Assembly line mechanism capable of automatically adjusting width and plasma cleaning machine thereof

Abstract

The utility model discloses an assembly line mechanism capable of automatically adjusting width and a plasma cleaning machine thereof, the assembly line mechanism comprises a bottom plate, the bottom plate is provided with two parallel guide rails along the length direction, and the bottom plate is in sliding connection with a moving plate through the guide rails; the at least one fixed side assembly is fixed on the bottom plate; the movable side assembly is arranged corresponding to the fixed side assembly, the movable side assembly is installed on the movable plate, and a space for materials to pass through is reserved between the opposite movable side assembly and the fixed side assembly; and the width adjusting assembly is installed on the bottom plate, the width adjusting assembly is used for adjusting the distance between the fixed side assembly and the movable side assembly, the width adjusting assembly comprises a driving unit and a transmission unit in transmission fit with the driving unit, and the transmission unit is connected with the movable plate. The distance between the fixed side assembly and the movable side assembly can be automatically adjusted, and material conveying accuracy and production efficiency are improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of plasma cleaning machine, concretely relates to a kind of assembly line mechanism and its plasma cleaning machine of width can be automatically adjusted. BACKGROUND

[0002] Plasma cleaning machine is a kind of equipment using plasma to effectively remove organic contaminants on the surface of material, to realize cleaning, coating and other purposes, as a kind of new cleaning technology, plasma cleaning machine can achieve the effect that conventional cleaning scheme cannot achieve, plasma cleaning machine is commonly used in semiconductor industry, and the manufacture of semiconductor chip has extremely high requirements on surface cleanliness and roughness.Plasma cleaning technology can accurately remove photoresist, organic contaminants and the like without damaging the surface of chip, to provide good surface conditions for subsequent photoetching, etching, doping and other processes, to ensure the quality and performance of chip.

[0003] Most plasma cleaning machines still adopt manual feeding and discharging mode, i.e., manually placing the material to be cleaned into the plasma cleaning cavity, and manually taking out the cleaned material from the plasma cleaning cavity after cleaning. Although automatic plasma cleaning machine can realize automatic feeding and discharging, when compatible with multiple size specifications of materials, manual intervention is still required to adjust the width of assembly line, and the degree of automation is low, the manual adjustment time is long, the efficiency is low, manual adjustment is required after fixing, which is extremely inconvenient to use, and increases the production cost. UTILITARY MODEL CONTENTS

[0004] In view of the above problems existing in the prior art, the utility model provides a kind of assembly line mechanism and its plasma cleaning machine of width can be automatically adjusted.The utility model can automatically adjust the width of assembly line, and can solve the problem that automatic plasma cleaning machine cannot quickly switch production of multiple types of materials.

[0005] In order to solve the above technical problems, the utility model adopts the following technical scheme:

[0006] A kind of assembly line mechanism of width can be automatically adjusted, comprising:

[0007] Bottom plate, the bottom plate is provided with two mutually parallel guide rails along the length direction, and the bottom plate is slidably connected to the moving plate by the guide rail;

[0008] At least one fixed side assembly, the fixed side assembly is fixed on the bottom plate;

[0009] Corresponding to the fixed side assembly, the moving side assembly is installed on the moving plate, and the space for material passing is left between the opposite moving side assembly and the fixed side assembly;And

[0010] A width adjustment assembly is installed on the bottom plate, and the width adjustment assembly is used to adjust the distance between the fixed side assembly and the moving side assembly, and the width adjustment assembly comprises a driving unit and a transmission unit in transmission cooperation with the driving unit, and the transmission unit is connected with the moving plate.

[0011] Further, the driving unit comprises a motor fixing plate fixed on one side of the bottom plate and a driving motor installed on the motor fixing plate, and a first belt pulley is installed on the output end of the driving motor.

[0012] Further, the transmission unit comprises a ball screw, a second belt pulley, a sliding block connecting seat, a screw fixing seat and a screw support seat, the screw fixing seat and the screw support seat are both fixed on the bottom plate and are rotatably connected with both ends of the ball screw respectively, the ball screw is installed with the second belt pulley at one end, the second belt pulley is connected with the first belt pulley through a synchronous belt, the ball screw is rotatably connected with the sliding block connecting seat, and the sliding block connecting seat is fixed on the lower part of the moving plate.

[0013] Further, the motor fixing plate further comprises locking bolts, the output end of the driving motor passes through a strip-shaped hole formed in the motor fixing plate, the motor fixing plate is further provided with a waist-shaped hole, the waist-shaped hole is located on both sides of the strip-shaped hole, the length direction of the waist-shaped hole is parallel to the direction of the synchronous belt, and the locking bolts are threadedly connected with the positioning screw holes on one side of the driving motor after passing through the waist-shaped hole.

[0014] Further, the number of the waist-shaped holes is four.

[0015] Further, the fixed side assembly comprises a first guide plate fixed on the bottom plate, and the first guide plate is installed with a guide assembly for guiding the movement of materials on the side opposite to the moving side assembly.

[0016] Further, the moving side assembly comprises a second guide plate fixed on the moving plate, and the first guide plate is installed with a guide assembly for guiding the movement of materials on the side opposite to the fixed side assembly.

[0017] Further, the plasma cleaning machine is installed with any one of the above-mentioned automatic width adjustment pipeline mechanisms.

[0018] Compared with the prior art, the scheme has the following beneficial effects:

[0019] The utility model provides a width automatic adjustment's assembly line mechanism and plasma cleaning machine thereof, install fixed side assembly on bottom plate, guide rail on bottom plate installs mobile side assembly, when processing, material passes through material fixture from the opposite setting fixed side assembly and mobile side assembly guide under, adjust the interval between fixed side assembly and mobile side assembly through width adjustment assembly, so that the assembly line mechanism of the utility model can be compatible with many size specifications materials, the width adjustment assembly of the utility model, width adjustment assembly includes drive unit, drive unit is connected with moving plate through transmission unit, can automatically adjust the distance between fixed side assembly and mobile side assembly, need not manual intervention to adjust the width of the assembly line, automation degree is high, has improved the accuracy of material conveying and production efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 It is the assembly drawing of this assembly line mechanism;

[0021] Figure 2 It is fixed side assembly structure schematic view;

[0022] Figure 3 It is width adjustment assembly structure schematic view;

[0023] Figure 4 It is mobile side assembly structure schematic view.

[0024] The label of drawing is as follows: bottom plate 1, guide rail 11, moving plate 2, guide block 21, fixed side assembly 3, first guide plate 31, guide assembly 32, mobile side assembly 4, second guide plate 41, width adjustment assembly 5, motor fixed plate 51, waist type hole 511, drive motor 52, first belt pulley 53, ball screw 54, second belt pulley 55, sliding block connecting seat 56, screw rod fixed seat 57, screw rod support seat 58, synchronous belt 59. DETAILED DESCRIPTION

[0025] The utility model will be further explained in detail in connection with the drawings.

[0026] A width automatic adjustment's assembly line mechanism, as shown in Figure 1 , comprising:

[0027] Bottom plate 1, the bottom plate 1 is provided with two mutually parallel guide rails 11 along the length direction, and the bottom plate 1 is slidably connected with the moving plate 2 through the guide rails 11;

[0028] At least one fixed side assembly 3, the fixed side assembly 3 is fixed on the bottom plate 1, and the fixed side assembly 3 is as shown in Figure 2 ;

[0029] Corresponding mobile side assembly 4 is arranged with the fixed side assembly 3, and the mobile side assembly 4 is as shown in Figure 3As shown, the moving side assembly 4 is mounted on the moving plate 2, and the opposite moving side assembly 4 and the fixed side assembly 3 are left with a space for passing materials; and

[0030] The width adjusting assembly 5 mounted on the bottom plate 1 is used to adjust the distance between the fixed side assembly 3 and the moving side assembly 4, and the width adjusting assembly 5 comprises a driving unit and a transmission unit in transmission cooperation with the driving unit, and the transmission unit is connected with the moving plate 2.

[0031] According to a specific embodiment provided by the utility model, the bottom plate 1 can be set according to actual production needs, and a rectangular structure plate body is adopted in the embodiment, two mutually parallel guide rails 11 are fixed on the upper surface of the plate body through bolts, four guide blocks 21 are fixed on the lower part of the moving plate 2, and the guide blocks 21 are in sliding cooperation with the guide rails 11 in pairs.

[0032] During processing, the materials pass downward from the oppositely arranged fixed side assembly 3 and moving side assembly 4, the interval between the fixed side assembly 3 and the moving side assembly 4 is adjusted, so that the assembly line mechanism of the utility model can be compatible with materials of multiple size specifications, the width adjusting assembly 5 of the utility model comprises a driving unit, the driving unit is connected with the moving plate 2 through a transmission unit, the distance between the fixed side assembly 3 and the moving side assembly 4 can be automatically adjusted, manual intervention is not needed for adjusting the width of the assembly line, the degree of automation is high, and the accuracy of material conveying and production efficiency are improved.

[0033] Further, the driving unit comprises a motor fixing plate 51 fixed on one side of the bottom plate 1 and a driving motor 52, the driving motor 52 is mounted on the motor fixing plate 51, and a first belt pulley 53 is mounted on the output end of the driving motor 52.

[0034] According to a specific embodiment provided by the utility model, specifically, the bottom plate 1 is horizontally arranged, the motor fixing plate 51 is vertically fixed on the side surface of the end part of the bottom plate 1, the driving motor 52 is located below the bottom plate 1, the output end of the driving motor 52 corresponds to the transmission unit, and the first belt pulley 53 and the driving motor 52 are respectively located on the two sides of the motor fixing plate 51. In the embodiment, the driving motor 52 can adopt a stepping motor, a servo motor or a speed regulating motor.

[0035] Further, the transmission unit comprises a ball screw 54, a second belt pulley 55, a sliding block connecting seat 56, a screw fixing seat 57 and a screw support seat 58, the screw fixing seat 57 and the screw support seat 58 are both fixed on the bottom plate 1 and are respectively in rotary connection with the two ends of the ball screw 54, the ball screw 54 is mounted with the second belt pulley 55 at one end, the second belt pulley 55 is connected with the first belt pulley 53 through a synchronous belt 59, the ball screw 54 is in rotary connection with the sliding block connecting seat 56, and the sliding connection seat is fixed on the lower part of the moving plate 2.

[0036] According to the specific embodiment provided by the utility model, as shown in the figure, Figure 3 The ball screw 54 is located in the middle of the bottom plate 1 and between the two guide rails 11, and is arranged along the length direction of the bottom plate 1. The rotary motion of the driving motor 52 is converted into linear motion through the ball screw 54. In actual operation, the host computer writes the width interval to be adjusted, the host computer controls the rotation of the driving motor 52 to drive the rotation of the ball screw 54, and the width interval adjustment of the moving side assembly 4 in the micrometer level is realized.

[0037] In the embodiment, the second belt pulley 55 is fixed at the end of the ball screw 54, the screw rod fixing seat 57 and the screw rod supporting seat 58 are both fixed on the bottom plate 1, the screw rod fixing seat 57 and the screw rod supporting seat 58 are used for installing the ball screw 54, and the sliding block connecting seat 56 is fixed at the lower part of the moving plate 2. The linear movement of the sliding block connecting seat 56 drives the movement of the moving plate 2.

[0038] Further, the synchronous belt 59 is relatively loose during actual installation. In order to adjust the tension of the synchronous belt 59, the motor fixing plate 51 further comprises a locking bolt (not shown in the figure), the output end of the driving motor 52 passes through the strip-shaped hole formed in the motor fixing plate 51, the strip-shaped hole is formed along the height direction of the motor fixing plate 51, the motor fixing plate 51 is further provided with a waist-shaped hole 511, the waist-shaped hole 511 is located on both sides of the strip-shaped hole, the length direction of the waist-shaped hole 511 is parallel to the direction of the synchronous belt 59, and the locking bolt is threadedly connected with the positioning screw hole on one side of the driving motor 52 after passing through the waist-shaped hole 511.

[0039] In the embodiment, the length direction of the waist-shaped hole 511 is parallel to the direction of the synchronous belt 59, the locking bolt can move in the direction of the synchronous belt 59 under the limitation of the waist-shaped hole 511, and the driving motor 52 can be fixed on one side of the motor fixing plate 51 after the locking bolt is tightened, so that the installation of the driving motor 52 and the adjustment of the tension degree of the synchronous belt 59 are realized.

[0040] Further, the number of the waist-shaped holes 511 is four, that is, two waist-shaped holes 511 are arranged on both sides of the strip-shaped hole, and the four waist-shaped holes make the driving motor 52 more stable.

[0041] Further, the fixed side assembly 3 comprises a first guide plate 31, the first guide plate 31 is fixed on the bottom plate 1, and a guide assembly 32 for guiding the movement of materials is arranged on one side of the first guide plate 31 relative to the moving side assembly 4.

[0042] Further, the moving side assembly 4 comprises a second guide plate 41 fixed on the moving plate 2, and the first guide plate 31 is provided with a guide assembly 32 for guiding the movement of materials on one side of the fixed side assembly 3.

[0043] According to the embodiment, the first guide plate 31 is provided with a notch on the side fixed to the bottom plate 1 to accommodate the moving plate 2, and the moving plate 2 passes through the notch of each first guide plate 31, so that the moving plate 2 can move with the ball screw 54. The guide assembly 32 can adopt the prior art, for example, the first guide plate 31 and the second guide plate 41 are provided with guide wheels on the upper ends of the two ends, the two guide wheels are in a horizontal plane, the two guide wheels drive the conveyor belt, the upper guide wheel is driven by the lower guide wheel, the guide wheel is coaxially fixed with a gear, the gear is driven by the driving motor 52 on the side of the assembly line mechanism, the conveyor belt moves under the driving of the guide wheel, and the conveyor belt is provided with a pressing wheel on the upper part, and at the same time, the materials are moved along the length direction of the first guide plate 31 and the second guide plate 41.

[0044] The first guide plate 31 and the second guide plate 41 are parallel to each other, the length edges of the first guide plate 31 and the second guide plate 41 are fixed to the bottom plate 1 or the moving plate 2 respectively, and the length direction of the first guide plate 31 and the second guide plate 41 is horizontal. In order to improve the production efficiency, the number of the first guide plate 31 and the second guide plate 41 can be set to be multiple, and in the embodiment, the number is set to be four, and the first guide plate 31 and the second guide plate 41 can be fixed and installed at equal distances on the corresponding bottom plate 1 or moving plate 2, so that when the moving plate 2 slides along the bottom plate 1, all the second guide plates 41 are moved.

[0045] Further, the plasma cleaning machine is provided with any one of the above-mentioned assembly lines capable of automatically adjusting the width.

[0046] Finally, it should be pointed out that in the description of the utility model, it should be pointed out that the terms "vertical", "upper", "lower", "horizontal" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model.

[0047] In the description of the utility model, still need to explain, unless another explicit provision and limitation, term " set ", " install ", " link ", " connect " should do broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integrally connected;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can indirectly connect through the intermediate medium, can be two elements inside the communication。For ordinary skilled person in the art, can understand the specific meaning of the above-mentioned terms in the utility model according to specific circumstances.

[0048] The above only for the preferred embodiment of the utility model has been described, and does not limit the utility model, although the utility model is described in detail with reference to the foregoing embodiments, for those skilled in the art, it still can modify the technical scheme recorded in the foregoing embodiments, or equivalent replacement to part of technical features。Any modification, equivalent replacement, improvement etc. within the spirit and principle of the utility model, should be included in the protection scope of the utility model.

Claims

1. A production line mechanism with automatically adjustable width, characterized in that, include: A base plate, wherein two parallel guide rails are provided along the length direction of the base plate, and a movable plate is slidably connected to the base plate through the guide rails; At least one fixed-side component is fixed to the base plate; A movable side component is provided corresponding to the fixed side component, the movable side component is mounted on the movable plate, and a space is left between the movable side component and the fixed side component for material passage; and A width adjustment assembly is mounted on the base plate. The width adjustment assembly is used to adjust the distance between the fixed side assembly and the moving side assembly. The width adjustment assembly includes a drive unit and a transmission unit that drives the drive unit. The transmission unit is connected to the moving plate.

2. The assembly line mechanism with automatically adjustable width as described in claim 1, characterized in that, The drive unit includes a motor mounting plate fixed to one side of the base plate and a drive motor. The drive motor is mounted on the motor mounting plate, and a first pulley is installed at the output end of the drive motor.

3. The assembly line mechanism with automatically adjustable width as described in claim 2, characterized in that, The transmission unit includes a ball screw, a second pulley, a slider connecting seat, a screw fixing seat, and a screw support seat. The screw fixing seat and the screw support seat are both fixed on the base plate and are rotatably connected to both ends of the ball screw. The second pulley is installed at one end of the ball screw, and the second pulley is connected to the first pulley through a synchronous belt. The ball screw is rotatably connected to the slider connecting seat, and the slider connecting seat is fixed to the lower part of the moving plate.

4. The assembly line mechanism with automatically adjustable width as described in claim 3, characterized in that, The motor mounting plate also includes a locking bolt. The output end of the drive motor passes through the strip hole opened in the motor mounting plate. The motor mounting plate also has a waist-shaped hole. The waist-shaped hole is located on both sides of the strip hole. The length direction of the waist-shaped hole is parallel to the direction of the timing belt. After the locking bolt passes through the waist-shaped hole, it is threadedly connected to the positioning screw hole on one side of the drive motor.

5. The assembly line mechanism with automatically adjustable width as described in claim 4, characterized in that, The number of waist-shaped holes is set to four.

6. A conveyor system mechanism with automatically adjustable width as described in any one of claims 1-5, characterized in that, The fixed side assembly includes a first guide plate, which is fixed to the base plate. A guide component for guiding material movement is installed on the side of the first guide plate opposite to the moving side assembly.

7. The assembly line mechanism with automatically adjustable width as described in claim 6, characterized in that, The moving side assembly includes a second guide plate fixed to the moving plate, and a guide component for guiding material movement is installed on the side of the first guide plate opposite to the fixed side assembly.

8. A plasma cleaner, characterized in that, The plasma cleaner is equipped with any one of the automatic width-adjustable production line mechanisms according to claims 1-7.

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