Anti-loosening device of pipe joint and process equipment of semiconductor device

Abstract

The utility model discloses an anti-loosening device of a pipe joint and process equipment of a semiconductor device. The anti-loosening device of the pipe joint comprises a first buckle and a second buckle, the first buckle is movably fixed to a first pipeline through a first screw assembly, and the first end of the first buckle clamps the pipe joint of the first pipeline so as to fix the pipe joint of the first pipeline; the second buckle is located on the outer side of the first buckle, a strip-shaped groove hole is formed in the second buckle, the second screw penetrates through the strip-shaped groove hole so that the second buckle can be movably fixed to the first buckle through the strip-shaped groove hole, and the first end of the second buckle clamps the pipe joint of the second pipeline so as to fix the pipe joint of the second pipeline. According to the anti-loosening device, reliable connection of the pipe joint in an unstable working environment can be kept, assembly is rapid and convenient, the pipe joint does not need to be matched with the fixing buckle, and in the pipe joint maintenance process, the fixing buckle can be prevented from falling off or being lost.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to an anti-loosening device for a pipe joint and process equipment for semiconductor devices. Background Art

[0002] Semiconductor device processing equipment is equipped with numerous pipes, depending on process requirements. These pipes carry various gases and liquids, depending on their purpose. They are an integral part of the thin film deposition process, many of which are flammable, explosive, highly toxic, or corrosive. Leaks can cause serious safety hazards. The vast majority of these pipes are connected via threaded connections, including but not limited to compression fittings and flared fittings. The primary working mechanism is that the tightening of the threads compresses the tapered ferrule or the flared pipe opening, causing deformation between the fitting and the tapered ferrule, thus achieving a seal.

[0003] Relying solely on the self-locking of the thread to ensure the reliability of the pipe joint connection is acceptable in a stable working environment. However, in actual use, due to the movement and vibration of the moving parts of the machine, as well as the alternating changes in temperature, the threaded connections of these pipe joints in an unstable operating environment are very likely to loosen or even fall off, causing extrusion deformation failure, leading to dangers such as gas and liquid leakage. Although the existing technology uses fixed clips to fix pipe joints, the pipe joints are required to adapt to the shape and specifications of the fixed clips, which limits their versatility and increases the difficulty of installing the pipe joints. In addition, during the maintenance of the pipe joints, the fixed clips are likely to hinder the maintenance work of the pipe joints, and if the fixed clips are removed, the removed fixed clips are very likely to fall or be lost.

[0004] In order to solve the above-mentioned problems existing in the prior art, there is an urgent need in this field for a pipe joint anti-loosening technology, which can not only maintain the reliable connection of the pipe joint in an unstable working environment, but also be assembled quickly and conveniently without the need to adapt the fixing clip through the pipe joint. In addition, during the maintenance process of the pipe joint, it will not be hindered by the fixing clip, and the fixing clip can also be prevented from falling or being lost. Utility Model Content

[0005] The following is a brief summary of one or more aspects to provide a basic understanding of these aspects. This summary is not an exhaustive overview of all conceivable aspects and is neither intended to identify key or critical elements of all aspects nor to define the scope of any or all aspects. Its sole purpose is to present some concepts of one or more aspects in a simplified form as a prelude to the more detailed description that will be provided later.

[0006] In order to overcome the above-mentioned defects of the prior art, the utility model provides an anti-loosening device for a pipe joint and a process equipment for a semiconductor device, which can not only maintain the reliable connection of the pipe joint in an unstable working environment, but also assemble quickly and conveniently without the need to adapt the fixing clip through the pipe joint. In addition, during the maintenance process of the pipe joint, not only will it not be hindered by the fixing clip, but it can also prevent the fixing clip from falling or being lost.

[0007] Specifically, the anti-loosening device of the above-mentioned pipe joint provided according to the first aspect of the present utility model includes: a first clip, which is movably fixed to the first pipe through a first screw assembly, wherein the first end of the first clip clamps the pipe joint of the first pipe to fix the pipe joint of the first pipe; and a second clip, located on the outside of the first clip, the second clip includes a strip slot, and a second screw passes through the strip slot so that the second clip is movably fixed to the first clip via the strip slot, wherein the first end of the second clip clamps the pipe joint of the second pipe to fix the pipe joint of the second pipe.

[0008] Furthermore, in some embodiments of the present invention, a transverse strip slot is provided on the surface of the second end of the second buckle, and a second screw hole is provided on the surface of the second end of the first buckle located on the inner side of the second buckle, the second screw passes through the transverse strip slot and is screwed into the second screw hole to fix the second buckle on the first buckle, and the second screw and the second screw hole are loosened to allow the second buckle to be laterally displaced relative to the first buckle in the transverse strip slot.

[0009] Furthermore, in some embodiments of the present invention, the second clip is rotated and displaced so that its first end is in contact with the pipe joint of the second pipe, and the second screw passes through the arc-shaped strip slot and is screwed into the second screw hole to fix the second clip on the first clip, and the first end of the second clip clamps the pipe joint of the second pipe.

[0010] Furthermore, in some embodiments of the present invention, the first screw assembly includes a first screw and a clamp, the first clamp is fitted to one side of the first pipe, and two first screw holes are provided at both ends of the side wall of the first clamp, the first screw passes through the clamp and is screwed into the two first screw holes to make the clamp fit the other side of the first pipe, the first clamp is fixed to the first pipe via the clamp, and the first screw and the first screw hole are loosened to make the first clamp move longitudinally relative to the first pipe.

[0011] Furthermore, in some embodiments of the present invention, the first clip is longitudinally displaced to the point where its first end fits the pipe joint of the first pipe, the first screw passes through the clip and is screwed into the two first screw holes to make the clip fit the other side of the first pipe, the first clip is fixed to the pipe joint of the first pipe via the clip, and the first end of the first clip clamps the pipe joint of the first pipe.

[0012] Furthermore, in some embodiments of the present invention, the first side of the second buckle and the first side of the first buckle are both open groove structures, so that the first buckle can be embedded in the second buckle and the first pipe can be embedded in the first buckle, respectively.

[0013] In addition, the process equipment for the above-mentioned semiconductor device provided according to the second aspect of the present invention includes: a process chamber, the interior of which is used to carry out the processing technology of the semiconductor device; a plurality of pipelines connecting the process chamber to provide process gas into the process chamber; and the anti-loosening device of the above-mentioned pipe joint provided by the first aspect of the present invention, which is arranged at the position of the pipe joints of the plurality of pipelines, and is used to fix each of the pipe joints, and to remove the anti-loosening device of the pipe joint when maintenance work is performed on each of the pipe joints. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The above features and advantages of the present invention can be better understood after reading the detailed description of the embodiments of the present disclosure in conjunction with the following drawings. In the drawings, the components are not necessarily drawn to scale, and components with similar related properties or characteristics may have the same or similar reference numerals.

[0015] Figure 1 An exploded view of an anti-loosening device for a pipe joint provided according to some embodiments of the present utility model is shown;

[0016] Figure 2 A schematic structural diagram of an anti-loosening device for a pipe joint provided according to some embodiments of the present utility model is shown;

[0017] Figure 3 A flow chart showing an assembly method of an anti-loosening device for a pipe joint provided in accordance with some embodiments of the present invention; and

[0018] Figure 4 A flow chart of a pipe joint maintenance method provided according to some embodiments of the present utility model is shown.

[0019] Reference numerals:

[0020] 100 Anti-loosening device of pipe joint;

[0021] 110 first buckle;

[0022] 111 first end of the first buckle;

[0023] 112 second end of the first buckle;

[0024] 120 second buckle;

[0025] 121 a first end of a second buckle;

[0026] 122 second end of the second buckle;

[0027] 123 bar slots;

[0028] 130 first screw assembly;

[0029] 131 first screw;

[0030] 132 Hug Card;

[0031] 133 first screw hole;

[0032] 140 second screw;

[0033] 141 second screw hole;

[0034] 210 First Pipeline;

[0035] 211 a pipe joint of the first pipeline;

[0036] 220 Second Pipeline;

[0037] 221 pipe joint of the second pipeline;

[0038] Steps S310 to S330; and

[0039] Steps S410 to S430. DETAILED DESCRIPTION

[0040] The following specific embodiments illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and functions of the present invention from the contents disclosed in this specification. Although the description of the present invention will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this utility model are limited to this implementation. On the contrary, the purpose of introducing the utility model in conjunction with the implementation is to cover other options or modifications that may be extended based on the claims of the present invention. In order to provide an in-depth understanding of the present invention, the following description will contain many specific details. The present invention can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present invention, some specific details will be omitted in the description.

[0041] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0042] Furthermore, the terms "upper," "lower," "left," "right," "top," "bottom," "horizontal," and "vertical" used in the following description should be understood to refer to the orientations depicted in that section and the accompanying drawings. These relative terms are used solely for convenience of description and do not necessarily imply that the devices described herein must be manufactured or operated in a specific orientation. Therefore, they should not be construed as limiting the present invention.

[0043] It is understood that although the terms "first," "second," "third," etc. may be used herein to describe various components, regions, layers, and / or portions, these components, regions, layers, and / or portions should not be limited by these terms, and these terms are merely used to distinguish different components, regions, layers, and / or portions. Thus, a first component, region, layer, and / or portion discussed below may be referred to as a second component, region, layer, and / or portion without departing from some embodiments of the present invention.

[0044] As mentioned above, relying solely on the self-locking of the thread to ensure the reliability of the pipe joint connection is acceptable in a stable working environment. However, in actual use, due to the movement and vibration of the moving parts of the machine, as well as the alternating changes in temperature, the threaded connections of these pipe joints in an unstable operating environment are very likely to loosen or even fall off, causing extrusion deformation failure, leading to dangers such as gas and liquid leakage. Although the existing technology uses fixed clips to fix pipe joints, the pipe joints are required to adapt to the shape and specifications of the fixed clips, which limits their versatility and increases the difficulty of installing the pipe joints due to the assembly. In addition, during the maintenance of the pipe joints, the fixed clips are likely to hinder the maintenance work of the pipe joints, and if the fixed clips are removed, the removed fixed clips are very likely to fall or be lost.

[0045] In order to solve the above-mentioned problems existing in the prior art, the utility model provides an anti-loosening device for a pipe joint and a process equipment for a semiconductor device, which can not only maintain the reliable connection of the pipe joint in an unstable working environment, but also assemble quickly and conveniently without the need to adapt the fixing clip through the pipe joint. In addition, during the maintenance process of the pipe joint, not only will it not be hindered by the fixing clip, but it can also prevent the fixing clip from falling or being lost.

[0046] In some non-limiting embodiments, the anti-loosening device of the pipe joint provided in the first aspect of the present invention can be configured in the process equipment of the semiconductor device provided in the second aspect of the present invention.

[0047] The following describes the operating principle of the aforementioned anti-loosening device for a pipe joint, using examples of certain semiconductor device processing equipment. Those skilled in the art will appreciate that these examples of semiconductor device processing equipment are merely non-limiting implementations of the present invention, intended to clearly demonstrate the main concepts of the present invention and provide specific solutions that facilitate public implementation. They are not intended to limit the full operating mode or functionality of the anti-loosening device for the pipe joint. Similarly, the anti-loosening device for the pipe joint is merely a non-limiting implementation of the present invention and does not constitute a limitation on the configuration of the device in these semiconductor device processing equipment.

[0048] Please see Figure 1 , Figure 1 An exploded view of an anti-loosening device for a pipe joint provided according to some embodiments of the present utility model is shown.

[0049] like Figure 1 As shown, in some embodiments of the present invention, the anti-loosening device 100 of the pipe joint may include a first buckle 110 and a second buckle 120. The first buckle 110 may be movably fixed to the first pipe 210 by a first screw assembly 130. When the first end 111 (the lower end) of the first buckle clamps the pipe joint 211 of the first pipe, it can be used to fix the pipe joint 211 of the first pipe. The second buckle 120 may be located on the outside of the first buckle 110, and the second buckle 120 may include a strip slot 123. The second screw 140 may pass through the strip slot 123 to movably fix the second buckle 120 to the first buckle 110 via the strip slot 123. When the first end 121 of the second buckle clamps the pipe joint 221 of the second pipe, it can be used to fix the pipe joint 221 of the second pipe.

[0050] Furthermore, please combine Figure 2 See together, Figure 2 A schematic structural diagram of an anti-loosening device for a pipe joint provided according to some embodiments of the present utility model is shown.

[0051] like Figure 1 and Figure 2As shown, the first screw assembly 130 may include a first screw 131 and a clamp 132. The first clamp 110 may fit one side of the first pipe 210, and two first screw holes 133 may be provided at both ends of the side wall of the first clamp 110. The first screw 131 passes through the clamp 132 and is screwed into the first screw hole 133 so that the clamp 132 can fit the other side of the first pipe 210, that is, the clamp 132 is connected to the first screw hole 113 on the side wall of the first clamp 110. The first clamp 110 can be fixed to the first pipe 210 via the clamp 132. Loosening the first screw 131 and the first screw hole 133 can cause the first clamp 110 to move longitudinally relative to the first pipe 210, thereby enabling the first clamp 110 to slide along the first pipe 210.

[0052] Furthermore, if Figure 2 As shown, when the first clip 110 is longitudinally displaced until its first end abuts against the pipe joint 211 of the first pipe, the first screw 131 can be passed through the clamp 132 and screwed into the two first screw holes 133, so that the clamp 132 abuts against the other side of the first pipe 210. The first clip 110 is fixed to the pipe joint 211 of the first pipe via the clamp 132, and the first end 111 of the first clip clamps the pipe joint 211 of the first pipe.

[0053] Continue to combine Figure 1 and Figure 2 Furthermore, a transverse strip slot 123 may be provided on the surface of the second end 122 (such as the upper end) of the second clip, and a second screw hole 141 may be provided on the surface of the second end 112 (such as the upper end) of the first clip located inside the second clip 120. The second screw 140 can pass through the transverse strip slot 123 and be screwed into the second screw hole 141 to fix the second clip 120 on the first clip 110. Loosening the second screw 140 and the second screw hole 141 can cause the second clip 120 to be laterally displaced relative to the first clip 110 in the transverse strip slot 123. Furthermore, the second clip 120 can be disengaged from the first pipe 210 and the second pipe 220 by completely unscrewing the second screw 140. This side-to-side disassembly method will not damage or affect other pipe structures.

[0054] Preferably, the transverse strip slot 123 can be an arc-shaped strip slot. Loosening the second screw 140 and the second screw hole 141 can rotate the second buckle 120 relative to the first buckle 110 in the arc-shaped strip slot 123, thereby adjusting the orientation of the second buckle 120.

[0055] In the above embodiment, through the strip-shaped slot 123 structure located at the second end 122 (such as the upper end) of the second clip, after the pipe joint 211 of the first pipe and the pipe joint 221 of the second pipe are completed, the relative position between the first clip 110 and the second clip 120 can be adjusted according to the relative position of the two pipe joints after tightening, that is, the locking positions of the first clip 110 and the second clip 120 can be adjusted, and no special alignment part is required. It has strong applicability and does not require changing the existing pipeline joint structure. It is suitable for standard outsourced joint pipe fittings and has strong versatility. There is no need for a pipe joint to adapt to the shape and specification size of the fixed clip as in the prior art.

[0056] Optionally, continue combining Figure 1 and Figure 2 The first side of the second clip 120 and the first side of the first clip 110 can both be open groove structures, so that the first clip 110 can be embedded in the second clip 120, and the first pipe 210 can be embedded in the first clip 110, thereby reducing the volume of the pipe joint anti-loosening device 100. In addition, the single-sided open-type clamping structure of the pipe joint anti-loosening device 100 is suitable for post-installation assembly without damaging the pipe and pipe joint. It can reliably prevent the pipe joint from loosening without pre-installation, is applicable to existing pipe joints and newly installed pipes, and does not increase the difficulty of joint installation.

[0057] To further illustrate the working principle of the anti-loosening device 100 of the pipe joint, please refer to Figure 3 , Figure 3 The flowchart shows a method for assembling an anti-loosening device for a pipe joint according to some embodiments of the present utility model.

[0058] like Figure 3 As shown, the assembly method of the anti-loosening device of the pipe joint may include step S310: butting the pipe joints of the first pipe and the second pipe.

[0059] Specifically, please combine Figure 1 and Figure 2 It is commonly understood that the pipe joint 211 of the first pipe and the pipe joint 221 of the second pipe can be connected by screwing or other methods.

[0060] like Figure 3 As shown, the assembly method of the anti-loosening device of the above-mentioned pipe joint provided by the utility model can also include step S320: in response to completing the pipe joint docking, based on adjusting the relative positions of the pipe joints of the first pipe and the second pipe, adjusting the relative positions of the first buckle and the second buckle in the anti-loosening device of the pipe joint.

[0061] Continue to combine Figure 1 and Figure 2As shown, after the first pipe joint 211 and the second pipe joint 221 are docked, the pipe joint anti-loosening device 100 is installed. The single-side open clamping structure of the pipe joint anti-loosening device 100 can be used for post-installation assembly without damaging the pipes and pipe joints. It can reliably prevent the pipe joints from loosening without requiring pre-installation, is applicable to existing pipe joints and newly installed pipes, and does not increase the difficulty of joint installation.

[0062] According to the relative positions of the two pipe joints, the first screw 131 located on the side wall of the first clip 110 can be loosened but not completely unscrewed, so that the first clip 110 can be longitudinally displaced relative to the first pipe 210, that is, the first clip 110 can slide along the first pipe 210.

[0063] In addition, optionally, the second screw 140 located at the second end 112 (such as the upper end) of the first buckle can be loosened but not completely unscrewed so that the second buckle 120 located outside the first buckle 110 can be laterally displaced relative to the first buckle 110 in the strip slot 123.

[0064] Furthermore, in some preferred embodiments, the strip-shaped slot 123 located at the second end 122 (such as the upper end) of the second clip can be arc-shaped, and the second end 112 (such as the upper end) of the first clip located inside the second clip 120 can be provided with a second screw hole 141, and the second screw 140 can pass through the arc-shaped strip-shaped slot 123 and be screwed into the second screw hole 141 to fix the second clip 120 to the first clip 110. On this basis, by loosening but not completely unscrewing the second screw 140 located at the second end 112 of the first clip, the second clip 120 located outside the first clip 110 can be rotated relative to the first clip 110 within the arc-shaped strip-shaped slot 123, that is, the second clip 120 can slide in an arc shape along the arc-shaped strip-shaped slot 123.

[0065] Continue back Figure 3 The assembly method of the anti-loosening device of the above-mentioned pipe joint provided by the utility model may also include step S330: in response to completing the adjustment of the relative positions of the first buckle and the second buckle, respectively fixing the first buckle to the first pipe and fixing the second buckle to the first buckle by the first screw assembly and the second screw.

[0066] Specifically, combined Figure 1 and Figure 2As shown, the first screw assembly 130 may include a first screw 131 and a clamp 132. The first clamp 110 is attached to one side of the first pipe 210, and a first screw hole 133 is provided on the sidewall of the first clamp 110. The clamp 132 is located on the other side of the first pipe 210. After the position of the first clamp 110 is adjusted based on the relative positions of the pipe joint 211 of the first pipe and the pipe joint 221 of the second pipe, the first screw 131 can pass through the clamp 132 and screw into the first screw hole 133, so that the clamp 132 is attached to the other side of the first pipe 210. The first clamp 110 is fixed to the first pipe 210 via the clamp 132, and the first end 111 of the first clamp clamps the pipe joint 211 of the first pipe, thereby confirming that the first clamp 110 is accurately installed in the first pipe 210.

[0067] Moreover, after the position adjustment of the second clip 120 is completed based on the relative positions of the pipe joint 211 of the first pipe and the pipe joint 221 of the second pipe, the second screw 140 can pass through the arc-shaped strip slot 123 and be screwed into the second screw hole 141, so that the second clip 120 is fixed to the first clip 110 via the arc-shaped strip slot 123, and the first end 121 of the second clip clamps the pipe joint 221 of the second pipe, so that it can be determined that the second clip 120 is installed in the exact position of the second pipe 220.

[0068] In addition, the working principle of the anti-loosening device 100 of the pipe joint can be further combined with Figure 4 Common understanding. Figure 4 , Figure 4 A flow chart of a pipe joint maintenance method provided according to some embodiments of the present utility model is shown.

[0069] like Figure 4 As shown, in some embodiments of the present invention, the maintenance method of the pipe joint may include the following steps. First, step S410 can be performed: loosen but not completely unscrew the first screw located on the side wall of the first clip in the anti-loosening device of the pipe joint, so that the first clip carries the second clip to perform longitudinal displacement in the first pipe.

[0070] Specifically, combined Figure 1 and Figure 2 It is commonly understood that when at least one of the pipe joint 211 of the first pipe and the pipe joint 221 of the second pipe needs maintenance, such as cleaning or replacement of the pipe joint, the first screw 131 on the side wall of the first clip 110 can be loosened but not completely unscrewed, and the clamp 132 no longer fits on the first pipe 210, that is, the first clip 110 no longer fits on the first pipe 210. Therefore, the first clip 110 and the second clip 120 can be longitudinally displaced together on the first pipe 210, for example, Figure 2The upper end of the first pipe 210 is longitudinally displaced.

[0071] Next, S420 may be performed: in response to the first buckle and the second buckle being away from the pipe joints of the first pipe and the second pipe, tightening the first screw to fix the first buckle at another position of the first pipe except the pipe joint.

[0072] Combine Figure 1 and Figure 2 It is commonly understood that when the pipe joint is undergoing maintenance work, the anti-loosening device 100 of the pipe joint can be moved along the pipeline to a position where it does not interfere with the maintenance work of the pipe joint by loosening at least the first screw 131, and then the first screw 131 can be tightened to fix the anti-loosening device 100 of the pipe joint on the pipeline again, thereby preventing the anti-loosening device 100 of the pipe joint from falling or being lost during the maintenance work of the pipe joint.

[0073] Next, S430 may be executed: performing maintenance work on the pipe joints of the first pipeline and the second pipeline.

[0074] Furthermore, optionally, in some embodiments, after completing maintenance work on the pipe joint, the first screw 131 can be loosened but not completely unscrewed, so that the first clip 110 and the second clip 120 can be moved longitudinally along the first pipe 210 again. When the first clip 110 and the second clip 120 are moved back to the position of the pipe joint 211 of the first pipe and the pipe joint 221 of the second pipe, the positions of the first end 111 of the first clip and the first end 121 of the second clip can be further adjusted so that the first end 111 of the first clip clamps the pipe joint 211 of the first pipe and the first end 121 of the second clip clamps the pipe joint 221 of the second pipe, thereby confirming that the first clip 110 and the second clip 120 have been accurately installed. Then, the first screw 131 can be tightened to secure the first clip 110 to the first pipe 210.

[0075] Optionally, in other embodiments, when performing maintenance work on the pipe joint, the second screw 140 of the second clip 120 can be loosened, and after the first clip 110 is installed in the correct position again, the position between the second clip 120 and the second pipe 220 can be readjusted so that the second end 122 of the second clip clamps the pipe joint 221 of the second pipe again, and then the second screw 140 is tightened.

[0076] In some preferred embodiments, after completing the maintenance work on the pipe joints and moving the first clip 110 and the second clip 120 back to the exact positions of the pipe joints 211 and 221 of the first pipe, marking lines can be engraved on the pipe joints 211 and 221 respectively to facilitate the next observation and inspection.

[0077] Although the above methods are illustrated and described as a series of acts for simplicity of explanation, it is to be understood and appreciated that these methods are not limited by the order of the acts, as some acts may occur in a different order and / or concurrently with other acts from those illustrated and described herein or not illustrated and described herein but understandable to those skilled in the art according to one or more embodiments.

[0078] In addition, the utility model also provides a process equipment for semiconductor devices, which may include: a process chamber, the interior of which is used to carry out the processing technology of the semiconductor device; multiple pipelines, connecting the process chamber to provide process gas into the process chamber; and the above-mentioned pipe joint anti-loosening device 100, which can be set at the position of the pipe joints of multiple pipelines, used to fix each pipe joint, and remove the pipe joint anti-loosening device 100 when each pipe joint is undergoing maintenance work.

[0079] Those skilled in the art will appreciate that the anti-loosening device 100 for the pipe joint provided by the present invention can be applied not only to pipe joints in process equipment for semiconductor devices, but can also be extended to all joints connected by screws, such as gas lines and water lines, to achieve the same technical effect.

[0080] In summary, the utility model provides an anti-loosening device for a pipe joint and a process equipment for a semiconductor device, which can not only maintain the reliable connection of the pipe joint in an unstable working environment, but also be assembled quickly and conveniently without the need to adapt the fixing clip through the pipe joint. In addition, during the maintenance process of the pipe joint, it will not be hindered by the fixing clip, and can also avoid the fixing clip from falling or being lost.

[0081] The previous description of the disclosure is provided to enable any person skilled in the art to make or use the disclosure. Various modifications to the disclosure will be apparent to those skilled in the art, and the general principles defined herein may be applied to other variations without departing from the spirit or scope of the disclosure. Thus, the disclosure is not intended to be limited to the examples and designs described herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A pipe joint anti-loosening device, characterized in that: include: a first clip, which is movably fixed to the first pipe by a first screw assembly, wherein a first end of the first clip clamps the pipe joint of the first pipe to fix the pipe joint of the first pipe; and The second clip is located on the outside of the first clip, and includes a strip slot. A second screw passes through the strip slot so that the second clip is movably fixed to the first clip via the strip slot, wherein the first end of the second clip clamps the pipe joint of the second pipe to fix the pipe joint of the second pipe.

2. The anti-loosening device according to claim 1, characterized in that: A transverse strip slot is provided on the surface of the second end of the second buckle, and a second screw hole is provided on the surface of the second end of the first buckle located on the inner side of the second buckle. The second screw passes through the transverse strip slot and is screwed into the second screw hole to fix the second buckle on the first buckle, and the second screw and the second screw hole are loosened to allow the second buckle to be laterally displaced relative to the first buckle in the transverse strip slot.

3. The anti-loosening device according to claim 2, characterized in that: The transverse strip slot is an arc-shaped strip slot. The second screw and the second screw hole are loosened to allow the second buckle to rotate relative to the first buckle in the arc-shaped strip slot.

4. The anti-loosening device according to claim 3, characterized in that: The second clip is rotated and displaced until its first end is in contact with the pipe joint of the second pipe, and the second screw passes through the arc-shaped strip slot and is screwed into the second screw hole to fix the second clip on the first clip, and the first end of the second clip clamps the pipe joint of the second pipe.

5. The anti-loosening device according to claim 1, characterized in that: The first screw assembly includes a first screw and a clamp, the first clamp is attached to one side of the first pipe, and two first screw holes are provided at both ends of the side wall of the first clamp, the first screw passes through the clamp and is screwed into the two first screw holes to make the clamp fit the other side of the first pipe, the first clamp is fixed to the first pipe via the clamp, and the first screw and the first screw hole are loosened to make the first clamp move longitudinally relative to the first pipe.

6. The anti-loosening device according to claim 5, characterized in that: The first clip is longitudinally displaced until its first end is in contact with the pipe joint of the first pipe. The first screw passes through the clip and is screwed into the two first screw holes to make the clip in contact with the other side of the first pipe. The first clip is fixed to the pipe joint of the first pipe via the clip, and the first end of the first clip clamps the pipe joint of the first pipe.

7. The anti-loosening device according to claim 1, characterized in that: The first side of the second buckle and the first side of the first buckle are both open groove structures, so that the first buckle can be embedded in the second buckle and the first pipe can be embedded in the first buckle respectively.

8. A process equipment for a semiconductor device, characterized in that: include: A process chamber, the interior of which is used for performing semiconductor device processing; a plurality of pipelines connected to the process chamber to provide process gas into the process chamber; as well as The anti-loosening device of the pipe joint according to any one of claims 1 to 7 is arranged at the position of the pipe joints of the multiple pipelines, and is used to fix each of the pipe joints, and to remove the anti-loosening device of the pipe joint when maintenance work is performed on each of the pipe joints.

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