Magnetron sputtering coating tool and moving device

Abstract

The utility model belongs to the field of coating, and particularly relates to a magnetron sputtering coating tool and a moving device. Comprising a containing part, the containing part is provided with a restraining groove, the interior of the restraining groove is used for containing and bearing a substrate, and when the substrate is located in the restraining groove, the substrate is in an upward inclined state. The utility model provides a magnetron sputtering coating tool and a moving device, and aims to solve the problem that a substrate cannot be fully coated due to the fact that the edge of the substrate is shielded by a vertical tool in the prior art.

Description

Technical Field

[0001] The utility model belongs to the field of coating, and particularly relates to a magnetron sputtering coating tooling and a moving device. Background Art

[0002] A magnetron sputtering coating tooling is a device used to adapt to a coating substrate and is widely used in magnetron sputtering coating. The magnetron sputtering coating tooling in the prior art is generally divided into two categories, namely, a horizontal tooling and a vertical tooling.

[0003] When the substrate is on the vertical tooling (the substrate is usually in a vertical state), the magnetron sputtering coating device can coat the substrate in front of the substrate, which can avoid the coating slag falling on the coating layer. However, when the substrate is on the vertical tooling, in order to prevent the vertically placed substrate from falling forward, a retaining piece needs to be configured at the edge of the substrate by the vertical tooling to restrain the substrate. Obviously, the retaining piece will block the edge of the substrate, and finally full coating cannot be achieved on the substrate (full coating means that there is no area without a coating layer on the substrate).

[0004] In summary, the vertical tooling in the prior art has the problem of blocking the edge of the substrate. Summary of the Utility Model

[0005] The utility model provides a magnetron sputtering coating tooling and a moving device, aiming to solve the problem in the prior art that the vertical tooling blocks the edge of the substrate, resulting in the inability to achieve full coating on the substrate.

[0006] To achieve the above purpose, in the first aspect of the utility model, a magnetron sputtering coating tooling is provided, which includes a containing component. The containing component is configured with a restraining groove. The inside of the restraining groove is used to contain and support the substrate, and when the substrate is located inside the restraining groove, the substrate is in an obliquely upward inclined state.

[0007] In this solution, the substrate is contained inside the restraining groove, and the restraining groove can support the substrate. At the same time, when the substrate is inside the restraining groove, the substrate is in an obliquely upward inclined state. Due to the support of the restraining groove and its own gravity, the substrate is in a stable obliquely upward inclined state, the substrate is not blocked, and full coating can be achieved on the substrate, solving the deficiencies of the prior art.

[0008] Preferably, in order to make the substrate in an inclined state inside the restraining groove, this solution preferably sets the containing component to be inclined, so that the substrate is in an upward inclined state.

[0009] In this solution, the containing component is set to be inclined, so when the substrate is placed in the restraining groove of the containing component, the substrate is in an obliquely upward inclined state.

[0010] To ensure that the substrate does not fall over and reduce the probability of coating slag adhering to the substrate. This solution preferably sets the substrate to be in a state of inclining 5-10 degrees.

[0011] When the substrate is in a state of being inclined by 5 to 10 degrees, the substrate will not tip forward. At the same time, the probability of the substrate receiving plating dross is also greatly reduced, avoiding the situation where plating dross falls on the surface of the substrate.

[0012] Preferably, since the substrate is usually rectangular, in order to ensure the adaptation of the substrate to the constraint groove, this solution preferably makes the constraint groove a rectangular groove.

[0013] In this solution, the constraint groove is set as a rectangular groove. Therefore, when the substrate is accommodated inside the constraint groove, the left and right sides and the upper and lower sides of the substrate are restricted by the side walls of the constraint groove, and the substrate can be more stable, avoiding the sliding of the substrate.

[0014] Since the substrate often needs to be heated, in order to ensure that there is no large temperature difference between the front and rear sides of the substrate, this solution preferably sets a through hole at the bottom of the constraint groove, and the through hole penetrates through the accommodating component.

[0015] In this solution, a through hole is formed at the bottom of the constraint groove. Therefore, when the substrate is accommodated inside the constraint groove, the rear side of the substrate is exposed from the through hole. When the substrate is heated, both the front and rear sides of the substrate can be heated, avoiding the problem of too large a temperature difference between the front and rear of the substrate.

[0016] In order to accommodate more substrates, this solution preferably configures at least two constraint grooves, and they are arranged in an array on the accommodating component.

[0017] In this solution, at least two constraint grooves are formed on the accommodating component, and each constraint groove can accommodate one substrate inside. Therefore, more substrates can be placed on the accommodating component.

[0018] Preferably, in order to keep the accommodating component stable, this solution preferably further includes a support structure. The accommodating component is installed on the support structure, and the support structure is used to support the accommodating component.

[0019] In this solution, the support of the accommodating component is realized by setting the support structure, so that the accommodating component remains stable.

[0020] Preferably, in order to realize the support of the accommodating component, this solution preferably makes the support structure include a base and support columns. The support columns are installed on the base, and the accommodating component is connected to the support columns.

[0021] In this solution, the base is placed at the bottom end, and then the accommodating component is supported by the support columns.

[0022] Preferably, in order to solve the problem of wear when the base moves, this solution preferably sets rolling components on the base, and the rolling components are used to guide the movement of the entire tooling.

[0023] In this solution, rolling components are provided on the base, and rolling contact is made with the external structure through the rolling components. By the rolling of the rolling components, the problem of damage to the base caused by friction between the base and the external structure is solved.

[0024] Preferably, to solve the problem of frictional damage to the external structure on both sides of the rolling components, it is preferred in this solution that the rolling components are arranged on both sides of the base.

[0025] In this solution, rolling components are configured on both sides of the base, so the problem of frictional damage to the external structure on both sides of the base can be solved.

[0026] For the rolling components to achieve rolling, it is preferred in this solution that the rolling components are rollers or balls.

[0027] A plurality of the rolling components are provided and arranged in a straight line.

[0028] To solve the problem of the movement of the coating tooling, in the second aspect of the present utility model, a moving device is provided, including the above-mentioned magnetron sputtering coating tooling and a moving mechanism. The magnetron sputtering coating tooling is located on the moving mechanism, and the moving mechanism is used to drive the magnetron sputtering coating tooling to move.

[0029] In this solution, the moving mechanism is configured to be adapted to the magnetron sputtering coating tooling. When the moving mechanism is driven, the magnetron sputtering coating tooling arranged on the moving mechanism is driven to move. When the magnetron sputtering coating tooling moves, the substrate located on the magnetron sputtering coating tooling moves accordingly, so as to reach different workstations.

[0030] Preferably, for the moving mechanism to drive the magnetron sputtering coating tooling to move, it is preferred in this solution that the moving mechanism is a roller moving mechanism.

[0031] To achieve the guiding of the magnetron sputtering coating tooling, it is preferred in this solution that a guiding channel is provided above the moving mechanism, and the guiding channel guides the magnetron sputtering coating tooling to move.

[0032] In this solution, the magnetron sputtering coating tooling is arranged above the moving mechanism. When the magnetron sputtering coating tooling moves, the magnetron sputtering coating tooling moves along the guiding channel, and the guiding channel realizes the guiding of the magnetron sputtering coating tooling, avoiding deviation when the magnetron sputtering coating tooling moves.

[0033] Preferably, when the magnetron sputtering coating tooling enters the moving mechanism, the entry position of the magnetron sputtering coating tooling will deviate. It is preferred in this solution that the guiding channel includes an inlet end and an outlet end, and the inlet end of the guiding channel is in a flared shape.

[0034] In this solution, the magnetron sputtering coating tooling enters the moving mechanism from the inlet end of the guiding channel and then exits the moving mechanism from the outlet end of the guiding channel. When the magnetron sputtering coating tooling enters the moving mechanism from the inlet end, even if the entry position of the magnetron sputtering coating tooling is offset, the trumpet-shaped inlet end can guide the magnetron sputtering coating tooling to ensure that the magnetron sputtering coating tooling can enter the moving mechanism at the correct position.

[0035] The beneficial effect of the present utility model is that in this solution, the substrate is accommodated inside the constraint groove, and the constraint groove can support the substrate. At the same time, when the substrate is inside the constraint groove, the substrate is in an inclined upward state. Due to the support of the constraint groove and its own gravity, the substrate remains stable in the inclined upward state, the substrate is not blocked, and the substrate can achieve full coating, solving the deficiencies of the prior art. Description of the Drawings

[0036] Figure 1 It is a schematic structural diagram of the coating tooling in Embodiment 1.

[0037] Figure 2 It is a front view of the coating tooling in Embodiment 1.

[0038] Figure 3 It is a side view of the coating tooling in Embodiment 1.

[0039] Figure 4 It is a cross-sectional view when the accommodating component is inclined in Embodiment 1.

[0040] Figure 5 It is a cross-sectional view when the constraint groove is inclined in Embodiment 1.

[0041] Figure 6 It is a schematic structural diagram of the moving device in Embodiment 3.

[0042] Figure 7 It is a schematic structural diagram of the moving mechanism in Embodiment 3.

[0043] Figure 8 It is a top view of the moving mechanism in Embodiment 3.

[0044] The reference numerals include: accommodating component 1, constraint groove 11, through hole 12, base 2, rolling component 21, support column 3, moving mechanism 4, roller 41, driving motor 42, transmission belt 43, frame 44, guiding channel 5, substrate 6. Detailed Description of the Embodiments

[0045] In order to make the objectives, technical solutions, and advantages of the embodiments more clear and understandable, the following further details the present utility model in conjunction with the accompanying drawings and embodiments. When the following description refers to the drawings, unless otherwise indicated, the same numerals in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present disclosure. On the contrary, they are merely examples of devices and methods consistent with some aspects of the present disclosure as detailed in the appended claims.

[0046] It should be noted that all actions of obtaining signals, information, or data in this application are carried out on the premise of complying with the corresponding data protection regulations and policies of the country where the location is located and obtaining the authorization given by the owner of the corresponding device.

[0047] In the present disclosure, unless otherwise stated, orientation terms such as "inside, outside" are defined according to the contour of the corresponding component itself. Terms such as "first, second" used in the present disclosure are used to distinguish one element from another and do not have order or importance.

[0048] Embodiment 1

[0049] Basically as shown in the appended Figure 1 to the appended Figure 2 figures, the magnetron sputtering coating tooling is mainly used to adapt to the substrate 6 so that the substrate 6 can be fully coated and the substrate 6 will not be contaminated by coating slag.

[0050] As Figure 1 and Figure 2 shown, the magnetron sputtering coating tooling in the embodiments of the present disclosure specifically includes a receiving component 1 and a support structure. The support structure is used to support the receiving component 1 so that the receiving component 1 remains stable. The receiving component 1 is configured with a constraint groove 11. The constraint groove 11 is a rectangular groove, and the inside of the constraint groove 11 is used to accommodate the substrate 6. As Figure 1 shown, the receiving component 1 in the embodiments of the present disclosure is disposed obliquely upward as a whole, so that when the substrate 6 is located inside the constraint groove 11, the substrate 6 is in an obliquely upward inclined state. The receiving component 1 is inclined obliquely upward by 5 to 10 degrees, so that the substrate 6 can remain stable inside the constraint groove 11.

[0051] It should be noted that when the substrate 6 is located inside the constraint groove 11, the bottom and the side wall of the constraint groove 11 can support the substrate 6 so that the substrate 6 remains stable and does not slide out of the constraint groove 11. At the same time, since the substrate 6 is in an obliquely upward inclined state inside the constraint groove 11, even if the edge of the substrate 6 is not restricted, the substrate 6 will not fall forward, the substrate 6 is not blocked, and the substrate 6 can be fully coated, as Figure 4 shown.

[0052] It should be noted that: Since the substrate 6 needs to be in an inclined state and does not fall forward. And it is also necessary to prevent the substrate 6 from adhering to the dropped plating slag. Therefore, when the substrate 6 is accommodated inside the restraint groove 11, the substrate 6 being inclined upward by 5 to 10 degrees can meet the usage requirements. When the inclination angle is greater than 10 degrees, the probability of the plating slag falling on the substrate 6 will increase significantly. When the inclination angle is less than 5 degrees, the probability of the substrate 6 falling forward from inside the restraint groove 11 will also increase significantly. In addition, within the angle range of 5 to 10 degrees, the most preferred inclination angle of the substrate 6 in the embodiments of the present disclosure is 7 degrees. At this time, the substrate 6 will neither fall forward, and the probability of the substrate 6 adhering to the dropped plating slag is also low, as Figure 3 shown.

[0053] In the embodiments of the present disclosure, it is preferred that the restraint groove 11 is a rectangular groove, and the shape of the rectangular groove is adapted to that of the substrate 6. For example: when the substrate 6 is rectangular, the restraint groove 11 is a rectangular groove; when the substrate 6 is square, the restraint groove 11 is a square groove. At the same time, in order to enable the tooling to accommodate more substrates 6 and prevent interference between the substrates 6. In the embodiments of the present disclosure, it is preferred that at least two restraint grooves 11 are provided, and each restraint groove 11 can accommodate one substrate 6. In the embodiments of the present disclosure, the number of the restraint grooves 11 is not specifically limited, and during implementation, 2, 3, 4, 5, etc. can be set according to the size of the accommodating member 1. At the same time, in order to enable more restraint grooves 11 to be constructed on the accommodating member 1, in the embodiments of the present disclosure, it is preferred that the restraint grooves 11 are arranged in an array, ensuring that more accommodating members 1 can be constructed while the restraint grooves 11 do not interfere with each other, as Figure 2 shown.

[0054] In order to prevent the back surface of the substrate 6 from being blocked and ensure that there is no temperature difference or a small temperature difference between the front and back surfaces of the substrate 6 when the substrate 6 is heated. Therefore, in the embodiments of the present disclosure, it is preferred that a through hole 12 is provided at the inner bottom of the restraint groove 11, as Figure 1 and Figure 2 shown. The through hole 12 can be a circular opening, a rectangular opening or an irregular opening, etc. The through hole 12 penetrates the entire accommodating member 1 to ensure that when the substrate 6 is accommodated inside the restraint groove 11, the back surface of the substrate 6 can be exposed.

[0055] Taking an application scenario as an example: When the substrate 6 is accommodated inside the restraint groove 11, the edge of the substrate 6 can contact the inner wall of the restraint groove 11, and the restraint groove 11 realizes the limit of the substrate 6 to prevent the substrate 6 from sliding. At the same time, since the through hole 12 is formed at the inner bottom of the restraint groove 11, when the substrate 6 is accommodated inside the restraint groove 11, the back surface of the substrate 6 remains exposed.

[0056] The support structure in the embodiments of the present disclosure includes a base 2 and support columns 3, as Figure 1 andFigure 2 As shown. The base 2 is integrally plate-shaped and is arranged at the bottom end. The top of the base 2 can be installed with the support columns 3 through fasteners. Preferably, two support columns 3 are provided and are respectively located on the left and right sides of the base 2. The tops of the support columns 3 on both sides are connected to the side walls of the accommodating member 1, so that the left and right sides of the accommodating member 1 are supported by the support columns 3, and the accommodating member 1 is more stable. During implementation, the tops of the support columns 3 can be fixedly connected to the side walls of the accommodating member 1 by welding or configuring fasteners.

[0057] Meanwhile, in order to facilitate the movement of the entire magnetron sputtering coating tooling, a handle can be configured on the base 2 in the embodiments of the present disclosure. When the user needs to move the entire tooling, it can be carried through the handle, which is convenient for use.

[0058] When the magnetron sputtering coating tooling is moved, the base 2 is worn. In the embodiments of the present disclosure, rolling members 21 can be provided on both the front and rear sides of the base 2. The rolling members 21 can be rollers or balls. The rolling members 21 are horizontally arranged and can roll, thus realizing rolling contact. At the same time, a plurality of rolling members 21 are provided on both the front and rear sides of the base 2, and the plurality of rolling members 21 are arranged in a straight line.

[0059] The following is further detailed through specific embodiments: When coating is required, the substrate 6 is placed inside the constraint groove 11. The substrate 6 is in an inclined state inside the constraint groove 11. Due to its own gravity and the supporting force of the constraint groove 11, the substrate 6 leans against the inside of the constraint groove 11, so the substrate 6 does not require a retaining piece and will not tip forward. The substrate 6 is not blocked, and full coating of the substrate 6 can be achieved.

[0060] Embodiment 2

[0061] The difference between the embodiment of the present disclosure and Embodiment 1 is that the accommodating member 1 in the embodiment of the present disclosure is not inclined, but the constraint groove 11 is set to be inclined, as Figure 5 shown. That is to say, in the embodiment of the present disclosure, the accommodating member 1 can be vertically arranged, or the inclination angle is not 5-10 degrees. Instead, the constraint groove 11 is set to be inclined. When the substrate 6 is accommodated inside the inclined constraint groove 11, the substrate 6 can also be in an inclined state.

[0062] The inclination angle of the constraint groove 11 can be 5-10 degrees, which makes the substrate 6 in a state of 5-10 degrees when the substrate 6 is accommodated inside the constraint groove 11.

[0063] Embodiment 3

[0064] The embodiment of the present disclosure provides a moving device, as Figure 6 and Figure 7As shown, it includes the magnetron sputtering coating tooling of Embodiment 1 or Embodiment 2 and the moving mechanism 4. The magnetron sputtering coating tooling is placed on the moving mechanism 4, and the moving mechanism 4 is used to drive the magnetron sputtering coating tooling to move, so that the magnetron sputtering coating tooling can be conveyed into the coating device.

[0065] The moving mechanism 4 in the embodiment of the present disclosure is a roller moving mechanism, as Figure 6 and Figure 7 shown. The roller moving mechanism includes rollers 41, a driving motor 42, a frame 44, and a transmission belt 43. The rollers 41 are rotatably installed on the frame 44 by configuring bearings, and the frame 44 is a metal frame body. The frame 44 is fixedly installed, specifically determined according to the use environment. For example: it can be fixedly installed inside the coating device for coating, or it can be fixedly installed inside the transition device for transition, etc. A plurality of the rollers 41 are provided and arranged in a straight line. The surface of the rollers 41 is used for placing the magnetron sputtering coating tooling, so that the magnetron sputtering coating tooling can be driven to move. One end of the roller 41 is provided with a pulley, and when the pulley rotates, the roller 41 rotates accordingly. The driving motor 42 is also installed on the frame 44, and the output end of the driving motor 42 is also provided with a pulley. A belt is arranged between the pulley of the driving motor 42 and the pulley of the roller 41 for transmission connection. When the driving motor 42 works, the driving motor 42 can be transmitted through the transmission belt 43 to make the roller 41 rotate. When the roller 41 rotates, the magnetron sputtering coating tooling located on the roller 41 moves accordingly. At the same time, in order to prevent the bottom of the roller 41 from sliding with the magnetron sputtering coating tooling, anti-slip patterns can be constructed on the bottom of the magnetron sputtering coating tooling, thereby solving the problem of the bottom sliding between the roller 41 and the magnetron sputtering coating tooling. Or, anti-slip patterns can also be provided on the surface of the roller 41, thereby solving the problem of the bottom sliding between the roller 41 and the magnetron sputtering coating tooling.

[0066] In order to ensure that the magnetron sputtering coating tooling does not deviate when being driven by the moving mechanism 4. In the embodiment of the present disclosure, guiding components are configured on both sides of the top of the moving mechanism 4, as Figure 8 shown. The guiding components are plate-shaped. The bottom of the guiding components can be installed on the top of the frame 44.

[0067] When the magnetron sputtering coating tooling is located on the moving mechanism 4, the front and rear sides of the base 2 of the magnetron sputtering coating tooling are respectively in contact with the guiding plates arranged on the front and rear sides. The guiding plates can guide the magnetron sputtering coating tooling to move and prevent the magnetron sputtering coating tooling from shifting. In the embodiment of the present disclosure, since rollers are provided on the front and rear sides of the bottom plate and the rollers are in contact with the guiding plates, compared with the bottom plate directly contacting the guiding components, a large amount of wear of the bottom plate is avoided.

[0068] In the embodiment of the present disclosure, a guiding channel for accommodating a magnetron sputtering coating tooling is constructed between the guiding components located on the front and rear sides, as Figure 8 shown. In the embodiment of the present disclosure, the two ends of the guiding channel are respectively an inlet end and an outlet end. The inlet end is used for guiding the magnetron sputtering coating tooling into the guiding channel, and the outlet end is used for guiding the magnetron sputtering coating tooling to move out of the guiding channel.

[0069] In the embodiment of the present disclosure, the inlet end of the guiding channel is arranged in a horn shape, and the horn-shaped inlet end can guide the movement of the magnetron sputtering coating tooling.

[0070] It should be noted that: Since the magnetron sputtering coating tooling enters the guiding channel from the inlet of the moving mechanism 4, there are differences in the entry positions of the magnetron sputtering coating tooling. Therefore, by setting the inlet end of the guiding channel in a horn shape, even if there are differences in the entry positions of the magnetron sputtering coating tooling, the magnetron sputtering coating tooling can still enter the guiding channel.

[0071] The above are only the embodiments of the present invention, and common knowledge such as specific structures and characteristics known in the solution is not described in detail here. It should be pointed out that for those skilled in the art, without departing from the structure of the present invention, several modifications and improvements can still be made, and these should also be regarded as the protection scope of the present invention, and these will not affect the implementation effect of the present invention and the practicality of the patent. The protection scope required by this application shall be subject to the content of its claims, and the specific implementation manners described in the specification can be used to interpret the content of the claims.

Claims

1. Magnetron sputtering coating tooling, characterized by: The housing comprises a containing part, wherein the containing part is configured with a restraining groove, wherein the restraining groove is a rectangular groove, wherein the interior of the restraining groove is used for accommodating and supporting the substrate, and when the substrate is located in the restraining groove, the substrate is in an obliquely upward tilted state.

2. The magnetron sputtering coating tool according to claim 1, characterized in that: The receiving component is arranged in an inclined manner so that the substrate is in an upwardly inclined state; and / or; The substrate is tilted 5 to 10 degrees.

3. The magnetron sputtering coating tool according to claim 1, characterized in that: The bottom of the constraint groove is provided with a through opening, and the through opening passes through the accommodating component; and / or; There are at least two restraining grooves, which are arranged in an array on the accommodating component.

4. The magnetron sputtering coating tool according to any one of claims 1 to 3, characterized in that: It also includes a supporting structure, the accommodating component is installed on the supporting structure, and the supporting structure is used to support the accommodating component.

5. The magnetron sputtering coating tool according to claim 4, characterized in that: The supporting structure comprises a base and a supporting column, wherein the supporting column is installed on the base, and the accommodating component is connected to the supporting column.

6. The magnetron sputtering coating tool according to claim 5, characterized in that: The base is provided with a rolling component.

7. The magnetron sputtering coating tooling according to claim 6, characterized in that: The rolling components are arranged on both sides of the base; and / or; The rolling component is a roller or a ball; and / or; The rolling components are arranged in a plurality and arranged in a straight line.

8. A mobile device, characterized in that: It comprises the magnetron sputtering coating tooling and the moving mechanism as described in any one of claims 1 to 7, wherein the magnetron sputtering coating tooling is located on the moving mechanism, and the moving mechanism is used to drive the magnetron sputtering coating tooling to move.

9. The mobile device according to claim 8, characterized in that: The moving mechanism is a roller moving mechanism; and / or; A guide channel is arranged above the moving mechanism, and the guide channel guides the movement of the magnetron sputtering coating tooling.

10. The mobile device according to claim 9, characterized in that: The guide channel comprises an inlet end and an outlet end, and the inlet end of the guide channel is trumpet-shaped.

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