Pushing device based on silicon wafer drying

Abstract

The utility model relates to the technical field of silicon wafer drying, in particular to a pushing device based on silicon wafer drying, which comprises a conveying track, a first photoelectric sensor, a second photoelectric sensor, a third photoelectric sensor and a first cylinder, the first photoelectric sensor, the second photoelectric sensor and the third photoelectric sensor are all located on one side of the conveying track, are sequentially distributed in the conveying direction of the flower basket and are all used for detecting whether the flower basket is placed at the relative position of the conveying track or not. The first air cylinder is used for pushing the basket to move in the conveying direction. When baskets to be dried are placed on the conveying track, the first air cylinder is started, the baskets close to one side of the first air cylinder can be pushed to move towards the baskets far away from one side of the first air cylinder, and therefore the distance between the two baskets can be shortened, the overall space of the drying box can be reduced, meanwhile, the drying occupancy rate is increased, and the drying heat is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer drying, in particular to a pushing device based on silicon wafer drying. Background Art

[0002] During the solar cell production process, silicon wafers undergo a series of processes, including texturing, diffusion, etching, coating, and printing. During the texturing process, the silicon wafers are immersed in a reaction solution to corrode the surface, forming a textured surface. After texturing, the wafers need to be dried during the diffusion process. Therefore, after the texturing process, the silicon wafers must be cleaned and dried to remove water stains on the surface to ensure their quality and performance.

[0003] In photovoltaic trough cleaning equipment, drying is the final step in the process. Currently, silicon wafer drying is performed by a robotic arm picking up a basket and placing it onto a conveyor belt. The conveyor belt then transports the basket to a drying oven for drying. To improve drying efficiency, multiple wafers are dried simultaneously. However, the timing of the robotic arm's basket pick-up is difficult to control, resulting in inconsistent spacing between adjacent baskets on the conveyor belt. This, in turn, results in excessive spacing between the baskets. This results in low drying oven occupancy, low heat utilization, and poor drying results. Utility Model Content

[0004] The technical problem to be solved by the present invention is: in order to solve the technical problem that the existing silicon wafer drying affects the drying effect due to the low drying heat utilization rate, the present invention provides a pushing device based on silicon wafer drying, which can adjust the distance between two adjacent flower baskets, shorten the distance between two adjacent flower baskets, and improve the drying effect of silicon wafers.

[0005] The technical solution adopted by the utility model to solve its technical problems is: a pushing device based on silicon wafer drying, including: a conveying track, a first photoelectric sensor, a second photoelectric sensor, a third photoelectric sensor and a first cylinder, the conveying track is used to convey a flower basket, the first photoelectric sensor, the second photoelectric sensor and the third photoelectric sensor are all located on one side of the conveying track and are distributed in sequence along the conveying direction of the flower basket, the first photoelectric sensor, the second photoelectric sensor and the third photoelectric sensor are all used to detect whether the flower basket is placed at a relative position on the conveying track, and the first cylinder is used to push the flower basket to move along the conveying direction.

[0006] Therefore, when the flower basket to be dried is placed on the conveying track, the first cylinder is started, which can push the flower basket close to the first cylinder to move toward the flower basket away from the first cylinder. In this way, the distance between the two flower baskets can be shortened, and the overall space of the drying box can be reduced. At the same time, the occupancy rate of the drying is increased and the drying heat is increased.

[0007] Furthermore, it also includes: a push plate, which is installed at the driving end of the first cylinder.

[0008] Furthermore, the push plate includes a supporting portion and a pushing portion, wherein the supporting portion is connected to the driving end of the first cylinder, and the pushing portion is connected to the supporting portion; wherein the supporting portion and the pushing portion are perpendicular to each other. Thus, the supporting portion is used to support the flower basket to be dried, and the pushing portion is used to push the flower basket to move.

[0009] Furthermore, the conveying track includes two conveying parts, one end of the flower basket is located on one conveying part, and the other end of the flower basket is located on the other conveying part. Thus, both ends of the flower basket are respectively installed on the conveying parts and are conveyed by the conveying parts.

[0010] Furthermore, the first cylinder and the push plate are located between the two conveying parts, and the first cylinder and the supporting part are located below the flower basket. Thus, the space in the middle is used to install the first cylinder and the push plate. On the one hand, the conveying and movement of the flower basket do not interfere with each other, and on the other hand, the installation space of the entire pushing device can be shortened.

[0011] Furthermore, the robot further comprises a guide bar mounted on the conveying portion and located on a side of the conveying portion away from the flower basket. The number of guide bars is equal to the number of conveying portions. Thus, the guide bar facilitates the robot arm to place the flower basket on the conveying track, and prevents the flower basket from falling off the conveying track during the conveying and movement of the flower basket.

[0012] Furthermore, a mounting seat is provided at the bottom of the first cylinder.

[0013] Furthermore, it also includes: a support, and the conveying part, the first photoelectric sensor, the second photoelectric sensor, the third photoelectric sensor and the mounting seat are all connected to the support.

[0014] Compared with the prior art, the beneficial effects of the present invention are:

[0015] When the flower basket to be dried is placed on the conveyor track, the first cylinder is started, which can push the flower basket close to the first cylinder to move toward the flower basket away from the first cylinder. In this way, the distance between the two flower baskets can be shortened, and the overall space of the drying box can be reduced. At the same time, the occupancy rate of the drying is increased and the drying heat is increased. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0017] Figure 1 This is a schematic structural diagram of a pushing device based on silicon wafer drying according to the present invention;

[0018] Figure 2 This is a schematic diagram of the structure of the silicon wafer and flower basket installation of the utility model;

[0019] Figure 3 This is a schematic structural diagram of the push device based on silicon wafer drying before the distance between the two flower baskets is adjusted;

[0020] Figure 4 This is a top view of the push device based on silicon wafer drying of the present invention before the distance between the two flower baskets is adjusted;

[0021] Figure 5 This is a top view of the push device based on silicon wafer drying of the present invention after the distance between the two flower baskets is adjusted;

[0022] Figure 6 This is a control block diagram of the pushing device based on silicon wafer drying of the present invention.

[0023] In the figure: 1. Conveying track; 101. Conveying part; 2. Flower basket; 3. First photoelectric sensor; 4. Second photoelectric sensor; 5. Third photoelectric sensor; 6. First cylinder; 601. Mounting seat; 7. Push plate; 701. Supporting part; 702. Pushing part; 8. Guide bar; 9. Support; 10. Drying box; 11. Silicon wafer; 12. First box door; 13. Second cylinder; 14. Third cylinder; 15. Fourth photoelectric sensor; 16. Controller. DETAILED DESCRIPTION

[0024] The present invention will now be described in further detail with reference to the accompanying drawings, which are simplified schematic diagrams that illustrate the basic structure of the present invention in a schematic manner.

[0025] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, features defined as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0026] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0027] like Figures 1 to 6 The figure shows a preferred embodiment of the present invention. The push device for drying silicon wafers in this embodiment includes a conveyor track 1, a first photoelectric sensor 3, a second photoelectric sensor 4, a third photoelectric sensor 5, and a first cylinder 6. The conveyor track 1 is used to transport flower baskets 2. The first photoelectric sensor 3, the second photoelectric sensor 4, and the third photoelectric sensor 5 are all located on one side of the conveyor track 1 and are sequentially distributed along the conveying direction of the flower baskets 2. The first photoelectric sensor 3, the second photoelectric sensor 4, and the third photoelectric sensor 5 are each used to detect whether a flower basket 2 is placed relative to the conveyor track 1. The first cylinder 6 is used to push the flower basket 2 along the conveying direction. Thus, when a flower basket 2 to be dried is placed on the conveyor track 1, the first cylinder 6 is activated, pushing the flower basket 2 closer to the first cylinder 6 toward the flower basket 2 farther from the first cylinder 6. This shortens the distance between the two flower baskets 2, reduces the overall space of the drying box 10, and improves the drying occupancy rate and drying heat.

[0028] In other words, by adjusting the distance between the two flower baskets 2 (i.e., shortening the distance between the two flower baskets 2), when drying multiple flower baskets 2 at the same time, after the distance between the flower baskets 2 is adjusted, on the one hand, the space required by the drying box 10 is relatively small (i.e., the overall space of the drying box 10 can be reduced), and on the other hand, the space of the drying box 10 is utilized as much as possible (i.e., the drying occupancy rate is increased and the drying heat is increased).

[0029] It should be noted that: Figure 2 As shown, the flower basket 2 serves as a carrier for the silicon wafers 11. When drying the silicon wafers 11, the silicon wafers 11 are placed on the flower basket 2 and then dried, rather than stacking multiple silicon wafers 11 for drying.

[0030] This embodiment further includes a push plate 7, which includes a supporting portion 701 and a pushing portion 702. The supporting portion 701 is connected to the driving end of the first cylinder 6, and the pushing portion 702 is connected to the supporting portion 701. The supporting portion 701 and the pushing portion 702 are perpendicular to each other. Thus, the supporting portion 701 is used to support the flower basket 2 to be dried, and the pushing portion 702 is used to push the flower basket 2 to move.

[0031] In this embodiment, the conveyor track 1 includes two conveyor sections 101. One end of the flower basket 2 is located on one conveyor section 101, and the other end of the flower basket 2 is located on the other conveyor section 101. The first cylinder 6 and push plate 7 are located between the two conveyor sections 101, and the first cylinder 6 and support section 701 are located below the flower basket 2. Thus, the flower basket 2 is mounted on each of the conveyor sections 101 at both ends and transported by the conveyor sections 101.

[0032] Specifically, there are two groups of conveying tracks 1, so that four groups of silicon wafers 11 can be dried at the same time. Two groups of silicon wafers 11 are conveyed to the drying box 10 for drying through one conveying track 1, and the other two groups are conveyed to the drying box 10 for drying through another conveying track 1.

[0033] This embodiment also includes guide bars 8 mounted on the conveying portion 101, located on the side of the conveying portion 101 away from the flower basket 2. The number of guide bars 8 is equal to the number of conveying portions 101. This allows for the installation of the first cylinder 6 and push plate 7 in the middle, ensuring that the conveying and movement of the flower basket 2 do not interfere with each other and reducing the installation space of the entire push device.

[0034] It should be noted that the conveying of the flower basket 2 means that the flower basket 2 moves along with the movement of the conveying track 1 (i.e., the flower basket 2 and the conveying track 1 are relatively stationary), and the movement of the flower basket 2 means that the conveying track 1 is not working and the first cylinder 6 pushes the flower basket 2 to move (i.e., the flower basket 2 and the conveying track 1 move relative to each other).

[0035] In this embodiment, a mounting seat 601 is provided at the bottom of the first cylinder 6 .

[0036] In this embodiment, the device further includes: a support 9 , a conveying portion 101 , a first photoelectric sensor 3 , a second photoelectric sensor 4 , a third photoelectric sensor 5 , a mounting base 601 and a drying box 10 , all of which are connected to the support 9 .

[0037] It should be noted that: 1. The conveyor track 1 runs through the drying box 10. A first door 12 is provided on the side of the drying box 10 close to the first cylinder 6 (the first door 12 is the door through which the flower basket 2 enters the drying box 10. The first door 12 is connected to the drying box 10 via a second cylinder 13, and the first door 12 can be opened and closed by the second cylinder 13). A second door is provided on the side of the drying box 10 away from the first cylinder 6 (the second door (not shown in the figure) is the door through which the flower basket 2 leaves the drying box 10. The second door is connected to the drying box 10 via a third cylinder 14, and the second door can be opened and closed by the third cylinder 14).

[0038] 2. A fourth photoelectric sensor 15 is further provided between the third photoelectric sensor 5 and the first door 12. The fourth photoelectric sensor 15 is used to detect whether a flower basket 2 is placed at a position relative to the conveyor track 1, and uses the placement of a flower basket 2 at that position as an opening or closing signal for the first door 12.

[0039] 3. The conveying track 1, the first light spot sensor, the second photoelectric sensor 4, the first cylinder 6, the second cylinder 13, the third cylinder 14 and the fourth photoelectric sensor 15 are all connected to the controller 16, which can control the progress of the flower basket 2 drying operation.

[0040] The drying process of the silicon wafers 11 of the present invention is as follows: first, two baskets 2 with silicon wafers 11 (taking one conveyor track 1 as an example) are grabbed by a robot and placed on the conveyor track 1 (one is placed relative to the first photoelectric sensor 3, and the other is placed relative to the third photoelectric sensor 5);

[0041] Next, the first air cylinder 6 is activated (at this time, the conveyor track 1 is not in operation), moving the flower basket 2, which is located opposite the first photoelectric sensor 3, to the position opposite the second photoelectric sensor 4. (The distance pushed by the first air cylinder 6 each time is a preset value, i.e., the flower basket 2 can be moved from the position opposite the first photoelectric sensor 3 to the position opposite the second photoelectric sensor 4 each time).

[0042] Then, the conveying track 1 is started (at this time, the first cylinder 6 is not working), and the flower basket 2 is conveyed by the conveying track 1 to move to one side of the drying box 10;

[0043] Next, when the third photoelectric sensor 5 senses the flower basket 2, the second cylinder 13 controls the first door 12 to open, allowing the flower basket 2 to enter the drying box 10. When the flower basket 2 is completely inside the drying box 10, the first door 12 is closed.

[0044] Then, the flower basket 2 is dried in the drying box 10 (at this time, the conveying track 1 is not working, and the flower basket 2 is placed still in the drying box 10);

[0045] Finally, after the silicon wafers 11 are dried, the second door is opened by the third cylinder 14 and the conveying track 1 is started to convey the dried flower baskets 2 out of the drying box 10 .

[0046] It should be noted that the first door 12 and the second door need to be opened and closed synchronously to ensure that the first door 12 and the second door do not interfere with the conveying operation of the conveying track 1.

[0047] To sum up, when the flower basket 2 to be dried is placed on the conveying track 1, the first cylinder 6 is started, which can push the flower basket 2 close to the first cylinder 6 to move toward the flower basket 2 away from the first cylinder 6. In this way, the distance between the two flower baskets 2 can be shortened, and the overall space of the drying box 10 can be reduced. At the same time, the occupancy rate of the drying is improved and the drying heat is increased.

[0048] The above description is based on the ideal embodiment of the present invention. Based on the above description, relevant personnel can make various changes and modifications without departing from the technical scope of this utility model. The technical scope of this utility model is not limited to the content of the specification and must be determined according to the scope of the claims.

Claims

1. A pushing device based on silicon wafer drying, characterized in that: include: A conveying track (1), wherein the conveying track (1) is used to convey the flower basket (2); a first photoelectric sensor (3), a second photoelectric sensor (4), and a third photoelectric sensor (5); the first photoelectric sensor (3), the second photoelectric sensor (4), and the third photoelectric sensor (5) are all located on one side of the conveying track (1) and are sequentially distributed along the conveying direction of the flower basket (2); the first photoelectric sensor (3), the second photoelectric sensor (4), and the third photoelectric sensor (5) are all used to detect whether the flower basket (2) is placed at a relative position of the conveying track (1); A first cylinder (6) is used to push the flower basket (2) to move along a conveying direction.

2. The pushing device based on silicon wafer drying according to claim 1, characterized in that: Also includes: A push plate (7) is mounted on the driving end of the first cylinder (6).

3. The pushing device based on silicon wafer drying according to claim 2, characterized in that: The push plate (7) comprises: A supporting portion (701) and a pushing portion (702), wherein the supporting portion (701) is connected to the driving end of the first cylinder (6), and the pushing portion (702) is connected to the supporting portion (701); Wherein: the supporting portion (701) and the pushing portion (702) are perpendicular to each other.

4. The pushing device based on silicon wafer drying according to claim 3, characterized in that: The conveying track (1) comprises: There are two conveying parts (101), one end of the flower basket (2) is located on one of the conveying parts (101), and the other end of the flower basket (2) is located on the other of the conveying parts (101).

5. The pushing device based on silicon wafer drying according to claim 4, characterized in that: The first cylinder (6) and the push plate (7) are both located between the two conveying parts (101), and the first cylinder (6) and the supporting part (701) are located below the flower basket (2).

6. The pushing device based on silicon wafer drying according to claim 5, characterized in that: Also includes: A guide bar (8), the guide bar (8) being mounted on the conveying portion (101), and the guide bar (8) being located on a side of the conveying portion (101) away from the flower basket (2); Wherein: the number of the guide bars (8) is equal to the number of the conveying parts (101).

7. The pushing device based on silicon wafer drying according to claim 6, characterized in that: A mounting seat (601) is provided at the bottom of the first cylinder (6).

8. The pushing device based on silicon wafer drying according to claim 7, characterized in that: Also includes: The support (9), the conveying portion (101), the first photoelectric sensor (3), the second photoelectric sensor (4), the third photoelectric sensor (5) and the mounting seat (601) are all connected to the support (9).

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