Vacuum coating equipment

Abstract

The utility model relates to the technical field of coating equipment, and discloses vacuum coating equipment which comprises an evaporation mechanism, a coating mechanism and a coating auxiliary mechanism are arranged at the top end of the evaporation mechanism, the evaporation mechanism comprises an electric cabinet, a processing table is arranged at the top end of the electric cabinet, and a coating material conveying water path is arranged in the processing table. An evaporation opening is formed in the processing table and corresponds to the upper portion of the conveying water way, and a separation net is arranged in the evaporation opening. By adopting the optimized coating material storage and conveying structural design, the coating material conveying water path is arranged in the electric control box body, the evaporation opening is formed in the position, corresponding to the upper portion of the conveying water path, of the machining table above the coating material conveying water path, the separation net is arranged in the evaporation opening, and meanwhile the material storage tank is arranged at one end of the electric control box body corresponding to the conveying water path of the electric control box body. And the valve is fixedly arranged at the interface at one end of the storage tank, so that the coating material is convenient and fast to replace and add.

Description

TECHNICAL FIELD

[0001] The utility model relates to a coating equipment technical field, concretely to a vacuum coating equipment. BACKGROUND

[0002] The vacuum coating equipment is a kind of equipment that metal or non-metal material is deposited on the workpiece surface to form film after evaporation in high vacuum environment.The basic principle is that in vacuum environment, plating material is vaporized by heating or other physical and chemical methods, and these gaseous plating material molecules fly to the workpiece to be plated in the vacuum chamber in the form of straight line movement, and condense to form film on the workpiece surface.For example, evaporation plating in physical vapor deposition (PVD) is to heat plating material (such as aluminum, chromium, etc.) to boiling point by using heating source, so that it is deposited on the substrate surface after evaporation.

[0003] The existing vacuum coating equipment still has the following problems when in use: inconvenient replacement of material, cumbersome operation when replacing different plating materials, long time consumption, affecting production efficiency, and when replacing the workpiece to be plated, the placing rack of the workpiece to be plated needs to be taken out of the vacuum chamber due to the small opening of the vacuum chamber, which is inconvenient, and in addition, the placing rack is designed in fixed structure, and the angle of the placing rack cannot be adjusted according to actual plating requirements. CONTENT OF THE UTILITY MODEL

[0004] (I) Technical problem solved.

[0005] In view of the deficiencies of the prior art, the utility model provides a vacuum coating equipment to solve the problems proposed in the background art.

[0006] (II) Technical scheme.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a vacuum coating equipment, including evaporation mechanism, the evaporation mechanism top is provided with plating mechanism and plating auxiliary mechanism, the evaporation mechanism includes an electric control box, the electric control box top is provided with processing platform, the processing platform is provided with plating material transmission waterway, the processing platform is provided with evaporation port above corresponding transmission waterway, and the evaporation port is provided with screen, one end of the electric control box is provided with storage tank corresponding to its transmission waterway, one end of the storage tank is provided with interface, and the interface is fixedly installed with valve, the plating mechanism includes vacuum chamber fixedly connected to the top of processing platform, the vacuum chamber is provided with placing rack, the placing rack is located directly above evaporation port, and the processing platform top other side is provided with plating auxiliary mechanism matched with vacuum chamber.

[0008] As a further scheme of the utility model: the vacuum chamber front end opening and opening is provided with rotating sealing mechanism, the rotating sealing mechanism includes the hinge fixedly installed on the vacuum chamber front end opening top, the rotating end of hinge is fixedly connected with sealing door.

[0009] As a further scheme of the utility model: the placing rack one end is provided with drive rotating mechanism, the vacuum chamber one end center position is provided with shaft hole, the drive rotating mechanism includes drive motor fixedly installed on vacuum chamber one end outside, the drive motor other end is provided with drive shaft, the drive shaft passes through the shaft hole and is fixedly connected with placing rack.

[0010] As a further scheme of the utility model: the electric cabinet other end is provided with three connecting holes, the coating auxiliary mechanism includes the connecting pipe fixedly connected in the other end opening of connecting hole, the other end of front connecting pipe is connected with heating equipment, the other end of rear connecting pipe is connected with cooling tower, the cooling tower rear end is provided with cooling backflow pipe, the other end of middle connecting pipe is connected with vacuum equipment, the vacuum equipment includes vacuum pump, vacuum gauge and vacuum valve.

[0011] Compared with the prior art, the utility model has the advantages that:

[0012] 1、the utility model discloses a coating material storage and conveying structure design is optimized, and the coating material transmission waterway is provided in the electric cabinet body, and the evaporation port is provided above the processing table corresponding to the transmission waterway, and the evaporation port is provided with a screen, and the valve is fixedly installed at the one end interface of the storage tank corresponding to the transmission waterway of the electric cabinet body, and the coating material is convenient and fast to replace and add.

[0013] 2、the utility model discloses that the vacuum chamber front end is opened on the whole side, and is equipped with a special sealing door, can realize the convenient opening and closing of the vacuum chamber front end or is opened, when the coating article is replaced, often does not need to take out the placing rack of coating article in the vacuum chamber, can directly replace the coating article on the placing rack in the vacuum chamber, is more convenient.

[0014] 3、the utility model discloses that the placing rack adopts adjustable structure design, and the shaft hole is opened in the vacuum chamber one end, and the drive shaft of drive motor is rotatably connected in it, and the drive shaft passes through the shaft hole and is connected with the placing rack, can drive the placing rack to rotate position adjustment, and then can angle adjustment is carried out to the placing rack according to actual coating demand. BRIEF DESCRIPTION OF DRAWINGS

[0015] Fig. 1 It is the overall perspective drawing of the utility model;

[0016] Fig. 2 It is the evaporation mechanism perspective drawing of the utility model;

[0017] Fig. 3 is a three-dimensional view of the film plating mechanism of the utility model;

[0018] Fig. 4 is a three-dimensional view of the film plating auxiliary mechanism of the utility model.

[0019] In the figure: 1, evaporation mechanism;2, film plating mechanism;3, film plating auxiliary mechanism;11, electric control box;12, processing platform;13, evaporation port;14, storage tank;15, valve;21, vacuum chamber;22, hinge;23, sealing door;24, shaft hole;25, connecting hole;26, placing rack;27, drive motor;31, cooling tower;32, cooling backflow pipeline;33, vacuum equipment;34, heating equipment;35, connecting pipe. DETAILED DESCRIPTION

[0020] The embodiments of the utility model will be further described in detail below in combination with the drawings and examples. The following examples are used to illustrate the utility model, but cannot be used to limit the scope of the utility model.

[0021] In the description of the utility model, unless otherwise specified, the meaning of "multiple" is two or more than two;The orientation or position relationship indicated by the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail" and the like is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model. In addition, the terms "first", "second", "third" and the like are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0022] In the description of the utility model, it should be pointed out that, unless otherwise specified and limited, the terms "connected", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected;It can be mechanically connected, or it can be electrically connected;It can be directly connected, or it can be indirectly connected through an intermediate medium. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0023] Please refer to Figs. 1-4The utility model discloses an evaporating mechanism 1 is provided with the plating auxiliary mechanism 3 and the plating mechanism 2 on the top, and the plating mechanism 2 includes the vacuum chamber 21 fixedly connected on the top of processing table 12, and the vacuum chamber 21 is provided with the placing rack 26, and the placing rack 26 is located the evaporation port 13 directly above, and the plating auxiliary mechanism 3 is provided with on the other side of the top of processing table 12 and cooperates the vacuum chamber 21, and the whole adopts the optimized plating material storage and conveying structure design, and it is provided with the plating material transmission waterway in the electric control box body 11, and the evaporation port 13 is provided with on the top of processing table 12 and cooperates the transmission waterway, and it is provided with the screen in the evaporation port 13, and it is provided with the storage tank 14 on the one end of the electric control box body 11 and cooperates the transmission waterway, and the valve 15 is fixedly installed at the interface of the one end of storage tank 14, and the replacement of plating material is convenient and fast.

[0024] The vacuum chamber 21 front end opening and the opening are provided with rotary sealing mechanism, and the rotary sealing mechanism includes the hinge 22 fixedly installed on the vacuum chamber 21 front end opening upper side, and the rotary end of hinge 22 is fixedly connected with sealing door 23, and the vacuum chamber 21 front end whole side opening, and is equipped with the sealing door 23 specially, can realize the convenient opening and closing of the vacuum chamber 21 front end or is opened, when plating article is replaced, often does not need to take out the placing rack 26 of plating article in the vacuum chamber 21, can directly on the placing rack 26 in the vacuum chamber 21 and carries out the replacement of plating article, is more convenient.

[0025] The placing rack 26 one end is provided with drive rotary mechanism, and the vacuum chamber 21 one end center position is provided with shaft hole 24, and the drive rotary mechanism includes the drive motor 27 fixedly installed on the one end outside of vacuum chamber 21, and the drive motor 27 other end is provided with drive shaft, and the drive shaft passes through shaft hole 24 and is fixedly connected with placing rack 26, and the placing rack 26 adopts adjustable structure design, and the vacuum chamber 21 one end is provided with shaft hole 24, and the drive shaft of drive motor 27 is rotatably connected in it, and the drive shaft passes through shaft hole 24 and is connected with placing rack 26, can drive placing rack 26 and carry out rotary position adjustment, and then can angle adjustment to placing rack 26 according to actual plating demand.

[0026] The other end of the electric control box 11 is provided with three connecting holes 25, the coating auxiliary mechanism 3 comprises connecting pipes 35 fixedly connected to the other end of the connecting holes 25, the other end of the front connecting pipe 35 is connected with a heating device 34, the heating work in the vacuum chamber 21 can be carried out, and the heating device 34 provides the heat required for the evaporation of the coating material in the evaporation port 13, the other end of the rear connecting pipe 35 is connected with a cooling tower 31, the cooling tower 31 is provided with a cooling backflow pipe 32 at the rear end, the cooling work in the vacuum chamber 21 is realized, and the excess coating material can be cooled and collected back, and the other end of the middle connecting pipe 35 is connected with a vacuum device 33, the vacuum device 33 comprises a vacuum pump, a vacuum gauge and a vacuum valve, and the vacuum work in the vacuum chamber 21 can be carried out.

[0027] The working principle of the utility model is: the coating material can be stored in the storage tank 14 through the valve 15, and the coating material is transmitted to the evaporation port 13 through the transmission waterway, the sealing door 23 is opened on the placing rack 26 to assemble the workpiece to be plated, and the vacuum work in the vacuum chamber 21 is carried out through the vacuum device 33, in the vacuum environment, the heating device 34 can carry out the heating work in the vacuum chamber 21, and the heating device 34 provides the heat required for the evaporation of the coating material in the evaporation port 13, the coating material in the evaporation port 13 is vaporized through the heating method, the gaseous coating material molecules fly to the workpiece to be plated in the vacuum chamber 21 in a straight line, and the thin film is formed on the surface of the workpiece.

[0028] The above is only the preferred specific embodiment of the utility model, but the protection scope of the utility model is not limited to this, any skilled person in the art can make equivalent replacement or change according to the technical scheme and the utility model concept of the utility model within the technical range disclosed by the utility model, and all should be covered in the protection scope of the utility model.

Claims

1. A vacuum coating apparatus, comprising an evaporation mechanism (1), wherein a coating mechanism (2) and a coating auxiliary mechanism (3) are provided at the top of the evaporation mechanism (1). Its features are: The evaporation mechanism (1) includes an electrical control box (11), a processing table (12) is provided at the top of the electrical control box (11), a coating material transmission water channel is provided inside the processing table (12), an evaporation port (13) is provided above the processing table (12) corresponding to the transmission water channel, and a mesh is provided inside the evaporation port (13); One end of the electrical control box (11) is provided with a storage tank (14) corresponding to its transmission water path. One end of the storage tank (14) is provided with an interface, and a valve (15) is fixedly installed at the interface. The coating mechanism (2) includes a vacuum chamber (21) fixedly connected to the top of the processing table (12). The front end of the vacuum chamber (21) is open and a rotating sealing mechanism is provided at the opening. A placement rack (26) is provided inside the vacuum chamber (21). The placement rack (26) is located directly above the evaporation port (13). A drive rotation mechanism is provided at one end of the placement rack (26). The other side of the top of the processing table (12) is equipped with a coating auxiliary mechanism (3) in conjunction with the vacuum chamber (21).

2. The vacuum coating equipment according to claim 1, characterized in that: The rotating sealing mechanism includes a hinge (22) fixedly installed above the front opening of the vacuum chamber (21), and a sealing door (23) is fixedly connected to the rotating end of the hinge (22).

3. The vacuum coating equipment according to claim 1, characterized in that: The vacuum chamber (21) has a shaft hole (24) at the center of one end, and the drive rotation mechanism includes a drive motor (27) fixedly installed on the outside of one end of the vacuum chamber (21).

4. The vacuum coating equipment according to claim 3, characterized in that: The other end of the drive motor (27) is provided with a drive shaft, which passes through the shaft hole (24) and is fixedly connected to the placement frame (26).

5. The vacuum coating equipment according to claim 1, characterized in that: The electrical control box (11) has three connection holes (25) at the other end, and the coating auxiliary mechanism (3) includes a connecting pipe (35) fixedly connected to the opening at the other end of the connection hole (25).

6. The vacuum coating equipment according to claim 5, characterized in that: The other end of the front connecting pipe (35) is connected to a heating device (34), and the other end of the rear connecting pipe (35) is connected to a cooling tower (31). A cooling return pipe (32) is provided at the rear end of the cooling tower (31).

7. The vacuum coating equipment according to claim 5, characterized in that: The other end of the connecting pipe (35) in the middle is connected to a vacuum device (33), which includes a vacuum pump, a vacuum gauge and a vacuum valve.

Images