving component 230 close to the second-direction moving component 220. Since the first angular displacement 11 is smaller than the second angular displacement 12 when the first grasping member 110 and / or the second grasping member 120 is offset, the detection mechanism 30 is arranged at the bottom end of the third-direction moving component 230. This can further improve the sensitivity of detecting the offset of the first grasping member 110 and / or the second grasping member 120.

[0045] In an optional embodiment, if Figure 4 As shown, the first gripping member 110 includes a first fixing plate 111 and a first gripping hand 112, and the first gripping hand 112 is connected to the bottom end of the first fixing plate 111; the second gripping member 120 includes a second fixing plate 121 and a second gripping hand 122, and the second gripping hand 122 is connected to the bottom end of the second fixing plate 121. In the plane formed by the second direction and the third direction, the cross-section of the first fixing plate 111 and the second fixing plate 121 is a rectangular structure, the cross-section of the first gripping hand 112 is a structure with two forks (or a pentagonal structure with a trapezoidal shape missing at the bottom), and the cross-section of the second gripping hand 122 is a rectangle with a pointed structure at the bottom (the pointed structure is a trapezoidal structure with an upper base larger than a lower base).

[0046] like Figure 4 As shown, the bottom end of the detection mechanism 30 is close to the connection point between the first fixing plate 111 and the first gripper 112 , or close to the connection point between the second fixing plate 121 and the second gripper 122 .

[0047] like Figure 3 and Figure 4 As shown, along the second direction, the width of the first fixed plate 111 is equal to the width of the second fixed plate 121 and is equal to the width of the third direction moving component 230, thereby ensuring the synchronization and sensitivity of the detection mechanism 30 in detecting the first grasping member 110 and the second grasping member 120.

[0048] In an optional embodiment, if Figure 4 As shown, a spring proximity sensor 40 is disposed above the top of the first fixing plate 111 and the second fixing plate 121 .

[0049] In an optional embodiment, if Figure 3 As shown, the top of the first fixing plate 111 and the top of the second fixing plate 121 are rotatably connected via a rotating shaft 130; at least one connecting member 140 is provided between the rotating shaft of the first fixing plate 111 and the first gripper 112, and between the rotating shaft of the second fixing plate 121 and the second gripper 122. In order to improve the fixation between the first gripper 110 and the second gripper 120, multiple connecting members 140 may be provided. The connecting member 140 may be, for example, a connecting rod.

[0050] The conveying device of the wet cleaning machine provided in this embodiment can be monitored and sensed by the detection mechanism 30 when the grasping mechanism 10 is offset or tilted, and the alarm can be used to notify the operator, thereby eliminating the hidden danger of wafer tipping, reducing the cost of wafer scrapping, and improving the shipment rate.

[0051] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.

Claims

1. A conveying device for a wet cleaning machine, characterized in that: include: A gripping mechanism, wherein the gripping mechanism comprises a first gripping member and a second gripping member, wherein the first gripping member and the second gripping member are connected via a rotating shaft, and at least one connecting member is provided between the first gripping member and the second gripping member. The first grasping member and the second grasping member cooperate to grasp a target object; The moving mechanism comprises a first direction moving component, a second direction moving component and a third direction moving component; the first direction moving component comprises a first track arranged along a first direction, the second direction moving component moves along the first track; the second direction moving component comprises a second track arranged along a second direction, the third direction moving component moves along the second track; the third direction moving component comprises a third track arranged along the third direction The grabbing mechanism moves along the third track; the first direction, the second direction and the third direction are perpendicular to each other; Among them, the rotating shaft in the grasping mechanism is arranged along the first direction, and the first grasping member and the second grasping member in the grasping mechanism are arranged along the third direction; along the second direction, detection mechanisms are respectively arranged on both sides of the third direction moving component, and the detection mechanisms are used to detect whether the first grasping member and / or the second grasping member are offset and / or tilted along the second direction.

2. The conveying device of the wet cleaning machine according to claim 1, characterized in that: The detection mechanism is a laser beam amplifier, the light beam emitted by the laser beam amplifier is along the first direction, and the laser beam amplifier is used to measure the angular deviation between the first grasping member and / or the second grasping member and a preset reference line.

3. The conveying device of the wet cleaning machine according to claim 1 or 2, characterized in that: It also includes an alarm, and the detection mechanism and the alarm are both connected to the controller.

4. The conveying device of the wet cleaning machine according to claim 3, characterized in that: The detection mechanism is arranged at one end of the third-direction moving component close to the second-direction moving component.

5. The conveying device of the wet cleaning machine according to claim 4, characterized in that: The first gripping member comprises a first fixing plate and a first gripper disposed at the bottom end of the first fixing plate, and along the second direction and the third direction, a cross section of the first gripper presents a structure with two forks; The second gripping member includes a second fixing plate and a second gripper disposed at the bottom end of the second fixing plate. Along the second direction and the third direction, the cross section of the second gripper is a rectangle with a pointed structure at the bottom end.

6. The conveying device of the wet cleaning machine according to claim 5, characterized in that: The bottom end of the detection mechanism is close to a connection point between the first fixing plate and the first gripper and / or close to a connection point between the second fixing plate and the second gripper.

7. The conveying device of the wet cleaning machine according to claim 5, characterized in that: Along the second direction, the width of the first fixing plate and / or the width of the second fixing plate is equal to the width of the third-direction moving component.

8. The conveying device of the wet cleaning machine according to claim 5, characterized in that: A spring proximity sensor is arranged above the top of the first fixing plate and / or the second fixing plate.

9. The conveying device of the wet cleaning machine according to claim 5, characterized in that: The top end of the first fixing plate is rotatably connected to the top end of the second fixing plate via the rotating shaft; The connecting member is arranged between the rotating shaft of the first fixing plate and the first gripper, and between the rotating shaft of the second fixing plate and the second gripper.

10. The conveying device of the wet cleaning machine according to claim 9, characterized in that: The connecting piece is a connecting rod.

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