Ceramic substrate cleaning carrier

Abstract

A ceramic substrate cleaning carrier comprises a hanging bracket and bearing rods detachably installed on the hanging bracket, and is characterized in that the number of the bearing rods is at least two, each bearing rod comprises a rod body, spacer bushes sleeved on the rod body in a clearance fit mode and spacer bushes sleeved on the rod body in a clearance fit mode, and the spacer bushes are clamped between the adjacent spacer bushes. The outer diameter of the spacer sleeve is smaller than that of the spacer sleeve, a matching groove is formed between every two adjacent spacer sleeves, the end of the rod body is fastened on the hanging bracket through a bolt, and the base plate is vertically supported on the bearing rod and clamped in the matching grooves. The spacer sleeves with different lengths can be selected according to the thicknesses of the substrates, so that the formed matching grooves can effectively position the substrates, the supporting device is suitable for supporting the substrates with different thicknesses, the spacer sleeves with different lengths can be replaced to adjust the number of the matching grooves in the supporting rod so as to support the substrates with different numbers, the cleaning efficiency is improved, and the cleaning cost is reduced. And the square substrate can be cleaned and supported, and the practicability is high.

Description

Technical Field

[0001] The utility model relates to a cleaning carrier for ceramic substrates, belonging to the technical field of substrate cleaning carriers. Background Art

[0002] A ceramic substrate refers to a special process board in which a copper foil is directly bonded to the surface (single-sided or double-sided) of an alumina (Al2O3) or aluminum nitride (AlN) ceramic substrate at high temperature. The manufactured ultra-thin composite substrate has excellent electrical insulation performance, high thermal conductivity, excellent soldering property and high adhesion strength, and can be etched into various patterns like a PCB board, with a large current-carrying capacity. Ceramic substrates have become the basic materials for high-power power electronic circuit structure technology and interconnection technology. After processes such as grinding, polishing, and slicing, the surface of the ceramic substrate needs to be cleaned. Existing substrate cleaning carriers have the following problems:

[0003] 1. Most existing carriers are produced by injection molding process. The carrier size is fixed, and it can only support one specification of substrate, and the number of substrates loaded on a single carrier is fixed, which is difficult to expand and has low cleaning efficiency.

[0004] 2. Most are circular wafer cleaning carriers, which are not suitable for square substrates. There is no standardized carrier for square substrates and they need to be customized. Content of the Utility Model

[0005] The cleaning carrier for ceramic substrates provided by the utility model can select bushings with different lengths according to the thickness of the substrate, so that the formed fitting grooves can effectively position the substrate, is suitable for supporting substrates with different thicknesses, and can replace bushings with different lengths to adjust the number of fitting grooves on the supporting rod to support different numbers of substrates, thereby improving the cleaning efficiency and realizing the cleaning and support of square substrates, with high practicability.

[0006] To achieve the above object, the technical solution adopted by the utility model is:

[0007] The cleaning carrier for ceramic substrates includes a hanging frame and a supporting rod detachably mounted on the hanging frame, and is characterized in that: the number of the supporting rods is at least two. The supporting rod includes a rod body, a spacer sleeve fitted on the rod body with a clearance, and a retaining sleeve fitted on the rod body with a clearance. The retaining sleeve is clamped between adjacent spacer sleeves. The outer diameter of the retaining sleeve is smaller than that of the spacer sleeve, and a fitting groove is formed between adjacent spacer sleeves. The end of the rod body is fastened to the hanging frame by bolts. The substrate is vertically supported on the supporting rod and clamped in the fitting groove.

[0008] Preferably, the hanging frame includes two baffle plates and a suspension rod connected between the two baffle plates by bolts. The number of the suspension rods is two and they are horizontally aligned and distributed. The supporting rod is arranged between the two baffle plates and is parallel to and arranged below the suspension rod. The end of the rod body penetrates through the baffle plate and is fastened by bolts.

[0009] Preferably, both the rod body and the suspension rod are made of metal, and the spacer sleeve, the retaining sleeve, and the baffle are all made of polytetrafluoroethylene.

[0010] Preferably, the number of the supporting rods is two, and the two supporting rods are arranged horizontally and aligned.

[0011] Preferably, the number of the supporting rods is four, and the four supporting rods are distributed in a trapezoid, and the distance between the two upper supporting rods is greater than the distance between the two lower supporting rods.

[0012] The beneficial effects of the present utility model are as follows:

[0013] For the ceramic substrate cleaning carrier of the present utility model, a detachable supporting rod is installed on the hanging bracket. The supporting rod is a split structure, including a rod body, a spacer sleeve, and a retaining sleeve. The spacer sleeve and the retaining sleeve are respectively sleeved on the rod body, and the retaining sleeve is clamped between adjacent spacer sleeves to form a fitting groove between the adjacent spacer sleeves. The substrate is vertically placed on the supporting rod and the fitting groove is used to clamp the substrate, positioning the substrate on the supporting rod, enabling side-by-side support of the substrate. Different lengths of retaining sleeves can be selected according to the thickness of the substrate so that the formed fitting groove can effectively position the substrate, which is suitable for supporting substrates of different thicknesses. Different lengths of spacer sleeves can be replaced to adjust the number of fitting grooves on the supporting rod to support different numbers of substrates, improving the cleaning efficiency.

[0014] The number of supporting rods can be adjusted according to the shape of the substrate. When the substrate is circular, only two supporting rods are needed to achieve side-by-side support of the substrate. When the substrate is square, four supporting rods are needed to support the substrate side by side, realizing the cleaning and support of the square substrate, with high practicality. Description of the Drawings

[0015] Figure 1 It is a schematic diagram of the ceramic substrate cleaning carrier of the present utility model when supporting a circular substrate.

[0016] Figure 2 It is a schematic diagram of the ceramic substrate cleaning carrier when supporting a square substrate. Detailed Description of the Embodiment

[0017] The following Figures 1 - 2 will make a detailed description of the embodiments of the present utility model.

[0018] Ceramic substrate cleaning carrier, including a hanging bracket 1 and a supporting rod 2 detachably mounted on the hanging bracket 1, characterized in that: the number of the supporting rods 2 is at least two, and the supporting rod 2 includes a rod body 21, a spacer sleeve 22 fitted on the rod body 21 with a clearance, and a retaining sleeve 23 fitted on the rod body 21 with a clearance. The retaining sleeve 23 is clamped between adjacent spacer sleeves 22. The outer diameter of the retaining sleeve 23 is smaller than that of the spacer sleeve 22, and a fitting groove 24 is formed between adjacent spacer sleeves. The end of the rod body 21 is fastened to the hanging bracket 1 by bolts, and the substrate 100 is vertically supported on the support 2 and clamped in the fitting groove 24.

[0019] For the above-mentioned ceramic substrate cleaning carrier, a detachable supporting rod 2 is installed on the hanging bracket 1. The supporting rod 2 is a split structure, including a rod body 21, a spacer sleeve 22 and a retaining sleeve 23. The spacer sleeve 22 and the retaining sleeve 23 are respectively sleeved on the rod body. And the retaining sleeve 23 is clamped between adjacent spacer sleeves 22 to form a fitting groove 24 between adjacent spacer sleeves 22. The substrate 100 is vertically placed on the supporting rod 2 and the substrate 100 is clamped by the fitting groove 24, positioning the substrate 100 on the supporting rod 2, enabling side-by-side support of the substrate 100. Different lengths of the retaining sleeve 23 can be selected according to the thickness of the substrate to make the formed fitting groove 24 effectively position the substrate 100, suitable for supporting substrates of different thicknesses. Different lengths of the spacer sleeve 22 can be replaced to adjust the number of fitting grooves 24 on the supporting rod 2 to support different numbers of substrates, improving the cleaning efficiency.

[0020] Among them, the hanging bracket 1 includes two baffle plates 11 and a suspension rod 12 connected between the two baffle plates 11 by bolts. The number of the suspension rods 12 is two and they are horizontally aligned and distributed. The supporting rod 2 is arranged between the two baffle plates 11 and is parallel to and below the suspension rod 12. The end of the rod body 21 penetrates through the baffle plate and is fastened by bolts. Both the suspension rod 12 and the supporting rod 2 are detachably connected to the baffle plate 11. The appropriate baffle plate 11 can be selected according to the number of the supporting rods 2, facilitating the connection of different numbers of supporting rods 2. When the bolts at the end of the rod body 21 are fastened to the baffle plate 11, the two baffle plates 11 press the spacer sleeve 22 and the retaining sleeve 23 on the rod body 21, making the disassembly and assembly of the carrier convenient and simple. After the substrate 11 is placed in place, the suspension rod 12 is grasped and moved to place the carrier into the ultrasonic cleaning tank for ultrasonic cleaning of the substrate.

[0021] Among them, both the rod body 21 and the suspension rod 12 are made of metal, and the spacer sleeve 22, the retaining sleeve 23 and the baffle plate 11 are all made of polytetrafluoroethylene. The rod body 21 and the suspension rod 12 have strong supporting ability and are not easily deformed, ensuring the supporting reliability of the carrier. Also, it avoids the direct contact between the rod body 21 and the suspension rod 12 made of metal and the substrate 100, preventing the substrate from being knocked and damaged during the cleaning process.

[0022] Among them, when supporting a circular substrate such as Figure 1As shown, the number of the supporting rods 2 is two, and the two supporting rods 2 are arranged horizontally and aligned. The circular substrate can be supported side by side by only two supporting rods 2.

[0023] When supporting a square substrate as Figure 2 shown, the number of the supporting rods 2 is four, and the four supporting rods 2 are distributed in a trapezoidal shape, and the distance between the two upper supporting rods 2 is greater than the distance between the two lower supporting rods 2. The square substrate needs four supporting rods 2 to support the substrate. According to the number of the supporting rods 2, the baffle 11 that is adaptively connected can be selected. As Figure 2 can be seen, the four supporting rods 2 are distributed in a trapezoidal shape between the two stoppers 11. The distance between the two upper supporting rods 2 is greater than the distance between the two lower supporting rods 2. The two lower supporting rods 2 are used to support the weight of the substrate, and the two upper supporting rods 2 are used to position the substrate 100 front and back. The substrate 100 is matched with the matching grooves 24 on the four supporting rods 2 to form left and right positioning of the substrate, preventing the substrate from moving on the supporting rods 2, and can form a reliable side-by-side support for the square substrate, realizing the cleaning support for the square substrate, and having high practicability.

[0024] The technical solutions of the embodiments of the present invention are completely described above in conjunction with the accompanying drawings. It should be noted that the described embodiments are only a part of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts fall within the protection scope of the present invention.

Claims

1. Ceramic substrate cleaning carrier, comprising a hanging bracket and a supporting rod detachably mounted on the hanging bracket, characterized in that: The number of the supporting rods is at least two. Each supporting rod includes a rod body, a spacer sleeve which is in clearance fit with the rod body, and a retaining sleeve which is in clearance fit with the rod body. The retaining sleeve is clamped between adjacent spacer sleeves. The outer diameter of the retaining sleeve is smaller than that of the spacer sleeve, and a fitting groove is formed between adjacent spacer sleeves. The end of the rod body is fastened to the hanging bracket by bolts, and the base plate is vertically supported on the supporting rod and clamped in the fitting groove.

2. The ceramic substrate cleaning carrier according to claim 1, wherein: The hanging bracket includes two baffle plates and a suspension rod which is connected between the two baffle plates by bolts. The number of the suspension rods is two and they are horizontally aligned. The supporting rod is arranged between the two baffle plates and is parallel to and below the suspension rod. The end of the rod body penetrates through the baffle plate and is fastened by bolts.

3. The ceramic substrate cleaning carrier according to claim 2, wherein: Both the rod body and the suspension rod are made of metal, and the spacer sleeve, the retaining sleeve and the baffle plates are all made of polytetrafluoroethylene.

4. The ceramic substrate cleaning carrier according to claim 1, wherein: The number of the supporting rods is two, and the two supporting rods are horizontally aligned.

5. The ceramic substrate cleaning carrier according to claim 1, wherein: The number of the supporting rods is four. The four supporting rods are distributed in a trapezoidal shape, and the distance between the two upper supporting rods is greater than the distance between the two lower supporting rods.

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