N2 Purge transformation device for wafer FOUP automatic loader Loadport

Abstract

The utility model discloses an N2Purge transformation device for a wafer FOUP automatic loader Loadport, and relates to the technical field of semiconductors. The connecting base is arranged above the platform plate, an FOUP box is connected to the upper end of the connecting base, an FOUP monitoring Sensor is arranged on the left side of the lower portion of the middle of the connecting base, an air inlet rubber mat connected with the connecting base is arranged on the lower side of the left end of the FOUP box, an air inlet pipeline is arranged on the left side of the lower end of the platform plate, and an air outlet pipeline is arranged on the right side of the lower end of the platform plate. An exhaust pipeline is arranged on the right side of the lower end of the platform plate; the problems that the variety of rubber discs with fixed specifications and dimensions on an existing Loadport table top is large, equipment is inconvenient to transform and upgrade, rubber discs with different specifications and specifications often need to be replaced to meet sealing of an FOUP air inlet and outlet, production efficiency is reduced, equipment transformation and debugging time is prolonged, meanwhile, an FOUP box is inconvenient to open and close when a wafer is taken, difficulty is easily brought to an operator, and the working efficiency of the FOUP box is influenced are solved. And labor force is wasted.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor technical field, concretely relates to a kind of N2 Purge reformed device for wafer FOUP automatic loader Loadport. BACKGROUND

[0002] In the manufacturing process of semiconductor, wafer (the silicon wafer used to make silicon semiconductor circuit) needs to be treated in various different processes, so it will be transported between multiple devices, Loadport (the wafer cassette loading port of silicon wafer taken from the wafer cassette in the processing device) is various, FOUP (wafer transport box, can protect, transport and store wafer, provide safety protection when transporting and storing) air inlet is mostly sealed by fixed size rubber pad on Loadport table surface, to reduce the particles mixed from the outside of the device into the interior.

[0003] Compared with the existing FOUP box, the following defects still exist: the fixed size rubber pad on the existing Loadport table surface has more types, which is not convenient for equipment modification and upgrading, and often needs to replace rubber pads of different sizes to meet the sealing of FOUP air inlet, which reduces production efficiency and prolongs equipment modification and debugging time. At the same time, the FOUP box is not convenient to open and close when taking wafers, which brings difficulties to operators and wastes labor. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a kind of N2 Purge reformed device for wafer FOUP automatic loader Loadport, to solve the following technical problems:

[0005] The purpose of the utility model can be realized by the following technical solutions:

[0006] A kind of N2 Purge reformed device for wafer FOUP automatic loader Loadport, platform plate;

[0007] The connecting base is arranged above the platform plate, the upper end of the connecting base is connected with the FOUP box, the middle lower left of the connecting base is provided with FOUP monitoring sensor, the left lower side of the FOUP box is provided with air inlet rubber pad connected with the connecting base, the right lower side of the FOUP box is provided with exhaust rubber pad connected with the connecting base, the left lower side of the lower end of the platform plate is provided with air inlet pipeline, and the right lower side of the lower end of the platform plate is provided with exhaust pipeline;

[0008] The left and right lower sides of the FOUP box are provided with mounting box, the front of the FOUP box is provided with sealing end cover, and the rear middle part of the sealing end cover is provided with sealing element connected with the FOUP box.

[0009] As a further scheme of the utility model: the lower end of the air inlet rubber pad is connected with an air inlet cavity opened in the left side of the platform plate, the air inlet rubber pad forms a communication structure with the air inlet pipeline through the air inlet cavity, and an air outlet cavity connected with the air outlet rubber pad and the air outlet pipeline is opened in the right side of the air inlet cavity.

[0010] As a further scheme of the utility model: the lower end of the platform plate is provided with a connecting frame, and the inner side of the connecting frame is provided with a nitrogen tank connected with the air inlet pipeline.

[0011] As a further scheme of the utility model: a servo motor is installed on the inner rear side of the mounting box, an adjusting rod is arranged on the upper end of the servo motor, a driving disc is connected to the front end of the adjusting rod, and a driven disc is connected to the front end of the driving disc.

[0012] As a further scheme of the utility model: the adjusting rod forms a rotating structure on the mounting box through the built-in bearing, and the adjusting rod and the driven disc are connected with the driving disc in a meshing mode.

[0013] As a further scheme of the utility model: the driven disc is connected with the sealing end cover in a meshing mode, the lower end of the front side of the sealing end cover is provided with a convex structure for abutting and limiting the FOUP box after being rotated forward by 90 degrees.

[0014] As a further scheme of the utility model: the sealing end cover is connected with the FOUP box in a clamping mode through the sealing element connected by adhesion, and the upper end of the rear side of the sealing end cover is provided with a magnet connected with the FOUP box.

[0015] The utility model has the advantages of:

[0016] 1. The platform plate and the FOUP box are connected through the air inlet rubber pad and the air outlet rubber pad, when the FOUP box is placed, the air inlet rubber pad and the air outlet rubber pad generate a compression amount, so that the connection is more compact, and the air leakage risk is effectively reduced.

[0017] 2. The sealing end cover can be automatically opened and closed through the meshing linkage of the adjusting rod, the driving disc, the driven disc and the sealing end cover, the labor intensity of the operator is reduced, and the production efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS

[0018] The utility model will be further described below in combination with the drawings.

[0019] Figure 1 It is the front view cross section structure schematic diagram of the utility model;

[0020] Figure 2 It is the utility modelFigure 1 Enlarged structure schematic view of position A in the middle;

[0021] Figure 3 Is the side view profile structure schematic view of the FOUP box and the sealing end cover connection of the utility model;

[0022] Figure 4 Is the utility model Figure 3 Enlarged structure schematic view of position B in the middle.

[0023] In the figure: 1, platform plate;2, connecting base;3, FOUP box;4, FOUP monitoring sensor;5, air inlet rubber pad;6, air inlet cavity;7, air inlet pipeline;8, air outlet rubber pad;9, air outlet cavity;10, air outlet pipeline;11, connecting frame;12, nitrogen tank;13, mounting box;14, servo motor;15, adjusting rod;16, driving disc;17, driven disc;18, sealing end cover;19, sealing element;20, magnet. Specific embodiments

[0024] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0025] Embodiment one

[0026] Please refer to Figure 1 And Figure 2 The utility model is a kind of N2Purge transformation device for wafer FOUP automatic loader Loadport, specifically for making connection more closely, reduce the risk of gas leakage, including platform plate 1;Connecting base 2 is arranged above platform plate 1, the upper end of connecting base 2 is connected with FOUP box 3, FOUP monitoring sensor 4 is arranged in the middle lower left side of connecting base 2, the left end lower side of FOUP box 3 is provided with air inlet rubber pad 5 connected with connecting base 2, the right end lower side of FOUP box 3 is provided with air outlet rubber pad 8 connected with connecting base 2, the lower left side of platform plate 1 is provided with air inlet pipeline 7, and the lower right side of platform plate 1 is provided with air outlet pipeline 10.

[0027] In the embodiment, preferably, the lower end of the air inlet rubber pad 5 is connected with an air inlet cavity 6 opened in the left side of the platform plate 1, the air inlet rubber pad 5 forms a communication structure through the air inlet cavity 6 and the air inlet pipeline 7, and the right side of the air inlet cavity 6 is provided with an air outlet cavity 9 connected with the air outlet rubber pad 8 and the air outlet pipeline 10; the lower end of the platform plate 1 is provided with a connecting frame 11, and the inner side of the connecting frame 11 is provided with a nitrogen tank 12 connected with the air inlet pipeline 7.

[0028] In summary, when the FOUP box 3 is placed, the air inlet rubber pad 5 and the air outlet rubber pad 8 arranged on the left and right sides in the connecting base 2 are compressed, the FOUP monitoring sensor 4 is extruded by the bottom pattern of the connecting base 2, at this time, the FOUP monitoring sensor 4 transmits a signal to the module, then the nitrogen tank 12 is transported upward through the air inlet pipeline 7, reaches the air inlet rubber pad 5 through the air inlet cavity 6, enters the FOUP box 3, is discharged from the air outlet rubber pad 8 after circulation, and is discharged outward along the air outlet cavity 9 from the air outlet pipeline 10.

[0029] Embodiment two

[0030] Refer to the first embodiment shown in the drawings, the utility model discloses a first embodiment, specifically, the left and right ends of the FOUP box 3 are provided with the air inlet rubber pad 5 and the air outlet rubber pad 8, the air inlet rubber pad 5 and the air outlet rubber pad 8 are arranged on the left and right sides of the FOUP box 3 respectively, and the air inlet rubber pad 5 and the air outlet rubber pad 8 are arranged on the lower side of the FOUP box 3. Figure 1 、 Figure 3 and Figure 4 The second embodiment of the utility model is shown in the drawings, specifically, the left and right ends of the FOUP box 3 are provided with the mounting box 13, the front of the FOUP box 3 is provided with the sealing end cover 18, and the rear end middle part of the sealing end cover 18 is provided with the sealing piece 19 connected with the FOUP box 3.

[0031] In the embodiment, preferably, the inside rear side of the mounting box 13 is provided with the servo motor 14, the upper end of the servo motor 14 is provided with the adjusting rod 15, the front end of the adjusting rod 15 is connected with the driving disc 16, and the front end of the driving disc 16 is connected with the driven disc 17; the adjusting rod 15 forms a rotating structure on the mounting box 13 through the built-in bearing, and the adjusting rod 15 and the driven disc 17 are connected with the driving disc 16 in a meshing mode; the driven disc 17 is connected with the sealing end cover 18 in a meshing mode, the lower end front side of the sealing end cover 18 is provided with a convex structure for abutting and limiting the FOUP box 3 after being rotated forward by 90°, and the sealing end cover 18 can drive the meshing connected driving disc 16 to rotate synchronously when the servo motor 14 rotates the adjusting rod 15, so that the driving disc 16 drives the driven disc 17 to move.

[0032] In the embodiment, preferably, the sealing end cover 18 is connected to the FOUP box 3 in a clamping manner through the adhesive connection sealing element 19, and the upper rear side of the sealing end cover 18 is provided with a magnet 20 connected to the FOUP box 3, so that the fastening of the connection can be improved under the action of the magnet 20 after the sealing end cover 18 is clamped and connected to the FOUP box 3.

[0033] In summary, when the material needs to be taken, the servo motor 14 installed in the inside of the mounting box 13 is opened to rotate the adjusting rod 15, and the adjusting rod 15, the driving disc 16, the driven disc 17 and the sealing end cover 18 are connected to each other in a meshing manner, so that the sealing end cover 18 can be synchronously rotated when the adjusting rod 15 is rotated, to achieve the automatic opening and closing effect. The front lower side of the sealing end cover 18 is provided with a convex structure, which can be in contact with the FOUP box 3 after the sealing end cover 18 is rotated forward by 90°, so as to avoid excessive rotation of the sealing end cover 18 and limit the rotation angle. When the sealing end cover 18 is closed, the sealing element 19 at the rear end is clamped and connected to the FOUP box 3, and can be magnetically connected under the action of the magnet 20, so as to enhance the sealing effect. The driving disc 16 and the driven disc 17 can reduce the transmission speed and avoid excessive rotation of the sealing end cover 18.

[0034] Embodiment three

[0035] The embodiment one and the embodiment two are combined to obtain the embodiment.

[0036] The above nitrogen blowing and automatic opening and closing operation can not only effectively reduce dust interference, but also improve production efficiency.

[0037] The above describes one embodiment of the utility model in detail, but the content is only the preferred embodiment of the utility model, and cannot be considered as limiting the scope of the embodiment of the utility model. Any equivalent changes and improvements made according to the scope of the utility model application shall still belong to the patent coverage range of the utility model.

Claims

1. An N2 Purge retrofit device for a wafer FOUP Loadport, characterized by, The utility model relates to a FOUP box monitoring device, including; Platform plate (1); The left side below the middle part of the connecting base (2) is provided with FOUP monitoring sensor (4), the left end downside of FOUP box (3) is provided with the air inlet rubber pad (5) connected with connecting base (2), the right end downside of FOUP box (3) is provided with the air exhaust rubber pad (8) connected with connecting base (2), the lower left side of platform plate (1) is provided with air inlet pipeline (7), and the lower right side of platform plate (1) is provided with air exhaust pipeline (10); The left and right ends downside of FOUP box (3) are provided with mounting box (13), and the front of FOUP box (3) is provided with sealing end cover (18), and the rear end middle part of sealing end cover (18) is provided with sealing piece (19) connected with FOUP box (3).

2. A N2 Purge retrofit device for a wafer FOUP Loadport according to claim 1, wherein, The lower end of air inlet rubber pad (5) is connected with air inlet cavity (6) opened in the left side inside platform plate (1), and air inlet rubber pad (5) forms a communication structure between air inlet cavity (6) and air inlet pipeline (7), and the right side of air inlet cavity (6) is provided with air exhaust cavity (9) connected with air exhaust rubber pad (8) and air exhaust pipeline (10).

3. A N2 Purge retrofit device for a wafer FOUP Loadport according to claim 2, wherein, The lower end of platform plate (1) is provided with connecting frame (11), and the inner side of connecting frame (11) is provided with nitrogen tank (12) connected with air inlet pipeline (7).

4. The N2 Purge retrofit device for a wafer FOUP Loadport of claim 1, wherein, The inside rear side of mounting box (13) is mounted with servo motor (14), the upper end of servo motor (14) is provided with adjusting rod (15), the front end of adjusting rod (15) is connected with driving disc (16), and the front end of driving disc (16) is connected with driven disc (17).

5. A N2 Purge retrofit device for a wafer FOUP Loadport according to claim 4, wherein, The adjusting rod (15) forms a rotating structure on the mounting box (13) through the built-in bearing, and the adjusting rod (15) and the driven disc (17) are connected with the driving disc (16) in the form of meshing.

6. A N2 Purge retrofit device for a wafer FOUP Loadport as recited in claim 4, wherein, The driven disc (17) is connected with the sealing end cover (18) in the form of meshing, and the lower end of the sealing end cover (18) is provided with a convex structure on the front side, which is used for abutting and limiting with the FOUP box (3) after rotating 90 degrees forward.

7. A N2 Purge retrofit device for a wafer FOUP Loadport according to claim 6, wherein, The sealing end cover (18) is connected with the FOUP box (3) in the form of clamping through the sealing piece (19) connected by bonding, and the upper end rear side of sealing end cover (18) is provided with magnet (20) connected with FOUP box (3).

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