Large rectangular gate valve sealing structure for vacuum coating

Abstract

The utility model belongs to the technical field of vacuum coating sealing, and particularly provides a large rectangular gate valve sealing structure for vacuum coating, which comprises a valve body, a main shaft is arranged in the valve body, a plurality of valve plate connecting pieces I are arranged on the main shaft, a valve plate connecting piece II is arranged on the side surface of each group of valve plate connecting pieces I, and a plurality of valve plate connecting pieces II are arranged on the valve plate connecting pieces II. The valve plate connecting piece II is connected with the valve plate; a preset opening matched with the valve plate is formed in one side of the valve body, the main shaft drives the valve plate to rotate in the rotating process to achieve opening and closing of the gate valve, and the technical problem that in the background technology, an existing gate valve is connected through a compressed spring, and after continuous high-vacuum coating equipment is used for a long time, the service life of the compressed spring is shortened is solved.

Description

Technical Field

[0001] The utility model mainly relates to the technical field of vacuum coating sealing, in particular to a large rectangular gate valve sealing structure for vacuum coating. Background Art

[0002] Continuous high vacuum coating is the uninterrupted and continuous coating of a type of large-sized substrate. That is, the substrate is placed in the upper half of the vacuum chamber, and the coating material is placed in the lower half of the vacuum chamber. The substrate moves in the vacuum coating chamber, and the film material flies from bottom to top to deposit a thin film on the lower surface of the substrate. The advantage of this is that the lower surface of the substrate can be kept clean and no dust or other impurities fall on it. The vacuum coating equipment requires a vacuum chamber, and various parts are installed inside the vacuum chamber to work in a high vacuum environment.

[0003] The gate valve required by the existing vacuum chamber, such as the gate valve for a vacuum plating chamber disclosed in Patent No. CN201120452241.1, includes a gate valve plate, which is fixed on a gate valve pressure seat composed of a compression spring and a pressure plate; the gate valve pressure seat is fixedly mounted on a main shaft, which is connected to a cylinder fork driven by a cylinder through a coupling.

[0004] However, when implementing the above technical solution, the inventors found that since the gate valve is connected by a compression spring, the service life of the compression spring will be shortened after long-term use of continuous high vacuum coating equipment. On this basis, and in order to meet the diversified development of the market, a large rectangular gate valve sealing structure for vacuum coating was proposed. Utility Model Content

[0005] 1. Technical problems to be solved by the utility model:

[0006] The utility model provides a large rectangular gate valve sealing structure for vacuum coating, which is used to solve the technical problems existing in the above-mentioned background technology.

[0007] 2. Technical solution:

[0008] In order to achieve the above purpose, the technical solution of the utility model is:

[0009] A large rectangular gate valve sealing structure for vacuum coating, comprising a valve body, a main shaft provided in the valve body, a plurality of valve plate connectors 1 provided on the main shaft, a valve plate connector 2 provided on the side of each group of valve plate connectors 1, and the valve plate connectors 2 connected to the valve plate;

[0010] One side of the valve body is provided with a preset opening matched with the valve plate, and the rotation of the main shaft drives the valve plate to rotate to realize the opening and closing of the gate valve.

[0011] A further improvement is that it also includes a guide shaft that passes through the multiple valve plate connecting members 1 and the multiple valve plate connecting members 2.

[0012] A further improvement is that it also includes a transmission component that drives the main shaft to rotate, the transmission component includes a cylinder arranged on one side of the valve body, the output end of the cylinder is connected to the rocker, and the other end of the rocker is provided with a magnetic fluid, and the magnetic fluid transmission is connected to the main shaft.

[0013] A further improvement is that it also includes a cylinder mounting seat arranged on one side of the valve body for supporting the cylinder.

[0014] A further improvement is that the main shaft end bearing is arranged in the valve body.

[0015] A further improvement is that an observation window is provided on the valve body corresponding to the preset port.

[0016] A further improvement is that an anti-wear gasket is provided between the first valve plate connector and the second valve plate connector.

[0017] A further improvement is that it also includes a valve cover adapted to the valve body, and the valve cover is connected to the valve body via a fastener.

[0018] A further improvement is that the valve plate connector 1 includes an arcuate end connected to the main shaft, the arcuate end is connected to the main shaft through a fastener 2, and the other end of the valve plate connector 1 is connected to the valve plate through a fastener 3.

[0019] 3.Beneficial effects:

[0020] Compared with the prior art, the technical solution provided by this utility model has the following beneficial effects:

[0021] The gate valve sealing structure provided by the utility model adopts multiple valve plate connecting parts 1 and 2 to connect with the valve plate, so that the main shaft rotates and drives the valve plate to rotate more stably, and has a longer service life;

[0022] The large rectangular gate valve sealing structure provided by the utility model can realize the continuous feeding of large-size substrates while ensuring that the vacuum conditions of all chambers are not destroyed. It can also realize the connection between chambers, effectively ensuring the continuity and rhythm of coating. The gate valve is opened when the substrate needs to be fed, and the gate valve is closed after the substrate is fed, so as to achieve continuous coating without destroying the vacuum conditions of the chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a schematic diagram of the overall structure of the utility model;

[0024] Figure 2 This is a schematic diagram of the valve body structure of the utility model;

[0025] Figure 3 This is a schematic diagram of the connection between the transmission assembly and the main shaft of the utility model;

[0026] Figure 4 For this utility model Figure 3 Schematic diagram of the enlarged structure of part A in the middle.

[0027] Reference numerals:

[0028] 1-valve body; 2-main shaft; 3-valve plate connector 1; 4-valve plate connector 2; 5-valve plate; 6-preset port; 7-guide shaft; 8-transmission assembly; 81-cylinder; 82-rocker; 83-magnetic fluid; 84-cylinder mounting seat; 9-observation window; 10-anti-wear gasket; 11-valve cover; 12-fastener 1; 13-fastener 2; 14-fastener 3. DETAILED DESCRIPTION

[0029] To facilitate understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings. Several embodiments of the present invention are given in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0030] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connected," "fixed," "provided with," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integral connection; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; or internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0031] It should be noted that the structures not introduced in the present invention do not involve the design points and improvement directions of the present invention, and all adopt the existing technology. At the same time, the content of the above background technology belongs to the technical cognition scope of the utility model author. Since the technical content in this field is vast and too complicated, the above content of this application does not necessarily constitute the existing technology.

[0032] Reference Figure 1-4 A large rectangular gate valve sealing structure for vacuum coating includes a valve body 1, a main shaft 2 is provided in the valve body 1, a plurality of valve plate connectors 3 are provided on the main shaft 2, and a valve plate connector 2 4 is provided on the side of each group of valve plate connectors 3, and the valve plate connectors 2 4 are connected to the valve plate 5. Specifically, the valve plate connectors 2 4 are connected to the valve plate 5 by screws;

[0033] One side of the valve body 1 is provided with a preset opening 6 matched with the valve plate 5. The rotation of the main shaft 2 drives the valve plate 5 to rotate to realize the opening and closing of the gate valve.

[0034] The gate valve sealing structure provided by the above technical solution uses multiple valve plate connectors 1 3 and valve plate connectors 2 4 to connect with the valve plate 5, so that the rotation of the main shaft 2 drives the valve plate 5 to rotate more stably and has a longer service life;

[0035] The vacuum chamber sampling chamber and the process chamber are connected by a rectangular gate valve. When the film needs to be fed in, the rectangular gate valve is closed, and the sampling chamber door is opened to put the substrate in. Since continuous coating is required, the sampling chamber needs to continuously put substrates in. The rectangular gate valve connection can keep the vacuum environment of the process chamber from being destroyed to complete the film feeding, thereby maintaining the beat.

[0036] Taking into account the support stability of the valve plate 5 during rotation, this embodiment provides a preferred technical solution, which also includes a guide shaft 7 that passes through multiple valve plate connectors 1 3 and multiple valve plate connectors 2 4.

[0037] Taking into account the specific implementation method of the transmission component 8 driving the main shaft, this embodiment also includes a transmission component 8 that drives the main shaft 2 to rotate, and the transmission component 8 includes a cylinder 81 arranged on one side of the valve body 1, and the output end of the cylinder 81 is connected to the rocker 82. The other end of the rocker 82 is provided with a magnetic fluid 83, and the magnetic fluid 83 is connected to the main shaft 2 through a coupling.

[0038] Taking into account the stability of the cylinder 81 during transmission, this embodiment provides a preferred technical solution, which also includes a cylinder mounting seat 84 provided on one side of the valve body 1 for supporting the cylinder 81.

[0039] Taking into account the stability of the main shaft 2 during rotation, this embodiment provides a preferred technical solution, in which the bearing at the other end of the main shaft 2 is disposed in the valve body 1 .

[0040] In order to clearly see the rotation of the internal components of the valve body 1 , this embodiment provides a preferred technical solution, in which an observation window 9 is provided on the valve body 1 corresponding to the preset port 6 .

[0041] Considering the connection stability between the valve plate connector 1 3 and the valve plate connector 2 4 , an anti-wear gasket 10 is provided between the valve plate connector 1 3 and the valve plate connector 2 4 .

[0042] Taking into account that the valve cover 11 can be easily opened when maintenance is required, which facilitates the maintenance and repair of internal parts, this embodiment provides a preferred technical solution, which also includes a valve cover 11 adapted to be arranged with the valve body 1, and the valve cover 11 is connected to the valve body 1 through a fastener 12 (such as a screw).

[0043] Taking into account the connection stability between the main shaft 2 and the valve plate connector 3, this embodiment provides a preferred technical solution, wherein the valve plate connector 3 includes an arcuate end 31 connected to the main shaft 2, and the arcuate end 31 is connected to the main shaft 2 through a fastener 2 13 (such as a screw), and the other end of the valve plate connector 3 is connected to the valve plate 5 through a fastener 3 14 (such as a bolt).

[0044] The above-mentioned embodiments only express a certain implementation method of the utility model, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the utility model, which all fall within the scope of protection of the utility model. Therefore, the scope of protection of the utility model patent shall be based on the attached claims.

Claims

1. A large rectangular gate valve sealing structure for vacuum coating, characterized by: The valve body (1) comprises a main shaft (2) provided in the valve body (1), a plurality of valve plate connecting members (3) provided on the main shaft (2), a valve plate connecting member (4) provided on the side of each group of the valve plate connecting members (3), and the valve plate connecting member (4) is connected to the valve plate (5); One side of the valve body (1) is provided with a preset opening (6) matched with the valve plate (5), and the rotation of the main shaft (2) drives the valve plate (5) to rotate to realize the opening and closing of the gate valve.

2. The large rectangular gate valve sealing structure for vacuum coating according to claim 1, characterized in that: It also includes a guide shaft (7) that passes through the plurality of valve plate connecting members 1 (3) and the plurality of valve plate connecting members 2 (4).

3. The large rectangular gate valve sealing structure for vacuum coating according to claim 1, characterized in that: The valve body (1) further comprises a transmission assembly (8) for driving the main shaft (2) to rotate, wherein the transmission assembly (8) comprises a cylinder (81) arranged on one side of the valve body (1), wherein the output end of the cylinder (81) is connected to a rocker (82), and the other end of the rocker (82) is provided with a magnetic fluid (83), and the magnetic fluid (83) is transmission-connected to the main shaft (2).

4. The large rectangular gate valve sealing structure for vacuum coating according to claim 3, characterized in that: It also includes a cylinder mounting seat (84) arranged on one side of the valve body (1) for supporting the cylinder (81).

5. The large rectangular gate valve sealing structure for vacuum coating according to claim 1, characterized in that: The end bearing of the main shaft (2) is arranged in the valve body (1).

6. The large rectangular gate valve sealing structure for vacuum coating according to claim 1, characterized in that: An observation window (9) is provided on the valve body (1) corresponding to the preset port (6).

7. The large rectangular gate valve sealing structure for vacuum coating according to claim 1, characterized in that: An anti-wear gasket (10) is provided between the valve plate connecting member 1 (3) and the valve plate connecting member 2 (4).

8. The large rectangular gate valve sealing structure for vacuum coating according to claim 1, characterized in that: It also includes a valve cover (11) adapted to be arranged with the valve body (1), and the valve cover (11) is connected to the valve body (1) via a fastener (12).

9. The large rectangular gate valve sealing structure for vacuum coating according to claim 1, characterized in that: The valve plate connecting member 1 (3) includes an arcuate end (31) connected to the main shaft (2), and the arcuate end (31) is connected to the main shaft (2) via a fastener 2 (13). The other end of the valve plate connecting member 1 (3) is connected to the valve plate (5) via a fastener 3 (14).

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