Spray plate temperature measuring platform

Abstract

The utility model discloses a spraying plate temperature measuring platform, which comprises a platform, an upper cover plate, a spraying plate, a heating element and a plurality of temperature measuring elements, and is characterized in that the upper cover plate covers the platform, and a cavity is formed between the upper cover plate and the platform; the spraying plate is arranged in the cavity and mounted on the upper cover plate, and a plurality of temperature measuring points at different positions are arranged on the upper surface of the spraying plate; the heating element is arranged on the platform and / or the upper cover plate, and the heating element is configured to heat the spraying plate; and the plurality of temperature measuring elements pass through the upper cover plate and carry out temperature measurement on the plurality of temperature measuring points in a one-to-one correspondence manner. According to the invention, the temperature of a plurality of different positions on the spraying plate can be measured, small wafer test blocks do not need to be manually installed, the positions have repeatability and are more accurate, the requirement for the temperature detection of a specific position can be met, the temperature measurement accuracy is improved, the temperature measurement does not fall off, and the temperature measurement reliability is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and particularly relates to a shower head temperature measurement platform. Background Art

[0002] In the process of semiconductor manufacturing, process gas enters the reaction cavity through a shower head (SHD) for chemical reaction, and this process has a crucial impact on the quality of the final product. The design and working state of the SHD directly affect many key parameters, such as the number of particles, the uniformity of the film layer, and the film layer thickness. Among these factors, the overall temperature of the SHD is a very critical parameter because it directly relates to the flow characteristics of the process gas and the efficiency of the chemical reaction. To ensure the uniformity of the overall temperature of the SHD, it is necessary to accurately monitor its surface temperature. Currently, the commonly used method in the industry is to use a wafer coupon for measurement. During specific operation, the staff will use a high-temperature resistant tape to paste the wafer coupon on the lower surface of the SHD after opening the cavity. However, this method has several significant problems: First, the fixing method with high-temperature resistant tape is prone to falling off during the heating process, resulting in the inability to continuously monitor the temperature; Second, the manual pasting method is difficult to ensure the accurate and repeatable installation position of the wafer coupon, which limits the need for temperature detection at specific positions; Finally, the process of installing the wafer coupon is time-consuming and laborious, affecting the production efficiency. Summary of the Utility Model

[0003] An embodiment of the utility model provides a shower head temperature measurement platform, aiming to solve the problems of low reliability and low accuracy in measuring the temperature of the shower head by using a wafer coupon.

[0004] In a first aspect, the utility model provides a shower head temperature measurement platform, including:

[0005] A platform;

[0006] An upper cover plate, covering the platform, and a cavity is formed between the upper cover plate and the platform;

[0007] A shower head, disposed in the cavity and installed on the upper cover plate, and a plurality of temperature measurement points with different positions are arranged on the upper surface of the shower head;

[0008] A heating element, disposed on the platform and / or the upper cover plate, and the heating element is configured to heat the shower head;

[0009] A plurality of temperature measurement elements, passing through the upper cover plate and measuring the temperature of the plurality of temperature measurement points one by one.

[0010] Furthermore, the upper surface of the spray plate includes a mounting surface and a temperature measuring surface. The mounting surface is arranged around the temperature measuring surface. The mounting surface is mounted with the upper cover plate, and the temperature measuring points are arranged on the temperature measuring surface and / or the mounting surface.

[0011] Furthermore, the temperature measuring points are distributed on the mounting surface along the circumferential direction of the spray plate; and / or,

[0012] The temperature measuring points are distributed on the temperature measuring surface along the radial direction of the spray plate.

[0013] Furthermore, the temperature measuring points are mounting holes opened on the upper surface of the spray plate. The end of the temperature measuring element is arranged in the mounting holes. The spray plate temperature measuring platform further includes an insulating bushing. The insulating bushing is sleeved outside the temperature measuring element to isolate the temperature measuring element and the spray plate.

[0014] Furthermore, the heating element includes a first heating member, and the first heating member is arranged on one side of the outer surface of the upper cover plate facing away from the spray plate.

[0015] Furthermore, the heating element includes a second heating member, and the second heating member is arranged on one side of the inner surface of the platform facing the spray plate.

[0016] Furthermore, the spray plate temperature measuring platform further includes a sealing plate. The sealing plate is arranged on the upper cover plate. The sealing plate is provided with an air extraction joint for connecting with a vacuum pump. The upper cover plate is provided with an air extraction channel communicating with the air extraction joint and the cavity respectively.

[0017] Furthermore, the spray plate temperature measuring platform further includes a sealing member. The sealing member is arranged between the sealing plate and the upper cover plate, and / or the sealing member is arranged between the upper cover plate and the platform.

[0018] Furthermore, the spray plate temperature measuring platform further includes a fan and a mounting bracket. The mounting bracket is mounted on the upper cover plate and / or the platform, and the fan is mounted on the mounting bracket.

[0019] Furthermore, the spray plate temperature measuring platform further includes a water inlet pipe and a water outlet pipe. The platform is provided with a water cooling channel, and the water cooling channel is respectively connected with the water inlet pipe and the water outlet pipe.

[0020] The present utility model provides a temperature measurement platform for a spray plate. The temperature measurement platform for the spray plate includes: a platform, an upper cover plate, a spray plate, a heating element, and a plurality of temperature measurement elements. The upper cover plate is installed on the platform, and a cavity is formed between the upper cover plate and the platform. The spray plate is located in the cavity and is installed with the upper cover plate. A plurality of temperature measurement points at different positions are arranged on the upper surface of the spray plate. The heating element is used to heat the spray plate. The plurality of temperature measurement elements pass through the upper cover plate and correspond to the plurality of temperature measurement points at different positions on the spray plate one by one for temperature measurement. Thus, the temperatures at a plurality of different positions on the spray plate can be measured. There is no need to artificially install a wafer test block, and the position has repeatability and is more accurate, which can meet the requirement of detecting the temperature at a specific position, improve the accuracy of temperature measurement, and will not fall off, improving the reliability of temperature measurement. Moreover, this temperature measurement platform measures the temperature of the spray plate in an offline manner, without affecting the normal operation and production efficiency of the machine tool. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0022] Figure 1 Shows a schematic cross-sectional view of the temperature measurement platform for the spray plate in an embodiment of the present utility model;

[0023] Figure 2 Shows a schematic diagram of the spray plate of the temperature measurement platform for the spray plate in an embodiment of the present utility model;

[0024] Figure 3 Shows Figure 1 a partially enlarged schematic diagram of;

[0025] Figure 4 Shows an exploded perspective schematic diagram of the temperature measurement platform for the spray plate in an embodiment of the present utility model;

[0026] Figure 5 Shows an exploded schematic diagram of the temperature measurement platform for the spray plate in an embodiment of the present utility model;

[0027] Figure 6 Shows another schematic cross-sectional view of the temperature measurement platform for the spray plate in an embodiment of the present utility model;

[0028] Figure 7 Shows a schematic diagram of the temperature measurement platform for the spray plate in an embodiment of the present utility model;

[0029] Reference numerals:

[0030] 1. Platform; 21. Upper cover plate; 211. Sunken platform; 212. Installation platform; 213. Air extraction channel; 22. Sealing plate; 221. Air extraction joint; 3. Spraying plate; 31. Installation surface; 32. Temperature measurement surface; 33. Temperature measurement point; 41. Temperature measurement element; 42. Insulating bushing; 5. Heating element; 51. First heating element; 52. Second heating element; 6. Sealing element; 71. Fan; 72. Installation bracket; 81. Water inlet pipe; 82. Water outlet pipe. Detailed implementation manners

[0031] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0032] The directional terms mentioned in the present invention, such as "upper", "lower", "front", "rear", "left", "right", "inner", "outer", "side", etc., are only references to the directions in the attached drawings. Therefore, the directional terms used are for explaining and understanding the present invention, rather than for limiting the present invention. In addition, in the drawings, structures that are similar or the same are denoted by the same reference numerals.

[0033] In the semiconductor manufacturing process, process gases enter the reaction chamber through the spraying plate, where chemical reactions occur. The spraying plate is crucial for process performance, especially affecting key parameters such as particle control, film thickness uniformity, and film thickness. For the spraying plate, the overall temperature is an extremely important factor as it directly affects the process performance. Therefore, it is crucial to ensure the uniformity of the overall temperature of the spraying plate. To achieve this, effective methods are needed to detect the surface temperature of the spraying plate in a specific environment. Currently, the most common practice is to use a wafer coupon for temperature measurement. However, when using a wafer coupon to measure the surface temperature of the spraying plate, it is necessary to manually use a high-temperature tape to stick the wafer coupon on the lower surface of the spraying plate after opening the chamber. This method requires the installation of the wafer coupon, which is not only time-consuming and laborious but also prone to falling off. Moreover, the accuracy of the manually pasted position is low and difficult to reproduce.

[0034] To this end, the embodiment of the present utility model proposes a temperature measurement platform for a spray plate, which solves the problems of low reliability and low accuracy in measuring the temperature of the spray plate by using wafer coupon in the prior art. By designing a temperature measurement platform specifically for testing the spray plate, and arranging a plurality of temperature measurement points at different positions on the spray plate as required, a plurality of temperature measurement elements measure the temperature of each corresponding temperature measurement point one by one, so that the temperatures at different positions on the surface of the spray plate can be measured, the positions are repeatable, avoiding human errors, and improving the accuracy and reliability of temperature measurement.

[0035] The specific idea for the embodiment of the present utility model to solve the above problems of low temperature measurement reliability and inaccuracy is as follows:

[0036] Specifically design a temperature measurement platform for the spray plate. This temperature measurement platform uses an offline temperature measurement method to measure the temperature of the surface of the spray plate, that is, it is not measured at the machine end, but in a dedicated temperature measurement platform, which can simulate the temperature distribution on the spray plate at the machine end and provide temperature references for each position of the spray plate during actual heating. For example, if it is found during the test that the heating surface area is insufficient to achieve the heat transfer of the set temperature, then during the design of the new product, the heat transfer efficiency obtained from the test can be used to inversely deduce how much the heat transfer area needs to be increased here to achieve the conduction of the heat source, thereby assisting in the research and development design of the spray plate. Specifically, the platform and the upper cover plate are used to simulate the cavity and the spray top plate at the machine end. The platform is equivalent to the cavity, and the upper cover plate is equivalent to the spray top plate. The spray plate is arranged inside the platform, and the spray plate is heated and raised in temperature by heating elements. In order to test the uniformity of the overall temperature of the spray plate, a plurality of temperature measurement points at different positions are arranged on the upper surface of the spray plate as required. For example, before the process, the temperature measurement points can be arranged at the positions that are more sensitive to the process. For example, for the atomic layer deposition (ALD) process, it is more sensitive to the temperature of the central hole position of the spray plate, so temperature measurement points can be arranged in the circumferential direction at the center position of the surface of the spray plate to measure the temperature. Each temperature measurement point is correspondingly provided with a temperature measurement element for temperature measurement. The temperature measurement element passes through the upper cover plate to reach the temperature measurement point on the surface of the spray plate, so that the temperature of each position on the surface of the spray plate can be measured. In this way, the temperature of the heat transfer surface and the heat conduction efficiency can be effectively detected, and the heating surface area can be adjusted according to the temperature measurement results to affect the heat transfer efficiency and assist in the new product design of the spray plate. Compared with the existing method of using wafer coupon for temperature measurement, the step of manually pasting wafer coupon is omitted, improving the temperature measurement efficiency, and the situation of wafer coupon falling off will not occur, improving the reliability of temperature measurement; moreover, the positions of the temperature measurement points are fixed, so the positions are repeatable, avoiding the human errors of manual attachment, improving the accuracy of temperature measurement, and being able to meet the needs of detecting the temperature at specific positions; and the temperature measurement is carried out on a dedicated temperature measurement platform, rather than at the machine end, so it does not affect the normal operation of the machine end, thereby improving the production efficiency.

[0037] To better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings of the specification and specific embodiments.

[0038] Please refer to Figures 1 - 7 , an embodiment of the present utility model shows a spray plate temperature measurement platform, including: a platform 1, an upper cover plate 21, a spray plate 3, a heating element 5 and a plurality of temperature measurement elements 41. The upper cover plate 21 covers the platform 1, and a cavity is formed between the upper cover plate 21 and the platform 1; the spray plate 3 is arranged in the cavity and installed on the upper cover plate 21, and a plurality of temperature measurement points 33 with different positions are arranged on the upper surface of the spray plate 3; the heating element 5 is arranged on the platform 1 and / or the upper cover plate 21, and the heating element 5 is configured to heat the spray plate 3; a plurality of temperature measurement elements 41 pass through the upper cover plate 21 and measure the temperature of a plurality of the temperature measurement points 33 one by one.

[0039] Specifically, the platform 1 is integrally in the structure of a circular basin body and is hollow inside. The upper cover plate 21 is integrally in the structure of a sunken table 211, the center of the upper cover plate 21 sinks to form the table 211, the edge of the upper cover plate 21 and the edge of the platform 1 are fixedly installed by screws, and a cavity is formed between the lower surface of the table 211 of the upper cover plate 21 and the inner wall of the platform 1. The spray plate 3 is in the structure of a circular plate body, and the upper surface of the spray plate 3 is fixedly installed with the lower surface of the table 211 of the upper cover plate 21, so that the spray plate 3 is fixed at the lower surface of the upper cover plate 21, and thus the spray plate 3 is located in the cavity. The heating element 5 can be arranged on the platform 1, or on the upper cover plate 21, or on both the platform 1 and the upper cover plate 21 at the same time. The heating element 5 is used to heat the spray plate 3 to make its temperature rise reach the set temperature and provide temperature measurement conditions. On the upper surface of the spray plate 3, that is, on the surface close to the upper cover plate 21, a plurality of temperature measurement points 33 with different positions are arranged. The positions of these temperature measurement points 33 are selected according to actual needs, and those skilled in the art can select and set according to actual needs, which are not limited herein. Corresponding to the positions of these temperature measurement points 33 on the upper cover plate 21, corresponding through holes are respectively opened. These through holes are used to place the temperature measurement elements 41. The temperature measurement elements 41 are fixed on the upper cover plate 21 and pass through the through holes to reach the temperature measurement points 33 on the upper surface of the spray plate 3. Among them, the temperature measurement elements 41 adopt K-type thermocouples. One end of the temperature measurement element 41 passing through the through hole is the temperature sensing end, and this temperature sensing end is located at the position of the temperature measurement point 33 to sense the temperature of the temperature measurement point 33. The temperature measurement elements 41 measure the temperature of the temperature measurement points 33 one by one, so that a plurality of temperature measurement elements 41 can measure the temperatures at the temperature measurement points 33 at different positions, and thus the overall temperature of the spray plate 3 can be measured.

[0040] In this embodiment, compared with the existing method of using a wafer coupon for temperature measurement, in this embodiment, a temperature measuring element 41 is used to measure the temperature of a fixed temperature measuring point 33 arranged on the surface of the spray plate 3. There is no need to attach a wafer coupon, which avoids the detachment of the wafer coupon and improves the reliability of temperature measurement. Moreover, the position of the temperature measuring point 33 is fixed, so the position is repeatable, avoiding the human error caused by manual attachment and improving the accuracy of temperature measurement, which can meet the need for detecting the temperature at a specific position.

[0041] Referring to Figure 2 , in one embodiment, the upper surface of the spray plate 3 includes a mounting surface 31 and a temperature measuring surface 32. The mounting surface 31 is arranged around the temperature measuring surface 32. The mounting surface 31 is installed with the upper cover plate 21, and the temperature measuring point 33 is arranged on the temperature measuring surface 32 and / or the mounting surface 31. Specifically, the spray plate 3 is a circular plate structure. The mounting surface 31 is the outer ring part of the upper surface of the spray plate 3, and the temperature measuring surface 32 is the inner circular part of the upper surface of the spray plate 3. The mounting surface 31 surrounds the temperature measuring surface 32. The mounting surface 31 is used to install with the upper cover plate 21, and the mounting surface 31 forms a fixation with the upper cover plate 21. Therefore, the mounting surface 31 is in contact with the upper cover plate 21. Then, the mounting surface 31 is also the heat transfer contact surface of the spray plate 3. The temperature measuring point 33 can be arranged on the temperature measuring surface 32, or on the mounting surface 31, or on both the temperature measuring surface 32 and the mounting surface 31 at the same time. In this way, the temperature of the heat transfer contact surface and the heat conduction efficiency can be effectively detected, and the heating surface area can be adjusted according to the temperature measurement result to affect the heat transfer efficiency. For example, during the test, it is found that the heating surface area is not sufficient to achieve the heat transfer of the set temperature. Then, when designing a new product, the heat transfer efficiency obtained from the test can be used to inversely deduce how much heat transfer area needs to be increased here to achieve the conduction of the heat source.

[0042] Continuing to refer to Figure 2 , in this embodiment, the temperature measuring points 33 are distributed on the mounting surface 31 along the circumferential direction of the spray plate 3; and / or, the temperature measuring points 33 are distributed on the temperature measuring surface 32 along the radial direction of the spray plate 3. Specifically, one arrangement method is that a plurality of temperature measuring points 33 are distributed along the outer ring mounting surface 31, which can be evenly spaced, surrounding the inner circle for one full circle of 360 degrees to ensure the uniformity of temperature measurement. Another arrangement method is that a plurality of temperature measuring points 33 are radially spaced along the inner circle temperature measuring surface 32, which can be evenly spaced or unevenly spaced, and there are temperature measuring points 33 distributed in multiple different radial directions, making the overall temperature measuring points 33 radially distributed to ensure the uniformity of temperature measurement.

[0043] Referring to Figure 4 and Figure 5, in one embodiment, the temperature measurement point 33 is a mounting hole formed on the upper surface of the spray plate 3, and the end of the temperature measurement element 41 is disposed in the mounting hole. The spray plate temperature measurement platform further includes an insulating bushing 42, and the insulating bushing 42 is sleeved outside the temperature measurement element 41 to isolate the temperature measurement element 41 from the spray plate 3. Specifically, since the end of the thermocouple is metallic and the spray plate 3 is also metallic, direct contact between the end of the thermocouple and the spray plate 3 will cause sparking. Therefore, in order to avoid sparking, an insulating bushing 42 needs to be sleeved outside the temperature measurement element 41 to isolate the temperature measurement element 41 from the spray plate 3. The insulating bushing 42 can be, for example, a ceramic insulating bushing 42, and the insulating bushing 42 is sleeved outside the temperature measurement element 41 and assembled with the temperature measurement element 41. Specifically, the temperature measurement point 33 is a mounting hole formed on the upper surface of the spray plate 3. The insulating bushing 42 passes through the through hole on the upper cover plate 21, and the insulating bushing 42 is installed on the upper cover plate 21 by screws. The end of the temperature measurement element 41, that is, the temperature sensing end, extends into the mounting hole, and the temperature sensing end is at a position where it can touch the surface of the mounting hole. Therefore, the temperature at the position of the mounting hole can be measured, but the temperature sensing end is non-contact with the spray plate 3. Through this embodiment, the insulating bushing 42 is used to separate the temperature measurement element 41 from the spray plate 3 to avoid sparking, ensuring safety while realizing temperature measurement. In addition, since the test platform 1 needs to simulate the vacuum environment of the machine platform end, the sealing performance of the test platform 1 needs to be ensured. A sealing groove is provided around each through hole of the upper cover plate 21, and a sealing ring is placed in the sealing groove. The insulating bushing 42 penetrates into the through hole, and the insulating bushing 42 is fastened to the upper cover plate 21 by screws. The sealing ring is pressed by the insulating bushing 42 onto the upper cover plate 21 to isolate the atmosphere and the vacuum, ensuring the vacuum of the platform 1.

[0044] Referring to Figure 1 and Figure 6 , in one embodiment, the heating element 5 includes a first heating member 51, and the first heating member 51 is disposed on one side of the upper surface of the upper cover plate 21 facing away from the spray plate 3. Specifically, the first heating member 51 is a mica sheet, and the mica sheet has good insulation and heat resistance. Therefore, the mica sheet is used as the first heating element 5. The center of the upper surface of the sunk platform 211 of the upper cover plate 21 is provided with a mounting platform 212, and the mounting platform 212 is used to install a vacuum pump to simulate a vacuum environment. The first heating member 51 is integrally in a circular sheet-like structure and is looped around the periphery of the mounting platform 212. Thus, the first heating member 51 is located on the side of the upper cover plate 21 facing away from the spray plate 3, that is, on the upper surface of the sunk platform 211. The first heating member 51 serves as the heating device of the entire temperature measurement platform, and the heating of the entire platform 1 is completed by the first heating member 51. By the operation of the first heating member 51, the spray plate 3 can be heated to reach the set temperature so as to realize temperature measurement.

[0045] Continue to refer to Figure 1 and Figure 6 In one embodiment, the heating element 5 includes a second heating member 52, and the second heating member 52 is disposed on one side of the platform 1 facing the lower surface of the spray plate 3. Specifically, in order to simulate the environmental factors of the heat radiation of the heating plate of the temperature measurement platform, the heating element 5 of this embodiment further includes a second heating element 5. The second heating element 5 also uses mica sheets, but the difference from the first heating element 5 is that the shape of the second heating element 5 is circular, and its diameter can simulate the actual size of the heating plate. The second heating element 5 is disposed on the inner bottom wall of the platform 1 at the lower surface of the spray plate 3, and the distance between the lower surface of the spray plate 3 and the second heating element 5 is the same as the distance between the spray plate 3 and the heating plate at the machine end. During the temperature rise test, the heat radiation function used to simulate the heating plate is started synchronously. Therefore, through this embodiment, the actual temperature at the required position can be accurately measured, and it is also convenient for subsequent structural adjustment. In addition, a sealing ring is provided between the second heating element 5 and the platform 1 to further improve the sealing performance.

[0046] In one embodiment, the spray plate temperature measurement platform further includes a sealing plate 22. The sealing plate 22 is disposed on the upper cover plate 21, and the sealing plate 22 is provided with an air extraction joint 221 for connecting to a vacuum pump. The upper cover plate 21 is provided with an air extraction channel 213 that communicates with the air extraction joint 221 and the cavity respectively. Specifically, in order to simulate the environmental factors of the vacuum of the temperature measurement platform, the temperature measurement platform of this embodiment further includes a sealing plate 22. The sealing plate 22 is provided with an air extraction joint 221. The air extraction joint 221 is a short pipe joint, which is vertically disposed on the plate body of the sealing plate 22. The air extraction joint 221 penetrates up and down, and a flange is provided at the head of the air extraction joint 221 for installation and connection with the vacuum pump. The structure of the installation platform 212 of the upper cover plate 21 has been described above. The installation platform 212 of the upper cover plate 21 is also provided with a vertically penetrating air extraction channel 213. The sealing plate 22 is installed on the top of the installation platform 212, the air extraction joint 221 is aligned with the outlet of the air extraction channel 213, the inlet of the air extraction channel 213 faces the cavity, and the air extraction joint 221, the air extraction channel 213, and the cavity are interconnected. Therefore, after the vacuum pump is turned on, the inside of the platform 1 can be evacuated to provide a vacuum environment.

[0047] Refer to Figure 6, in this embodiment, the spray plate temperature measurement platform further includes a seal 6. The seal 6 is provided between the seal plate 22 and the upper cover plate 21, and / or the seal 6 is provided between the upper cover plate 21 and the platform 1. Specifically, the temperature measurement platform needs to simulate a vacuum environment, so the sealing performance of the temperature measurement platform needs to be ensured. For this purpose, multiple seals 6 are provided in this embodiment, and the seals 6 are made of sealing rings. Since the seal plate 22 is installed on the installation platform 212 of the upper cover plate 21, there is a possibility of air leakage between the seal plate 22 and the upper cover plate 21. Therefore, a sealing ring is provided between the seal plate 22 and the upper cover plate 21 to achieve the seal between the two and improve the sealing performance between the seal plate 22 and the upper cover plate 21. In addition, the edge of the upper cover plate 21 and the edge of the platform 1 are installed by screws, and there is also a possibility of air leakage between the upper cover plate 21 and the platform 1. Therefore, a sealing ring is provided between the upper cover plate 21 and the platform 1 to achieve the seal between the two and improve the sealing performance between the platform 1 and the upper cover plate 21.

[0048] Referring to Figure 7 , in an embodiment, the spray plate temperature measurement platform further includes a fan 71 and a mounting bracket 72. The mounting bracket 72 is mounted on the upper cover plate 21 and / or the platform 1, and the fan 71 is mounted on the mounting bracket 72. Specifically, in order to simulate the air-cooled environmental factors of the temperature measurement platform, the fan 71 is installed on the temperature measurement platform for simulation. Specifically, a mounting bracket 72 for placing the fan 71 is provided. The mounting bracket 72 can be fixed on the platform 1, or can be fixed on the upper cover plate 21, or can be fixed on both the platform 1 and the upper cover plate 21 at the same time. In this embodiment, the mounting bracket 72 is fixed on the upper cover plate 21. The mounting bracket 72 includes a support leg and an annular platform 1. The support leg is installed on the lower side of the annular platform 1, and the fan 71 is installed on the upper side of the annular platform 1. The number of fans 71 is not limited. In this embodiment, 4 fans 71 are provided, and the 4 fans 71 are connected in series and powered uniformly. The installation position height of the fans 71 can be adjusted according to needs, and the fan 71 switch is started synchronously at the beginning of the heating test. The gas cooling at the machine end is simulated by installing the fan 71 on the test platform 1.

[0049] Continue to refer to Figure 7, in one embodiment, the temperature measurement platform of the spray plate further includes a water inlet pipe 81 and a water outlet pipe 82. A water cooling channel (not shown in the figure) is provided on the platform 1, and the water cooling channel is respectively connected to the water inlet pipe 81 and the water outlet pipe 82. Specifically, in order to simulate the environmental factors of the water cooling of the temperature measurement platform, a water cooling channel with the same size as the water cooling of the reaction chamber at the machine end is reserved on the test platform 1. A hot water machine can be connected using an adapter during heating to provide a water cooling source. Specifically, a water cooling channel is opened on the platform 1. The position and size of this water cooling channel both simulate the actual situation of the cavity of the reaction chamber. The inlet and outlet of this water cooling channel are respectively led out through the water inlet pipe 81 and the water outlet pipe 82. One of the water inlet pipe 81 and the water outlet pipe 82 is for inlet and the other is for outlet, forming an overall loop structure. That is, the water inlet pipe 81, the water cooling channel, and the water outlet pipe 82 form a circulating water path structure. During the heating test, both the water inlet pipe 81 and the water outlet pipe 82 are connected to the hot water machine, and the hot water machine provides cooling water at different temperatures. Through this embodiment, the environmental factors of the water cooling of the cavity at the machine end are simulated by opening the water cooling channel.

[0050] In summary, this embodiment can avoid installing the wafer coupon at the machine end, avoid manually attaching the high-temperature adhesive tape to install the wafer coupon, prevent it from falling off and improve reliability. Moreover, the position of the temperature measurement point 33 is fixed, and the situation of inaccurate temperature measurement caused by inaccurate manual attachment position will not occur. In addition, the temperature measurement platform of this embodiment can simulate the environment of the spray plate 3 at the machine end to the greatest extent, and can realize environmental factors such as vacuum, water cooling, air cooling, and heat radiation of the heating plate. Moreover, using the offline temperature measurement platform to detect the surface temperature of the spray plate 3 simulates various environmental factors at the machine end, making the result more accurate. The offline test does not affect the normal operation of the machine and improves production efficiency.

[0051] As mentioned above, the above are only the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should all be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.

Claims

1. A temperature measurement platform for a spray plate, characterized in that Comprising: A platform; An upper cover plate, covering the platform, with a cavity formed between the upper cover plate and the platform; A spray plate, disposed in the cavity and mounted on the upper cover plate, with a plurality of temperature measurement points arranged at different positions on the upper surface of the spray plate; A heating element, disposed on the platform and / or the upper cover plate, configured to heat the spray plate; A plurality of temperature measurement elements, passing through the upper cover plate and corresponding to the plurality of temperature measurement points one by one for temperature measurement.

2. The temperature measurement platform of the spray plate according to claim 1, characterized in that The upper surface of the spray plate includes a mounting surface and a temperature measurement surface, the mounting surface surrounds the temperature measurement surface, the mounting surface is mounted to the upper cover plate, and the temperature measurement points are arranged on the temperature measurement surface and / or the mounting surface.

3. The temperature measurement platform for the spray plate according to claim 2, characterized in that, The temperature measurement points are distributed on the mounting surface along the circumferential direction of the spray plate; and / or, The temperature measurement points are distributed on the temperature measurement surface along the radial direction of the spray plate.

4. The temperature measurement platform of the spray plate according to claim 1, characterized in that, The temperature measurement points are mounting holes opened on the upper surface of the spray plate, the end of the temperature measurement element is disposed in the mounting hole, and the spray plate temperature measurement platform further includes an insulating bushing, and the insulating bushing is sleeved outside the temperature measurement element to insulate the temperature measurement element and the spray plate.

5. The temperature measurement platform of the spray plate according to claim 1, characterized in that, The heating element includes a first heating member, and the first heating member is disposed on one side of the outer surface of the upper cover plate facing away from the spray plate.

6. The spray plate temperature measurement platform according to claim 5, wherein, The heating element includes a second heating member, and the second heating member is disposed on one side of the inner surface of the platform facing the spray plate.

7. The temperature measurement platform of the spray plate according to claim 1, characterized in that, Further including a sealing plate, the sealing plate is disposed on the upper cover plate, and an air extraction joint for connecting to a vacuum pump is provided on the sealing plate, and an air extraction channel communicating with the air extraction joint and the cavity is opened on the upper cover plate.

8. The temperature measurement platform of the spray plate according to claim 7, characterized in that, Further including a sealing member, the sealing member is provided between the sealing plate and the upper cover plate, and / or, the sealing member is provided between the upper cover plate and the platform.

9. The temperature measurement platform of the spray plate according to claim 1, characterized in that, Further including a fan and a mounting bracket, the mounting bracket is mounted on the upper cover plate and / or the platform, and the fan is mounted on the mounting bracket.

10. The temperature measurement platform of the spray plate according to claim 1, characterized in that, Further including a water inlet pipe and a water outlet pipe, a water cooling channel is provided on the platform, and the water cooling channel is respectively connected to the water inlet pipe and the water outlet pipe.

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